JP2002153729A5 - - Google Patents
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- Publication number
- JP2002153729A5 JP2002153729A5 JP2000350855A JP2000350855A JP2002153729A5 JP 2002153729 A5 JP2002153729 A5 JP 2002153729A5 JP 2000350855 A JP2000350855 A JP 2000350855A JP 2000350855 A JP2000350855 A JP 2000350855A JP 2002153729 A5 JP2002153729 A5 JP 2002153729A5
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- JP
- Japan
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000350855A JP4558176B2 (en) | 2000-11-17 | 2000-11-17 | Halogen-containing gas processing method and processing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000350855A JP4558176B2 (en) | 2000-11-17 | 2000-11-17 | Halogen-containing gas processing method and processing apparatus |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2002153729A JP2002153729A (en) | 2002-05-28 |
JP2002153729A5 true JP2002153729A5 (en) | 2007-01-11 |
JP4558176B2 JP4558176B2 (en) | 2010-10-06 |
Family
ID=18824011
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000350855A Expired - Fee Related JP4558176B2 (en) | 2000-11-17 | 2000-11-17 | Halogen-containing gas processing method and processing apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4558176B2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1716912A4 (en) * | 2004-01-29 | 2008-02-06 | Taiyo Nippon Sanso Corp | Method and apparatus for treating exhaust gas |
GB0416385D0 (en) * | 2004-07-22 | 2004-08-25 | Boc Group Plc | Gas abatement |
JP2007021290A (en) * | 2005-07-12 | 2007-02-01 | Taiyo Nippon Sanso Corp | Method and apparatus for treating exhaust gas |
JP2012213720A (en) * | 2011-03-31 | 2012-11-08 | Azbil Corp | Gas treatment device |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63291624A (en) * | 1987-05-23 | 1988-11-29 | Showa Denko Kk | Treatment of exhaust gas in dry etching of gallium-arsenide wafer |
JPH09206555A (en) * | 1996-01-31 | 1997-08-12 | Takuma Co Ltd | Treatment of organohalogen compound and device therefor |
JPH11156156A (en) * | 1997-11-27 | 1999-06-15 | Seiko Epson Corp | Method and apparatus for treatment of halogen-based gas, reaction treater and semi-conductor device |
JP2000009037A (en) * | 1998-06-18 | 2000-01-11 | Fujitsu Ltd | Exhaust device and exhaust method |
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2000
- 2000-11-17 JP JP2000350855A patent/JP4558176B2/en not_active Expired - Fee Related