JP2002156744A5 - - Google Patents

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Publication number
JP2002156744A5
JP2002156744A5 JP2000350606A JP2000350606A JP2002156744A5 JP 2002156744 A5 JP2002156744 A5 JP 2002156744A5 JP 2000350606 A JP2000350606 A JP 2000350606A JP 2000350606 A JP2000350606 A JP 2000350606A JP 2002156744 A5 JP2002156744 A5 JP 2002156744A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000350606A
Other languages
Japanese (ja)
Other versions
JP2002156744A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000350606A priority Critical patent/JP2002156744A/ja
Priority claimed from JP2000350606A external-priority patent/JP2002156744A/ja
Publication of JP2002156744A publication Critical patent/JP2002156744A/ja
Publication of JP2002156744A5 publication Critical patent/JP2002156744A5/ja
Pending legal-status Critical Current

Links

JP2000350606A 2000-11-17 2000-11-17 ペリクル収納容器 Pending JP2002156744A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000350606A JP2002156744A (ja) 2000-11-17 2000-11-17 ペリクル収納容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000350606A JP2002156744A (ja) 2000-11-17 2000-11-17 ペリクル収納容器

Publications (2)

Publication Number Publication Date
JP2002156744A JP2002156744A (ja) 2002-05-31
JP2002156744A5 true JP2002156744A5 (cg-RX-API-DMAC7.html) 2008-03-13

Family

ID=18823803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000350606A Pending JP2002156744A (ja) 2000-11-17 2000-11-17 ペリクル収納容器

Country Status (1)

Country Link
JP (1) JP2002156744A (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4697615B2 (ja) * 2008-01-21 2011-06-08 Ｎｅｃエンジニアリング株式会社 チップ収容トレイ
JP5722760B2 (ja) * 2011-02-08 2015-05-27 信越化学工業株式会社 ペリクル製造用キット
WO2016121635A1 (ja) * 2015-01-26 2016-08-04 株式会社ニコン マスクケース、保管装置及び方法、搬送装置及び方法、並びに露光装置
KR102172722B1 (ko) * 2018-12-26 2020-11-02 주식회사 에프에스티 초극자외선 리소그라피용 펠리클의 검사에 사용되는 캡슐

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2595993B2 (ja) * 1987-10-09 1997-04-02 株式会社ニコン 露光用原板作成装置及び方法
JP3242693B2 (ja) * 1992-05-15 2001-12-25 富士通株式会社 ペリクル貼り付け装置
JPH0683042A (ja) * 1992-09-04 1994-03-25 Nikon Corp フレームの貼着装置
JPH0714428U (ja) * 1993-08-12 1995-03-10 株式会社ヤマザキ電機 ガラス基板類の連続熱処理装置
JP3552178B2 (ja) * 1995-09-27 2004-08-11 大日本スクリーン製造株式会社 基板収納カセット、インターフェイス機構および基板処理装置
JPH09106066A (ja) * 1995-10-09 1997-04-22 Nikon Corp ペリクルライナーの剥離方法
JP3718074B2 (ja) * 1999-03-05 2005-11-16 信越化学工業株式会社 ペリクル収納容器

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