JP2002148777A5 - - Google Patents

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Publication number
JP2002148777A5
JP2002148777A5 JP2000344647A JP2000344647A JP2002148777A5 JP 2002148777 A5 JP2002148777 A5 JP 2002148777A5 JP 2000344647 A JP2000344647 A JP 2000344647A JP 2000344647 A JP2000344647 A JP 2000344647A JP 2002148777 A5 JP2002148777 A5 JP 2002148777A5
Authority
JP
Japan
Prior art keywords
flat plate
manifold
forming
slot die
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000344647A
Other languages
Japanese (ja)
Other versions
JP4092069B2 (en
JP2002148777A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2000344647A priority Critical patent/JP4092069B2/en
Priority claimed from JP2000344647A external-priority patent/JP4092069B2/en
Priority to US09/738,980 priority patent/US6478483B2/en
Priority to DE10063216A priority patent/DE10063216B8/en
Publication of JP2002148777A publication Critical patent/JP2002148777A/en
Publication of JP2002148777A5 publication Critical patent/JP2002148777A5/ja
Application granted granted Critical
Publication of JP4092069B2 publication Critical patent/JP4092069B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Claims (1)

少なくともスリットとマニホールドからなるスロットダイであって、前記マニホールドを形成するための溝が切り抜かれた１枚の平板Ａと、該平板Ａを両側から挟み込んで固定する２枚の平板Ｂ及びＣとを有し、前記平板Ａと前記平板ＢまたはＣのどちらか一方との間に、前記スリットを形成するためのフィルムＦを介在したことを特徴とするスロットダイ。  A slot die composed of at least a slit and a manifold, and includes one flat plate A from which grooves for forming the manifold are cut out, and two flat plates B and C that sandwich and fix the flat plate A from both sides. And a slot die having a film F for forming the slit interposed between the flat plate A and either the flat plate B or C.
JP2000344647A 1999-12-20 2000-11-13 Photosensitive material processing apparatus using a slot die Expired - Fee Related JP4092069B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2000344647A JP4092069B2 (en) 2000-11-13 2000-11-13 Photosensitive material processing apparatus using a slot die
US09/738,980 US6478483B2 (en) 1999-12-20 2000-12-19 Apparatus for processing photosensitive material
DE10063216A DE10063216B8 (en) 1999-12-20 2000-12-19 Apparatus for processing photosensitive material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000344647A JP4092069B2 (en) 2000-11-13 2000-11-13 Photosensitive material processing apparatus using a slot die

Publications (3)

Publication Number Publication Date
JP2002148777A JP2002148777A (en) 2002-05-22
JP2002148777A5 true JP2002148777A5 (en) 2005-05-12
JP4092069B2 JP4092069B2 (en) 2008-05-28

Family

ID=18818811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000344647A Expired - Fee Related JP4092069B2 (en) 1999-12-20 2000-11-13 Photosensitive material processing apparatus using a slot die

Country Status (1)

Country Link
JP (1) JP4092069B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8752501B2 (en) * 2010-07-29 2014-06-17 Corning Incorporated Systems and methods for dispensing a fluid
CN103801466B (en) * 2012-11-15 2015-11-18 沈阳芯源微电子设备有限公司 The wet processing process nozzle of the uniform flow of a kind of low impulsive force

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