JP2002159157A5 - - Google Patents

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Publication number
JP2002159157A5
JP2002159157A5 JP2000349234A JP2000349234A JP2002159157A5 JP 2002159157 A5 JP2002159157 A5 JP 2002159157A5 JP 2000349234 A JP2000349234 A JP 2000349234A JP 2000349234 A JP2000349234 A JP 2000349234A JP 2002159157 A5 JP2002159157 A5 JP 2002159157A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000349234A
Other languages
Japanese (ja)
Other versions
JP2002159157A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000349234A priority Critical patent/JP2002159157A/ja
Priority claimed from JP2000349234A external-priority patent/JP2002159157A/ja
Publication of JP2002159157A publication Critical patent/JP2002159157A/ja
Publication of JP2002159157A5 publication Critical patent/JP2002159157A5/ja
Withdrawn legal-status Critical Current

Links

JP2000349234A 2000-11-16 2000-11-16 動圧空気軸受モータ Withdrawn JP2002159157A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000349234A JP2002159157A (ja) 2000-11-16 2000-11-16 動圧空気軸受モータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000349234A JP2002159157A (ja) 2000-11-16 2000-11-16 動圧空気軸受モータ

Publications (2)

Publication Number Publication Date
JP2002159157A JP2002159157A (ja) 2002-05-31
JP2002159157A5 true JP2002159157A5 (de) 2007-12-27

Family

ID=18822677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000349234A Withdrawn JP2002159157A (ja) 2000-11-16 2000-11-16 動圧空気軸受モータ

Country Status (1)

Country Link
JP (1) JP2002159157A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4886355B2 (ja) * 2006-05-02 2012-02-29 日本トムソン株式会社 可動マグネット型リニアモータを内蔵したスライド装置

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