JP2002160769A - Buffer for container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a buffer for a container in which thickness or bulk of the package is reduced, which has a little possibility of making a space dirty where the container is handled or an adverse effect to the environment, can be reused, and prevent the reduction in impact absorbance. SOLUTION: A precision substrate housing container 10 is housed in a package box 1, and a buffer 20 for releasing the impact on a precision substrate W or the container 10 is interposed between the package box 1 and the container 10. The buffer 20 is composed of a first buffer 23 which is housed at the inside bottom of the package box l to engage with the lower part of the container 10, and a second buffer 24 which is disposed on the package box l to engage with the upper part of the container 10, an external wall 25 and an internal wall 27 forming the first and the second buffer 23 and 24 are connected with a connecting wall 31, and the connecting wall 31 are formed by being bent to form bellows 32 for absorbing the distortion due to the impact.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shock absorber for a container capable of reducing damage to a precision substrate and a container for the precision substrate generated during transportation of a thin precision substrate or a large-diameter precision substrate.

[0002]

2. Description of the Related Art Conventionally, when a precision substrate storage container 10 is transported, as shown in FIG. The precision substrate storage containers 10 are aligned and stored in the plurality of storage recesses 30, and the inside upper part of the packaging box 1 is covered with a second buffer 24 </ b> A to cover the plurality of storage recesses 30 and the precision substrate storage container 10.
Then, the plurality of open flaps 2 of the packaging box 1 are sealed and packed with a stapler, an adhesive tape, or the like, and the precision substrate storage container 10 is transported.

As shown in FIGS. 8 and 9, a precision substrate storage container 10 has a bottomed cylindrical container body 11 and a
1 and a cassette 13 for accommodating precision substrates W composed of a plurality of wafers at predetermined pitches through support grooves 12 having a V-shaped cross section, and an endless opening surface of the container body 11. The cover 15 includes a cover 15 that opens and closes via a packing 14, and a precision board holder 16 that is selectively mounted on the inner surface of the cover 15. Further, the first and second buffers 23A and 24A are formed using thick styrene foam, foamed polypropylene, a polypropylene sheet, or the like, and reduce the impact applied to the precision substrate W and the precision substrate storage container 10.

[0004]

Since the first and second shock absorbers 23A and 24A in the prior art are formed using styrofoam or the like as described above, the first and second shock absorbers 23A and 24A have a large thickness in order to increase the shock absorbing ability. There is a big problem that the packing form becomes bulky. In addition, the first and second buffer bodies 23A
Since 24A is fragile, it is easily broken and scattered by impact, and may contaminate a clean room using the precision substrate W or the precision substrate storage container 10 or adversely affect environmental hygiene. It is also difficult to use. To solve such problems, PP
A method of forming the first and second buffer bodies 23A and 24A by bending a sheet has been proposed. However, when the precision substrate W is increased in size and the weight of the precision substrate storage container 10 is increased, the impact strength applied from the outside tends to increase.
In the first and second buffer bodies 23A and 24A made of P sheet,
It is conceivable that the impact is likely to be easily damaged at the portion where the impact is concentrated, and that the impact absorption becomes difficult.

On the other hand, a large precision substrate W having a diameter of 200 mm or more, or a precision substrate W whose rear surface is polished and whose thickness is reduced to 20% to 70% of a normal precision substrate W is aligned and stored in a cassette 13. When the precision substrate W is placed horizontally so as to be horizontal, the precision substrate W is bent at its center by its own weight (in this regard, see FIG. 10). In particular, a large precision substrate W with a diameter of 300 mm or more and a thickness of 400 μm
When the following precision substrate W is stored, the central portion of the precision substrate W is further bent. For this reason, when an impact is applied from the outside, the precision substrate W is easily detached from the support groove 12, and the precision substrates W are likely to come into contact with each other and be damaged.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and suppresses an increase in thickness and an increase in bulk of a package.
Provided is a shock absorber for a precision substrate storage container, which has a low risk of contaminating the place of use or adversely affecting the environment, can be reused and used, and can eliminate a decrease in shock absorption. It is intended to be.

[0007]

According to the first aspect of the present invention, in order to attain the above object, a container is housed in a packaging box, and a cushion between the packaging box and the container is used to reduce an impact applied to the container. A first buffer that is housed in one end of the packaging box and engages with (engages with) one end of the container; A second buffer body disposed at the end and engaged with the other end of the container, wherein at least one of the first and second buffer bodies absorbs the strain caused by the impact. It features a bellows.

[0008] The first and second shock absorbers are provided with an outer peripheral wall located on the outer periphery of the container, and a cross section located inside the outer peripheral wall and engaged with an end or the other end of the container. It is preferable that the inner wall has a substantially U-shape and a connecting wall connecting the outer peripheral wall and the free end of the inner wall, and the connecting wall bends to form a bellows. Further, a bellows body can be provided at least on a flat portion of the inner wall of the first buffer body.

Here, the container in the claims stores one or more precision substrates.
In addition to a semiconductor wafer, a mask glass, a liquid crystal cell, a recording medium, and the like are included. The material and aperture size of the precision substrate can be appropriately changed as necessary, such as silicon, 3 ", 6", 8 ", 12" and the like. The container is mainly a single or plural precision substrate storage container, but is not limited to this, and may be a container for storing other various articles. Also, the engagement must be substantially understood,
Fitting (fitting), close fitting and the like are included. The bellows may be provided only on the first buffer, or may be provided only on the second buffer. Preferably, bellows are provided on both the first and second shock absorbers. Further, the inner wall may be formed in a U-shaped or U-shaped cross section, or may be formed in a substantially U-shaped or U-shaped cross section.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the present invention will be described below with reference to the accompanying drawings. As shown in FIGS. 1. A precision substrate storage container 10 is accommodated in the packaging box 1 and a buffer 2 for reducing the shock applied to the precision substrate W or the precision substrate storage container 10 between the packaging box 1 and the precision substrate storage container 10.
The buffer 20 is interposed between the first buffer 23 which is housed below the inside of the packaging box 1 and is engaged with the lower part of the precision substrate storage container 10, and the buffer 20 which is arranged at the top of the packaging box 1 And a second buffer 24 engaged with the upper portion of the substrate storage container 10.
4, a flexible bellows 32 for absorbing the distortion caused by the impact
Are provided.

As shown in FIG. 1, the packaging box 1 is formed in a size capable of arranging a plurality of precision substrate storage containers 10 side by side using cardboard, polypropylene resin, foaming material, and the like, and has an upper opening. It is formed in a rectangular parallelepiped with a flap 2. As the packaging box 1, a resin case made of recyclable polypropylene or the like, which generates little paper dust and dust when carried into a clean room, is preferably used.

As shown in FIG.
It is formed using a predetermined sheet having a thickness of about mm to 1.2 mm, and concave portions 21 and convex portions 22 are alternately formed around the sheet. Examples of the predetermined sheet include polypropylene, polyethylene, copolymers of polypropylene and polyethylene, polystyrene, polybutadiene, and the like, which are used in known vacuum forming, and the above resin is provided with an antistatic property in order to prevent adhesion of dust due to static electricity. Polypropylene, which is excellent in impact resistance and shock-absorbing property and easy to mold, is most suitable.

As shown in FIGS. 2 and 3, the first and second buffers 23 and 24 have an outer peripheral wall 25 surrounding the precision substrate storage container 10 and a container main body located inside the outer peripheral wall 25. 11
A lower wall or a mortar-shaped inner wall 27 that engages with the lower portion or the lid 15 of the inner wall 27, and a connecting wall 31 that connects the lower end or the upper end of the outer peripheral wall 25 and the inner wall 27 substantially horizontally, The connecting wall 31 is bent continuously in the horizontal direction to form the bellows 32. First and second buffers 23
As shown in FIG. 3, 24 is stacked one on top of the other when not in use or stored, so the storage space can be small, and when reusing it, it has a small volume when transporting a single buffer. And can contribute to cost reduction of reuse.

The outer peripheral wall 25 is inclined so as to increase the strength, and a flange 26 projects horizontally and outward from a lower end or an upper end, and this flange 26 is provided at a lower inner peripheral surface or an upper inner peripheral surface of the packaging box 1. The precision substrate storage container 10 at the time of storage by contact is effectively prevented from shifting. Further, the inner wall 27 is
An inner peripheral wall 28 that is opposed to the inner peripheral wall 28 in an inclined state with a gap therebetween, and a basically flat bottom plate portion 29 that closes a lower opening or an upper opening of the inner peripheral wall 28. One or a plurality of locations surrounded by the inner peripheral wall 28 formed in each of the first and second buffer bodies 23 and 24 is a storage recess 30 that engages with one end or the other end of the precision substrate storage container. In the center of the bottom plate portion 29, a through hole 33 for reducing air resistance during storage is formed in a plane circular shape or the like as necessary. It is preferable that a step is provided on the bottom plate portion 29 to ensure strength.

The bellows 32 is formed of three continuous triangular bent pieces, and the length L of two sides forming a right angle of each bent piece is 5 mm. The angle α of each bent piece is
The angle is selected from the range of 60 to 120 °, but is preferably 90 ° from the viewpoint of durability against impact and cushioning. The bellows 32 is arranged so as to surround the precision substrate storage container in order to withstand an impact from all directions,
It is even more preferable that they are arranged at different heights along the concave portion 21 and the convex portion 22 provided around the buffer 20. In addition, regarding the size of the bellows 32 and the number of bent pieces,
The present invention is not limited to this embodiment.
And the size of the precision substrate storage container 10 and the number of containers to be inserted are appropriately selected. The other parts are the same as in the conventional example, and the description is omitted.

In the above configuration, the precision substrate storage container 10
Is transported, a first buffer 23 is laid below the inside of the packaging box 1, and the precision substrate storage containers 10 are arranged and engaged with the plurality of storage recesses 30 of the first buffer 23 at intervals. Then, the upper inside of the packaging box 1 is covered with the second buffer 24 to engage the plurality of storage recesses 30 with the upper part of the precision substrate storage container 10. If the flap 2 is sealed and packed with a stapler or an adhesive tape, the precision substrate storage container 10 can be transported in a fixed state.

At the time of this transportation, the precision substrate storage container 10
The first and second buffers 23 and 24 sandwich the first and second buffers 23 and 24.
Since the bellows 32 that bends to reduce the impact is located around the second buffer bodies 23 and 24, breakage is significantly suppressed and prevented. Further, the concave portion 21 and the convex portion 2 are provided around the buffer 20.
2 are arranged alternately, so that the precision substrate storage container 1
It becomes possible to greatly improve the buffering capacity for the 0 ridge direction. That is, the bellows 32 of the protrusion 22 of the buffer 20 is positioned on the side surface of the precision substrate storage container 10, and the buffer 2 is positioned on the ridge of the precision substrate storage container 10.
Since the bellows 32 of the 0 concave portion 21 is located, the external force acting on the precision substrate storage container 10 during transportation can be greatly reduced.

According to the above construction, since the first and second shock absorbers 23 and 24 with the bellows 32 are formed using a resin sheet of polypropylene or the like, the thickness is increased in order to enhance the shock absorbing ability. There is no necessity, and it is possible to effectively suppress and prevent bulking of the packaging form with a simple configuration. In addition, since the materials of the first and second buffers 23 and 24 are not brittle like styrofoam, they are not crushed and scattered by impact. Therefore, there is no risk of contaminating the clean room using the precision substrate W or the precision substrate storage container 10 with particles or the like, or adversely affecting environmental hygiene, and it is also possible to reuse the clean room. In addition, remarkable improvement in resilience in repeated dropping can be expected.

Further, even if the precision substrate W becomes larger and the weight of the precision substrate storage container 10 increases and the impact strength applied from the outside increases, the portion where the first and second buffers 23 and 24 concentrate the impacts. And the impact can be easily absorbed without breakage. A large precision substrate W having a diameter of 200 mm or more, or a precision substrate W whose rear surface is polished and whose thickness is reduced to 20% to 70% of a normal precision substrate W is aligned and stored in the cassette 13 and placed horizontally. In this case, the central portion of the precision substrate W is bent, but the impact applied from the outside can be greatly reduced, so that the precision substrate W does not easily come off the support groove 12. Therefore, the possibility that the precision substrates W come into contact with each other and be damaged can be easily eliminated.

Further, since the same first and second buffers 23 and 24 can be stacked one upon another during storage, a reduction in the occupied space required for storage can be greatly expected. Furthermore, even if the first and second buffers 23 and 24 of different types are erroneously overlapped and laminated, the concave portion 21 and the convex
Do not overlap properly. Therefore, mixing of different kinds of buffer bodies 20 can be prevented very effectively.

FIGS. 4 and 5 show a second embodiment of the present invention. In this case, a bellows 32 and a bellows 32 are provided on the back surface of the bottom plate 29 of the inner wall 27 of the first shock absorber 23. Is mounted integrally with another bellows body 40 located substantially at right angles to improve not only the horizontal direction but also the durability and cushioning properties in the vertical direction. Bellows body 4
0 is fitting such as heat welding and uneven fitting on the back surface of the bottom plate portion 29;
Frame plate 4 that is attached so as not to come off by various methods such as bonding
1, and a bellows 42 that can expand and contract is mounted on the back surface of the frame plate 41 in the vertical direction. The bellows 42 can be formed by vacuum forming, pressure forming, blow molding, or the like, but the manufacturing method is not particularly limited. The other parts are the same as those in the above-described embodiment, and a description thereof will be omitted.

In the above embodiment, the precision substrate storage container 10 of the top open box type is shown, but the precision substrate storage container 10 of the front open box type may be used. Although the precision substrate storage container 10 is simply sandwiched between the first and second buffers 23 and 24, the precision substrate storage container 10 wrapped with an aluminum sheet is used as the first and second buffers 23 and 24. May be pinched. Further, the bellows body 40 is integrally mounted on the back surface of the bottom plate portion 29 of the inner wall 27 in the first buffer body 23, but the bellows body is mounted on the back surface of the bottom plate portion (flat portion) 29 of the inner wall 27 in the second buffer body 24. Body 4
0 is integrally mounted, and the durability and cushioning property in the direction perpendicular to the direction of expansion and contraction of the bellows body provided around the cushioning body can be further improved.

[0023]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a shock absorber for a container according to the present invention will be described with reference to FIG. Example First, the first buffer 2 of the embodiment is placed below the inside of the packaging box 1.
3 and the precision substrate storage containers 10 are engaged with the plurality of storage recesses 30 surrounded by the inner peripheral wall of the first buffer body 23 at intervals with the precision substrate storage containers 10 therebetween. After covering with the second buffer 24 and engaging the upper part of the precision substrate storage container 10 with the plurality of storage recesses 30, the plurality of open flaps 2 of the packaging box 1 were sealed and packed. The first and second buffers 23 and 24 were made of polypropylene, and a plurality of precision substrates W were aligned and stored in the precision substrate storage container 10.

Thus, the precision substrate storage container 10 is
According to Japanese Industrial Standards [Packaged Cargo and Container Drop Test Method (JIS Z0202)] and [Packaged Cargo Drop Test (JIS Z0200)], as shown in FIG. It was dropped in eight directions from the location toward the concrete floor, and the states of the precision substrate storage container 10 and the precision substrate W were confirmed. Table 1 summarizes the results.

COMPARATIVE EXAMPLE First and second buffers 23 and 24 were replaced with conventional buffers 23A and 24A.
The test was performed in the same manner as in the examples, and the results are summarized in Table 2.

[0026]

[Table 1] ：: No abnormality ×: Precision substrate W came off from support groove 12 of cassette 13-: Not implemented

[0027]

[Table 2] ：: No abnormality ×: Precision substrate W came off from support groove 12 of cassette 13-: Not implemented

As is evident from the results of Tables 1 and 2, the buffer of the container of the example is different from the buffer of the container of the comparative example.
Excellent durability, cushioning properties, and resilience of repeated drops were obtained.

[0029]

As described above, according to the present invention, it is possible to effectively suppress an increase in wall thickness and an increase in bulk of a packing form.
There is an effect that it is possible to suppress the risk of scattering and contaminating the place of use of the container and adversely affecting the environment. It can be reused and used, and
It is also possible to increase the degree of shock absorption.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing an embodiment of a shock absorber of a container according to the present invention.

FIG. 2 is a sectional view taken along line II-II of FIG.

FIG. 3 is an explanatory cross-sectional view showing a stacked state of first and second buffers in the embodiment of the buffer of the container according to the present invention.

FIG. 4 is an exploded perspective view showing a second embodiment of the shock absorber of the container according to the present invention.

FIG. 5 is a sectional view of a main part of FIG.

FIG. 6 is an explanatory perspective view showing an embodiment of the shock absorber of the container according to the present invention.

FIG. 7 is an exploded perspective view showing a shock absorber of a conventional container.

FIG. 8 is an exploded perspective view showing a precision substrate storage container.

FIG. 9 is an explanatory perspective view showing a cassette and a precision substrate of the precision substrate storage container.

FIG. 10 is an explanatory view showing a problem of a conventional buffer for a container.

DESCRIPTION OF SYMBOLS 1 Packaging box 10 Precision substrate storage container (container) 11 Container main body 12 Support groove 13 Cassette 15 Lid 20 Buffer 21 Depression 22 Convex 23 First buffer 23A Conventional first buffer 24 Second buffer body 24A Conventional second buffer body 25 Outer peripheral wall 27 Inner wall 28 Inner peripheral wall 29 Bottom plate portion (flat portion) 31 Connecting wall 32 Bellows 40 Bellows body 41 Frame plate 42 Bellows W Precision substrate

Claims (3)

[Claims] 1. A container buffer in which a container is housed in a packaging box, and a buffer for reducing an impact applied to the container is interposed between the packaging box and the container. A first buffer body housed at one end of the container and engaged with one end of the container, and a second buffer body arranged at the other end of the packaging box and engaged with the other end of the container. And a bellows for absorbing the strain caused by the impact is provided on at least one of the first and second shock absorbers. 2. A cross-section in which the first and second shock absorbers are located on the outer periphery of the container and are engaged with one end or the other end of the container located inside the outer peripheral wall. 2. The shock absorber according to claim 1, wherein the shock absorber comprises a substantially U-shaped inner wall and a connecting wall connecting the outer peripheral wall and the free end of the inner wall, and the connecting wall is bent to form a bellows. 3. The shock absorber of the container according to claim 1, wherein a bellows body is provided on at least a flat portion of an inner wall of the first shock absorber.