JP2002174755A - Optical connector module - Google Patents

Optical connector module

Info

Publication number
JP2002174755A
JP2002174755A JP2000372265A JP2000372265A JP2002174755A JP 2002174755 A JP2002174755 A JP 2002174755A JP 2000372265 A JP2000372265 A JP 2000372265A JP 2000372265 A JP2000372265 A JP 2000372265A JP 2002174755 A JP2002174755 A JP 2002174755A
Authority
JP
Japan
Prior art keywords
wafer
optical
groove
guide pin
optical waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000372265A
Other languages
Japanese (ja)
Other versions
JP3656190B2 (en
Inventor
Yuichi Koreeda
雄一 是枝
Hiroaki Koshizuka
浩章 腰塚
Ryoji Kako
良二 加来
Takao Mase
高生 間瀬
Takuya Miyashita
拓也 宮下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Aviation Electronics Industry Ltd
Original Assignee
Japan Aviation Electronics Industry Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Aviation Electronics Industry Ltd filed Critical Japan Aviation Electronics Industry Ltd
Priority to JP2000372265A priority Critical patent/JP3656190B2/en
Publication of JP2002174755A publication Critical patent/JP2002174755A/en
Application granted granted Critical
Publication of JP3656190B2 publication Critical patent/JP3656190B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Led Device Packages (AREA)
  • Light Receiving Elements (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
  • Mechanical Coupling Of Light Guides (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

PROBLEM TO BE SOLVED: To accurately and easily align an optical transmitting/receiving wafer 100 with an optical waveguide wafer without positional shifting. SOLUTION: The optical transmitting/receiving wafer 100 is formed with V-grooves 120 having a V-shape in cross section for guide pins, at a set position relative to the optical transmitting/receiving end of an optical transmitter/ receiver 110. The optical waveguide wafer 210 of a connector 200 on the optical waveguide side is formed with guide pin V-grooves 212 correspondingly to the guide pin V-grooves 120 of the optical transmitting/receiving wafer 100. Between these guide pin V-grooves 120, 212, guide pins 300 for inter-wafer positioning are inserted. Then, the optical transmitting/receiving wafer 100 and the optical waveguide wafer 210 are brought close to and coupled with each other so as to be held between these guide pin V-grooves 120, 212.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は光コネクタモジュー
ルに関し、特に送受信源回路と光ファイバとの間を接続
するための光コネクタモジュールに属する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical connector module, and more particularly to an optical connector module for connecting between a transmission / reception source circuit and an optical fiber.

【0002】[0002]

【従来の技術】光ファイバを通して信号を伝送する場
合、信号の送受信源回路と光ファイバとの間に光導波路
を介在させた光コネクタモジュールが多く用いられる。
このような光コネクタモジュールの従来の一例を図5に
示す。この光コネクタモジュールは、光送受信ウエハ1
00x、光導波路側コネクタ200x、光ファイバ側コ
ネクタ400、及び光送受信ウエハ100x・光導波路
側コネクタ200x間結合固定用部材から成り、これら
の詳細は次のとおりである。
2. Description of the Related Art When transmitting a signal through an optical fiber, an optical connector module having an optical waveguide interposed between a signal transmission / reception source circuit and the optical fiber is often used.
FIG. 5 shows a conventional example of such an optical connector module. This optical connector module is provided with an optical transceiver wafer 1
00x, an optical waveguide side connector 200x, an optical fiber side connector 400, and a member for coupling and fixing between the optical transmission / reception wafer 100x and the optical waveguide side connector 200x, and the details thereof are as follows.

【0003】まず、光送受信ウエハ100xは、光送信
端となる発光ダイオード(LED)、半導体レーダ(L
D)などの発光素子111、及び光受信端となるホトダ
イオード(PD)などの受光素子112が予め定められ
た部位に配置されて形成され、送受信源回路(図示省
略)に接続される光送受信部110と、発光素子111
及び受光素子112の光送受信端前方に設けられたマー
カー140と、を備えている。
First, a light transmitting / receiving wafer 100x includes a light emitting diode (LED) serving as a light transmitting end and a semiconductor radar (L).
D) and a light receiving element 112 such as a photodiode (PD) serving as an optical receiving end are arranged and formed at predetermined sites, and are connected to a transmitting / receiving source circuit (not shown). 110 and light emitting element 111
And a marker 140 provided in front of the light transmitting / receiving end of the light receiving element 112.

【0004】次に、光導波路側コネクタ200xは、光
送受信ウエハ100xの光送受信部110との光送受信
端面が一方の端面に配置され、光ファイバ500との光
接続端面が他方の端面に配置されて形成された光導波路
211、及びこの光導波路211の両側の、他方の端面
寄りに断面V字状に形成されたガイドピン用V溝212
x、並びに、光導波路211の両側の、一方の端面寄り
で、光送受信ウエハ100xのマーカー140と対応す
る位置に設けられたマーカー214を備えて形成された
光導波路ウエハ210xと、この光導波路ウエハ210
xの他方の端面から予め設定された長さだけ突出するよ
うにガイドピン用V溝212xに配置、保持されるコネ
クタ・ガイドピン220と、このコネクタ・ガイドピン
220をガイドピン用V溝212xに配置、保持した状
態で光導波路ウエハ210xに固定するピン固定用部材
230と、を含む。
Next, the optical waveguide side connector 200x has an optical transmission / reception end face with the optical transmission / reception unit 110 of the optical transmission / reception wafer 100x arranged on one end face, and an optical connection end face with the optical fiber 500 arranged on the other end face. Optical waveguide 211 formed on the optical waveguide 211, and a V-shaped groove 212 for a guide pin formed in a V-shaped cross section near the other end face on both sides of the optical waveguide 211.
x, and an optical waveguide wafer 210x formed with a marker 214 provided at a position corresponding to the marker 140 of the optical transceiver wafer 100x on both sides of the optical waveguide 211 and near one end face, and this optical waveguide wafer 210
The connector guide pin 220 is disposed and held in the guide pin V-groove 212x so as to protrude from the other end surface of the x by a preset length, and the connector guide pin 220 is inserted into the guide pin V-groove 212x. A pin fixing member 230 that is fixed to the optical waveguide wafer 210x while being arranged and held.

【0005】また、光ファイバ側コネクタ400は、光
導波路側コネクタ200xとの接続端面(図の破線の部
分)に光ファイバ500の光接続端面が配置されるよう
にこの光ファイバ500を配置、保持固定し、上記接続
端面に明けられたガイドピン挿入孔(図の破線の部分)
に、コネクタ・ガイドピン220の突出部分が挿入され
て光導波路側コネクタ200xと結合したとき、光ファ
イバ500が光導波路211と接続されるようになって
いる。
[0005] The optical fiber connector 400 arranges and holds the optical fiber 500 such that the optical connection end face of the optical fiber 500 is arranged on the connection end face (broken line in the figure) with the optical waveguide side connector 200x. Guide pin insertion hole fixed in the connection end face (broken line in the figure)
The optical fiber 500 is connected to the optical waveguide 211 when the protruding portion of the connector / guide pin 220 is inserted into the optical waveguide connector 200x.

【0006】更に、光導波路側コネクタ200xと光送
受信ウエハ100xとは、光導波路ウエハ210xの下
面側のマーカー214と光送受信ウエハ100xの上面
側のマーカー140とが、フリップチップボンディング
により位置合わせして接合され、互いに結合される。こ
のとき、光送受信部110の発光素子111及び受光素
子112の光送受面と光導波路211の光送受信端面と
の間も位置合わせされる。
Further, the optical waveguide side connector 200x and the optical transmission / reception wafer 100x are aligned with the marker 214 on the lower surface side of the optical waveguide wafer 210x and the marker 140 on the upper surface side of the optical transmission / reception wafer 100x by flip chip bonding. Joined and joined together. At this time, the positions of the light transmitting / receiving surfaces of the light emitting element 111 and the light receiving element 112 of the light transmitting / receiving unit 110 and the light transmitting / receiving end face of the optical waveguide 211 are also aligned.

【0007】[0007]

【発明が解決しようとする課題】上述した従来の光コネ
クタモジュールは、光送受信ウエハ100xの上面側に
形成されたマーカー140と、光導波路ウエハ210x
の下面側に形成されたマーカー214とを、フリップチ
ップボンディングにより、位置合わせして接合すること
により、光送受信部110の発光素子111及び受光素
子112の光送受信面と、光導波路211の光送受信端
面との間を位置決めする構成、構造となっているので、
マーカー140,214間の位置合わせが困難な上に、
接合時に位置ずれが生じる危険性がある、という問題点
があった。
The above-described conventional optical connector module includes a marker 140 formed on the upper surface of the optical transceiver wafer 100x and an optical waveguide wafer 210x.
The marker 214 formed on the lower surface of the optical transceiver 211 is aligned and bonded by flip chip bonding, so that the light transmitting and receiving surfaces of the light emitting element 111 and the light receiving element 112 of the optical transmitting and receiving unit 110 and the light transmitting and receiving of the optical waveguide 211 are formed. Since it has a configuration and structure to position between the end face,
In addition to the difficulty in positioning the markers 140 and 214,
There is a problem that there is a risk of displacement during joining.

【0008】本発明の目的は、上記従来技術の問題点に
鑑みて、光送受信ウエハ・光導波路ウエハ間の位置合わ
せが容易となり、しかもウエハ間結合時の、光送受信部
の光送受信面と光導波路の光送受信面との位置ずれする
危険性がない、光コネクタモジュールを提供することに
ある。
SUMMARY OF THE INVENTION In view of the above-mentioned problems of the prior art, it is an object of the present invention to facilitate alignment between an optical transmitting / receiving wafer and an optical waveguide wafer. An object of the present invention is to provide an optical connector module which does not have a risk of displacement of a wave path from an optical transmitting / receiving surface.

【0009】[0009]

【課題を解決するための手段】本発明の光コネクタモジ
ュールは、送受信源回路と光ファイバとの間を接続する
ための光コネクタモジュールであって、次の各構成を有
することを特徴とする。 (イ)光送受信端が予め定められた部位に配置されて形
成され、前記送受信源回路に接続される光送受信部と、
この光送受信部の光送受信端に対する設定された部位
に、断面がV字状に形成されたV溝と、を備えて成る光
送受信ウエハ (ロ)前記光送受信部との光送受信端面が一方の端面
に、前記光送受信部の光送受信端と対応して配置され、
かつ前記光ファイバとの光接続端面が他方の端面に配置
されてその間をつなぐように形成された光導波路、及び
前記光送受信ウエハのV溝と対応する部位に、断面がV
字状に形成されたV溝を備えて成る光導波路ウエハと、
この光導波路ウエハの他方の端面から予め設定された長
さだけ突出するように、前記光導波路ウエハに保持固定
されたコネクタ・ガイドピンと、を含んで成る光導波路
側コネクタ (ハ)前記光送受信ウエハのV溝と前記光導波路ウエハ
のV溝との間に挿入され、前記光送受信ウエハと前記光
導波路ウエハとが互いに接近するように結合したとき、
これらウエハのV溝に挟み付けられてこれらウエハを位
置決め固定し、これらウエハの、光送受信部の光送受信
端と光導波路の光送受信端面とを位置合わせする、ウエ
ハ間位置決めガイドピン (ニ)前記光送受信ウエハと前記光導波路ウエハとを結
合させて保持固定するウエハ間結合固定用部材 (ホ)前記光ファイバを、その光接続端面が一方の端面
に配置されるように保持固定し、前記光導波路側コネク
タのコネクタ・ガイドピンと対応する部位にガイドピン
用孔が形成されて成り、このガイドピン用孔に前記コネ
クタ・ガイドピンが挿入されて前記光導波路側コネクタ
と結合し、前記光ファイバの光接続端面を前記光導波路
の光接続端面に接続する光ファイバ側コネクタ
An optical connector module according to the present invention is an optical connector module for connecting between a transmission / reception source circuit and an optical fiber, and has the following components. (A) an optical transmitting and receiving unit, wherein an optical transmitting and receiving end is arranged and formed at a predetermined site, and connected to the transmitting and receiving source circuit;
An optical transmission / reception wafer comprising a V-groove having a V-shaped cross section at a position set for the optical transmission / reception end of the optical transmission / reception unit. On the end face, arranged corresponding to the optical transmitting and receiving end of the optical transmitting and receiving unit,
And an optical waveguide formed such that an optical connection end face with the optical fiber is disposed on the other end face and connects the other end face, and a portion corresponding to the V-groove of the optical transmission / reception wafer has a cross section of V
An optical waveguide wafer comprising a V-shaped groove formed in a V-shape;
An optical waveguide side connector comprising: a connector guide pin held and fixed to the optical waveguide wafer so as to protrude by a predetermined length from the other end surface of the optical waveguide wafer. Is inserted between the V-groove of the optical waveguide wafer and the V-groove of the optical waveguide wafer, and when the optical transceiver wafer and the optical waveguide wafer are coupled so as to approach each other,
An inter-wafer positioning guide pin for positioning and fixing the wafers by being sandwiched between the V-grooves of the wafers and aligning the light transmitting and receiving ends of the light transmitting and receiving portions of the wafers with the light transmitting and receiving end surfaces of the optical waveguides; A member for wafer-to-wafer coupling and fixing for coupling and holding the optical transmitting and receiving wafer and the optical waveguide wafer. (E) The optical fiber is held and fixed so that its optical connection end face is disposed on one end face, and A guide pin hole is formed in a portion corresponding to the connector / guide pin of the waveguide connector, and the connector / guide pin is inserted into the guide pin hole and coupled with the optical waveguide connector, thereby forming the optical fiber. Optical fiber side connector for connecting an optical connection end face to an optical connection end face of the optical waveguide

【0010】また、前記光導波路側コネクタは、その光
導波路ウエハに、コネクタ・ガイドピン用のV溝が形成
されてこのV溝に前記コネクタ・ガイドピンが配置、保
持固定され、かつこのコネクタ・ガイドピン用のV溝の
延長線上に、前記ウエハ間位置決めガイドピン用のV溝
が前記コネクタ・ガイドピン用のV溝と一体形成された
構造である、構成を有している。
In the optical waveguide side connector, a V groove for a connector guide pin is formed in the optical waveguide wafer, and the connector guide pin is arranged, held and fixed in the V groove. On the extension of the V-groove for the guide pin, the V-groove for the inter-wafer positioning guide pin is formed integrally with the V-groove for the connector / guide pin.

【0011】また、前記光導波路側コネクタ及びウエハ
間位置決めガイドピンは、前記光導波路側コネクタの光
導波路ウエハに、コネクタ・ガイドピン用のV溝が形成
され、かつこのコネクタ・ガイドピン用のV溝の延長線
上に前記ウエハ間位置決めガイドピン用のV溝が前記コ
ネクタ・ガイドピン用のV溝と一体形成され、前記光導
波路側コネクタのコネクタ・ガイドピンと前記ウエハ間
位置決めガイドピンとが一体形成されて、前記光導波路
ウエハに一体形成されたV溝に配置、保持固定される構
造である、構成を有している。
In the optical waveguide side connector and the wafer positioning guide pin, a V groove for a connector guide pin is formed in an optical waveguide wafer of the optical waveguide side connector, and a V groove for the connector / guide pin is formed. The V-groove for the inter-wafer positioning guide pin is formed integrally with the V-groove for the connector / guide pin on an extension of the groove, and the connector / guide pin of the optical waveguide side connector and the inter-wafer positioning guide pin are formed integrally. The optical waveguide wafer is arranged, held and fixed in a V-groove formed integrally with the optical waveguide wafer.

【0012】また、前記光導波路側コネクタは、その光
導波路ウエハに、コネクタ・ガイドピン用のV溝が形成
されてこのV溝に前記コネクタ・ガイドピンが配置、保
持固定され、かつこのコネクタ・ガイドピン用のV溝の
延長線上に、前記ウエハ間位置決め用のV溝が前記コネ
クタ・ガイドピン用のV溝と一体形成され、更に、この
一体形成されたV溝に直交して、ウエハ間位置決め用の
直交V溝が形成された構造であり、前記光送受信ウエハ
にも、前記光導波路ウエハの直交V溝と対応する部位に
直交V溝が形成されて、前記光導波路ウエハの、延長、
一体形成されたウエハ間位置決め用のV溝、及び直交V
溝と、前記光送受信ウエハのウエハ間位置決め用のV
溝、及び直交V溝との間に、ウエハ間位置決めガイドピ
ンを挟み込む構造である、構成を有し、更にまた、前記
コネクタ・ガイドピンと、前記光導波路ウエハの、延
長、一体形成されたV溝に配置されるウエハ間位置決め
ガイドピンとが、一体形成された構造である、構成を有
している。
In the optical waveguide side connector, a V-groove for a connector / guide pin is formed in the optical waveguide wafer, and the connector / guide pin is arranged, held and fixed in the V-groove. The V-groove for positioning between wafers is formed integrally with the V-groove for connector / guide pin on an extension of the V-groove for guide pins, It is a structure in which orthogonal V-grooves for positioning are formed. Also in the optical transmission / reception wafer, orthogonal V-grooves are formed in portions corresponding to the orthogonal V-grooves of the optical waveguide wafer.
V-groove for inter-wafer positioning and orthogonal V
A groove and a V for positioning the light transmitting and receiving wafer between wafers.
And a structure in which an inter-wafer positioning guide pin is sandwiched between the groove and the orthogonal V-groove. Further, the connector / guide pin and the optical waveguide wafer are extended and integrally formed with the V-groove. Are arranged integrally with the inter-wafer positioning guide pins.

【0013】また、前記光導波路ウエハの、延長、一体
形成されたV溝、及び前記光送受信ウエハのV溝に挟み
込まれるウエハ間位置決めガイドピンの直径と、前記光
導波路ウエハの直交V溝、及び前記光送受信ウエハの直
交V溝に挟み込まれるウエハ間位置決めガイドピンの直
径とを、異なる寸法とし、これらウエハ間位置決めガイ
ドピンの直径に合わせて、前記V溝及び直交V溝を異な
る寸法とした、構成を有している。
The diameter of the extended and integrally formed V-groove of the optical waveguide wafer, the diameter of the inter-wafer positioning guide pin sandwiched between the V-grooves of the optical transceiver wafer, the orthogonal V-groove of the optical waveguide wafer, and The diameter of the inter-wafer positioning guide pin sandwiched between the orthogonal V-grooves of the light transmitting and receiving wafer has different dimensions, and the V-groove and the orthogonal V-groove have different dimensions according to the diameter of these inter-wafer positioning guide pins. It has a configuration.

【0014】[0014]

【発明の実施の形態】本発明の一実施の形態は、送受信
源回路と光ファイバとの間を接続するためのものであっ
て、光送受信ウエハと、光導波路側コネクタと、ウエハ
間位置決めガイドピンと、ウエハ間結合固定用部材と、
光ファイバ側コネクタと、を含んで構成され、これらの
詳細は次のとおりである。
DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention is for connecting between a transmission / reception source circuit and an optical fiber, and includes an optical transmission / reception wafer, an optical waveguide side connector, and an inter-wafer positioning guide. A pin, a member for bonding and fixing between wafers,
And an optical fiber side connector, the details of which are as follows.

【0015】光送受信ウエハは、光送受信端が予め定め
られた部位に配置されて形成され、上記送受信源回路に
接続される光送受信部と、この光送受信部の光送受信端
に対する設定された部位に、断面がV字状に形成された
V溝と、を備えている。
The optical transmission / reception wafer is formed with an optical transmission / reception end arranged at a predetermined site, and an optical transmission / reception unit connected to the transmission / reception source circuit, and a site set for the optical transmission / reception end of the optical transmission / reception unit. And a V-shaped groove having a V-shaped cross section.

【0016】光導波路側コネクタは、上記光送受信部と
の光送受信端面が一方の端面に、上記光送受信部の光送
受信端と対応して配置され、かつ上記光ファイバとの光
接続端面が他方の端面に配置されてその間をつなぐよう
に形成された光導波路、及び上記光送受信ウエハのV溝
と対応する部位に、断面がV字状に形成されたV溝を備
えて成る光導波路ウエハと、この光導波路ウエハの他方
の端面から予め設定された長さだけ突出するように、こ
の光導波路ウエハに保持固定されたコネクタ・ガイドピ
ンと、を含んで構成される。
In the optical waveguide side connector, an optical transmission / reception end face with the optical transmission / reception section is disposed on one end face in correspondence with an optical transmission / reception end of the optical transmission / reception section, and an optical connection end face with the optical fiber is on the other side. An optical waveguide disposed on an end face of the optical transmission and reception part, and an optical waveguide wafer comprising a V-shaped groove having a V-shaped cross section at a portion corresponding to the V-shaped groove of the optical transmission and reception wafer; A connector guide pin held and fixed to the optical waveguide wafer so as to protrude from the other end face of the optical waveguide wafer by a predetermined length.

【0017】ウエハ間位置決めガイドピンは、上記光送
受信ウエハのV溝と上記光導波路ウエハのV溝との間に
挿入され、上記光送受信ウエハと上記光導波路ウエハと
が互いに接近するように結合したとき、これらウエハの
V溝に挟み付けられてこれらウエハを位置決め固定し、
これらウエハの、光送受信部の光送受信端と光導波路の
光送受信端面とを位置合わせする。
An inter-wafer positioning guide pin is inserted between the V-groove of the optical transmission / reception wafer and the V-groove of the optical waveguide wafer, and the optical transmission / reception wafer and the optical waveguide wafer are coupled so as to approach each other. Sometimes, these wafers are sandwiched between the V-grooves of these wafers to position and fix these wafers.
The light transmitting / receiving end of the light transmitting / receiving unit and the light transmitting / receiving end face of the optical waveguide of these wafers are aligned.

【0018】ウエハ間結合固定用部材は、上記光送受信
ウエハと上記光導波路ウエハとを結合させて保持固定す
る。光ファイバ側コネクタは、上記光ファイバを、その
光接続端面が一方の端面に配置されるように保持固定
し、上記光導波路側コネクタのコネクタ・ガイドピンと
対応する部位にガイドピン用孔が形成されて成り、この
ガイドピン用孔に上記コネクタ・ガイドピンが挿入され
て上記光導波路側コネクタと結合し、上記光ファイバの
光接続端面を上記光導波路の光接続端面に接続する。
The inter-wafer coupling and fixing member couples and holds and holds the optical transmission / reception wafer and the optical waveguide wafer. The optical fiber side connector holds and fixes the optical fiber so that its optical connection end face is disposed on one end face, and a guide pin hole is formed in a portion corresponding to the connector guide pin of the optical waveguide side connector. The connector / guide pin is inserted into the guide pin hole and coupled to the optical waveguide side connector, and the optical connection end face of the optical fiber is connected to the optical connection end face of the optical waveguide.

【0019】このような構成、構造とすることにより、
両ウエハのV溝間にウエハ間位置決めガイドピンを挿入
し、これらウエハを互いに接近するように結合、保持固
定する、という単純、かつ容易な作業で、光導波路の光
送受信端面と光送受信部の光送受信端とを正確に位置合
わせすることができ、かつ、ウエハ間結合時の位置ずれ
をなくすことができる。
With such a configuration and structure,
Inserting the inter-wafer positioning guide pins between the V-grooves of both wafers, connecting and holding these wafers close to each other, and holding and fixing them, it is a simple and easy operation. It is possible to accurately align the position with the optical transmitting / receiving end, and to eliminate a positional deviation at the time of bonding between wafers.

【0020】[0020]

【実施例】次に、本発明の実施例について図面を参照し
て説明する。図1は本発明の第1の実施例を示す分解斜
視図である。この第1の実施例は、光送受信ウエハ10
0、光導波路側コネクタ200、ウエハ間位置決めガイ
ドピン300、及び光ファイバ側コネクタ400の4つ
の部分と、図示されていないウエハ間結合固定用部材と
を含んで構成され、これらの詳細は次のとおりである。
Next, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is an exploded perspective view showing a first embodiment of the present invention. In the first embodiment, the optical transmission / reception wafer 10
0, an optical waveguide side connector 200, an inter-wafer positioning guide pin 300, and four parts of an optical fiber side connector 400, and a not-shown inter-wafer coupling / fixing member. It is as follows.

【0021】まず、光送受信ウエハ100は、光送信端
となる、発光ダイオード(LED)、半導体レーダ(L
D)などの発光素子111、及び光受信端となる、ホト
ダイオード(PD)などの受光素子112が予め定めら
れた部位に配置されて形成され、送受信源回路(図示省
略)に接続される光送受信部110と、この光送受信部
110の、発光素子111及び受光素子112による光
送受信端前方両側に、断面がV字状に形成された2本の
ガイドピン用V溝120と、を備えている。
First, a light transmitting / receiving wafer 100 is provided with a light emitting diode (LED), a semiconductor radar (L)
D) and a light receiving element 112 such as a photodiode (PD), which is a light receiving end, is arranged and formed at a predetermined site, and is connected to a transmission / reception source circuit (not shown). A portion 110 and two V-shaped guide pin V-grooves 120 each having a V-shaped cross section are provided on both front sides of the light transmitting / receiving end of the light transmitting / receiving section 112 of the light transmitting / receiving section 110. .

【0022】次に、光導波路側コネクタ200は、光送
受信ウエハ100の光送受信部110との光送受信端面
が一方の端面に、光送受信部110の光送受信端と対応
して配置され、光ファイバ500との光接続端面が他方
の端面に配置されてその間をつなぐように形成された光
導波路211と、この光導波路211の両側に沿って、
光送受信ウエハ100のガイドピン用V溝120と対応
する部位、及びこれらの延長線上に、断面V字状に形成
されたガイドピン用V溝212とを備えて成る光導波路
ウエハ210と、この光導波路ウエハ210の他方の端
面から予め設定された長さだけ突出するように、ガイド
ピン用V溝212のうちの、他方の端面寄り部分に納め
られたコネクタ・ガイドピン220と、このコネクタ・
ガイドピン220を、ガイドピン用V溝212に納めた
状態で光導波路ウエハ210に保持固定するピン固定用
部材230と、を含んで構成される。
Next, the optical waveguide side connector 200 has an optical transmission / reception end face with the optical transmission / reception section 110 of the optical transmission / reception wafer 100 disposed on one end face corresponding to the optical transmission / reception end of the optical transmission / reception section 110, and An optical waveguide 211 formed so that an optical connection end face with the optical waveguide 500 is disposed on the other end face and connects the other end face, and along both sides of the optical waveguide 211,
An optical waveguide wafer 210 including a portion corresponding to the guide pin V-groove 120 of the optical transceiver wafer 100 and a guide pin V-groove 212 formed in a V-shaped cross section on an extension of these portions; A connector guide pin 220 accommodated in the guide pin V-groove 212 near the other end face so as to protrude from the other end face of the waveguide wafer 210 by a predetermined length, and
A pin fixing member 230 for holding and fixing the guide pin 220 to the optical waveguide wafer 210 in a state of being accommodated in the guide pin V-groove 212.

【0023】次に、ウエハ間位置決めガイドピン300
は、光送受信ウエハ100のガイドピン用V溝120
と、光導波路ウエハのガイドピン用V溝212のうち
の、ガイドピン用V溝120と対応する部分との間に挿
入され、光送受信ウエハ100と光導波路ウエハ210
とが互いに接近するように結合したとき、これらウエハ
のガイドピン用V溝120,212に挟み付けられてこ
れらウエハ(100,210)を位置決め固定し、これ
らウエハの、光送受信部110の光送受信端と光導波路
211の光送受信端面とを位置合わせする。
Next, guide pins 300 for positioning between wafers
Are the V-grooves 120 for guide pins of the optical transceiver wafer 100.
And the optical transmission / reception wafer 100 and the optical waveguide wafer 210 are inserted between a portion corresponding to the guide pin V groove 120 of the guide pin V groove 212 of the optical waveguide wafer.
When the wafers are brought close to each other, the wafers (100, 210) are sandwiched between the guide pin V-grooves 120, 212 to position and fix the wafers (100, 210). The end and the optical transmission / reception end face of the optical waveguide 211 are aligned.

【0024】光ファイバ側コネクタ400は、前述の従
来技術における光ファイバ側コネクタ400と同一の構
造を有し、そのガイドピン用孔に光導波路側コネクタ2
00の、コネクタ・ガイドピン220の突出部分が挿入
されてこの光導波路側コネクタ200と結合し、光ファ
イバ500の光接続端面を光導波路211の光接続端面
に接続させる。
The optical fiber side connector 400 has the same structure as the optical fiber side connector 400 of the prior art described above, and the optical waveguide side connector 2 is inserted into its guide pin hole.
The projecting portion of the connector / guide pin 220 is inserted and coupled to the optical waveguide side connector 200, and the optical connection end face of the optical fiber 500 is connected to the optical connection end face of the optical waveguide 211.

【0025】なお、図示されていないウエハ間結合固定
用部材は、光送受信ウエハ100と光導波路ウエハ21
0とを、互いに接近するように結合させて互いに保持固
定する。
The members for coupling and fixing between the wafers, not shown, are the optical transmission / reception wafer 100 and the optical waveguide wafer 21.
0 and are fixed so as to be close to each other.

【0026】この第1の実施例において、ウエハ間位置
決めガイドピン300の直径寸法は、光送受信ウエハ1
00及び光導波路ウエハ210を互いに接近させて結合
させたとき、そのガイドピン用V溝120,212に挟
み付けられるような寸法となっているので、光送受信ウ
エハ100及び光導波路ウエハ210を互いに接近させ
て結合させ、これらV溝(120,212)で挟み付け
ると、これらウエハ(100,210)の相対位置は、
ウエハ間位置決めガイドピン300の、中心軸と直交す
る方向に対し一意的に決定される。
In the first embodiment, the diameter of the inter-wafer positioning guide pin 300 is
When the optical waveguide wafer 210 and the optical waveguide wafer 210 are brought close to each other and joined together, the optical transmission / reception wafer 100 and the optical waveguide wafer 210 are brought close to each other because the dimensions are such that they are sandwiched between the guide pin V-grooves 120 and 212. When these wafers (100, 210) are bonded together and sandwiched by these V-grooves (120, 212), the relative positions of these wafers (100, 210) are
It is uniquely determined in the direction orthogonal to the central axis of the inter-wafer positioning guide pin 300.

【0027】従って、光送受信部110の光送受信端面
と、光導波路211の光送受信端面とが相対向する位置
となるように、ガイドピン用V溝120,212の位置
及び寸法、並びにウエハ間位置決めガイドピン300の
寸法等を幾何学的に決定すれば、光送受信ウエハ100
と光導波路ウエハ210とを互いに接近させて結合させ
るだけで、これらウエハ間の位置は一意的に定まり、光
送受信部110の光送受信端と光導波路211の光送受
信端面とを正確に位置合わせすることができる。
Accordingly, the positions and dimensions of the guide pin V-grooves 120 and 212 and the positioning between wafers are set so that the light transmitting / receiving end face of the light transmitting / receiving section 110 and the light transmitting / receiving end face of the optical waveguide 211 are opposed to each other. If the dimensions and the like of the guide pins 300 are determined geometrically, the light transmitting / receiving wafer 100
By simply bringing the optical waveguide wafer 210 and the optical waveguide wafer 210 close to each other, the position between the wafers is uniquely determined, and the optical transmission / reception end of the optical transmission / reception unit 110 and the optical transmission / reception end face of the optical waveguide 211 are accurately aligned. be able to.

【0028】すなわち、この第1の実施例においては、
光送受信ウエハ100のガイドピン用V溝120と光導
波路ウエハ210のガイドピン用V溝212の間に、ウ
エハ間位置決めガイドピン300を挿入してこれらウエ
ハ(100,210)を互いに接近するように結合さ
せ、保持固定する、という極めて単純、容易な作業によ
り、光送受信部110の光送受信端と光導波路211の
光送受信端面とを正確に位置合わせすることができ、し
かも、ウエハ間結合時に、その位置ずれが生じることは
ない。
That is, in the first embodiment,
The inter-wafer positioning guide pins 300 are inserted between the guide pin V-grooves 120 of the optical transmission / reception wafer 100 and the guide pin V-grooves 212 of the optical waveguide wafer 210 so that the wafers (100, 210) approach each other. The extremely simple and easy work of coupling and holding and fixing can accurately align the optical transmitting and receiving end of the optical transmitting and receiving unit 110 with the optical transmitting and receiving end face of the optical waveguide 211. The displacement does not occur.

【0029】図2は本発明の第2の実施例を示す分解斜
視図である。この第2の実施例が前述の第1の実施例と
相違する点は、第1の実施例における、光導波路側コネ
クタ200のコネクタ・ガイドピン220と、ウエハ間
位置決めガイドピン300とを、一体化してこれをガイ
ドピン240とし、このガイドピン240を光導波路ウ
エハ210のガイドピン用V溝212に納めてそのコネ
クタ・ガイドピン部分をピン固定用部材230で保持固
定し、光導波路側コネクタ200aとした点にある。
FIG. 2 is an exploded perspective view showing a second embodiment of the present invention. The second embodiment differs from the first embodiment in that the connector guide pins 220 of the optical waveguide side connector 200 and the inter-wafer positioning guide pins 300 in the first embodiment are integrated. The guide pin 240 is inserted into the guide pin V-groove 212 of the optical waveguide wafer 210, the connector / guide pin portion is held and fixed by the pin fixing member 230, and the optical waveguide side connector 200a It is in the point.

【0030】この第2の実施例では、コネクタ・ガイド
ピンとウエハ間位置決めガイドピンとが一体化されて光
導波路側コネクタ200a内に納められているので、第
1の実施例のようにウエハ間位置決めガイドピンを単体
で取り扱う、という必要がなくなり、光送受信ウエハ1
00と光導波路ウエハ210との間の結合作業が、更に
単純、容易化される、という利点がある。なお、その他
の作用効果は第1の実施例と同様である。
In the second embodiment, since the connector guide pin and the inter-wafer positioning guide pin are integrated and housed in the optical waveguide side connector 200a, the inter-wafer positioning guide is provided as in the first embodiment. There is no need to handle pins alone, and the optical transmission / reception wafer 1
There is an advantage that the coupling operation between the optical waveguide wafer 210 and the optical waveguide wafer 210 is further simplified and facilitated. Other functions and effects are the same as those of the first embodiment.

【0031】図3は本発明の第3の実施例を示す分解斜
視図である。前述の第2の実施例では、ガイドピン24
0、及びこのガイドピン240を挟み付けるガイドピン
用V溝120,212が、光導波路211の両側に沿っ
て配置されているが、この第3の実施例では、光導波路
211の両側に沿って配置されたガイドピン240a、
及びこのガイドピン240aを挟みつけるガイドピン用
V溝120a,212aのほかに、これらガイドピン用
V溝120a,212aと直交するガイドピン用V溝1
30,213を形成して光送受信ウエハ100a及び光
導波路ウエハ210aとし、これらガイドピン用V溝1
30,213に挟みつけられるウエハ間位置決めガイド
ピン350を新たに設けている。
FIG. 3 is an exploded perspective view showing a third embodiment of the present invention. In the above-described second embodiment, the guide pins 24
0, and guide pin V-grooves 120 and 212 for sandwiching the guide pin 240 are arranged along both sides of the optical waveguide 211, but in the third embodiment, along the both sides of the optical waveguide 211. Arranged guide pins 240a,
In addition to the guide pin V-grooves 120a and 212a which sandwich the guide pin 240a, the guide pin V-groove 1 orthogonal to the guide pin V-grooves 120a and 212a.
The optical transmission / reception wafer 100a and the optical waveguide wafer 210a are formed by forming the V-grooves 30 and 213.
An inter-wafer positioning guide pin 350 to be sandwiched between 30, 30 and 213 is newly provided.

【0032】このような構成、構造とすることにより、
光送受信部110の光送受信端と光導波路211の光送
受信端面との間の、相互の光軸に対する位置だけでな
く、端面相互間の間隔や接触状態を一意的に制御するこ
とができて、その結合状態を制御することができる、と
いう効果がある。なお、そのほかの作用効果は第2の実
施例と同様である。
With such a configuration and structure,
It is possible to uniquely control not only the position with respect to the optical axis between the optical transmitting / receiving end of the optical transmitting / receiving unit 110 and the optical transmitting / receiving end face of the optical waveguide 211, but also the spacing and contact state between the end faces, There is an effect that the coupling state can be controlled. The other operation and effect are the same as those of the second embodiment.

【0033】図4は本発明の第4の実施例を示す分解斜
視図である。この第4の実施例は、前述の第3の実施例
における、一体化されたガイドピン240aを、第1の
実施例のように、コネクタ・ガイドピン220とウエハ
間位置決めガイドピン300aとに分割したものであ
り、このような構成、構造とすることにより、コネクタ
・ガイドピン220の直径寸法とは異なる直径寸法のウ
エハ間位置決めガイドピン300aを使用することがで
きて、位置合わせ精度、ウエハ結合精度等を制御するこ
とができる、という利点がある。
FIG. 4 is an exploded perspective view showing a fourth embodiment of the present invention. In the fourth embodiment, the integrated guide pins 240a in the third embodiment are divided into the connector guide pins 220 and the inter-wafer positioning guide pins 300a as in the first embodiment. With such a configuration and structure, the inter-wafer positioning guide pins 300a having a diameter different from the diameter of the connector / guide pins 220 can be used. There is an advantage that accuracy and the like can be controlled.

【0034】また、ウエハ間位置決めガイドピン300
aと直交するウエハ間位置決めガイドピン350につい
ても同様に、その直径寸法により、位置合わせ精度、ウ
エハ間結合精度等を制御することができる。その他の作
用効果は、第3の実施例と同様である。
Further, guide pins 300 for positioning between wafers are provided.
Similarly, the positioning accuracy, the inter-wafer coupling accuracy, and the like of the inter-wafer positioning guide pins 350 that are orthogonal to a can be controlled by their diameters. Other functions and effects are the same as those of the third embodiment.

【0035】[0035]

【発明の効果】以上説明したように本発明は、光送受信
ウエハに、光送受信部の光送受信端に対する設定された
部位に断面V字状のV溝を形成し、光導波路側コネクタ
の、光導波路ウエハに、光送受信ウエハのV溝と対応し
て断面V字状のV溝を形成し、これら光送受信ウエハの
V溝と光導波路ウエハのV溝との間にウエハ間位置決め
ガイドピンを挿入してこれを両ウエハのV溝で挟みつけ
るように光送受信ウエハ及び光導波路ウエハを接近、結
合させる構成、構造とすることにより、これら両ウエハ
のV溝間にウエハ間位置決めガイドピンを挿入してこれ
ら両ウエハを互いに接近、結合させる、という単純、か
つ容易な作業で、光送受信部の光送受信端と光導波路の
光送受信端面とを正確に位置合わせすることができ、か
つ、ウエハ間結合時に、その位置ずれが発生する危険性
もなく、位置合わせできる、という効果がある。
As described above, according to the present invention, a V-groove having a V-shaped cross section is formed on a portion of a light transmitting / receiving wafer set to a light transmitting / receiving end of a light transmitting / receiving portion. A V-groove having a V-shaped cross section is formed in the waveguide wafer corresponding to the V-groove of the optical transceiver wafer, and inter-wafer positioning guide pins are inserted between the V-groove of the optical transceiver wafer and the V-groove of the optical waveguide wafer. Then, the optical transmission / reception wafer and the optical waveguide wafer are approached and coupled so that they are sandwiched between the V-grooves of both wafers, whereby the inter-wafer positioning guide pins are inserted between the V-grooves of both wafers. In this simple and easy operation of bringing these two wafers closer to each other and bonding them together, the light transmitting / receiving end of the light transmitting / receiving unit and the light transmitting / receiving end face of the optical waveguide can be accurately aligned, and the wafer-to-wafer bonding To, no danger of its positional deviation occurs, it aligned, there is an effect that.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1の実施例を示す分解斜視図であ
る。
FIG. 1 is an exploded perspective view showing a first embodiment of the present invention.

【図2】本発明の第2の実施例を示す分解斜視図であ
る。
FIG. 2 is an exploded perspective view showing a second embodiment of the present invention.

【図3】本発明の第3の実施例を示す分解斜視図であ
る。
FIG. 3 is an exploded perspective view showing a third embodiment of the present invention.

【図4】本発明の第4の実施例を示す分解斜視図であ
る。
FIG. 4 is an exploded perspective view showing a fourth embodiment of the present invention.

【図5】従来の光コネクタモジュールの一例を示す分解
斜視図である。
FIG. 5 is an exploded perspective view showing an example of a conventional optical connector module.

【符号の説明】[Explanation of symbols]

100,100a,100x 光送受信ウエハ 110 光送受信部 111 発光素子 112 受光素子 120,120a,130 ガイドピン用V溝 140 マーカー 200,200a〜200c,200x 光導波路側コ
ネクタ 210,210a,210x 光導波路ウエハ 211 光導波路 212,212a,212x,213 ガイドピン用V
溝 214 マーカー 220 コネクタ・ガイドピン 230 ピン固定用部材 240,240a ガイドピン 300,300a,350 ウエハ間位置決めガイドピ
ン 400 光ファイバ側コネクタ 500 光ファイバ
100, 100a, 100x Optical transmission / reception wafer 110 Optical transmission / reception unit 111 Light emitting element 112 Light receiving element 120, 120a, 130 V groove for guide pin 140 Marker 200, 200a to 200c, 200x Optical waveguide side connector 210, 210a, 210x Optical waveguide wafer 211 Optical waveguide 212, 212a, 212x, 213 V for guide pin
Groove 214 Marker 220 Connector / guide pin 230 Pin fixing member 240, 240a Guide pin 300, 300a, 350 Positioning guide pin between wafers 400 Optical fiber side connector 500 Optical fiber

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) H01S 5/022 H01L 31/02 C 5F089 (72)発明者 加来 良二 東京都渋谷区道玄坂1丁目21番2号 日本 航空電子工業株式会社内 (72)発明者 間瀬 高生 東京都渋谷区道玄坂1丁目21番2号 日本 航空電子工業株式会社内 (72)発明者 宮下 拓也 東京都渋谷区道玄坂1丁目21番2号 日本 航空電子工業株式会社内 Fターム(参考) 2H036 QA03 QA49 QA56 2H037 AA01 BA02 BA11 BA24 5F041 AA39 DA19 DA35 EE03 FF14 5F073 BA01 EA15 FA02 FA07 FA11 FA23 5F088 AA01 BA16 BB01 EA09 JA14 JA20 5F089 AA01 AC11 AC16 AC17 AC24 AC25 CA03 ──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. 7 Identification FI FI Theme Court ゛ (Reference) H01S 5/022 H01L 31/02 C5F089 (72) Inventor Ryoji Kaku 1-21 Dogenzaka, Shibuya-ku, Tokyo 2 Japan Aviation Electronics Industry Co., Ltd. (72) Takao Mase, Inventor 1-21-2 Dogenzaka, Shibuya-ku, Tokyo Japan Japan Aviation Electronics Industry Co., Ltd. (72) Takuya Miyashita 1-21, Dogenzaka, Shibuya-ku, Tokyo No. 2 Japan Aviation Electronics Industry Co., Ltd. F term (reference) 2H036 QA03 QA49 QA56 2H037 AA01 BA02 BA11 BA24 5F041 AA39 DA19 DA35 EE03 FF14 5F073 BA01 EA15 FA02 FA07 FA11 FA23 5F088 AA01 BA16 BB01 EA09 AC14 AC20 CA03

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 送受信源回路と光ファイバとの間を接続
するための光コネクタモジュールであって、次の各構成
を有することを特徴とする光コネクタモジュール。 (イ)光送受信端が予め定められた部位に配置されて形
成され、前記送受信源回路に接続される光送受信部と、
この光送受信部の光送受信端に対する設定された部位
に、断面がV字状に形成されたV溝と、を備えて成る光
送受信ウエハ (ロ)前記光送受信部との光送受信端面が一方の端面
に、前記光送受信部の光送受信端と対応して配置され、
かつ前記光ファイバとの光接続端面が他方の端面に配置
されてその間をつなぐように形成された光導波路、及び
前記光送受信ウエハのV溝と対応する部位に、断面がV
字状に形成されたV溝を備えて成る光導波路ウエハと、
この光導波路ウエハの他方の端面から予め設定された長
さだけ突出するように、前記光導波路ウエハに保持固定
されたコネクタ・ガイドピンと、を含んで成る光導波路
側コネクタ (ハ)前記光送受信ウエハのV溝と前記光導波路ウエハ
のV溝との間に挿入され、前記光送受信ウエハと前記光
導波路ウエハとが互いに接近するように結合したとき、
これらウエハのV溝に挟み付けられてこれらウエハを位
置決め固定し、これらウエハの、光送受信部の光送受信
端と光導波路の光送受信端面とを位置合わせする、ウエ
ハ間位置決めガイドピン (ニ)前記光送受信ウエハと前記光導波路ウエハとを結
合させて保持固定するウエハ間結合固定用部材 (ホ)前記光ファイバを、その光接続端面が一方の端面
に配置されるように保持固定し、前記光導波路側コネク
タのコネクタ・ガイドピンと対応する部位にガイドピン
用孔が形成されて成り、このガイドピン用孔に前記コネ
クタ・ガイドピンが挿入されて前記光導波路側コネクタ
と結合し、前記光ファイバの光接続端面を前記光導波路
の光接続端面に接続する光ファイバ側コネクタ
1. An optical connector module for connecting between a transmission / reception source circuit and an optical fiber, the optical connector module having the following configurations. (A) an optical transmitting and receiving unit, wherein an optical transmitting and receiving end is arranged and formed at a predetermined site, and connected to the transmitting and receiving source circuit;
An optical transmission / reception wafer comprising a V-groove having a V-shaped cross section at a position set for the optical transmission / reception end of the optical transmission / reception unit. On the end face, arranged corresponding to the optical transmitting and receiving end of the optical transmitting and receiving unit,
And an optical waveguide formed such that an optical connection end face with the optical fiber is disposed on the other end face and connects the other end face, and a portion corresponding to the V-groove of the optical transmission / reception wafer has a cross section of V
An optical waveguide wafer comprising a V-shaped groove formed in a V-shape;
An optical waveguide side connector comprising: a connector guide pin held and fixed to the optical waveguide wafer so as to protrude by a predetermined length from the other end surface of the optical waveguide wafer. Is inserted between the V-groove of the optical waveguide wafer and the V-groove of the optical waveguide wafer, when the optical transceiver wafer and the optical waveguide wafer are coupled so as to approach each other,
An inter-wafer positioning guide pin for positioning and fixing the wafers by being sandwiched between the V-grooves of the wafers and aligning the light transmitting and receiving ends of the light transmitting and receiving portions of the wafers with the light transmitting and receiving end surfaces of the optical waveguides; A member for wafer-to-wafer coupling and fixing for coupling and holding the optical transmitting and receiving wafer and the optical waveguide wafer. (E) The optical fiber is held and fixed so that its optical connection end face is disposed on one end face, and A guide pin hole is formed in a portion corresponding to the connector / guide pin of the waveguide connector, and the connector / guide pin is inserted into the guide pin hole and coupled with the optical waveguide connector, thereby forming the optical fiber. Optical fiber side connector for connecting an optical connection end face to the optical connection end face of the optical waveguide
【請求項2】 前記光導波路側コネクタは、その光導波
路ウエハに、コネクタ・ガイドピン用のV溝が形成され
てこのV溝に前記コネクタ・ガイドピンが配置、保持固
定され、かつこのコネクタ・ガイドピン用のV溝の延長
線上に、前記ウエハ間位置決めガイドピン用のV溝が前
記コネクタ・ガイドピン用のV溝と一体形成された構造
である、請求項1記載の光コネクタモジュール。
2. The optical waveguide-side connector according to claim 1, wherein a V-groove for a connector guide pin is formed in the optical waveguide wafer, and the connector guide pin is arranged, held and fixed in the V-groove. 2. The optical connector module according to claim 1, wherein the V-groove for the inter-wafer positioning guide pin is formed integrally with the V-groove for the connector / guide pin on an extension of the V-groove for the guide pin.
【請求項3】 前記光導波路側コネクタ及びウエハ間位
置決めガイドピンは、前記光導波路側コネクタの光導波
路ウエハに、コネクタ・ガイドピン用のV溝が形成さ
れ、かつこのコネクタ・ガイドピン用のV溝の延長線上
に前記ウエハ間位置決めガイドピン用のV溝が前記コネ
クタ・ガイドピン用のV溝と一体形成され、前記光導波
路側コネクタのコネクタ・ガイドピンと前記ウエハ間位
置決めガイドピンとが一体形成されて、前記光導波路ウ
エハに一体形成されたV溝に配置、保持固定される構造
である、請求項1記載の光コネクタモジュール。
3. The V-groove for a connector guide pin is formed on the optical waveguide wafer of the optical waveguide side connector, and the V guide groove is formed on the optical waveguide wafer of the optical waveguide side connector. The V-groove for the inter-wafer positioning guide pin is formed integrally with the V-groove for the connector / guide pin on an extension of the groove, and the connector / guide pin of the optical waveguide side connector and the inter-wafer positioning guide pin are formed integrally. The optical connector module according to claim 1, wherein the optical connector module is configured to be disposed and held and fixed in a V-groove formed integrally with the optical waveguide wafer.
【請求項4】 前記光導波路側コネクタは、その光導波
路ウエハに、コネクタ・ガイドピン用のV溝が形成され
てこのV溝に前記コネクタ・ガイドピンが配置、保持固
定され、かつこのコネクタ・ガイドピン用のV溝の延長
線上に、前記ウエハ間位置決め用のV溝が前記コネクタ
・ガイドピン用のV溝と一体形成され、更に、この一体
形成されたV溝に直交して、ウエハ間位置決め用の直交
V溝が形成された構造であり、前記光送受信ウエハに
も、前記光導波路ウエハの直交V溝と対応する部位に直
交V溝が形成されて、前記光導波路ウエハの、延長、一
体形成されたウエハ間位置決め用のV溝、及び直交V溝
と、前記光送受信ウエハのウエハ間位置決め用のV溝、
及び直交V溝との間に、ウエハ間位置決めガイドピンを
挟み込む構造である、請求項1記載の光コネクタモジュ
ール。
4. The optical waveguide-side connector, wherein a V-groove for a connector guide pin is formed in the optical waveguide wafer, and the connector guide pin is arranged, held and fixed in the V-groove. The V-groove for positioning between wafers is formed integrally with the V-groove for connector / guide pin on an extension of the V-groove for guide pins, It is a structure in which orthogonal V-grooves for positioning are formed. Also in the optical transmission / reception wafer, orthogonal V-grooves are formed in portions corresponding to the orthogonal V-grooves of the optical waveguide wafer. An integrated V-groove for inter-wafer positioning, and an orthogonal V-groove; a V-groove for inter-wafer positioning of the optical transceiver wafer;
2. The optical connector module according to claim 1, wherein the inter-wafer positioning guide pins are sandwiched between the V-groove and the orthogonal V-groove.
【請求項5】 前記コネクタ・ガイドピンと、前記光導
波路ウエハの、延長、一体形成されたV溝に配置される
ウエハ間位置決めガイドピンとが、一体形成された構造
である、請求項4記載の光コネクタモジュール。
5. The light according to claim 4, wherein said connector / guide pin and said inter-wafer positioning guide pin arranged in an extended / integrated V-groove of said optical waveguide wafer are integrally formed. Connector module.
【請求項6】 前記光導波路ウエハの、延長、一体形成
されたV溝、及び前記光送受信ウエハのV溝に挟み込ま
れるウエハ間位置決めガイドピンの直径と、前記光導波
路ウエハの直交V溝、及び前記光送受信ウエハの直交V
溝に挟み込まれるウエハ間位置決めガイドピンの直径と
を、異なる寸法とし、これらウエハ間位置決めガイドピ
ンの直径に合わせて、前記V溝及び直交V溝を異なる寸
法とした、請求項4記載の光コネクタモジュール。
6. The V-groove of the optical waveguide wafer, the diameter of the extended and integrally formed V-groove, the diameter of the inter-wafer positioning guide pin sandwiched between the V-grooves of the optical transceiver wafer, the orthogonal V-groove of the optical waveguide wafer, The orthogonal V of the light transmitting and receiving wafer
5. The optical connector according to claim 4, wherein the diameter of the inter-wafer positioning guide pin sandwiched between the grooves is different, and the V-groove and the orthogonal V-groove are different in size according to the diameter of the inter-wafer positioning guide pin. module.
JP2000372265A 2000-12-07 2000-12-07 Optical connector module Expired - Fee Related JP3656190B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000372265A JP3656190B2 (en) 2000-12-07 2000-12-07 Optical connector module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000372265A JP3656190B2 (en) 2000-12-07 2000-12-07 Optical connector module

Publications (2)

Publication Number Publication Date
JP2002174755A true JP2002174755A (en) 2002-06-21
JP3656190B2 JP3656190B2 (en) 2005-06-08

Family

ID=18841838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000372265A Expired - Fee Related JP3656190B2 (en) 2000-12-07 2000-12-07 Optical connector module

Country Status (1)

Country Link
JP (1) JP3656190B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007271831A (en) * 2006-03-30 2007-10-18 Kyocera Corp Optical connection structure, opto-electric module using the same, and optical waveguide unit
JP2008191187A (en) * 2007-01-31 2008-08-21 Hakusan Mfg Co Ltd Optical connector
JP2011028306A (en) * 2010-11-12 2011-02-10 Kyocera Corp Optical connection structure, opto-electric module using the same, and optical waveguide unit
JP2012108559A (en) * 2012-03-07 2012-06-07 Kyocera Corp Optical connection structure, photoelectric module using the same and optical waveguide unit
JP2013532850A (en) * 2010-07-27 2013-08-19 インテル・コーポレーション Optical connection by flip-chip optical die as a single assembly with overhang and microstructure alignment functions

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007271831A (en) * 2006-03-30 2007-10-18 Kyocera Corp Optical connection structure, opto-electric module using the same, and optical waveguide unit
JP2008191187A (en) * 2007-01-31 2008-08-21 Hakusan Mfg Co Ltd Optical connector
JP2013532850A (en) * 2010-07-27 2013-08-19 インテル・コーポレーション Optical connection by flip-chip optical die as a single assembly with overhang and microstructure alignment functions
TWI507751B (en) * 2010-07-27 2015-11-11 Intel Corp Apparatus and method for optical connection through single assembly overhang flip chip optics die with
JP2011028306A (en) * 2010-11-12 2011-02-10 Kyocera Corp Optical connection structure, opto-electric module using the same, and optical waveguide unit
JP2012108559A (en) * 2012-03-07 2012-06-07 Kyocera Corp Optical connection structure, photoelectric module using the same and optical waveguide unit

Also Published As

Publication number Publication date
JP3656190B2 (en) 2005-06-08

Similar Documents

Publication Publication Date Title
US6741778B1 (en) Optical device with chip level precision alignment
US6994479B2 (en) Substrate, optical fiber connection end member, optical element housing member, and method of fabrication of an optical module and the substrate
US6843608B2 (en) Transparent substrate and hinged optical assembly
US6394666B1 (en) Light receiving/emitting element module and manufacturing method thereof
US7703991B2 (en) Flip-chip mountable optical connector for chip-to-chip optical interconnectability
TW201028748A (en) Wafer level optoelectronic package with fiber side insertion
EP3163342A1 (en) Photoelectric conversion assembly
US6595700B2 (en) Optoelectronic packages having insulation layers
JP5457656B2 (en) Photoelectric conversion device
JP2014522999A (en) Optical interposer with common inclined surface
JPH1123914A (en) Structure for fixing optical element to optical fiber
JP2002174755A (en) Optical connector module
US9122031B2 (en) Optical connector
JP6568698B2 (en) Optical module manufacturing method, optical module receptacle, and optical module
JP2007272047A (en) Optical component
US6851868B2 (en) Optical connector module
US6724961B2 (en) Method to assemble optical components to a substrate
US20030031428A1 (en) Parellel electro-optic interface assembly
JP2004342675A (en) Optical element module and device thereof
US20020181901A1 (en) Easily assembled transceiver module with high yield rate
US20130129276A1 (en) Optical engine assembly and optoelectronic package
JP2005227414A (en) Optical connection device
JP4375958B2 (en) Optical module
JPH09222538A (en) Optical component
JPH04296711A (en) Base body for optical switch

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20040202

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20040224

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040419

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20050201

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20050223

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080318

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090318

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090318

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100318

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100318

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100318

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110318

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110318

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120318

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120318

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130318

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130318

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130318

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140318

Year of fee payment: 9

LAPS Cancellation because of no payment of annual fees