JP2002158172A5 - - Google Patents

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Publication number
JP2002158172A5
JP2002158172A5 JP2001244163A JP2001244163A JP2002158172A5 JP 2002158172 A5 JP2002158172 A5 JP 2002158172A5 JP 2001244163 A JP2001244163 A JP 2001244163A JP 2001244163 A JP2001244163 A JP 2001244163A JP 2002158172 A5 JP2002158172 A5 JP 2002158172A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001244163A
Other versions
JP2002158172A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001244163A priority Critical patent/JP2002158172A/ja
Priority claimed from JP2001244163A external-priority patent/JP2002158172A/ja
Priority to US09/946,898 priority patent/US6746942B2/en
Publication of JP2002158172A publication Critical patent/JP2002158172A/ja
Priority to US10/828,882 priority patent/US7365358B2/en
Publication of JP2002158172A5 publication Critical patent/JP2002158172A5/ja
Pending legal-status Critical Current

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JP2001244163A 2000-09-05 2001-08-10 半導体薄膜、半導体薄膜の製造方法、及び単結晶半導体薄膜の製造装置、並びに単結晶薄膜の製造方法、単結晶薄膜基板、半導体装置 Pending JP2002158172A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2001244163A JP2002158172A (ja) 2000-09-05 2001-08-10 半導体薄膜、半導体薄膜の製造方法、及び単結晶半導体薄膜の製造装置、並びに単結晶薄膜の製造方法、単結晶薄膜基板、半導体装置
US09/946,898 US6746942B2 (en) 2000-09-05 2001-09-05 Semiconductor thin film and method of fabricating semiconductor thin film, apparatus for fabricating single crystal semiconductor thin film, and method of fabricating single crystal thin film, single crystal thin film substrate, and semiconductor device
US10/828,882 US7365358B2 (en) 2000-09-05 2004-04-21 Semiconductor thin film and method of fabricating semiconductor thin film, apparatus for fabricating single crystal semiconductor thin film, and method of fabricating single crystal thin film, single crystal thin film substrate, and semiconductor device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000-269274 2000-09-05
JP2000269274 2000-09-05
JP2001244163A JP2002158172A (ja) 2000-09-05 2001-08-10 半導体薄膜、半導体薄膜の製造方法、及び単結晶半導体薄膜の製造装置、並びに単結晶薄膜の製造方法、単結晶薄膜基板、半導体装置

Publications (2)

Publication Number Publication Date
JP2002158172A JP2002158172A (ja) 2002-05-31
JP2002158172A5 true JP2002158172A5 (ja) 2006-12-21

Family

ID=26599310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001244163A Pending JP2002158172A (ja) 2000-09-05 2001-08-10 半導体薄膜、半導体薄膜の製造方法、及び単結晶半導体薄膜の製造装置、並びに単結晶薄膜の製造方法、単結晶薄膜基板、半導体装置

Country Status (1)

Country Link
JP (1) JP2002158172A (ja)

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