JP2002147810A - Air shower device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the drawback that while dust sticking to the clothes of an operator is blown off in an air shower chamber, the dust falls and is scattered on a floor surface and the falling dust may be possibly stuck to the shoes of the operator and directly brought to a clean room and prevent the dust or the like falling on the floor surface of the air shower chamber from being accumulated. SOLUTION: The air shower device 1 comprises the air shower chamber 2 and cleaned air supply mechanisms 3 and 4 disposed in the side parts of the chamber to suck air in the air shower chamber 2 by the cleaned air supply mechanisms 3 and 4, jet the cleaned air to the air shower chamber 2, and circulate and clean the air in the air shower chamber 2. The cleaned air supply mechanisms 3 and 4 are provided with recessed parts 5 substantially flush with the floor surface of the air shower chamber 2. The cleaned air supply mechanisms 3 and 4 absorb the air in the air shower chamber 2 through the recessed parts.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air shower device which is installed at, for example, an entrance of a clean room and is used for removing dust and the like adhering to clothes when entering the room.

[0002]

2. Description of the Related Art An example of the above air shower device is shown in FIG. In the figure, an air shower device 50 includes an air shower chamber 51 also serving as a passage, and purified air supply mechanisms 52 and 53 provided on both sides thereof. However, the left and right purified air supply mechanisms 52 and 53 have the same structure. Hereinafter, one of the purified air supply mechanisms 52 will be described, and the other purified air supply mechanism 53 will be given the same reference numerals for the same parts. Omitted.

[0003] The purified air supply mechanism 52 includes a suction mechanism 5.
5 and a purification mechanism 56. The suction mechanism 55 is disposed under the air shower chamber 51 so as to face the suction plate 60 and has a plurality of suction holes 61 perforated therein, and a pre-filter 62 disposed directly behind the suction plate 60 or without the suction plate 61. When,
It further comprises a suction fan 64 arranged in a suction chamber 63 formed behind the suction fan.

The purifying mechanism 56 includes a high-performance air filter 65 and an injection nozzle 66 attached to an upper side wall 51a of the air shower chamber 51. An air supply chamber 67 is formed behind the air filter 65. The suction fan 64 is attached to the air supply chamber 67 so as to open. In the figure, reference numeral 70 denotes doors for front and rear access to the air shower room 51.

In the above configuration, the air in the air shower chamber 51 is sucked by the suction fan 64, the coarse dust is removed by the pre-filter 62, transferred to the air supply chamber 67, and purified by the high-performance air filter 65. It is injected from the injection nozzle 66 into the air shower chamber 51. By repeating this, the air in the air shower room is purified, and the dust adhered to the worker by the blast from the blast nozzle 66 is completely removed.

[0006]

The dust and the like adhering to the clothes and the like of the worker entering the air shower room are blown off, but the dust and the like fall on the floor surface and accumulate in the corners and the like. Therefore, the dropped dust or the like may adhere to the shoes or the like of the worker and may be directly brought into the clean room. That is, in the conventional structure, no consideration is given to the removal of dust and the like scattered on the floor surface. In view of the above, an object of the present invention is to eliminate the drawbacks and to prevent accumulation of dust and the like falling on the floor in an air shower room.

[0007]

According to a first aspect of the present invention, there is provided an air shower chamber, and a purified air supply mechanism disposed on a side of the air shower chamber to purify air in the air shower chamber. In an air shower device that sucks in air by an air supply mechanism, injects purified air into an air shower room, and circulates and purifies air in the air shower room, the purified air supply mechanism has a lower portion substantially flush with the floor surface of the air shower room. The purified air supply mechanism sucks the air in the air shower chamber through the recess.

According to the present invention having the above-described structure, the purified air supply mechanism has a recess at the lower portion which is substantially flush with the floor surface of the air shower chamber, and sucks air in the air shower chamber through the recess. By doing so, it is possible to prevent dust in the air shower room from moving to the recessed portion and accumulating on the floor of the air shower room.

According to a second aspect of the present invention, an opening / closing door is provided outside the recess for removing dust accumulated in the recess.

According to the present invention having the above-described structure, since the opening / closing door is provided outside the recess, the dust accumulated in the recess can be easily taken out without contaminating the air in the air shower room. .

In a third aspect of the present invention, the recess is provided with a receiving tray for collecting accumulated dust, and the receiving tray can be inserted and removed from the outside.

According to the present invention having the above structure, the recess is provided with a tray for collecting accumulated dust, and the accumulated dust is removed by removing the tray.
Its discharge is easy.

According to a fourth aspect of the present invention, the depression is provided with an adhesive sheet for collecting dust.

According to the present invention having the above-described structure, dust accumulated in the depression is captured by the adhesive sheet and does not scatter.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the embodiments shown in FIGS. In the figure, an air shower device 1 includes an air shower chamber 2 having a structure similar to that of a well-known structure, and purified air supply mechanisms 3 and 4 provided on both sides thereof.
However, the left and right purified air supply mechanisms 3 and 4 have the same structure. Hereinafter, one of the purified air supply mechanisms 3 will be described, and the other purified air supply mechanism 4 will be assigned the same reference numerals and will not be described. I do.

The purified air supply mechanism 3 has a lower portion formed with a recess 5 having a floor substantially the same as the floor FL of the air shower room 2 (preferably, slightly lower than the floor), and an upper portion thereof. , A suction mechanism 6 and a purification mechanism 7 provided on the suction mechanism 6
And

The suction mechanism 6 comprises a pre-filter 10 extending horizontally above the recess 5 and a suction fan 1 mounted on a suction chamber 11 formed above the pre-filter 10.
It consists of two.

The purifying mechanism 7 includes the high-performance air filter 1.
5 and an injection nozzle 16 attached to the upper side wall 2 a of the air shower chamber 2. An air supply chamber 17 is formed behind the air filter 15, and the suction fan 12 is opened to the air supply chamber 17. I have.

Reference numeral 18 denotes an opening / closing door formed on the outer wall of the recess 5 so that dust accumulated in the recess 5 can be easily taken out. Reference numeral 20 denotes doors for the front and rear of the air shower room 2.

In the above configuration, the air in the air shower chamber 2 is sucked by the suction fan 12 through the recess 5, the coarse dust is removed by the pre-filter 10, and is transferred to the air supply chamber 17. The air is purified by the air shower 15 and injected into the air shower room 2.

As a result, dust remaining in the air shower chamber 2 moves into the recess 5 and accumulates. The accumulated dust is taken out by opening the door 18. Alternatively, the tray 21 shown in FIG. 4 is inserted in the recess 5 in advance, the opening / closing door 18 is opened, and dust accumulated together with the tray is taken out. Alternatively, an adhesive sheet (not shown) may be laid beforehand in the recess 5 in place of the receiving tray 21 to allow intrusion dust to adhere thereto, and the opening / closing door 18 may be opened and taken out. May be laid.

Although the above embodiment has shown the structure in which the purified air supply mechanism is provided on both sides of the air shower chamber, it may be provided only on one side of the air shower chamber.

[0023]

As described above, according to the present invention, a purified air supply mechanism is provided on the side of the air shower chamber, and a recess is provided below the purified air supply mechanism, so that the air in the air shower chamber is removed by the recess. Since the air is sucked by the purified air supply mechanism through the portion, dust remaining in the room in the air shower room moves to the recess without staying in the passage in the room. Therefore, the passage of the air shower room is always kept in a clean state, whereby there is an effect that there is no possibility that the accumulated dust adheres to shoes or the like of the worker in the room. At this time, when providing an open / close door outside the recess,
It is convenient to take out the dust accumulated in the recess without polluting the air in the air shower room. Further, when a receiving tray is previously set in the recess, dust accumulates on the receiving tray. Therefore, it is very convenient for taking out dust.
Furthermore, when the adhesive sheet is laid in advance in the recessed portion, the invading dust is captured by the sheet and does not scatter.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of an air shower device of the present invention.

FIG. 2 is a sectional view taken along line XX in FIG.

FIG. 3 is a left side view in FIG.

FIG. 4 is a perspective view of a receiving tray.

FIG. 5 is a vertical sectional view of a conventional air shower device.

FIG. 6 is a sectional view taken along line YY in FIG. 5;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Air shower apparatus 2 Air shower room 3 Purified air supply mechanism 4 Purified air supply mechanism 5 Recess 18 Opening / closing door 21 Receiving tray

Claims (4)

[Claims] 1. An air shower chamber, and a purified air supply mechanism disposed on a side of the air shower chamber, wherein air in the air shower chamber is sucked by the purified air supply mechanism, and purified air is injected into the air shower chamber. In an air shower device that circulates and purifies air in an air shower room, the purified air supply mechanism has a depression at the lower portion that is substantially flush with the floor surface of the air shower room, and the purified air supply mechanism uses the air inside the air shower room. An air shower device for sucking air through the recess. 2. The air shower device according to claim 1, wherein an opening / closing door is provided outside the depression in the depression to remove accumulated dust. 3. The air shower device according to claim 1, wherein the recess is provided with a receiving tray for collecting accumulated dust, and the receiving tray is removable from the outside. 4. The air shower device according to claim 1, wherein the depression has an adhesive sheet for collecting dust.