JP2002156087A - Fluid control equipment and manufacturing method therefor - Google Patents

Fluid control equipment and manufacturing method therefor

Info

Publication number
JP2002156087A
JP2002156087A JP2001269740A JP2001269740A JP2002156087A JP 2002156087 A JP2002156087 A JP 2002156087A JP 2001269740 A JP2001269740 A JP 2001269740A JP 2001269740 A JP2001269740 A JP 2001269740A JP 2002156087 A JP2002156087 A JP 2002156087A
Authority
JP
Japan
Prior art keywords
resin
fluid control
control equipment
manufacturing
welded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001269740A
Other languages
Japanese (ja)
Inventor
Hiroshi Imai
弘 今井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Surpass Industry Co Ltd
Original Assignee
Surpass Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Surpass Industry Co Ltd filed Critical Surpass Industry Co Ltd
Priority to JP2001269740A priority Critical patent/JP2002156087A/en
Publication of JP2002156087A publication Critical patent/JP2002156087A/en
Priority to US10/235,805 priority patent/US20030071457A1/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide economical fluid control equipment and a manufacturing method therefor capable of corresponding to any specification demanded by destination of delivery, eliminating a possibility that useless stock occurs, and suppressing a mold cost low. SOLUTION: End connections 2, 3 made of resin weldable between two resin or between resin and the other resin such as fluororesin are protrudedly provided on the liquid inflow side and the liquid outflow side of a fluid control equipment main body part 1, and each one end of tubes 4, 5 made of resin for constituting a flow passage formed based on the design of the destination of delivery is abutted against and welded to the end connections 2, 3 respectively for delivery.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は流体制御機器及びそ
の製造方法、より詳細には、薬液、化学液等の液体流路
に配置される流量計、圧力計、エアオペレートバルブ、
レギュレータ等の、入液側と出液側がチューブ状に突出
するチューブ出し形状となる流体制御機器及びその製造
方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid control device and a method of manufacturing the same, and more particularly, to a flow meter, a pressure gauge, an air operated valve disposed in a liquid flow path of a chemical solution, a chemical solution, or the like.
The present invention relates to a fluid control device, such as a regulator, having a tube-out shape in which a liquid inlet side and a liquid outlet side project in a tube shape, and a method for manufacturing the same.

【0002】[0002]

【従来の技術】例えば、半導体製造装置においては、流
体配管部材であるチューブと、流体制御機器である流量
計、圧力計、エアオペレイトバルブ等を接続配管するに
当たり、半導体製造装置メーカーやデバイスメーカー等
からチューブ継手方式について指定を受けるため、図3
及び図4に示すように、チューブ12、13と流体制御
機器11をその継手14に合わせた様々な仕様としなけ
ればならない。
2. Description of the Related Art For example, in a semiconductor manufacturing apparatus, when connecting a pipe as a fluid piping member to a flow control device such as a flow meter, a pressure gauge, an air operated valve, etc., a semiconductor manufacturing apparatus manufacturer or a device manufacturer is required. Fig. 3
And, as shown in FIG. 4, the tubes 12, 13 and the fluid control device 11 must have various specifications adapted to the joint 14.

【0003】そのため、同じ性能の流量計、圧力計、エ
アオペレートバルブ等でありながら、各半導体製造装置
メーカー、デバイスメーカー等のチューブ継手方式の指
定に適合させるため、様々なチューブ継手方式の製品を
それぞれ多数製造して保管し、納期に対応する必要があ
った。その結果、大量の在庫品を確保することを余儀な
くされていた。
[0003] Therefore, in order to conform to the specification of the tube fitting system of each semiconductor manufacturing equipment maker, device maker, etc., various tube fitting type products have to be manufactured in spite of the same performance of the flow meter, the pressure gauge, the air operated valve and the like. Each of them had to be manufactured and stored, and to meet the delivery date. As a result, it has been necessary to secure a large amount of stock.

【0004】上記機器のように、入液側と出液側とがチ
ューブ出し形状となる機器の本体部とチューブ部とは、
一般に、プラスチックの一体成形又は切削加工によって
一体的に製造される。
[0004] As in the above-described device, the main body and the tube portion of a device in which the liquid input side and the liquid discharge side have a tube-out shape,
Generally, it is integrally manufactured by integral molding or cutting of plastic.

【0005】一体成形の場合は、製造効率はよいが、金
型代が高価となるという経済上の理由から、チューブ部
の形状、長さが多種多様の金型を用意することができな
いために、チューブ部の形状変更、長さ変更に事実上対
応することができず、また、チューブ部もある程度の長
さとしなければならないために、金型が大きくなってコ
スト高につながるという問題がある。一方、切削加工の
場合は、切削加工品の強度上の制約から、チューブ長
さ、形状変更には事実上対応し得ないという問題があ
り、更に、材料取りをする際、材料が大きくなってしま
い、やはりコスト高につながるという問題がある。
In the case of integral molding, the production efficiency is high, but because of the economical cost of the mold, it is not possible to prepare a variety of molds with various tube shapes and lengths. However, it is difficult to cope with a change in the shape and length of the tube portion, and the tube portion must have a certain length. On the other hand, in the case of cutting, there is a problem that the tube length and shape cannot be practically changed due to the restriction on the strength of the cut product, and further, when the material is removed, the material becomes larger. In other words, there is still a problem that the cost is increased.

【0006】[0006]

【発明が解決しようとする課題】上述したように、従来
の流体制御機器の場合、納入先のチューブ継手方式の仕
様に適合したものを迅速に供給するために、予め、性能
は同じであってもチューブ継手方式の異なる各種の流体
制御機器をそれぞれ多数製造し、且つ、在庫しておかな
ければならなかったが、常にコンスタントに各種のもの
が出荷される訳ではないために、無駄となる在庫品が多
く出ることを避けれらなかった。勿論、在庫量を少なく
するために受注生産とすることも考えられるが、その場
合は、納期に対応することが難しくなる。
As described above, in the case of a conventional fluid control device, in order to promptly supply a device that conforms to the specifications of the tube joint system of the delivery destination, the performance must be the same in advance. Had to manufacture a large number of various fluid control devices with different tube fitting systems and keep them in stock. However, since various kinds of fluid control devices are not always shipped constantly, wasteful inventory I couldn't help avoiding a lot of goods. Of course, it may be possible to make a build-to-order production in order to reduce the stock amount, but in that case, it becomes difficult to respond to the delivery date.

【0007】そこで本発明は、納入先の要求する如何な
る仕様にも対応でき、無駄な在庫を抱える虞がない流体
制御機器を提供することを第1の課題とする。
[0007] Therefore, it is a first object of the present invention to provide a fluid control device which can cope with any specification required by a delivery destination and has no fear of having unnecessary inventory.

【0008】また、従来のチューブ出し形状となる流体
制御機器の本体部とチューブ部を一体成形する場合は、
金型の関係でチューブ部に自由性、汎用性を持たせるこ
とができないという問題があったので、本発明はそのよ
うな問題のない、即ち、低コストにて、チューブ部に実
質的に自由性、汎用性を持たせることができる、チュー
ブ出し形状の流体制御機器の製造方法を提供することを
第2の課題とする。
In the case where the body portion and the tube portion of the conventional fluid control device having a tube-out shape are integrally formed,
The present invention does not have such a problem that the tube portion cannot be provided with flexibility and versatility due to a mold. Therefore, the present invention does not have such a problem. A second object of the present invention is to provide a method of manufacturing a fluid control device having a tube-out shape, which can provide flexibility and versatility.

【0009】[0009]

【課題を解決するための手段】上記第1の課題を解決す
るための本発明に係る流体制御機器は、入液側と出液側
に、同種又は異種の樹脂に溶着可能な樹脂製接続口を突
設し、前記接続口に、納入先設計に基いて形成した流路
構成用の樹脂製チューブの一端を突合わせ溶着して納入
されることを特徴とする。
According to a first aspect of the present invention, there is provided a fluid control device comprising a resin connection port which can be welded to the same or different resin at a liquid inlet side and a liquid outlet side. And one end of a resin tube for flow path formation formed based on the design of the delivery destination is butt-welded to the connection port and delivered.

【0010】上記第2の課題を解決するための本発明に
係る流体制御機器の製造方法は、入液側と出液側に接続
口を突設した樹脂製本体部を設けておき、前記接続口に
所望の樹脂製チューブ材を、突合わせ溶着することを特
徴とする。
According to a second aspect of the present invention, there is provided a method of manufacturing a fluid control device, wherein a resin main body having connection ports projecting from a liquid inlet side and a liquid discharge side is provided. It is characterized in that a desired resin tube material is butt-welded to the mouth.

【0011】[0011]

【発明の実施の形態】本発明の実施の形態を添付図面に
ついて説明する。本発明に係る流体制御機器において
は、先ず、入液側と出液側に、接続口2、3を一体に、
例えば2cm程突出させて設けた流体制御機器の本体部
1を用意する。本体部1と接続口2、3は、例えばフッ
素樹脂のような、当該樹脂同士又は他の樹脂との間で溶
着可能な樹脂製とする。接続口2、3の端部は、単なる
切り離し状態であってよく、特に加工を施す必要はな
い。
Embodiments of the present invention will be described with reference to the accompanying drawings. In the fluid control device according to the present invention, first, the connection ports 2 and 3 are integrally formed on the liquid inlet side and the liquid outlet side,
For example, a main body 1 of a fluid control device provided so as to protrude by about 2 cm is prepared. The main body 1 and the connection ports 2 and 3 are made of a resin such as a fluororesin that can be welded to each other or to another resin. The ends of the connection ports 2 and 3 may be simply separated, and need not be particularly processed.

【0012】接続口2、3には、それぞれ流路構成用の
樹脂製チューブ4、5が突き合わせ状態に溶着される
(図2における溶着部6参照)。チューブ4、5は、種
々の形状、長さのものを用意しておき、予め納入先から
入手した流路設計図に基き、適合するものを選択する。
適合するものがない場合は、チューブ4、5のみ新たに
製造すればよい。接続口2、3とチューブ4、5との溶
着は、例えば、遠赤外線ヒーターによる溶着機を用いて
行なう。
Resin tubes 4 and 5 for forming a flow path are welded to the connection ports 2 and 3, respectively, in abutting condition (see a welding portion 6 in FIG. 2). The tubes 4 and 5 are prepared in various shapes and lengths, and a suitable one is selected based on a flow path design drawing obtained in advance from a delivery destination.
If there is no suitable one, only the tubes 4 and 5 need to be newly manufactured. The welding between the connection ports 2 and 3 and the tubes 4 and 5 is performed using, for example, a welding machine with a far-infrared heater.

【0013】納入先へは、このようにしてチューブ4、
5が溶着された状態で納入されるため、納入先では、チ
ューブ4、5を継手7、8により、装置側から延びる配
管9、10に接続するだけでよく、本体部1の接続口
2、3に継手(図3における継手14参照)を接続する
手間が省ける。
[0013] In this way, the tube 4,
5 is delivered in a welded state, it is only necessary to connect the tubes 4 and 5 to the pipes 9 and 10 extending from the apparatus side by the joints 7 and 8 at the delivery destination. The labor for connecting a joint (see the joint 14 in FIG. 3) to the joint 3 can be omitted.

【0014】[0014]

【発明の効果】本発明は上述した通りであって、本発明
に係る流体制御機器及びその製造方法によれば、流体制
御機器本体部の接続口に継手を接続することなく、所望
の、ないし、納入先設計通りのチューブを溶着するた
め、流体制御機器に汎用性を持たせることができると共
に、金型代を低く抑えることができ、継手の仕様に対応
する種々の形態の機器を多数用意しておく必要がないた
め、無駄な在庫を抱える虞がなく、経済的であり、保管
スペースも少なくて済む。
The present invention is as described above, and according to the fluid control device and the method of manufacturing the same according to the present invention, it is possible to obtain a desired or desired fluid without connecting a joint to the connection port of the fluid control device main body. Welding tubing as designed at the destination allows the fluid control equipment to have versatility, keeps the mold cost low, and offers a variety of equipment in various forms corresponding to the joint specifications Since there is no need to keep the inventory, there is no risk of having useless inventory, and it is economical and requires less storage space.

【0015】また、流体制御機器の接続口に継手を用い
ないため、その分のコストダウンが図れると共に、その
部分における漏水に気を配る必要がなく、更に、納入先
において流体制御機器にチューブを接続したり曲げ加工
したりする手間が省け、施工時間を大幅に短縮し得る効
果がある。
Further, since a joint is not used at the connection port of the fluid control device, the cost can be reduced by that amount, and there is no need to pay attention to water leakage at that portion. There is an effect that the labor for connecting and bending can be omitted, and the construction time can be greatly reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施形態を示す図である。FIG. 1 is a diagram showing one embodiment of the present invention.

【図2】接続口とチューブの溶着部を示す部分断面図で
ある。
FIG. 2 is a partial sectional view showing a welded portion between a connection port and a tube.

【図3】従来の流体制御機器の配管例を示す図である。FIG. 3 is a diagram showing a piping example of a conventional fluid control device.

【図4】従来の流体制御機器における種々の継手接続例
を示す図である。
FIG. 4 is a diagram illustrating various connection examples of a joint in a conventional fluid control device.

【符号の説明】[Explanation of symbols]

1 本体部 2 接続口 3 接続口 4 チューブ 5 チューブ 6 溶着部 7 継手 8 継手 9 配管 10 配管 DESCRIPTION OF SYMBOLS 1 Main body part 2 Connection port 3 Connection port 4 Tube 5 Tube 6 Welding part 7 Joint 8 Joint 9 Piping 10 Piping

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 入液側と出液側に、同種又は異種の樹脂
に溶着可能な樹脂製接続口を突設し、前記接続口に、納
入先設計に基いて形成した流路構成用の樹脂製チューブ
の一端を突合わせ溶着して納入されることを特徴とする
流体制御機器。
1. A resin connection port which can be welded to the same or different resin is protrudingly provided on a liquid inlet side and a liquid discharge side, and the connection port is provided for a flow path configuration formed based on a design of a delivery destination. Fluid control equipment characterized in that one end of a resin tube is butt-welded and delivered.
【請求項2】 入液側と出液側に接続口を突設した樹脂
製本体部を設けておき、前記接続口に所望の樹脂製チュ
ーブ材を、突合わせ溶着することを特徴とする流体制御
機器の製造方法。
2. A fluid characterized in that a resin main body having connection ports protrudingly provided on a liquid inlet side and a liquid discharge side is provided, and a desired resin tube material is butt-welded to the connection ports. Manufacturing method of control equipment.
JP2001269740A 2000-09-06 2001-09-06 Fluid control equipment and manufacturing method therefor Pending JP2002156087A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2001269740A JP2002156087A (en) 2000-09-06 2001-09-06 Fluid control equipment and manufacturing method therefor
US10/235,805 US20030071457A1 (en) 2001-09-06 2002-09-06 Fluid control apparatus and its manufacturing method

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000269652 2000-09-06
JP2000-269652 2000-09-06
JP2001269740A JP2002156087A (en) 2000-09-06 2001-09-06 Fluid control equipment and manufacturing method therefor

Publications (1)

Publication Number Publication Date
JP2002156087A true JP2002156087A (en) 2002-05-31

Family

ID=26599327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001269740A Pending JP2002156087A (en) 2000-09-06 2001-09-06 Fluid control equipment and manufacturing method therefor

Country Status (1)

Country Link
JP (1) JP2002156087A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006266397A (en) * 2005-03-24 2006-10-05 Yasuo Shiraishi Pipe component
WO2017191712A1 (en) * 2016-05-06 2017-11-09 栗田工業株式会社 Member and method for reinforcing bonded section of fluorocarbon resin pipe

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006266397A (en) * 2005-03-24 2006-10-05 Yasuo Shiraishi Pipe component
WO2017191712A1 (en) * 2016-05-06 2017-11-09 栗田工業株式会社 Member and method for reinforcing bonded section of fluorocarbon resin pipe
CN109073128A (en) * 2016-05-06 2018-12-21 栗田工业株式会社 Fluorine carbon system resin prepares the strengthening part at the joint portion of pipe and reinforces method

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