JP2002156087A - Fluid control equipment and manufacturing method therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide economical fluid control equipment and a manufacturing method therefor capable of corresponding to any specification demanded by destination of delivery, eliminating a possibility that useless stock occurs, and suppressing a mold cost low. SOLUTION: End connections 2, 3 made of resin weldable between two resin or between resin and the other resin such as fluororesin are protrudedly provided on the liquid inflow side and the liquid outflow side of a fluid control equipment main body part 1, and each one end of tubes 4, 5 made of resin for constituting a flow passage formed based on the design of the destination of delivery is abutted against and welded to the end connections 2, 3 respectively for delivery.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid control device and a method of manufacturing the same, and more particularly, to a flow meter, a pressure gauge, an air operated valve disposed in a liquid flow path of a chemical solution, a chemical solution, or the like.
The present invention relates to a fluid control device, such as a regulator, having a tube-out shape in which a liquid inlet side and a liquid outlet side project in a tube shape, and a method for manufacturing the same.

[0002]

2. Description of the Related Art For example, in a semiconductor manufacturing apparatus, when connecting a pipe as a fluid piping member to a flow control device such as a flow meter, a pressure gauge, an air operated valve, etc., a semiconductor manufacturing apparatus manufacturer or a device manufacturer is required. Fig. 3
And, as shown in FIG. 4, the tubes 12, 13 and the fluid control device 11 must have various specifications adapted to the joint 14.

[0003] Therefore, in order to conform to the specification of the tube fitting system of each semiconductor manufacturing equipment maker, device maker, etc., various tube fitting type products have to be manufactured in spite of the same performance of the flow meter, the pressure gauge, the air operated valve and the like. Each of them had to be manufactured and stored, and to meet the delivery date. As a result, it has been necessary to secure a large amount of stock.

[0004] As in the above-described device, the main body and the tube portion of a device in which the liquid input side and the liquid discharge side have a tube-out shape,
Generally, it is integrally manufactured by integral molding or cutting of plastic.

In the case of integral molding, the production efficiency is high, but because of the economical cost of the mold, it is not possible to prepare a variety of molds with various tube shapes and lengths. However, it is difficult to cope with a change in the shape and length of the tube portion, and the tube portion must have a certain length. On the other hand, in the case of cutting, there is a problem that the tube length and shape cannot be practically changed due to the restriction on the strength of the cut product, and further, when the material is removed, the material becomes larger. In other words, there is still a problem that the cost is increased.

[0006]

As described above, in the case of a conventional fluid control device, in order to promptly supply a device that conforms to the specifications of the tube joint system of the delivery destination, the performance must be the same in advance. Had to manufacture a large number of various fluid control devices with different tube fitting systems and keep them in stock. However, since various kinds of fluid control devices are not always shipped constantly, wasteful inventory I couldn't help avoiding a lot of goods. Of course, it may be possible to make a build-to-order production in order to reduce the stock amount, but in that case, it becomes difficult to respond to the delivery date.

[0007] Therefore, it is a first object of the present invention to provide a fluid control device which can cope with any specification required by a delivery destination and has no fear of having unnecessary inventory.

In the case where the body portion and the tube portion of the conventional fluid control device having a tube-out shape are integrally formed,
The present invention does not have such a problem that the tube portion cannot be provided with flexibility and versatility due to a mold. Therefore, the present invention does not have such a problem. A second object of the present invention is to provide a method of manufacturing a fluid control device having a tube-out shape, which can provide flexibility and versatility.

[0009]

According to a first aspect of the present invention, there is provided a fluid control device comprising a resin connection port which can be welded to the same or different resin at a liquid inlet side and a liquid outlet side. And one end of a resin tube for flow path formation formed based on the design of the delivery destination is butt-welded to the connection port and delivered.

According to a second aspect of the present invention, there is provided a method of manufacturing a fluid control device, wherein a resin main body having connection ports projecting from a liquid inlet side and a liquid discharge side is provided. It is characterized in that a desired resin tube material is butt-welded to the mouth.

[0011]

Embodiments of the present invention will be described with reference to the accompanying drawings. In the fluid control device according to the present invention, first, the connection ports 2 and 3 are integrally formed on the liquid inlet side and the liquid outlet side,
For example, a main body 1 of a fluid control device provided so as to protrude by about 2 cm is prepared. The main body 1 and the connection ports 2 and 3 are made of a resin such as a fluororesin that can be welded to each other or to another resin. The ends of the connection ports 2 and 3 may be simply separated, and need not be particularly processed.

Resin tubes 4 and 5 for forming a flow path are welded to the connection ports 2 and 3, respectively, in abutting condition (see a welding portion 6 in FIG. 2). The tubes 4 and 5 are prepared in various shapes and lengths, and a suitable one is selected based on a flow path design drawing obtained in advance from a delivery destination.
If there is no suitable one, only the tubes 4 and 5 need to be newly manufactured. The welding between the connection ports 2 and 3 and the tubes 4 and 5 is performed using, for example, a welding machine with a far-infrared heater.

[0013] In this way, the tube 4,
5 is delivered in a welded state, it is only necessary to connect the tubes 4 and 5 to the pipes 9 and 10 extending from the apparatus side by the joints 7 and 8 at the delivery destination. The labor for connecting a joint (see the joint 14 in FIG. 3) to the joint 3 can be omitted.

[0014]

The present invention is as described above, and according to the fluid control device and the method of manufacturing the same according to the present invention, it is possible to obtain a desired or desired fluid without connecting a joint to the connection port of the fluid control device main body. Welding tubing as designed at the destination allows the fluid control equipment to have versatility, keeps the mold cost low, and offers a variety of equipment in various forms corresponding to the joint specifications Since there is no need to keep the inventory, there is no risk of having useless inventory, and it is economical and requires less storage space.

Further, since a joint is not used at the connection port of the fluid control device, the cost can be reduced by that amount, and there is no need to pay attention to water leakage at that portion. There is an effect that the labor for connecting and bending can be omitted, and the construction time can be greatly reduced.

[Brief description of the drawings]

FIG. 1 is a diagram showing one embodiment of the present invention.

FIG. 2 is a partial sectional view showing a welded portion between a connection port and a tube.

FIG. 3 is a diagram showing a piping example of a conventional fluid control device.

FIG. 4 is a diagram illustrating various connection examples of a joint in a conventional fluid control device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Main body part 2 Connection port 3 Connection port 4 Tube 5 Tube 6 Welding part 7 Joint 8 Joint 9 Piping 10 Piping

Claims (2)

[Claims] 1. A resin connection port which can be welded to the same or different resin is protrudingly provided on a liquid inlet side and a liquid discharge side, and the connection port is provided for a flow path configuration formed based on a design of a delivery destination. Fluid control equipment characterized in that one end of a resin tube is butt-welded and delivered. 2. A fluid characterized in that a resin main body having connection ports protrudingly provided on a liquid inlet side and a liquid discharge side is provided, and a desired resin tube material is butt-welded to the connection ports. Manufacturing method of control equipment.