JP2002169094A - 測定顕微鏡装置 - Google Patents
測定顕微鏡装置Info
- Publication number
- JP2002169094A JP2002169094A JP2000363482A JP2000363482A JP2002169094A JP 2002169094 A JP2002169094 A JP 2002169094A JP 2000363482 A JP2000363482 A JP 2000363482A JP 2000363482 A JP2000363482 A JP 2000363482A JP 2002169094 A JP2002169094 A JP 2002169094A
- Authority
- JP
- Japan
- Prior art keywords
- stage
- column
- unit
- electrical
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 25
- 238000012545 processing Methods 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 4
- 238000009434 installation Methods 0.000 abstract description 10
- 238000010586 diagram Methods 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Landscapes
- Microscoopes, Condenser (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000363482A JP2002169094A (ja) | 2000-11-29 | 2000-11-29 | 測定顕微鏡装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000363482A JP2002169094A (ja) | 2000-11-29 | 2000-11-29 | 測定顕微鏡装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002169094A true JP2002169094A (ja) | 2002-06-14 |
| JP2002169094A5 JP2002169094A5 (enrdf_load_stackoverflow) | 2007-11-22 |
Family
ID=18834591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000363482A Pending JP2002169094A (ja) | 2000-11-29 | 2000-11-29 | 測定顕微鏡装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002169094A (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09126714A (ja) * | 1995-10-31 | 1997-05-16 | Nikon Corp | 測定顕微鏡 |
-
2000
- 2000-11-29 JP JP2000363482A patent/JP2002169094A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09126714A (ja) * | 1995-10-31 | 1997-05-16 | Nikon Corp | 測定顕微鏡 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20071004 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20071004 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110301 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20110719 |