JP2002162595A5 - - Google Patents

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Publication number
JP2002162595A5
JP2002162595A5 JP2000358166A JP2000358166A JP2002162595A5 JP 2002162595 A5 JP2002162595 A5 JP 2002162595A5 JP 2000358166 A JP2000358166 A JP 2000358166A JP 2000358166 A JP2000358166 A JP 2000358166A JP 2002162595 A5 JP2002162595 A5 JP 2002162595A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000358166A
Other languages
Japanese (ja)
Other versions
JP2002162595A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2000358166A priority Critical patent/JP2002162595A/en
Priority claimed from JP2000358166A external-priority patent/JP2002162595A/en
Publication of JP2002162595A publication Critical patent/JP2002162595A/en
Publication of JP2002162595A5 publication Critical patent/JP2002162595A5/ja
Pending legal-status Critical Current

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JP2000358166A 2000-11-24 2000-11-24 Galvano mirror Pending JP2002162595A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000358166A JP2002162595A (en) 2000-11-24 2000-11-24 Galvano mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000358166A JP2002162595A (en) 2000-11-24 2000-11-24 Galvano mirror

Publications (2)

Publication Number Publication Date
JP2002162595A JP2002162595A (en) 2002-06-07
JP2002162595A5 true JP2002162595A5 (en) 2008-01-17

Family

ID=18830117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000358166A Pending JP2002162595A (en) 2000-11-24 2000-11-24 Galvano mirror

Country Status (1)

Country Link
JP (1) JP2002162595A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1582906A1 (en) * 2004-04-01 2005-10-05 Siemens Aktiengesellschaft Determination of the deflection of micro mirrors in a projection system
JP2013191250A (en) * 2012-03-13 2013-09-26 Toshiba Corp Optical recording and reproducing device
WO2014097683A1 (en) * 2012-12-21 2014-06-26 三菱電機株式会社 Optical scanning apparatus and projector

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63289413A (en) * 1987-05-21 1988-11-25 Matsushita Electric Ind Co Ltd Shape measuring apparatus
JPH02154018A (en) * 1988-11-30 1990-06-13 Toray Ind Inc Covering yarn
JPH04289527A (en) * 1991-03-18 1992-10-14 Sony Corp Mirror position adjusting device
DE19721105C5 (en) * 1997-05-20 2008-07-10 Sick Ag Optoelectronic sensor
JP3563978B2 (en) * 1997-10-24 2004-09-08 ペンタックス株式会社 Detecting device for rotational position of deflection mirror in optical information recording / reproducing device
JPH11161980A (en) * 1997-11-28 1999-06-18 Nec Corp Tracking error signal detector for optical head
JP2000098271A (en) * 1998-09-18 2000-04-07 Hitachi Constr Mach Co Ltd Galvano-mirror drive device

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