JP2002170722A - Inductor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inductor provided with a plurality of built-in thin film coils having inductance values of small deviation. SOLUTION: An array-type inductor 1 is equipped with thin film coils L1, L2, and L3 which are arranged in a line through dividing grooves 35 and 36 in the axial direction of a core member 11. The core member 11 is mounted on the top surface of a plate-like member 40 on which outer terminal electrode position adjusting patterns 41a to 43b, and outer terminal electrodes 44a to 46b are provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to an inductor component,
In particular, the present invention relates to an inductor component used as a transformer, an array type choke coil, an array type impedance, and the like.

[0002]

2. Description of the Related Art The prior art is disclosed in, for example,
An inductor component as disclosed in JP-A-41324 is known. The inductor component includes a columnar magnetic core made of a magnetic material having an insulating property such as ferrite. A conductor film is formed on the surface of the magnetic core, and the conductor film is irradiated with laser light to move the magnetic core in the axial direction while rotating, thereby forming a spiral coil forming groove. The remaining portion of the conductor film forms a thin-film coil that spirals around the magnetic core. This inductor component has the advantage that an inductance value with a narrow deviation can be obtained in the high frequency region,
In recent years, its use value has been increasing.

[0003]

However, a conventional inductor component using a thin-film coil only has one built-in coil, and one having a plurality of built-in coils is not yet available in the world. I haven't. this is,
This is because the commercialization of inductor components using laser processing technology has been in recent years, and it has been considered that the structure is not suitable for arraying.

An object of the present invention is to provide an inductor component having a plurality of built-in thin-film coils having a narrow deviation inductance value.

[0005]

In order to achieve the above object, an inductor component according to the present invention comprises: (a) a core member in which a plurality of coil winding portions are arranged in the axial direction; ) Provided on each of said coil winding portions,
At least one thin-film coil spirally circling the outer periphery of the coil winding part; (c) a dividing groove provided between the plurality of coil winding parts; and (d) a dividing groove provided on the surface of the core member. And external terminal electrodes respectively electrically connected to both ends of the thin-film coil. Here, the thin film coil is preferably formed by providing a spiral coil forming groove in a thin film conductor formed on the outer periphery of the core member.

Further, the inductor component according to the present invention comprises:
(E) a core member in which a plurality of coil winding portions are arranged in the axial direction, and (f) a plate-like member joined to the core member.
(G) at least one thin-film coil provided in each of the coil winding portions and spirally surrounding the outer periphery of the coil winding portion; and (h) provided between the plurality of coil winding portions. A dividing groove; and (i) external terminal electrodes provided on the surface of the plate-shaped member and electrically connected to both ends of the thin-film coil, respectively. The core member is joined to the plate member except for the coil winding part. The cross-sectional area of the coil winding portion of the core member is preferably smaller than the cross-sectional area of the remaining portion of the core member.

[0007] With the above arrangement, the plurality of coils are formed side by side with a dividing groove in the axial direction of the core member.
Then, by covering at least a part of the coil with an insulating resin, an insulating resin containing magnetic powder, or a top plate, an inductor component having a combination of various coils can be obtained.

Further, each of the coil winding portions is provided with two thin film coils which spirally surround the outer periphery of the coil winding portion, and the starting ends of the spiral coil forming grooves of the two thin film coils are wound around the core. The coil is shifted by approximately 180 degrees in the circumferential direction of the member, and the start end and the end of the spiral coil forming groove of each thin-film coil are shifted by approximately 18 in the outer circumferential direction of the core member.
The noise difference type impedances can be formed in an array by disposing them at 0 degrees and dividing the thin film coil for each coil winding portion by the dividing groove.

Alternatively, each of the coil winding portions is provided with two thin film coils spirally circumscribing the outer periphery of the coil winding portion, and the start ends of the spiral coil forming grooves of the two thin film coils are set at the core. Around 180 degrees in the circumferential direction of the member, the start end and the end of the spiral coil configuration groove of each thin film coil are disposed at substantially the same position in the outer circumferential direction of the core member, and two adjacent two A transformer can be formed by dividing only one of the thin film coils among the two thin film coils provided in the coil winding portion by the dividing groove.

[0010] Further, by shifting the starting end and the end of the spiral coil forming groove of each coil by approximately 180 degrees in the circumferential direction of the core member, the coil is connected to the external terminal electrode having a diagonal positional relationship. Will be pulled out. Further, by providing the external terminal electrode position adjusting pattern on the surface of the plate member, the input side and the output side of each coil are arranged on the same line. This increases the degree of freedom in designing the pattern of the printed circuit board for mounting the inductor component.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the inductor component according to the present invention will be described with reference to the accompanying drawings.

[First Embodiment, FIGS. 1 to 6] As shown in FIG. 1, a core member 11 includes coil winding portions 12, 13, and 14.
And flange portions 15, 16, 17, 18 provided with the coil winding portions 12, 13, 14 therebetween. The cross-sectional area of the coil winding portions 12 to 14 is smaller than the cross-sectional area of the remaining portion of the core member 11.

The core member 11 is made of, for example, Ni--Zn--Cu.
It is made of a magnetic material such as a system ferrite, a ceramic material such as non-magnetic alumina, a resin material, or the like. This core member 11
And zinc borosilicate glass powder while stirring for 800-90.
Heat treatment at 0 ° C. causes glass powder to adhere to the surface of the core member 11 to form an insulating coating film (not shown). As will be described later, when forming a thin-film coil by irradiating a laser beam, this insulating coating film causes the laser beam to reach the core member 11 and degrade the core member 11 to lower the magnetic resistance. It is for preventing. In addition,
The surface of the core member 11 may be impregnated with zinc borosilicate glass, and the material of the insulating coating film may be a resin such as an epoxy resin in addition to the glass. Further, this insulating coating film is not always necessary, and the insulating coating film is not provided on the surface of the core member 11 and the thin film conductor 2 is directly provided.
0 (described later) may be provided.

Next, as shown in FIG. 2, thin film conductors 20 are formed on the four side surfaces other than the left and right end surfaces E and F of the core member 11 by a method such as electroless plating or sputtering. The thin film conductor 20 is made of Cu, Ni, Ag, Ag-Pd or the like. Next, the core member 11 is chucked to a spindle (not shown) of a laser beam machine. Drive the spindle to move the core member 11 in the direction of arrow K1 (clockwise direction).
The laser beam is applied to the core member 11 while being appropriately rotated and moved in the direction of the arrow K3. As a result, the portion of the thin film conductor 20 irradiated with the laser beam is removed, and spiral coil forming grooves 22, 23, and 24 are formed in the coil winding portions 12, 13, and 14, respectively.

The starting end 22a of the coil forming groove 22 is formed on the one end face E of the core member 11 through the inclined portion 31 and the flange 15 from the center of the left end of the coil winding portion 12 on the side surface A of the core member 11. Has reached. The terminal end 22b of the coil configuration groove 22 is
The side surface B (the side surface on which the side surface A faces) of the core member 11 reaches the flange portion 16 from the center of the right end of the coil winding portion 12 through the inclined portion 31. The terminal end 22b of the coil forming groove 22 is connected to the starting end 23a of the coil forming groove 23 at the side surface B.

The starting end 23a of the coil forming groove 23 extends from the center of the left end of the coil winding portion 13 on the side surface B of the core member 11 to the flange 16 through the inclined portion 31. The end portion 23b of the coil configuration groove 23 is formed by a flange portion 17 from the right end center of the coil winding portion 13 on the side surface A of the core member 11 through the inclined portion 31.
Has been reached. The end portion 23b of the coil configuration groove 23 is connected to the start end portion 24a of the coil configuration groove 24 on the side surface A.
Connected to

The starting end 24 a of the coil forming groove 24 reaches the flange 17 from the center of the left end of the coil winding portion 14 on the side surface A of the core member 11 through the inclined portion 31. The terminal end portion 24b of the coil configuration groove 24 reaches the other end face F of the core member 11 from the center of the right end of the coil winding portion 14 on the side surface B of the core member 11 through the inclined portion 31 and the flange portion 18.

As described above, the starting ends 22a to 24a and the ending parts 22b to 24b of the coil forming grooves 22 to 24 are shifted from each other by approximately 180 degrees in the outer circumferential direction of the core member 11.
In the first embodiment, the coil forming grooves 22 to 24 are formed continuously, but it is needless to say that they may be formed separately.

Next, as shown in FIG. 3, while rotating the core member 11 in the direction of arrow K4, a laser beam is applied to the flange portions 16 and 17 of the core member 11, respectively. As a result, the thin film conductor 20 at the portion irradiated with the laser beam is removed, and division grooves 35 and 36 are formed around the flange portions 16 and 17 respectively in the outer circumferential direction of the core member 11.
The dividing groove 35 separates the terminal end 22 b of the coil forming groove 22 from the starting end 23 a of the coil forming groove 23. Dividing groove 36
Are the terminal portion 23b of the coil configuration groove 23 and the coil configuration groove 2
4 is separated from the starting end 24a.

Thus, the coil winding portions 12, 13, 14
The thin film coils L1, L2, and L3 are formed so as to spirally circumnavigate the outer peripheral portion of the circumferential direction. These thin-film coils L1 to L3 are formed by a core member 11
Since the thin film conductor formed on the surface of the coil is formed by laser processing, problems such as coil swelling do not occur. Therefore, errors in the inductance values of the thin-film coils L1 to L3 can be reduced.

Thereafter, the coil forming grooves 22, 23, 24,
Except for the dividing grooves 35 and 36 and both end surfaces E and F of the core member 11, Sn on the outer peripheral surface of the flange portions 15, 16, 17, 18
Plating or Ni-Cu-Sn plating is performed, and the terminal electrodes 25a, 25b, 26a,
26b, 27a and 27b are formed. Thus, the thin-film coil L1 is connected between the terminal electrodes 25a and 25b, the thin-film coil L2 is connected between the terminal electrodes 26a and 26b, and the thin-film coil L3 is connected between the terminal electrodes 27a and 27b. You.

Next, as shown in FIGS. 4 and 5, the core member 11 is mounted on the plate member 40 by a method such as soldering. At this time, since the cross-sectional area of the coil winding portions 12 to 14 is smaller than the cross-sectional area of the flange portions 15 to 18 and the coil winding portions 12 to 14 are recessed, the core member 11 is When the thin film coil L
1 to L3 do not contact the surface of the plate member 40, and the thin film coils L1 to L3 can be protected.

On the upper surface of the plate member 40, external terminal electrode position adjusting patterns 41a to 43b are formed. These patterns 41a to 43b are respectively
0 are connected to external terminal electrodes 44a to 46b provided on both side surfaces. The external terminal electrodes 44a and 44b are connected to terminal electrodes 25a and 25b formed on the core member 11 via patterns 41a and 41b, respectively.
5a and 45b are connected to the terminal electrodes 26a and 26b via the patterns 42a and 42b, respectively.
6a and 46b are connected to terminal electrodes 27a and 27b via patterns 43a and 43b, respectively. As a result, the input side and the output side of the thin-film coil L1 are drawn out to the two opposite sides of the plate member 40, respectively, and are arranged on the same line. Similarly, the input side and the output side of each of the thin film coils L2 and L3 are also arranged on the same line.

FIG. 6A is an electric equivalent circuit diagram of the core member 11 provided with the thin film coils L1 to L3, and FIG. 6B is an array after the core member 11 is mounted on the plate member 40. FIG. 2 is an electrical equivalent circuit diagram of the type inductor 1.

The plate member 40 is made of, for example, a magnetic material such as ferrite or a resin containing magnetic powder, or a metal. By using alumina as the material of the core member 11 and using ferrite as the material of the plate-shaped member 40, the array-type inductor 1 corresponding to the GHz band with small variation in stray capacitance can be obtained. On the other hand, by using ferrite as the material of the core member 11 and using resin such as ferrite or magnetic powder as the material of the plate-shaped member 40, the array type inductor 1 corresponding to a frequency lower than the GHz band can be obtained. .

Thereafter, if necessary, a protective case or the like is put on the plate member 40 to protect the core member 11.

The array type inductor 1 having the above configuration
Is formed by arranging thin film coils L1, L2, L3 in the axial direction of the core member 11 with dividing grooves 35, 36 therebetween. Thereby, it is possible to obtain the array type inductor 1 having the inductance value of the narrow deviation.

[Second Embodiment, FIGS. 7 to 9] In a second embodiment, a common mode choke coil will be described.
As shown in FIG. 7, the common mode choke coil 51
Has a structure similar to that of the inductor 1 of the first embodiment in which the top plate 52 made of ferrite is attached.

The top plate 52 includes thin film coils L1, L2, L3
So that the flanges 15 at both ends of the core member 11,
18 and an outer peripheral portion of the flange portion 15 and the flange portion 18.
Is connected to the outer peripheral portion. On the other hand, a gap is formed between the outer peripheral surfaces of the flange portions 16 and 17 located near the center of the core member 11 and the top plate 52. Further, ferrite is used as the material of the core member 11, and a ceramic or resin material such as non-magnetic alumina is used as the material of the plate-shaped member 11.

FIG. 8A is an electric equivalent circuit diagram of the core member 11 provided with the thin-film coils L1 to L3, and FIG. 8B is a schematic diagram of the core member 11, the top plate 52, and the plate member 40. FIG. 4 is an electrical equivalent circuit diagram of a common mode choke coil 51 shown in FIG.

In the common mode choke coil 51 having the above configuration, the thin-film coils L1, L2, L3
6 and 17, the thin film coil L1
The magnetic fluxes generated by L3 do not overlap. Therefore, the magnetic flux generated by the normal mode current does not cancel each other, and an inductance can be obtained even for the normal mode current. Therefore, the choke coil 51 can remove not only the common mode noise but also the normal mode noise. Therefore, a common mode choke coil 51 having three thin-film coils L1 to L3, which has been conventionally difficult, is obtained. Moreover, since a gap is formed between the outer peripheral surfaces of the flange portions 16 and 17 and the top plate 52, the magnetic resistance between the flange portions 16 and 17 and the top plate 52 increases. As a result, it is possible to obtain the choke coil 51 in which the magnetic saturation phenomenon hardly occurs even when a large normal mode current flows.

As shown in FIG. 9, the core member 1 in which the height of the flanges 16 and 17 located near the center is reduced.
1A and the plate-shaped top plate 52A may be used to reduce the height.

[Third Embodiment, FIGS. 10 to 15] In a third embodiment, an array type impedance will be described.

As shown in FIG. 10, the core member 61 is made of ferrite, and the coil winding portions 62 and 63 and the flange portion 65,
66 and 67. After an insulating coating film is formed on the surface of the core member 61 as necessary, as shown in FIG. 11, the thin film conductors 7 are formed on the four side surfaces other than the left and right end surfaces E and F.
0 is formed.

Next, the core member 61 is chucked to a spindle (not shown) of a laser beam machine. The laser beam is applied to the core member 61 while driving the spindle to appropriately rotate the core member 61 and moving the core member 61 in the axial direction. As a result, the portion of the thin film conductor 70 irradiated with the laser beam is removed, and spiral coil forming grooves 72 and 74 are formed in the coil winding portions 62 and 63, respectively.

The starting end portion 72a of the coil forming groove 72 extends from the left end center of the coil winding portion 62 on the side surface A of the core member 61 to the one end surface E of the core member 11 through the inclined portion 81 and the flange portion 65. Has reached. The terminal portion 72b of the coil configuration groove 72 is
The side surface B of the core member 61 reaches the flange 66 from the center of the right end of the coil winding portion 62 through the inclined portion 81. And
The terminal end 72b of the coil forming groove 72 is connected to the starting end 74a of the coil forming groove 74 at the side surface B.

The starting end 74 a of the coil forming groove 74 extends from the center of the left end of the coil winding portion 63 on the side surface B of the core member 61 to the flange 66 through the inclined portion 81. The terminal end portion 74b of the coil forming groove 74 reaches the other end face F of the core member 61 from the center of the right end of the coil winding portion 63 on the side surface A of the core member 61 through the inclined portion 81 and the flange portion 67. .

Further, as shown in FIG. 12, a laser beam is applied to the core member 61 while driving the spindle of the laser beam machine to rotate the core member 61 appropriately and move the core member 61 in the axial direction. Spiral coil forming grooves 73 and 75 are formed in the winding portions 62 and 63 so as to run substantially parallel to the coil forming grooves 72 and 74, respectively.

The starting end 73a of the coil forming groove 73 extends from the center of the left end of the coil winding portion 62 on the side surface B of the winding core member 61 to the end surface E of the winding core member 61 through the inclined portion 81 and the flange portion 65. I have. The terminal end 73 b of the coil configuration groove 73 reaches the flange 66 from the center of the right side of the coil winding portion 62 on the side surface A of the core member 61 through the inclined portion 81. The terminal end 73 b of the coil forming groove 73 is connected to the starting end 75 a of the coil forming groove 75 on the side surface A.

The starting end portion 75 a of the coil forming groove 75 extends from the left end center of the coil winding portion 63 on the side surface A of the core member 61 to the flange portion 66 through the inclined portion 81. The terminal end portion 75b of the coil configuration groove 75 reaches the other end face F of the core member 61 from the center of the right end of the coil winding portion 63 on the side surface B of the core member 61 through the inclined portion 81 and the flange portion 67. .

As described above, the starting ends 72a to 75a and the ending parts 72b to 75b of the coil forming grooves 72 to 75 are shifted from each other by approximately 180 degrees in the outer circumferential direction of the core 61.
Furthermore, the starting ends 72a and 73 of the coil forming grooves 72 and 73 are
a and the start ends 74a and 75a of the coil forming grooves 74 and 75 are also shifted by about 180 degrees in the outer circumferential direction of the core member 61.

Next, while rotating the core member 61, a laser beam is applied to the flange 66 of the core member 61, so as to make a round around the outer peripheral surface of the flange 66 as shown in FIG. The dividing groove 85 is formed. The dividing groove 85 separates the terminal ends 72b and 73b of the coil forming grooves 72 and 73 and the starting ends 74a and 75a of the coil forming grooves 74 and 75.

In this way, a pair of thin-film coils L1 and L2 spirally circling the outer peripheral portion of the coil winding portion 62 in a state where the circling directions are the same as each other, and
A pair of thin-film coils L3 and L4 are formed to spirally wrap around the outer periphery of the coil winding part 63.

Thereafter, plating or the like is performed on the outer peripheral surfaces of the flange portions 65, 66, 67, respectively, leaving the coil forming grooves 72 to 75, the dividing groove 85, and both end surfaces E, F of the core member 61, respectively.
Terminal electrodes 90a, 91b, 91 having good solderability etc.
a, 90b, 92a, 93b, 93a, 92b are formed. Thereby, the terminal electrodes 90 having a diagonal positional relationship are provided.
a and 90b, a thin-film coil L1 is connected between the terminal electrodes 91a and 91b, and a thin-film coil L2 is connected between the terminal electrodes 91a and 91b.
A thin-film coil L3 is connected between the terminal electrodes 92a and 92b, and a thin-film coil L4 is connected between the terminal electrodes 93a and 93b.
Is connected.

Next, as shown in FIG.
Is mounted on a plate-like member 100 made of non-magnetic alumina or the like. On the upper surface of the plate-like member 100, external terminal electrode position adjusting patterns 101a to 104b are formed.
These patterns 101 a to 104 b are respectively formed on external terminal electrodes 105 a to 105 a provided on both side surfaces of the plate-shaped member 100.
108b. External terminal electrodes 105a-10
8b are connected to terminal electrodes 90a to 93b formed on the core member 61 via patterns 101a to 104b, respectively. Thereby, the input side and the output side of each of the thin film coils L1 to L4
It will be drawn out to the side and will be arranged on the same line.

Thereafter, if necessary, a protective case, an outer protective resin, and the like are put on the plate-shaped member 100, and the core member 61 is formed.
To protect. FIG. 15A is an electric equivalent circuit diagram of a core member 61 provided with the thin-film coils L1 to L4, and FIG. 15B is a noise difference type array type including the core member 61 and the plate member 100. FIG. 3 is an electric equivalent circuit diagram of the impedance unit 60.

The array type impeder 6 having the above configuration
0 is an adjacent thin-film coil L substantially bifilar wound
1 and L2, and the thin-film coils L3 and L4 are magnetically coupled to each other, and further, the positional accuracy of the thin-film coils L1 to L4 by laser processing is high, so that a high coupling state is achieved. Therefore, even when a large current normal signal having the same phase and the same direction is input, the array type impedance circuit 60 can remove noise without saturation.

In the third embodiment, the core member 61 is made of ferrite, and the plate member 100 is made of alumina. This is because, in order to improve the degree of coupling between the adjacent thin film coils L1 and L2 and the degree of coupling between the thin film coils L3 and L4, those having relatively high initial magnetic permeability are used. Therefore, it is needless to say that alumina, resin, or the like may be used as the material of the core member 61, and resin, metal, or the like may be used as the material of the plate-shaped member 100.

[Fourth Embodiment, FIGS. 16 to 20] In a fourth embodiment, a transformer will be described. As shown in FIG. 16, the core member 61 is made of ferrite, and has coil winding portions 62 and 63 and flange portions 65, 66 and 67.
After an insulating coating film is formed on the surface of the core member 61 as necessary, thin film conductors 70 are formed on the four side surfaces other than the left and right end surfaces E and F.

Next, the core member 61 is chucked to a spindle (not shown) of a laser beam machine. The laser beam is applied to the core member 61 while driving the spindle to appropriately rotate the core member 61 and moving the core member 61 in the axial direction. As a result, the portion of the thin film conductor 70 irradiated with the laser beam is removed, and spiral coil forming grooves 122 and 124 are formed in the coil winding portions 62 and 63, respectively.

The starting end 122a of the coil forming groove 122 is
From the center of the left end of the coil winding portion 62 on the side surface A of the core member 61, it reaches one end surface E of the core member 61 through the inclined portion 81 and the flange portion 65. Terminal portion 12 of coil configuration groove 122
2b reaches the flange 66 from the center of the right end of the coil winding portion 62 on the side A of the core member 61 through the inclined portion 81.
And the terminal end part 122b of this coil configuration groove 122 is
The side surface A is connected to the starting end 124a of the coil forming groove 124.

The starting end 124a of the coil forming groove 124 is
From the center of the left end of the coil winding portion 63 on the side surface A of the core member 61, it reaches the flange portion 66 through the inclined portion 81. The terminal end 124 b of the coil configuration groove 124 is located on the side A of the core member 61.
From the center of the right end of the coil winding part 63 of FIG.
7 and reaches the other end face F of the core member 61.

Further, as shown in FIG. 17, a laser beam is irradiated on the core member 61 while driving the spindle of the laser beam machine to rotate the core member 61 appropriately and move the core member 61 in the axial direction. Spiral coil forming grooves 123, 125 are respectively provided on the winding portions 62, 63,
It is formed so as to run substantially parallel to the coil forming grooves 122 and 124.

The starting end 123a of the coil forming groove 123 is
From the center of the left end of the coil winding portion 62 on the side surface B of the core member 61, the end surface E of the core member 61 passes through the inclined portion 81 and the flange portion 65.
Has been reached. Terminal portion 123b of coil configuration groove 123
Extends from the center of the right end of the coil winding portion 62 on the side surface B of the core member 61 through the inclined portion 81 to the flange portion 66. The terminal end 123b of the coil forming groove 123 is connected to the starting end 125a of the coil forming groove 125 at the side surface B.

The starting end 125a of the coil forming groove 125 is
From the center of the left end of the coil winding portion 63 on the side surface B of the core member 61, it reaches the flange portion 66 through the inclined portion 81. The terminal portion 125b of the coil configuration groove 125 is located on the side surface B of the core member 61.
From the center of the right end of the coil winding part 63 of FIG.
7 and reaches the other end face F of the core member 61.

As described above, the coil forming grooves 122 to 125
End portions 122a to 125a and end portions 122b to 125
"b" is disposed at substantially the same position in the outer peripheral direction of the core member 61. Furthermore, the coil configuration grooves 122 and 12
3 and the starting ends 124a and 125a of the coil forming grooves 124 and 125 are shifted by about 180 degrees in the outer circumferential direction of the core member 61.

Next, while rotating the core member 61, a laser beam is applied to the flange 66 of the core member 61, so that the outer peripheral surface of the flange 66 is rotated substantially half way as shown in FIG. Is formed. The dividing groove 130 is
Terminal portions 122b, 123 of coil configuration grooves 122, 123
b and the starting ends 124a, 1 of the coil forming grooves 124, 125
25a.

In this way, a pair of thin-film coils L1 and L2 spirally circling the outer peripheral portion of the coil winding portion 62 in a state where the circling directions are the same as each other, and
A pair of thin-film coils L3 and L4 are formed to spirally wrap around the outer periphery of the coil winding part 63.

Thereafter, plating is performed on the outer peripheral surfaces of the flange portions 65, 66, 67, respectively, while leaving the coil forming grooves 122 to 125, the dividing groove 130, and both end surfaces E, F of the core member 61, and soldering. Terminal electrodes 140a, 1 having good properties
41a, terminal electrodes 141b, 142a and relay electrode 14
5. Form terminal electrodes 140b and 142b. Thereby, the thin film coil L is provided between the terminal electrodes 140a and 140b.
1 and L3 are connected in series, and the terminal electrodes 141a, 141
b, the thin film coil L2 is connected to the terminal electrode 142.
The thin-film coil L4 is connected between a and 142b. The thin-film coils L1 and L3 are primary coils, and the thin-film coils L2 and L4 are secondary coils. In this state,
Since the configuration as a transformer is completed, it may be a product.

Next, as shown in FIG.
Is mounted on a plate-like member 150 made of nonmagnetic alumina or the like. On the upper surface of the plate-like member 150, external terminal electrode position adjustment patterns 151a to 153b are formed.
These patterns 151 a to 153 b are respectively formed on the external terminal electrodes 155 a to 155 a provided on both side surfaces of the plate member 150.
157b. External terminal electrodes 155a-15
7b are terminal electrodes 140a to 142b formed on the core member 61 via the patterns 151a to 153b, respectively.
It is connected to the. FIG. 20 is an electrical equivalent circuit diagram of the transformer 160 thus obtained.

The transformer 160 having the above configuration is a transformer having a narrow deviation and a high coupling because the position accuracy of the thin-film coils L1 to L4 by laser processing is high. The number of turns of the thin-film coils L1 to L4 is determined by the coil configuration grooves 122 to 12.
5 can be easily changed by adjusting the number of turns.

In the fourth embodiment, the core member 61 is made of ferrite, and the plate member 150 is made of alumina. This is because a transformer having a relatively high initial magnetic permeability is used to improve the performance as a transformer. Therefore, it goes without saying that resin, metal, or the like may be used as the material of the plate-like member 150. Further, a transformer having no thin film coil L4 may be provided by omitting the coil configuration groove 124 formed in the coil winding portion 63 of the core member 61.

[Other Embodiments] The present invention is not limited to the above-described embodiment, but can be variously modified within the scope of the gist. For example, as the core member, a pillar-shaped or cylindrical-shaped one having a circular, triangular, pentagonal or more cross section can be used instead of a continuous drum-shaped member.

As shown in FIG. 21, the thin-film coils L1, L2, L3, L4 are axially divided into the grooves 35, 36, 3
The array-type common mode choke coil 170 may be configured by a core member 11B made of ferrite formed side by side with an intervening member 7, a plate member 40A made of alumina, and two top plates 52B made of ferrite. . As the core member 11B shown in FIG. 21, a columnar core member is used instead of a core member having a drum shape connected thereto. FIG. 22A is an electric equivalent circuit diagram of a core member 11B provided with the thin film coils L1 to L4, and FIG. 22B is an array type including the core member 11B, a top plate 52B, and a plate member 40A. FIG. 3 is an electric equivalent circuit diagram of a common mode choke coil 170.

Since the common mode choke coil 170 having the above configuration has a common mode impedance and a normal mode impedance, it can remove not only the common mode noise but also the normal mode noise. Therefore, a common mode choke coil 170 having two pairs of thin film coils L1 to L4, which has been conventionally difficult, is obtained.

As shown in FIG. 23, in the transformer 160 of the fourth embodiment, the top plate 1 made of ferrite is used.
80, the flange 65 at both ends and the center of the core 61.
To 67, and may cover the thin-film coils L1 to L4. In addition, as shown in FIG. 24, the height may be reduced by removing the plate-like member 150. Further, the insulating resin (or insulating resin containing magnetic powder) 185 is applied to the core member 6.
It may be provided in one coil winding part 62, 63. The core member 61 has a drum shape in which the cross-sectional area of the coil winding portions 62 and 63 is small (because the coil winding portions 62 and 63 are concave), and the height can be reduced even if the insulating resin 185 is provided. Do not hinder.
In FIG. 24, the insulating resin 185 is provided both above and below the core member 61, but may be provided only above or below the core member 61. Further, the insulating resin 185 is used for the winding core member 61 (the coil winding portion 6).
2, 63).

As shown in FIG. 25, a columnar core member 61A is used in place of the core member 61 connected in a drum shape, and an insulating resin 187 containing magnetic powder is provided in place of the top plate 180. Is also good. Alternatively, as shown in FIG. 26, a top plate 188 may be provided for each of the pair of thin film coils L1, L2 and L3, L4.

Further, the magnetic material such as ferrite and the non-magnetic material such as alumina are selectively used as materials constituting the core member, the plate-shaped member and the top plate, so that electrical characteristics such as high frequency characteristics are obtained. Can also be adjusted.

In forming the dividing groove and the coil forming groove, the laser beam is used in the above embodiment, but an electron beam or an ion beam may be used, or sand blasting or mechanical cutting of a diamond saw may be used. It may be a method. Further, the above-described embodiment employs a method of forming a thin-film coil on the entire side surface of the core member, and then removing unnecessary portions such as a dividing groove and a coil forming groove, but not necessarily. The present invention is not limited to this method, and a so-called additive method may be adopted in which a conductor is provided only to a necessary portion by sputtering, vapor deposition, plating, or the like to form a thin film coil.

[0070]

As is apparent from the above description, according to the present invention, a plurality of coils each composed of a film-shaped coil conductor are formed by arranging a dividing groove in the axial direction of a core member.
An error in the inductance values of the plurality of coils can be reduced. As a result, an inductor component having an inductance value with a narrow deviation can be obtained. Then, by covering at least a part of the coil with an insulating resin, an insulating resin containing magnetic powder, or a top plate, an inductor component having a combination of various coils can be obtained.

Further, by providing an external terminal electrode position adjusting pattern on the surface of the plate member, the input side and the output side of each coil can be arranged on the same line. This increases the degree of freedom in designing the pattern of the printed circuit board for mounting the inductor component.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a manufacturing procedure of a first embodiment of an inductor component according to the present invention.

FIG. 2 is a perspective view showing a manufacturing procedure of the inductor component following FIG. 1;

FIG. 3 is an exemplary perspective view showing a procedure for manufacturing the inductor component following FIG. 2;

FIG. 4 is a plan view showing a procedure for manufacturing the inductor component following FIG. 3;

FIG. 5 is a front view of the inductor component shown in FIG. 4;

FIG. 6 is an electrical equivalent circuit diagram of the inductor component shown in FIG. 4;

FIG. 7 is a front view showing a second embodiment of the inductor component according to the present invention.

FIG. 8 is an electric equivalent circuit diagram of the inductor component shown in FIG. 7;

FIG. 9 is an exemplary front view showing a modification of the inductor component shown in FIG. 7;

FIG. 10 is a perspective view showing a manufacturing procedure of the third embodiment of the inductor component according to the present invention.

FIG. 11 is an exemplary perspective view showing the manufacturing procedure of the inductor component following FIG. 10;

FIG. 12 is a perspective view showing the procedure of manufacturing the inductor component following FIG. 11;

FIG. 13 is an exemplary perspective view showing the manufacturing procedure of the inductor component following FIG. 12;

FIG. 14 is a plan view showing the procedure for manufacturing the inductor component following FIG. 13;

FIG. 15 is an electrical equivalent circuit diagram of the inductor component shown in FIG. 14;

FIG. 16 is a perspective view showing a manufacturing procedure of the fourth embodiment of the inductor component according to the present invention.

FIG. 17 is a perspective view showing the procedure of manufacturing the inductor component following FIG. 16;

FIG. 18 is a perspective view showing the procedure of manufacturing the inductor component following FIG. 17;

FIG. 19 is a plan view showing the procedure for manufacturing the inductor component following FIG. 18;

20 is an electrical equivalent circuit diagram of the inductor component shown in FIG.

FIG. 21 is a front view showing another embodiment of the inductor component according to the present invention.

FIG. 22 is an electrical equivalent circuit diagram of the inductor component shown in FIG. 21;

FIG. 23 is a front view showing another embodiment of the inductor component according to the present invention.

FIG. 24 is a front view showing still another embodiment of the inductor component according to the present invention.

FIG. 25 is a front view showing still another embodiment of the inductor component according to the present invention.

FIG. 26 is a front view showing still another embodiment of the inductor component according to the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Array type inductor 11, 11A, 11B ... Core member 12, 13, 14 ... Coil winding part 22, 23, 24 ... Coil constituent groove 25a, 25b, 26a, 26b, 27a, 27b, 2
8a, 28b ... terminal electrodes 35, 36, 37 ... dividing grooves 40, 40A ... plate members 41a-43b ... external terminal electrode position adjustment patterns 44a-46b ... external terminal electrodes 51, 170 ... common mode choke coils 52, 52A , 52B ... top plate 60 ... array type impeder 61, 61A ... core member 62, 63 ... coil winding part 72-75, 122-125 ... coil configuration groove 85, 130 ... division groove 90a-93b, 140a-142b ... Terminal electrodes 100, 150: Plate members 101a to 104b, 151a to 153b: External terminal electrode position adjustment patterns 105a to 108b, 155a to 157b: External terminal electrodes 160: Transformers 180, 188: Top plate 185: Insulating resin 187 ... Insulating resin containing magnetic powder L1, L2, L3, L4 ... Thin film coil

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Etsuji Yamamoto 2-26-10 Tenjin, Nagaokakyo-shi, Kyoto F-term in Murata Manufacturing Co., Ltd. (reference) 5E070 AA01 AA11 AB04 BA03 CA14 CA16 DA13 EA06

Claims (13)

[Claims] A coil member provided with a plurality of coil winding portions arranged in the axial direction; and at least one of a plurality of coil winding portions provided in each of the coil winding portions and spiraling around the outer periphery of the coil winding portion. Three thin-film coils, dividing grooves provided between the plurality of coil winding portions, and external terminal electrodes provided on the surface of the core member and electrically connected to both ends of the thin-film coil, respectively. An inductor component, comprising: 2. A core member in which a plurality of coil winding portions are arranged in the axial direction, a plate-like member joined to the core member, and a coil winding provided in each of the coil winding portions. At least one thin-film coil that spirals around the outer periphery of the winding portion; a dividing groove provided between the plurality of coil winding portions; and both end portions of the thin-film coil provided on the surface of the plate member And an external terminal electrode electrically connected to the inductor component. 3. The inductor component according to claim 2, wherein an external terminal electrode position adjusting pattern is provided on a surface of said plate-shaped member. 4. The inductor component according to claim 2, wherein the core member is joined to the plate member except for a coil winding portion. 5. The thin-film coil according to claim 1, wherein each of said thin-film coils is formed by providing a spiral coil-forming groove in a thin-film conductor formed on an outer periphery of said coil winding portion. 5. The inductor component according to any one of 4. 6. The spiral coil forming groove of each thin film coil has a starting end and a terminating end disposed substantially at the same position in the outer peripheral direction of the core member. The described inductor component. 7. The spiral coil forming groove of each thin-film coil has a starting end and a terminating end which are displaced from each other by approximately 180 degrees in the outer peripheral direction of the core member.
The described inductor component. 8. Each of the coil winding portions is provided with two thin film coils which spirally surround the outer periphery of the coil winding portion, and the start ends of the spiral coil configuration grooves of the two thin film coils are the same. The inductor component according to claim 6, wherein the inductor component is shifted by about 180 degrees in a circumferential direction of the core member. 9. The inductor component according to claim 8, wherein the dividing groove extends around the outer periphery of the core member, and the thin film coil is divided for each coil winding portion. 10. The two thin-film coils, wherein the dividing groove is provided in two adjacent coil winding portions, respectively.
9. The inductor component according to claim 8, wherein only one of the thin-film coils is divided. 11. The coil according to claim 1, wherein a cross-sectional area of the coil winding portion of the core member is smaller than a cross-sectional area of a remaining portion of the core member. Inductor parts. 12. At least a part of the thin-film coil,
The inductor component according to claim 1, wherein the inductor component is covered with one of an insulating resin and a magnetic powder-containing insulating resin. 13. The inductor component according to claim 1, wherein at least a part of the thin film coil is covered with a top plate.