JP2002162595A5 - - Google Patents
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- Publication number
- JP2002162595A5 JP2002162595A5 JP2000358166A JP2000358166A JP2002162595A5 JP 2002162595 A5 JP2002162595 A5 JP 2002162595A5 JP 2000358166 A JP2000358166 A JP 2000358166A JP 2000358166 A JP2000358166 A JP 2000358166A JP 2002162595 A5 JP2002162595 A5 JP 2002162595A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000358166A JP2002162595A (en) | 2000-11-24 | 2000-11-24 | Galvano mirror |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000358166A JP2002162595A (en) | 2000-11-24 | 2000-11-24 | Galvano mirror |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2002162595A JP2002162595A (en) | 2002-06-07 |
JP2002162595A5 true JP2002162595A5 (en) | 2008-01-17 |
Family
ID=18830117
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000358166A Pending JP2002162595A (en) | 2000-11-24 | 2000-11-24 | Galvano mirror |
Country Status (1)
Country | Link |
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JP (1) | JP2002162595A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1582906A1 (en) * | 2004-04-01 | 2005-10-05 | Siemens Aktiengesellschaft | Determination of the deflection of micro mirrors in a projection system |
JP2013191250A (en) * | 2012-03-13 | 2013-09-26 | Toshiba Corp | Optical recording and reproducing device |
WO2014097683A1 (en) * | 2012-12-21 | 2014-06-26 | 三菱電機株式会社 | Optical scanning apparatus and projector |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63289413A (en) * | 1987-05-21 | 1988-11-25 | Matsushita Electric Ind Co Ltd | Shape measuring apparatus |
JPH02154018A (en) * | 1988-11-30 | 1990-06-13 | Toray Ind Inc | Covering yarn |
JPH04289527A (en) * | 1991-03-18 | 1992-10-14 | Sony Corp | Mirror position adjusting device |
DE19721105C5 (en) * | 1997-05-20 | 2008-07-10 | Sick Ag | Optoelectronic sensor |
JP3563978B2 (en) * | 1997-10-24 | 2004-09-08 | ペンタックス株式会社 | Detecting device for rotational position of deflection mirror in optical information recording / reproducing device |
JPH11161980A (en) * | 1997-11-28 | 1999-06-18 | Nec Corp | Tracking error signal detector for optical head |
JP2000098271A (en) * | 1998-09-18 | 2000-04-07 | Hitachi Constr Mach Co Ltd | Galvano-mirror drive device |
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2000
- 2000-11-24 JP JP2000358166A patent/JP2002162595A/en active Pending