JP2002169118A5 - - Google Patents
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- Publication number
- JP2002169118A5 JP2002169118A5 JP2000368332A JP2000368332A JP2002169118A5 JP 2002169118 A5 JP2002169118 A5 JP 2002169118A5 JP 2000368332 A JP2000368332 A JP 2000368332A JP 2000368332 A JP2000368332 A JP 2000368332A JP 2002169118 A5 JP2002169118 A5 JP 2002169118A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000368332A JP4585684B2 (ja) | 2000-12-04 | 2000-12-04 | レーザビーム描画装置における音響光学素子定常化システム |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000368332A JP4585684B2 (ja) | 2000-12-04 | 2000-12-04 | レーザビーム描画装置における音響光学素子定常化システム |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2002169118A JP2002169118A (ja) | 2002-06-14 |
JP2002169118A5 true JP2002169118A5 (hu) | 2007-12-27 |
JP4585684B2 JP4585684B2 (ja) | 2010-11-24 |
Family
ID=18838604
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000368332A Expired - Fee Related JP4585684B2 (ja) | 2000-12-04 | 2000-12-04 | レーザビーム描画装置における音響光学素子定常化システム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4585684B2 (hu) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007144951A (ja) * | 2005-11-30 | 2007-06-14 | Ricoh Co Ltd | 画像形成装置 |
DE102007053199A1 (de) * | 2007-11-06 | 2009-05-14 | Leica Microsystems Cms Gmbh | Vorrichtung und Verfahren zur Ansteuerung eines akustooptischen Bauteils |
KR102138223B1 (ko) * | 2011-07-05 | 2020-07-28 | 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 | 사용 중 음향-광학 빔 편향기와 음향-광학 변조기에 온도 안정성을 제공하기 위한 시스템 및 방법 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4890539A (hu) * | 1972-03-01 | 1973-11-26 | ||
JPS6173920A (ja) * | 1984-09-19 | 1986-04-16 | Fuji Photo Film Co Ltd | レ−ザ露光量安定化装置 |
JPS61189575A (ja) * | 1985-02-19 | 1986-08-23 | Canon Inc | 画像形成装置 |
JPS6319962A (ja) * | 1986-07-12 | 1988-01-27 | Konica Corp | ステツピングモ−タを用いた画像記録装置 |
JPS63231313A (ja) * | 1987-03-19 | 1988-09-27 | Asahi Glass Co Ltd | 音響光学素子 |
JPS63316877A (ja) * | 1987-06-19 | 1988-12-26 | Fujitsu Ltd | 像形成装置 |
DE19861383B4 (de) * | 1998-06-18 | 2008-03-27 | Carl Zeiss Jena Gmbh | Laserscanmikroskop |
DE10029167B8 (de) * | 2000-06-19 | 2015-07-02 | Leica Microsystems Cms Gmbh | Verfahren und Vorrichtung zur Temperaturstabilisierung optischer Bauteile |
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2000
- 2000-12-04 JP JP2000368332A patent/JP4585684B2/ja not_active Expired - Fee Related