JP2002162113A - Temperature increasing device for constant temperature liquid - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an efficient temperature increasing device capable of obtaining constant temperature liquid, having a set temperature, in a short time. SOLUTION: The periphery of a temperature increasing pipe 1 increased to a set temperature by heating constant temperature liquid, flowing in a temperature increasing chamber 2, by a heater 7 is covered by an outer cylinder 15. A refrigerant flow passage 16 is formed between the outer cylinder 15 and the temperature increasing pipe 1. By flowing of a refrigerant, such as air, through the refrigerant flow passage 16, the constant temperature liquid increased to temperature exceeding a set temperature due to overshoot is cooled and rapidly reduced to a set temperature.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for increasing the temperature of a constant temperature liquid to a set temperature and supplying the same to a load when the load is heat-treated using a temperature controlled liquid. The present invention relates to a constant temperature liquid heating device.

[0002]

2. Description of the Related Art For example, when performing a heat treatment on a wafer in a semiconductor manufacturing apparatus, a constant temperature liquid such as a chemical solution or water is heated to a set temperature by a temperature increasing device and is supplied to the heat treating device cyclically. Such a temperature raising device generally has a temperature raising chamber having a built-in heater, and while the constant temperature liquid which has been cooled down by the heat treatment of the load and refluxed flows through the temperature raising chamber, the set temperature is set by the heater. The temperature is raised up to.

However, the conventional temperature raising device has a drawback that it takes time until the constant temperature liquid reaches a set temperature due to overshoot. That is, the conventional heating device is
Since the heat insulating material is used in consideration of the influence on the surroundings, when the constant temperature liquid flowing into the heating chamber is heated by the heater, the effect of the heat insulating material is too high, so that the temperature exceeds the set temperature. Will rise. And because of this overshoot, it takes time to get the constant temperature liquid at the set temperature,
It was inefficient.

[0004]

SUMMARY OF THE INVENTION It is an object of the present invention to provide an efficient heating device which can obtain a constant temperature liquid at a set temperature in a short time.

[0005]

According to the present invention, there is provided, in accordance with the present invention, a tube made of a heat conductive material having a heating chamber containing a heater and a liquid inlet and a liquid outlet communicating with the heating chamber. -Shaped heating tube, an outer cylinder provided at intervals around the heating tube, a cooling refrigerant flow path formed by the interval between the heating tube and the outer cylinder, the refrigerant There is provided a constant temperature liquid heating device having a coolant inlet and a coolant outlet communicating with a flow path.

According to the temperature raising apparatus of the present invention having the above configuration, the constant temperature liquid flowing into the temperature raising pipe is heated by the heater and rises to the set temperature. At this time, the temperature of the constant temperature liquid increases due to overshoot. Even if the temperature rises above the set temperature, the constant temperature liquid is cooled by the refrigerant flowing through the refrigerant flow path through the temperature raising pipe, and the temperature is forcibly and quickly lowered. Thus, a constant temperature liquid at the set temperature can be obtained efficiently.

It is desirable that the inside of the outer cylinder is mirror-finished for heat reflection. As a result, the temperature rise of the outer cylinder itself is suppressed, so that the influence of heat on peripheral devices can be minimized.

According to a specific embodiment of the present invention, the heating tube has a heater protection tube which penetrates the heating chamber in the axial direction and has both ends extending to the outside of the heating tube. The heater is installed in the inserted state, and a heater cap made of a heat insulating material is attached to both ends of the protective tube,
Further, the outer cylinder includes a cylindrical body that covers the outer peripheral surface of the heating tube and a pair of end plates that cover both end surfaces in the axial direction of the heating tube. The external cylinder is attached to the heating tube via a protective tube by attaching the external tube via the heater cap.

The body of the outer cylinder can be formed by dividing the body into a pair of half-cylinder bodies, and connecting these body halves to each other. By configuring the outer cylinder in this way, this outer cylinder is also attached to the existing heating tube,
It can be easily changed to a cooling method using a refrigerant.

Preferably, in the present invention, one of the liquid inlet and the liquid outlet and the refrigerant inlet and the refrigerant outlet are provided at a position near both ends in the axial direction on one of the opposite side surfaces of the heating device. And the other of the liquid inlet and the liquid outlet and the other of the refrigerant inlet and the refrigerant outlet are respectively provided at positions near the opposite axial ends on the other side surface of the temperature raising device. It is that you are.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below in detail with reference to the drawings. The temperature raising device shown in FIGS. 1 to 3 is for raising a constant temperature liquid composed of a chemical solution, water, or the like to a set temperature (for example, 120 to 160 ° C.) and supplying it to the heat treatment device in a circular manner. The temperature riser 1 is provided.

The heating tube 1 is made of a hard and heat-transmissive material such as metal or ceramic, and has a heating chamber 2 for heating a constant temperature liquid, and a liquid inlet 3 communicating with the heating chamber.
And a liquid outlet 4. The heating chamber 2 is divided into three small chambers 2a, 2b, and 2c by partition walls 5 radially provided at intervals of 120 degrees therein.
a and the second small chamber 2 b are connected to the first end 11 in the axial direction of the heating tube 1.
Communicate with each other by an opening provided at the end of the partition wall 5 on the side,
The second small chamber 2b and the third small chamber 2c communicate with each other by the opening at the end of the partition wall 5 on the second end 12 side on the opposite side. Each of the small chambers 2a, 2b, 2c has an end wall 6 respectively.
Through which a lamp heater 7 for constant temperature liquid heating is provided,
The third small chamber 2c directly communicating with the liquid outlet 4 is further provided with a temperature sensor 8 for detecting the temperature of the constant temperature liquid. The lamp heater 7 is installed in each of the small chambers 2a, 2b, 2c in a state of being inserted into a cylindrical protective tube 9, and both ends of the protective tube 9 and the lamp heater 7 are left and right. It extends from the end walls 6 and 6 to the outside of the heating tube 1.

The liquid inlet 3 and the liquid outlet 4 are separately provided at positions near both ends in the axial direction on both opposing side surfaces of the heating tube 1. That is, the liquid inlet 3 is
A liquid outlet 4 is provided at a position near the second end 12 on one side of the temperature raising pipe 1 so as to communicate with the first small chamber 2a.
Is provided at a position near the first end 11 on the opposite side surface so as to communicate with the third small chamber 2c. When the constant temperature liquid flows into the first small chamber 2a from the liquid inlet 3, the constant temperature liquid flows inside the first small chamber 2a to the first end 11 side, and from the first end 11 side to the second small chamber 2b. And flows toward the second end 12 on the opposite side.
Each of the small chambers 2a, 2a flows into the third small chamber 2c from the side, flows again to the opposite side, and flows out of the liquid outlet 4.
The fluid flows while bypassing b and 2c, and is heated by the heater 7 in each of the small chambers during that time so that the temperature rises. The temperature of the constant temperature liquid is raised to the third small chamber 2
The temperature is measured on the liquid outlet 4 side by a temperature sensor 8 provided in c.

An outer cylinder 15 is attached around the heating tube 1 so as to surround the entire heating tube 1 at a constant interval, and a space between the outer cylinder 15 and the heating tube 1 is provided. The cooling passage 16 for cooling is formed by the interval. The outer cylinder 15 has a cylindrical body 18 that covers the outer peripheral surface of the temperature raising tube 1.
And a pair of end plates 19, 19 that cover both end surfaces in the axial direction. The body 18 is a half-cylinder-shaped pair of body halves formed by dividing a cylinder into two along an axis. Body 18a, 1
The inner surfaces of the body 18 and the end plate 19 are mirror-finished to reflect heat, respectively. The outer cylinder 15 has the pair of end plates 19, 19 attached to both ends of each protective tube 9 via heater caps 10, 10, and then the body half 18 is attached to these end plates 19, 19.
By attaching a and 18a, the refrigerant pipes 16 are coaxially mounted around the heating tube 1, whereby the refrigerant flow path 16 is formed between the outer tube 15 and the heating tube 1.

The heater cap 10 is formed of a heat-insulating material into a hollow short cylindrical shape, and has a base portion having a flange portion 1 which abuts and locks on the inner surface of the end plate 19.
0a, and the inner hole 10b has a larger diameter at the base end side. The heater cap 10 is attached to each of the protection tubes 9 by fitting the end of the protection tube 9 into the large diameter portion of the inner hole 10b.
0 is fitted into each of the mounting holes 21a of the end plate 19, the end plate 19 is attached, and then the body halves 18a, 18a are attached to the end plate 19, so that the outer cylinder 15 is heated. Attach to 1. In the drawing, reference numeral 21b denotes a hole provided on one end plate 19 for leading an end of the temperature sensor, and reference numeral 25 denotes a screw for fixing the heater cap 10 and the lamp heater 7.

Thus, the protective tube 9 for protecting the lamp heater 7 is used, and the heater cap 10 is provided at the end thereof.
By attaching the outer cylinder 15 through the, the outer cylinder 15 can be easily attached to the heating tube 1.
In addition, by forming the outer cylinder 15 by the pair of body halves 18a, 18a, it is possible to easily attach an existing heating tube as well as to a new heating tube. .

On the side surface of the outer cylinder 15, there are provided lead-out portions for leading these liquid inlets 3 and liquid outlets 4 to the outside at positions corresponding to the liquid inlets 3 and the liquid outlets 4 of the heating tube 1, respectively. 22 and a refrigerant inlet 23 and a refrigerant outlet 24 communicating with the refrigerant flow path 16.

The outlet 22 is shaped like a cover protruding from the side surface of the outer cylinder 15 and has an opening 26 through which the pipes constituting the liquid inlet 3 and the liquid outlet 4 are led out. It is provided. In the illustrated example, the lead-out portion 22 is formed on the joint between the pair of body halves 18a, 18a. For this reason, this lead-out part 22 is divided into two lead-out part halves 22a, 22a at the center part, and these lead-out part halves 22a, 22a are respectively formed on the two trunk halves 18a, 18a. These torso halves 1
When the body portion 18 is formed by joining the body portions 8a and 18a, the leading portion halves 22a and 22a are joined to each other to form the leading portion 22. As described above, by forming the outlet portion 22 on the joint portion between the pair of body halves 18a, 18a, the liquid outlet 3 and the liquid outlet 4 can be externally connected to the existing heating tube 1 already provided. Even when the tube 15 is mounted, it can be easily mounted.

On the other hand, the refrigerant inlet 23 and the refrigerant outlet 24
Are formed at a position near one end in the axial direction of the outer cylinder 15 and a position near the other end. In this case, the refrigerant inlet 23 and the refrigerant outlet 24 may be provided at any positions on the circumference of the outer cylinder 15, but preferably, as shown, the same side surfaces as the liquid inlet 3 and the liquid outlet 4 are provided. It is to provide above. That is, in the illustrated example, the refrigerant inlet 23 is provided on the same side surface as the liquid inlet 3 near the end opposite to the liquid inlet 3 in the axial direction, and the liquid outlet 4 is on the same side as the liquid outlet 4. A refrigerant outlet 24 is provided at a position near the opposite end in the direction. Therefore, these refrigerant inlet 23 and refrigerant outlet 24
Similarly to the lead-out section 22, the pair of body halves 18 are substantially
a, 18a are formed on the joints. And these refrigerant inlets 23 and refrigerant outlets 24 made of pipes are
When the pair of trunk halves 18a, 18a are joined, they are attached between the joined portions.

The refrigerant may be a gas such as air or a liquid such as water. In the case where air is used, the connection between the body halves 18a, 18a and the end plates 19, 19 In order not to require such a high degree of air tightness when mounting the refrigerant inlet 23 or mounting the refrigerant inlet 23 and the refrigerant outlet 24, a sealing member may be interposed between the joints as necessary.

Thus, the refrigerant flow passage 16 formed between the outer cylinder 15 and the heating tube 1 is connected to the refrigerant outlet 23 through the refrigerant outlet 2.
4 through which a refrigerant such as air flows.
Even if the temperature of the constant temperature liquid in the inside rises above the set temperature due to overshoot, it is forcibly cooled through the heating tube 1 by the refrigerant, so that the temperature quickly drops to the set temperature, A constant temperature liquid at a set temperature can be obtained in a short time.

In the illustrated embodiment, the body 18 of the outer cylinder is divided into a pair of semi-cylindrical body halves 18a, 18a, but the body 18 is not limited to such a split type. Instead, it may be a cylindrical integral type.

[0023]

As described above, according to the heating device of the present invention,
Since the outer cylinder is provided outside the heating tube and a coolant passage for cooling is formed between them, even if the temperature of the constant temperature liquid in the heating tube exceeds the set temperature due to overshoot, The constant-temperature liquid is forcibly cooled by flowing a refrigerant through the refrigerant flow path, and the temperature can be rapidly lowered to the set temperature. Therefore, a constant-temperature liquid at the set temperature can be obtained in a short time. it can. In addition, since the inner surface of the outer cylinder is mirror-finished, the temperature rise of the outer cylinder itself can be suppressed, so that the influence of heat on peripheral devices can be minimized.

[Brief description of the drawings]

FIG. 1 is a sectional view of a temperature raising device according to the present invention.

FIG. 2 is a sectional view taken along line AA in FIG.

FIG. 3 is an exploded perspective view of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Heating pipe 2 Heating chamber 3 Liquid inlet 4 Liquid outlet 7 Heater 9 Protection tube 10 Heater cap 15 Outer cylinder 16 Refrigerant flow path 18 Body part 18a Body half 19 End plate 23 Refrigerant inlet 24 Refrigerant outlet

Claims (5)

[Claims] 1. A cylindrical heating tube made of a heat-conductive material having a heating chamber containing a heater, a liquid inlet and a liquid outlet communicating with the heating chamber, and a space around the heating tube. An outer cylinder provided, a cooling refrigerant flow path formed by the space between the heating tube and the outer cylinder, a refrigerant inlet and a refrigerant outlet communicating with the refrigerant flow path, Temperature raising device for constant temperature liquid. 2. The temperature raising device according to claim 1, wherein the inside of said outer cylinder is mirror-finished for heat reflection. 3. The heating device according to claim 1, wherein the heating tube has a heater protection tube that penetrates the heating chamber in the axial direction and has both ends extending outside the room. The heater is installed inside the tube so as to be inserted, and a heater cap made of a heat insulating material is attached to both ends of the protective tube, and the outer tube has a cylindrical shape that covers the outer peripheral surface of the temperature raising tube. The body comprises a pair of end plates that cover both end surfaces in the axial direction of the heating tube. By attaching these end plates to the protective tube via the heater cap, the outer tube becomes a heating tube. Characterized in that it is attached via a protective tube to 4. The temperature raising device according to claim 3, wherein the body of the outer cylinder comprises a pair of half-cylinder body halves, and these body halves are connected to each other. Characterized by being formed by: 5. A liquid heating device according to claim 1, wherein said liquid inlet is located at a position near both ends in the axial direction on one of two opposite side surfaces of said temperature raising device. And one of the liquid outlet and one of the refrigerant inlet and the refrigerant outlet are respectively provided, and at a position near both ends in the axial direction on the other side surface of the heating device, the other of the liquid inlet and the liquid outlet is provided. The refrigerant inlet and the refrigerant outlet are each provided.