JP2002148132A - Micro pressure detection element, device using it, and health monitoring system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a small, light-weight and highly sensitive micro pressure detection element. SOLUTION: A tunnel magnetoresistance effect element (TMR element) 2 formed by arranging a magnetostrictive part 6 in a part of a magnetic member and using a thin-film technology and the like is provided in a sensor part 7, and through a change and the like of a reluctivity based on magnetostriction of the magnetostrictive part 6, a pressure change in a detection object is detected. In this way, the highly sensitive micro pressure-detection element 1 can be realized while reducing its size and weight.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro pressure detecting element, an information input device using the element, a device such as a blood flow measuring device, and a health monitoring system.

[0002]

2. Description of the Related Art In general, there are a sphygmomanometer, a heart rate monitor, a pulse monitor, a pulse monitor, and the like as a health diagnostic device, particularly a blood flow measuring device or device. For example, as the pulse wave meter, there is a piezoelectric pulse wave meter in addition to the photoelectric pulse wave meter. In the case of the piezoelectric type, a pressure pulse wave is measured by a piezoelectric element, and a pulse wave signal is read non-invasively by pressing a piezoelectric sensor onto an artery. At this time, the piezoelectric sensor functions as a minute pressure sensor (a minute pressure detecting element). As such a minute pressure sensor, there is a sensor using a magnetostrictive element or a sensor using an electrostrictive element. The same applies to a sphygmomanometer, a heart rate monitor, a pulse meter and the like.

With respect to these blood flow measuring instruments, home-use or portable use forms are becoming widespread.
Application to a health monitoring system in combination with a communication system such as a PS system or a mobile phone has also been attempted (for example, JP-A-10-40483, JP-A-5-252).
284, JP-A-6-14128, etc.).

[0004]

However, such a conventional minute pressure sensor is not yet sufficient in terms of size and weight and sensitivity, and there is much room for improvement.

Accordingly, an object of the present invention is to provide a small-sized, light-weight, high-sensitivity micro-pressure detecting element.

Another object of the present invention is to provide an apparatus and a health monitoring system using the micro pressure detecting element which can be improved in function by using the micro pressure detecting element.

[0007]

According to a first aspect of the present invention, there is provided a minute pressure detecting element having a magnetostrictive portion in a part of a magnetic member, a giant magnetoresistive element, a tunnel magnetoresistive element, or a magnetic element. An impedance element is provided in a sensor unit for detecting a change in pressure of the detection target.

Accordingly, a magnetoresistive element (MR element), a giant magnetoresistive element (GMR element), a tunnel magnetoresistive element (TMR element) or a magneto-impedance element (MI element) manufactured using a thin film technique or the like. Is provided in the sensor section, and the pressure change of the detection target is detected through a change in the magnetoresistance based on the magnetostriction of the magnetostriction section, so that a small and light weight can be achieved and a highly sensitive sensor can be provided. .

According to a second aspect of the present invention, there is provided a micro pressure detecting element including an electromagnetic induction coil having a magnetostrictive portion in a part of a magnetic member in a sensor portion for detecting a change in pressure of a detection target.

[0010] Therefore, the electromagnetic induction coil is provided in the sensor section and the pressure change of the object to be detected is detected through the change of the voltage generated by the electromagnetic induction based on the magnetostriction of the magnetostrictive section, so that the size and weight can be reduced. In addition, a highly sensitive sensor can be provided.

According to a third aspect of the present invention, in the micro pressure detecting element according to the first aspect, only the magnetostrictive portions are arranged in parallel, and the sensor portion has a plurality of detection points.

Therefore, in realizing the first aspect of the present invention, it is possible to easily form an array and to expand the use of the array.

According to a fourth aspect of the present invention, in the micro pressure detecting element according to the first aspect, the magnetostrictive portion is formed as one common electrode, and the other magnetic element forming a pair with the magnetostrictive portion is formed. A plurality of detection points are provided in the sensor section by arranging a plurality of detection points in parallel so as to intersect with the common electrode.

Therefore, in realizing the first aspect of the present invention, it is possible to easily form an array and expand the use of the array.

According to a fifth aspect of the present invention, in the micro pressure detecting element according to the first aspect, the magnetostrictive portion is formed in parallel as a plurality of common electrodes, and the other magnetic pair forming a pair with the magnetostrictive portion. A semiconductor switch element for arranging a plurality of elements in parallel so as to intersect with the common electrode, providing the sensor unit with a plurality of detection points in a matrix, and switching the detection operation to each of the matrix-shaped detection points. Having.

Accordingly, in realizing the first aspect of the present invention, a two-dimensional array, that is, a dot matrix can be easily achieved, and the usage can be expanded.

According to a sixth aspect of the present invention, there is provided an information input device comprising the minute pressure detecting element according to any one of the first to fifth aspects, wherein a detection point pressed by a finger is associated with a button key. An input operation on the button key is detected based on a pressure change due to magnetostriction in a sensor section of the minute pressure detecting element.

Therefore, the minute pressure detecting element according to any one of claims 1 to 5 can be effectively applied to an information input device using a button key.

According to a seventh aspect of the present invention, there is provided an information input device comprising the minute pressure detecting element according to the fifth aspect, wherein a detection point pressed by a finger is associated with a pointer display coordinate of a display device. An input operation on the pointer display coordinates is detected based on a pressure change due to magnetostriction in the sensor section of the pressure detecting element.

Therefore, the minute pressure detecting element according to any one of claims 1 to 5 can be effectively applied to an information input device for inputting pointer display coordinates of a display device.

The blood flow system measuring device according to the invention of claim 8 is
A blood pressure system including a blood pressure, a pulse wave, a heartbeat or a pulse based on a pressure change of a pulse wave due to magnetostriction in a sensor unit of the minute pressure detection element, the blood pressure system including the minute pressure detection element according to any one of claims 1 to 5. Detect items.

In the present invention, "blood pressure" refers to the pressure in a blood vessel exerted on a blood vessel wall when blood pumped by expansion and contraction of the heart circulates in the blood vessel. "Pulse wave" refers to the fluctuation of pressure in a blood vessel that occurs when blood is pushed into the aorta due to contraction of the heart and propagates in the peripheral direction. Becomes a pressure pulse wave. "Heartbeat" is a heartbeat accompanied by muscle contraction of the heart, and the heart rate represents the speed of muscle contraction. "Pulse" refers to a heartbeat that periodically occurs when a muscle contraction movement of the heart is transmitted to an artery by blood sent into a blood vessel. Any of these blood flow measurement items involves a pressure change.

Therefore, the minute pressure detecting element according to any one of claims 1 to 5 can be effectively applied to a blood flow system measuring device for detecting a blood flow system measurement item such as blood pressure, pulse wave, heartbeat or pulse. .

According to a ninth aspect of the present invention, there is provided a health diagnosis terminal device according to the eighth aspect, a position information detecting means for detecting current position information, and the blood flow system measuring device. Associating a blood flow system measurement item information and the current position information detected by the position information detection means with a control device, and associating the blood flow system measurement item information with the control device with the current position information And storage means for storing the data in a memory.

Therefore, the blood flow system measuring device according to claim 8 which has the light-weight, small-sized, high-sensitivity minute pressure detecting element according to any one of claims 1 to 5 is provided together with the position information detecting means. Therefore, it is possible to provide a health examination terminal device that associates information of a blood flow system measurement item with current position information and manages the information in a memory at an arbitrary place.

According to a tenth aspect of the present invention, there is provided a health monitoring system according to the ninth aspect, wherein information on blood flow system measurement items and current position information stored in the memory of the health diagnosis terminal are provided. Receiving the input of the information on the blood flow system measurement item and the current position information transmitted from the wireless communication device, and the blood flow system measurement item and the current position of the health examination terminal device owner. And a host computer that monitors

Accordingly, since the health examination terminal device according to the ninth aspect is provided, the host computer is provided with a center function that enables the health status of the owner of the health examination terminal device to be grasped. It is possible to provide a health monitoring system that can constantly monitor the health status of a person together with its location, and can appropriately take emergency measures such as appropriately reporting an emergency such as the occurrence of an emergency.

[0028]

FIG. 1 shows a first embodiment of the present invention.
A description will be given based on FIG. The micro pressure detecting element 1 based on magnetostriction according to the present embodiment uses a TMR element (tunnel magnetoresistive element) 2 in a sensor section, and is basically formed on an insulating substrate 3 as shown in FIG. The first layer 4 is laminated by a predetermined pattern with a second layer 5 made of an insulating film and a third layer 6, and the third layer 6 is formed via the second layer 5 from the first layer 4. The sensor unit 7 includes a TMR element 2 having a structure in which a tunnel current flows through the layer 6. Here, the third layer 6 functions as a magnetostrictive portion and an electrode, and the first layer 4 functions as the other magnetic element and an electrode forming a pair with the magnetostrictive portion.

The TMR element is formed by a phenomenon found in recent years, that is, by a junction structure of a ferromagnetic material, an insulating film and a ferromagnetic material, and a tunnel is formed depending on a relative angle of magnetization of both ferromagnetic materials. It utilizes a phenomenon called a ferromagnetic tunnel effect in which an effect appears.
As described in Japanese Unexamined Patent Application Publication No. 10-255231 and S.I. Makesawa and V. Gafvert et al., In IEEE Trans. Magn., MAG-18, 707 (1982), theoretically and experimentally demonstrated that a tunnel effect appears depending on the relative angle of magnetization of both magnetic layers in a magnetic / insulator / magnetic coupling. Is shown.

The detailed configuration of such a TMR element 2 will be described including its manufacturing method. First, as shown in FIG. 1, an Fe20-Ni80 film having a general non-magnetostrictive composition is formed as a first layer 4 on an insulating substrate 3 made of quartz, glass or the like to a thickness of 0.1 μm by a sputtering method. . Fe2
The 0-Ni80 film itself is a magnetoresistive element film and functions as the other magnetic element. However, as the first layer 4, if it is a conductive magnetic member having a high spin polarization, Fe20-Ni is used.
80 film, Ni-Fe film, CuMo permalloy film, C
An oZrNb amorphous film or the like may be used. Magnetic properties such as coercive force may be selected according to the target magnetic field strength. Further, the Fe20-Ni80 film can also be manufactured by a plating method. Further, the thickness of the first layer 4 was set to 0.1 μm, but depending on sensitivity and other necessary conditions,
The thickness may be appropriately set.

Next, a general photolithography technique used in a semiconductor manufacturing process and RIE using CF ₄ + H ₂
By a method (reactive ion etching method), the first layer 4 is patterned as shown in FIG. Here, the first layer 4 was formed in a linear shape so as to function as one electrode of the TMR element 2 and had a pattern shape of 10 μm in width × 1 mm in length, which was a size capable of functioning as a magnetoresistive effect element. However, the dimensions and the shape of the first layer 4 may be appropriately changed according to the purpose. Further, the etching treatment may be a wet etching method, and in this case, aqua regia may be used as an etching solution.

Subsequently, as shown in FIG. 3, an Al ₂ O ₃ film is formed on the first layer 4 as an insulating film of the second layer 5 by a sputtering method. For this film formation, an EB method (electron beam method), a CVD method (chemical vapor deposition method), or the like may be used. Then, as in the case of the first layer 4, a general photolithography technique and RI using CF ₄ + H ₂ are used.
The second layer 5 is patterned by the E method. As the insulating material of the second layer 5, other insulating materials such as SiO ₂ can function, but an Al ₂ O ₃ film is excellent in characteristics. After the Al film is formed, a method of performing plasma oxidation in the air or in a vacuum may be used. The etching of the second layer 5 which is an insulating layer may be wet etching, but when the substrate 3 is also etched, it is necessary to protect the back surface of the substrate 3 with a resist or the like.

The substrate 3 may be an insulating substrate other than quartz or a flexible insulating substrate using PET (polyethylene terephthalate), polyimide, or the like. Depending on the design rule, a step of forming a film from the beginning using a metal mask may be used instead of the photolithography step.

Thereafter, as shown in FIG. 4, on the second layer 5 which is an insulating layer, an Fe layer having a large magnetostriction constant is formed as a third layer 6.
-A Co50 film is formed by a sputtering method, and is patterned into a pattern orthogonal to the pattern of the first layer 4 by a photolithography method as in the case of the first layer 4. The third layer 6 may have a structure in which a member having a large magnetostriction constant is provided on a part thereof, not on the entire surface, or may be another high magnetostriction thin film.

T in such a minute pressure detecting element 1
FIG. 5 shows a configuration example of a detection circuit for the MR element 2. A DC power supply 8 is connected between one end of the first layer 4 and one end of the third layer 6 each functioning as an electrode, and the other end of the first layer 4 and the third layer 6 are connected.
A microammeter 9 is connected to the other end of the micrometer so that a change in current when a DC tunnel current flows from the first layer 4 to the third layer 6 via the second layer 5 can be measured. 9 is a configuration for detection. In this detection operation, a uniform external magnetic field is applied to the TMR element 2. Here, the TM
The R element 2 is provided in the sensor section 7 of the micro pressure detection element 1, and when the third layer 6 functioning as a magnetostrictive section senses an external pressure applied from the detection target and changes its magnetism (magnetostriction change), With the change, the rate of change (MR rate) of the magnetoresistance as the TMR element 2 also changes, so that a change in minute pressure due to magnetostriction can be detected with high sensitivity.

Therefore, according to the micro pressure detecting element 1 of the present embodiment, the TM having the third layer 6 serving as a magnetostrictive part in a part thereof
Since the sensor element 7 is configured by using the R element 2, it is possible to reduce the size and weight of the sensor and to detect a small change in pressure due to magnetostriction with high sensitivity. Therefore, when it is applied to an information input device, a blood flow system measurement device, and the like, which will be described later, it is extremely effective.

In the present embodiment, the sensor section 7 has T
Although the configuration includes the MR element 2, the present invention is not limited to the TMR element 2, but an element having a magnetostrictive portion in a part of a magnetic member, specifically, a magnetoresistive element (MR element), a giant magnetoresistive element (GMR element). Element) or magneto-impedance element (MI element)
And the same effect can be obtained. Further, a configuration may be adopted in which an electromagnetic induction coil having a magnetostrictive part in a part of the magnetic member is provided in the sensor unit. In this case, a change in the pressure of the detection target is detected through a change in a voltage generated by electromagnetic induction based on the magnetostriction of the magnetostrictive portion.

FIGS. 6 and 7 show a second embodiment of the present invention.
It will be described based on. The same parts as those described in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.
(The same applies to each of the following embodiments.)

In the micro pressure detecting element 11 of the present embodiment, the third layer 6 functioning as a magnetostrictive portion is replaced with the third layers 6a to 6f.
By arranging them in parallel while dividing them into a plurality (for example, six) as shown by, the detection points 12a to 1a at the intersections of the sensor unit 7 with the lower first layer 4, for example, at six places
This is an array configuration having 2f. As a result, TMR between each third layer 6a to 6f and the first layer 4 is performed.
This constitutes an element.

As a manufacturing method, after forming the first layer 4 and the second layer 5 in the same manner as in the first embodiment, an Fe-Co50 film having a large magnetostriction constant is sputtered in the same manner as described above. It is formed by forming a third layer 6a to 6f functioning as a magnetostrictive portion by a patterning process of forming a film by a photolithography method and dividing the film into a plurality of pieces by a photolithography method.

As an example of a detection circuit configuration for the minute pressure detecting element 11 in this case, as shown in FIG. 7, a minute current is applied to each of the third layers 6a to 6f, which also function as electrodes, via the switching circuit 13. 9 in total,
Due to the switching operation of the switching circuit 13, the magnetic change due to the sensing of the pressure of the magnetostrictive portion by the third layers 6a to 6f is individually performed for each of the detection points 12a to 12f.
It is reliably and highly sensitively detected as a change in the R rate.

Therefore, according to the minute pressure detecting element 11 of this embodiment, since the detection points 12a to 12f are arranged in an array as a plurality of points, the same effect as in the first embodiment can be obtained. In addition to being obtained, the usage can be expanded as appropriate, which makes it more practical.

FIGS. 8 and 9 show a third embodiment of the present invention.
It will be described based on. The minute pressure detecting element 21 of the present embodiment is, in short, the case of the minute pressure detecting element 11 and T
The pattern configuration of the MR element is reversed. That is, the third layer 6 located on the surface side and functioning as a magnetostrictive part is formed as one common electrode, and the first layer 4 located on the lower layer side and functioning as the other magnetic element and electrode is formed as the first layer. The layers 4 a to 4 g are formed as patterns arranged in parallel so as to cross the third layer 6. Thus, the sensor section 7 has an array configuration in which the lower first layers 4a to 4g and the surface third layer 6 intersect, for example, seven detection points 22a to 22g.
As a result, a TMR element is formed between each of the first layers 4a to 4g and the third layer 6 as the surface layer.

As a manufacturing method, as in the case of the first embodiment, an Fe20-Ni80 film is formed on the substrate 3 and then patterned by photolithography to form the first layers 4a to 4g. Then, as before,
It is manufactured by forming and patterning the second layer 5 and the third layer 6.

As an example of a detection circuit configuration for the minute pressure detection element 21 in this case, as shown in FIG. 9, a minute current is applied to each of the first layers 4a to 4g, which also function as electrodes, via the switching circuit 23. 9 in total,
By the switching operation of the switching circuit 23, a magnetic change due to the pressure sensing in the magnetostrictive portion of the third layer 6 is individually and reliably detected as a change in the MR rate of the individual TMR element for each of the detection points 22a to 22g. .

Therefore, according to the minute pressure detecting element 21 of the present embodiment, since the detecting points 22a to 22g are arranged in an array as a plurality of points, the same effect as in the first embodiment can be obtained. In addition to being obtained, the usage can be expanded as appropriate, which makes it more practical.

A fourth embodiment of the present invention will be described with reference to FIGS. The minute pressure detecting element 31 of the present embodiment has a configuration in which the minute pressure detecting element 11 and the minute pressure detecting element 21 are combined.
That is, the third layer 6 located on the surface side and functioning as a magnetostrictive portion
Are divided and formed in parallel as third layers 6a to 6f, for example, six common electrodes, and the first layer 4 located on the lower layer side and functioning as the other magnetic element is also the first layers 4a to 4g.
Are formed as a matrix pattern arranged in parallel so as to cross each of the third layers 6a to 6f. Thereby, regarding the sensor section 7, the lower first layer 4
parts where a-4g intersect with the third layers 6a-6f of the surface layer,
For example, a two-dimensional array = dot matrix configuration having 42 detection points is provided. As a result, 4
A TMR element is configured for each of the two detection points. Here, a diode switch 3 as a semiconductor switch element is provided below the first layers 4a to 4g for each detection point.
2 is interposed.

As a manufacturing method, Al wiring patterns 33a to 33g are formed on the substrate 3 by a sputtering method and then patterned by a photolithography method. Diode switches 32a to 32g are provided by forming amorphous Si on these Al wiring patterns 33a to 33g. A film may be formed by a general CVD method using silane gas and a general photolithography method. The P layer is doped with boron,
The layer was doped with phosphorus to form a PN junction, thereby forming a diode switch. Of course, a diode may be formed using a ZnO thin film, a SiGe thin film, or the like other than amorphous Si. Further, as in the case of the third embodiment, an Fe20-Ni80 film is formed on the diode switches 32a to 32f, and then patterned by photolithography to form the first layers 4a to 4f. Thereafter, a second layer 5 is formed, and a Fe—Co 50 film having a large magnetostriction constant is formed by a sputtering method, and a plurality of films are formed by a photolithography method, as in the second embodiment. It is manufactured by forming third layers 6a to 6f functioning as magnetostrictive portions by patterning processing for division.

As an example of a detection circuit configuration for the minute pressure detection element 31 in this case, as shown in FIG. 11, each of the Al wiring patterns 33a to 33f (the first layer 4a) is connected to the DC power supply 8 via the switching circuit 34. To 4f) are connected, and each of the third layers 6a to 6f is connected via the switching circuit 35.
Is connected and the diode switch 3 located at each detection point
Any one selected through the switching of 2a to 32f
A voltage can be applied only to a certain detection point (TMR element). On the other hand, with respect to the minute ammeter 9, each of the Al wiring patterns 33 a to 33 a through the switching circuit 36.
33f (the first layers 4a to 4f) are connected, the third layers 6a to 6f are connected via the switching circuit 37, and an arbitrary selected through switching of the diode switches 32a to 32f located at the respective detection points. One detection point (T
Only the current in the MR element can be detected.

Therefore, according to the minute pressure detecting element 31 of this embodiment, the number of detection points is two-dimensional
Since they are arranged in the form of a dot matrix, the same effects as in the first embodiment can be obtained, and further, the usage can be appropriately expanded more than in the second and third embodiments. Can be made more practical. In particular, since it can be used as a two-dimensional sensor array, highly accurate pressure measurement can be performed for each dot-shaped detection point.

A fifth embodiment of the present invention will be described with reference to FIG. Each of the embodiments after this embodiment exemplifies an application example of the minute pressure detecting element as described above.

In the present embodiment, for example, the information input device 4 is used instead of the keyboard by operating the minute pressure detecting element 11 by finger operation.
An example of application to the information terminal 42 used as 1 is shown. In the information terminal 42, the operation surface of the information input device 41 is provided on the surface of the handy type terminal housing in an exposed state, and the display unit 43 of the display device is also provided in an exposed state. Further, a processing device 44 having a microcomputer configuration for receiving a signal input from the information input device 41 and controlling the display of the display unit 43 by the display device is incorporated. Here, the minute pressure detecting element 11 constituting the information input device 41
In the above, stamp button keys 45a to 45f are assigned to correspond to the respective detection points 12a to 12f in the array.

In the information terminal 42, when the user presses any one of the stamp button keys 45a to 45f with a finger, the information is detected as a pressure change due to the magnetostriction in the minute pressure detecting element 11 at the corresponding detection point. Therefore, it can function as the information input device 41 instead of the keyboard. At this time, the processing device 44 compares the signals obtained from the detection points 12a to 12f of the minute pressure detection element 11 with an average pressing operation pattern signal that is set in advance, thereby actually performing the pressing operation. It is possible to detect only the stamping button keys 45a to 45f by a true pressing operation pressed without malfunction, and use the detected signals as input signals. The input information of any of the stamp button keys 45a to 45f for which the input has been determined is displayed on the display unit 43 as key input information.

A sixth embodiment of the present invention will be described with reference to FIG. The present embodiment shows an example of application to an information terminal 52 using, for example, a minute pressure detecting element 31 having detection points in a two-dimensional array = dot matrix as an information input device 51 instead of a pointer operated by a finger. In the information terminal 52, the operation surface of the information input device 51 is provided on the surface of the handy type terminal housing in an exposed state, and the display unit 53 of the display device is also provided in an exposed state. Further, a processing device 54 having a microcomputer structure for receiving a signal input from the information input device 51 and controlling the display of the display unit 53 by the display device is incorporated. Here, the minute pressure detecting element 3 constituting the information input device 51
In 1, the area of the sensor unit 7 where each detection point of the array arrangement exists is set as an input area by a finger pressing operation.

In such an information terminal 52, when the user moves while pressing any part in the input area of the sensor unit 7 with his / her finger, the corresponding detection point is caused by the magnetostriction in the minute pressure detecting element 31 described above. Since it is sequentially detected as a pressure change, it can function as an information input device 52 instead of a pointer. At this time, in the processing device 54, by comparing a signal obtained from each detection point of the minute pressure detection element 31 with a preset average pressing operation pattern signal, whether the pressing operation was actually performed is determined. It is possible to detect only a portion that has been subjected to a true pressing operation that is being pressed without malfunction, and use it as a pointer input signal. The input information of the pressed location determined to be input is displayed on the display unit 53 as pointer input information.

A seventh embodiment of the present invention will be described with reference to FIG. The present embodiment is an example of application to an information terminal 62 in which a micro pressure detecting element 1 is used as a blood flow system measuring device 61 such as a pulse wave meter for detecting a pulse wave of a person to be measured based on a pressing operation with a fingertip. Show. In this information terminal 62, the sensor unit 7 of the blood flow system measurement device 61 is provided on the surface of the handy type terminal housing in an exposed state as a pressing measurement surface, and the display unit 63 of the display device is also exposed. It is provided in. Further, a processing device 64 having a microcomputer configuration for performing arithmetic processing upon receiving a signal from the blood flow measuring device 61 and controlling the display of the display unit 63 by the display device.
Is built-in.

In the information terminal 62, when the user presses the sensor unit 7 with the fingertip for a predetermined time, the pulse wave at the fingertip of the person to be measured accompanies the pressing operation. Is detected as a change in pressure due to magnetostriction in, and the information is taken into the processing device 64. At this time, the processing device 64 compares the signal obtained from the minute pressure detecting element 1 with a preset average pulse wave pressure fluctuation pattern signal to determine the pulse wave of the measurement subject. The calculation is performed, and the result is displayed on the display unit 63 as a measurement result.

In the present embodiment, a pulse wave is used as a blood flow measurement item, but a blood pressure or a pulse may be measured based on a pulse wave as a blood flow measurement item. Further, the heart rate may be measured as a blood flow system measurement item.

An eighth embodiment of the present invention will be described with reference to FIG. In the present embodiment, the processing device 64 in the information terminal 62 is used as a control device, and for example, a GPS (global positioning system) GPS
A location information detecting means 65 using a GPS receiver for receiving a signal to detect current location information and a memory 66 are added to constitute a handy-type health examination terminal device 67 having portability. Position information detecting means 6
Reference numeral 5 is for recognizing the location of the medical examination terminal device 67 based on the reception of the GPS signal, that is, the current position of the measurement target on the earth, as is well known, though the details are omitted. GPS
The present invention is not limited to the use, and may be a position information detecting unit 65 using an azimuth sensor or the like. The processing device 64 includes the information on the blood flow system measurement items measured by the blood flow system measurement device 61 and the position information detecting means 65 as described in the seventh embodiment.
The function also serves as storage means for storing the current position information detected at any time by the memory 66 in association with the current position information at the measurement time.

Thus, the medical examination terminal device 67 can carry the blood flow such as a pulse wave using the blood flow system measurement device 61 at an arbitrary time, place, or periodically while being carried by the person to be measured. The system measurement items will be measured. Then, the position (current position) at the time of the measurement is detected by the position information detecting means 65. These pieces of information are stored in the memory 66. Thereby, the medical examination terminal device 6 can manage the measurement result of the blood flow system measurement item in association with the location at the time of the measurement.
7 can be provided. In particular, when a health monitoring system is configured in combination with a mobile phone or the like as described later, it becomes more effective.

A ninth embodiment of the present invention will be described with reference to FIG. In the present embodiment, a health monitoring system 71 is constructed using the above-described health diagnosis terminal device 67. The health monitoring system 71 according to the present embodiment is a system constructed based on a contract relationship between a business and a subscriber who owns the health examination terminal device 67. Owns the computer 73 and is connected to the wireless communication device 7
4 is connected wirelessly. That is, information communication is performed between the communication unit 75 of the wireless communication device 74 and the communication unit 76 on the monitoring center 72 side. The wireless communication device 74 including the communication unit 75 may be a mobile phone or the like. The host computer 73 is connected to an analysis computer 78 in the analysis center 77.

Therefore, according to such a system configuration, the information (information on the blood flow system measurement items and the current position information) stored in the memory 66 of the health examination terminal device 67 is appropriately transmitted to the monitoring center 72 by the wireless communication device 74. And stored in a memory under the control of the host computer 73, and when an abnormal value or the like is detected, it notifies the health check terminal device 67 of the corresponding subscriber via the communication unit 76 to that effect. Will be reported. At this time, depending on the contract, in addition to the monitoring report, a health management service such as transmitting and outputting a health management advice through the health examination terminal device 67 of the subscriber in addition to the analysis result by the analysis computer 78, or an emergency It is possible to provide a backup service at the time.

[0063]

According to the micro pressure detecting element of the first aspect of the present invention, a magnetoresistive element (MR element) having a magnetostrictive part in a part of a magnetic member and manufactured using a thin film technique or the like, Giant magnetoresistance effect element (GMR element), tunnel magnetoresistance effect element (TMR element) or magnetoimpedance element
(MI element) is provided in the sensor unit, and it is configured to detect the pressure change of the detection target through the change of the magnetic resistivity based on the magnetostriction of the magnetostrictive unit, so that the size and weight can be reduced.
A highly sensitive sensor can be provided.

According to the micro pressure detecting element of the present invention, the electromagnetic induction coil having the magnetostrictive portion in a part of the magnetic member is provided in the sensor portion, and the change of the voltage generated by the electromagnetic induction based on the magnetostriction of the magnetostrictive portion. It is configured to detect the pressure change of the detection target through such as, so that it is possible to reduce the size and weight,
A highly sensitive sensor can be provided.

According to the third aspect of the present invention, in the micro pressure detecting element according to the first aspect, only the plurality of magnetostrictive portions are arranged in parallel, and the sensor portion has a plurality of detection points. Therefore, in realizing the invention of claim 1,
Arraying can be easily achieved, and applications can be expanded.

According to a fourth aspect of the present invention, in the micro pressure detecting element according to the first aspect, the magnetostrictive portion is formed as one common electrode, and the other magnetic pair forming a pair with the magnetostrictive portion. A plurality of elements are arranged in parallel so as to intersect with the common electrode, and a plurality of detection points are provided in the sensor section. It is possible to broaden the usage applications.

According to a fifth aspect of the present invention, in the micro pressure detecting element according to the first aspect, the magnetostrictive portion is formed in parallel as a plurality of common electrodes and the other paired with the magnetostrictive portion. A plurality of magnetic elements are arranged in parallel so as to intersect with the common electrode, a plurality of detection points are provided in a matrix in the sensor section, and the detection operation is switched to each detection point in the matrix. Since the switch element is provided, a two-dimensional array, that is, a matrix can be easily achieved for realizing the first aspect of the present invention, and the usage can be expanded.

According to the information input device of the present invention, the detection point pressed by a finger is associated with a button key. And detecting an input operation on the button key based on a pressure change due to a magnetic strain in a sensor unit of the minute pressure detecting element.
The minute pressure detecting element described in any one of the above items 5 to 5 can be effectively applied to an information input device using a button key.

According to a seventh aspect of the present invention, there is provided the information input device according to the fifth aspect, wherein each of the detection points pressed by the finger is associated with the pointer display coordinates of the display device. 6. The display device according to claim 1, wherein an input operation for the pointer display coordinates is detected based on a pressure change due to magnetostriction in a sensor section of the minute pressure detecting element. The present invention can be effectively applied to an information input device for inputting the pointer display coordinates.

According to an eighth aspect of the present invention, there is provided the blood flow system measuring apparatus, comprising the minute pressure detecting element according to any one of the first to fifth aspects, wherein a pulse caused by magnetostriction in a sensor section of the minute pressure detecting element. Since the blood pressure, pulse wave, heartbeat or blood flow system measurement items such as pulse are detected based on the pressure change of the wave, the micro pressure detection element according to any one of claims 1 to 5, the blood pressure, pulse wave, The present invention can be effectively applied to a blood flow measurement device that detects a blood flow measurement item such as a heartbeat or a pulse.

According to a ninth aspect of the present invention, there is provided a health diagnosis terminal device comprising the lightweight, small, and highly sensitive micro pressure detecting element according to any one of the first to fifth aspects. Since the system measurement device is provided with the position information detecting means and has portability, it is possible to provide a health diagnosis terminal device that associates information of blood flow system measurement items with current position information in an arbitrary place and manages the information in a memory. it can.

According to the health monitoring system of the tenth aspect of the present invention, since the health examination terminal device of the ninth aspect is provided, the center that allows the host computer to grasp the health status of the owner of the health examination terminal device. By providing a function, it is possible to provide a health monitoring system that can constantly monitor the health status of the health examination terminal device owner together with its location, and appropriately take emergency measures such as appropriately reporting an emergency such as the occurrence of an emergency. it can.

[Brief description of the drawings]

FIG. 1 is a vertical sectional front view of a substrate on which a first layer is formed according to a first embodiment of the present invention.

FIGS. 2A and 2B show a pattern shape of a first layer, wherein FIG. 2A is a plan view and FIG.

3A and 3B show a pattern shape of a second layer formed on a first layer, wherein FIG. 3A is a plan view and FIG. 3B is a vertical sectional front view.

4A and 4B show a pattern shape of a third layer formed on a second layer, wherein FIG. 4A is a plan view and FIG. 4B is a vertical sectional front view.

FIG. 5 is a plan view showing a measurement circuit.

FIGS. 6A and 6B show a minute pressure detecting element according to a second embodiment of the present invention, wherein FIG. 6A is a plan view and FIG.

FIG. 7 is a plan view showing a measurement circuit.

8A and 8B show a minute pressure detecting element according to a third embodiment of the present invention, wherein FIG. 8A is a plan view and FIG.

FIG. 9 is a plan view showing a measurement circuit.

FIGS. 10A and 10B show a minute pressure detecting element according to a fourth embodiment of the present invention, wherein FIG. 10A is a plan view and FIG.

FIG. 11 is a plan view showing a measurement circuit.

FIG. 12 is a front view illustrating a terminal device according to a fifth embodiment of the present invention.

FIG. 13 is a front view illustrating a terminal device according to a sixth embodiment of the present invention.

FIG. 14 is a front view illustrating a terminal device according to a seventh embodiment of the present invention.

FIG. 15 is a front view showing a terminal device according to an eighth embodiment of the present invention.

FIG. 16 is a schematic system configuration diagram showing a health monitoring system according to a ninth embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Micro pressure detection element 2 Tunnel magneto effect resistance element 6 Magnetostrictive part 7 Sensor part 11 Micro pressure detection element 12 Detection point 21 Micro pressure detection element 22 Detection point 31 Micro pressure detection element 32 Diode switch 41 Information input device 45 Button key 51 Information Input device 61 Blood flow system measuring device 65 Position information detecting means 66 Memory 67 Health diagnosis terminal device 73 Host computer

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01L 43/08 A61B 5/02 310M // G01S 5/14 340C F term (Reference) 2F055 AA05 BB14 CC60 DD01 EE29 FF11 GG01 GG11 4C017 AA02 AA08 AA09 AA10 AA11 AC05 FF17 5J062 AA08 BB05 CC07

Claims (10)

[Claims] 1. A sensor unit for detecting a change in pressure of a detection target by using a magnetoresistive element having a magnetostrictive portion in a part of a magnetic member, a giant magnetoresistive element, a tunnel magnetoresistive element, or a magnetoimpedance element. Micro pressure sensing element to prepare for. 2. A minute pressure detecting element comprising: an electromagnetic induction coil having a magnetostrictive part in a part of a magnetic member in a sensor unit for detecting a change in pressure of a detection target. 3. The minute pressure detecting element according to claim 1, wherein only a plurality of said magnetostrictive portions are arranged in parallel, and said sensor portion has a plurality of detection points. 4. The magnetostrictive portion is formed as one common electrode, and a plurality of other magnetic elements forming a pair with the magnetostrictive portion are arranged in parallel so as to intersect with the common electrode. 2. The minute pressure detecting element according to claim 1, wherein the sensor has a plurality of detection points. 5. The magnetostrictive section is formed in parallel as a plurality of common electrodes, and a plurality of other magnetic elements forming a pair with the magnetostrictive section are arranged in parallel so as to intersect with the common electrode. 2. The micro pressure detecting element according to claim 1, wherein the sensor section has a plurality of detection points in a matrix, and a semiconductor switch element for switching the detection operation at each of the matrix detection points. 6. The micro pressure detecting element according to claim 1, wherein a detection point pressed by a finger is associated with a button key. An information input device for detecting an input operation on the button key based on a pressure change due to magnetostriction. 7. The micro pressure detecting element according to claim 5, wherein a detection point pressed by a finger is associated with a pointer display coordinate of a display device, wherein the micro pressure detecting element is provided with a magnetic strain. An information input device for detecting an input operation for the pointer display coordinates based on a pressure change. 8. A blood pressure, a pulse wave, a heartbeat or a pulse based on a pressure change of a pulse wave due to magnetostriction in a sensor section of the minute pressure detection element, the pressure sensor comprising the minute pressure detection element according to claim 1. A blood flow system measurement device that detects a blood flow system measurement item. 9. The blood flow system measurement device according to claim 8, position information detection means for detecting current position information, information on a blood flow system measurement item detected by the blood flow system measurement device, and the position information. A control unit to which the current position information detected by the detection unit is input; and a storage unit to store the information of the blood flow system measurement item input to the control device and the current position information in a memory in association with each other. And portable medical examination terminal device. 10. A health examination terminal device according to claim 9, and a wireless communication device for transmitting and outputting information on blood flow system measurement items and current position information stored in said memory of said health examination terminal device. A host computer that receives the information on the blood flow system measurement items and the current position information transmitted from the wireless communication device and monitors the blood flow system measurement items and the current position of the owner of the health examination terminal device. Health monitoring system.