JP2002139638A - Optical element and method for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the problem of the difficulty in producing an optical element, such as optical wave guide or diffraction grating in a short period of time and at a low cost, due to a semiconductor process being used in the manufacture thereof. SOLUTION: In manufacturing the optical element, such as optical waveguide or diffraction grating, a resin 14 being a material for the optical element is filled into a groove 12 for the optical waveguide on a substrate 11. The refractive index of the resin 14 is varied periodically, while hardening the resin 14 by irradiating the resin 14 with ultraviolet rays by using a phase mask 15.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical element mainly used in optical communications and the like, having functions such as diffraction, demultiplexing, and filtering, and a method of manufacturing the same.

[0002]

2. Description of the Related Art In recent years, optical communication systems using wavelength-division multiplexing transmission and bidirectional transmission have been added to public communication and computer networks using optical communication having a wide band for the purpose of high speed and high functionality. Is infiltrating.

In the field of optical communication, research on optical integrated circuits having various functions has been actively conducted in order to perform advanced optical signal processing. An optical integrated circuit uses an optical waveguide as a basic element, and the optical waveguide confines light to the core region by covering the core region with a high refractive index with a cladding layer having a relatively low refractive index, and propagates the light in the core region. By patterning and arranging, various functions such as diffraction, demultiplexing, and filtering are realized. In particular, silica-based optical waveguides have low loss,
It has many advantages such as physical and chemical stability and compatibility with optical fibers, and is a typical passive optical waveguide.

A typical method of manufacturing an optical waveguide uses a flame deposition method as a method for forming a core / cladding film and a reactive ion etching method as a method for forming a core pattern. As a method of forming the core / cladding, a CVD method, a vacuum deposition method, a sputtering method, and the like have been proposed in addition to the flame deposition method.

Here, FIG. 11 shows an example of a method of manufacturing an optical element by a conventional flame deposition method.

First, a quartz material 114 serving as a core is deposited on a substrate 111 by a flame deposition method (FIG. 11).
(A)). By using a material having a higher refractive index than the substrate 111, the quartz-based material 114 functions as an optical waveguide. Next, a photoresist 118 is applied on the quartz-based material 114 (FIG. 11B), and after baking, is exposed using a photomask having a desired pattern, and is developed to pattern the photoresist 118 (FIG. 11B). 11
(C)).

Next, the quartz-based material 114 is etched together with the substrate 111 and patterned. At this time, the photoresist 118 functions as a mask, and the quartz-based material 114 remains in a desired pattern (FIG. 11D). Thereafter, the photoresist 118 serving as a mask is removed (FIG. 1).
1 (e)). Similarly, a photoresist is applied to the pattern portion, exposed and developed using a photomask having a periodic pattern, and then etched to form a periodic groove in the pattern portion, thereby forming a desired optical element. Is completed (FIG. 11F).

[0008]

However, such an optical module has the following problems in terms of cost and productivity.

[0009] Despite many proposals,
There is still no method for manufacturing an optical waveguide having both performance, mass productivity, and low cost. This is because various film forming methods have both advantages and disadvantages. For example, a flame deposition method or a CVD method can produce a good core, but the flame deposition method requires a high-temperature annealing at a temperature of 1000 ° C. or more for more than ten hours and several times. There are difficulties. Although low-loss film formation is also possible by electron beam evaporation or sputtering, the film formation speed is slow,
Usually, there is a problem in terms of cost as a manufacturing process of an optical waveguide requiring a film thickness of about 10 to several tens μm.

The present invention has been made in view of the above-mentioned problems of a conventional method for manufacturing an optical element, and has as its object to propose an optical element having performance, mass productivity, and low cost, and a method for manufacturing an optical element. Things.

[0011]

In order to solve the above problems, a first invention (corresponding to claim 1) is to provide a substrate having or not having a groove for an optical waveguide and filling the groove for an optical waveguide with the substrate. Or a material having a higher refractive index than the substrate, wherein the refractive index of the material is substantially periodically changed in the traveling direction of light, or substantially continuous. This is an optical element having a monotonically increasing or monotonically decreasing portion.

A second aspect of the present invention (corresponding to claim 2) is that, in a direction substantially perpendicular to the traveling direction of the light, a portion where the refractive index of the material changes substantially periodically, or substantially. The optical element according to the first aspect of the present invention, in which a portion that continuously increases or decreases monotonously exists.

According to a third aspect of the present invention (corresponding to claim 3), a substrate having or not having a groove for an optical waveguide and a substrate filled in the groove for an optical waveguide or disposed on the substrate are provided. A material having a high refractive index, in a direction substantially orthogonal to the light traveling direction, a portion where the refractive index of the material changes substantially periodically, or substantially continuously monotonically increases or decreases. This is the optical element where the portion exists.

According to a fourth aspect of the present invention (corresponding to claim 4), a substrate having or not having an optical waveguide groove and a substrate filled in the optical waveguide groove or disposed on the substrate are provided. With a high refractive index resin, in the light traveling direction,
And / or an optical element having a portion where the refractive index of the resin is different in a direction substantially orthogonal to the traveling direction of the light.

According to a fifth aspect of the present invention (corresponding to claim 5), the portion of the resin having a different refractive index is formed by utilizing the photocurable or thermosetting properties of the resin. 4 is an optical element according to the present invention.

According to a sixth aspect of the present invention (corresponding to claim 6), a substrate having or not having a groove for an optical waveguide and a substrate filled in the groove for an optical waveguide or disposed on the substrate are provided. With a material having a high refractive index, in the light traveling direction,
And / or an optical element further provided with a temperature control element disposed on the material in a direction substantially orthogonal to a traveling direction of the light and configured to partially change a temperature of the material.

According to a seventh aspect of the present invention (corresponding to claim 7), a substrate having or not having an optical waveguide groove and a substrate filled in the optical waveguide groove or disposed on the substrate are provided. With a material having a high refractive index, in the light traveling direction,
And / or an optical element further provided with an electrode disposed on the material in a direction substantially orthogonal to a traveling direction of the light and for partially changing an electric field of the material.

According to an eighth aspect of the present invention (corresponding to claim 8), a substrate having or not having an optical waveguide groove and a substrate filled in the optical waveguide groove or disposed on the substrate are provided. With a material having a high refractive index, in the light traveling direction,
And / or an optical element having a portion in which the material is convex toward the substrate and / or a portion in which the substrate is convex toward the material in a direction substantially orthogonal to a traveling direction of the light.

A ninth aspect of the present invention (corresponding to claim 9) is the optical element according to the eighth aspect of the present invention, wherein the convex portions are provided substantially periodically.

A tenth aspect of the present invention (corresponding to claim 10) is:
The optical element according to any one of the first, second, third, sixth, seventh, eighth, and ninth aspects of the present invention, wherein the material is a glass-based material or a resin.

The eleventh invention (corresponding to claim 11) provides:
A method of manufacturing an optical element for forming a photo-curable resin on a substrate and irradiating the photo-curable resin with light to cure the photo-curable resin, wherein the irradiation of the light on the photo-curable resin surface is performed. This is a method for manufacturing an optical element that changes the amount.

The twelfth invention (corresponding to claim 12) provides:
The optical element according to the eleventh aspect of the present invention, wherein the irradiation amount of the light is substantially periodically changed in a predetermined direction on the photocurable resin surface, or is monotonically increased or monotonously decreased substantially continuously. It is a manufacturing method.

According to a thirteenth aspect of the present invention (corresponding to claim 13),
An optical element manufacturing method according to an eleventh or twelfth aspect of the present invention, wherein an irradiation amount of the light on the photocurable resin surface is changed by changing an irradiation intensity of light to the photocurable resin. is there.

The fourteenth invention (corresponding to claim 14) provides:
A thirteenth method for changing the irradiation intensity of the light on the photocurable resin surface by using a mask having a partially different light transmittance;
This is a method for producing an optical element according to the present invention.

According to a fifteenth aspect of the present invention (corresponding to claim 15),
An eleventh or twelfth method of manufacturing an optical element according to the present invention, wherein the irradiation amount is changed by sequentially changing the light irradiation area using a light shielding plate.

According to a sixteenth aspect of the present invention (corresponding to claim 16),
A method of manufacturing an optical element for forming a photocurable resin on a substrate, irradiating the photocurable resin with light, and curing the photocurable resin, wherein another optical component is connected to the photocurable resin. And curing the photo-curable resin to fix the optical component to the photo-curable resin.

The seventeenth invention (corresponding to claim 17) provides:
The method for producing an optical element according to any one of the first to seventh aspects of the present invention, wherein the optical waveguide groove of the substrate is formed by:
This is a method for manufacturing an optical element that is formed collectively using a mold material having irregularities on the surface.

The eighteenth invention (corresponding to claim 18) is:
The method for manufacturing an optical element according to the eighth or ninth aspect of the present invention, wherein the unevenness of the substrate of the optical element is collectively formed using a mold having unevenness on the surface. Is the way.

[0029]

Embodiments of the present invention will be described below with reference to the accompanying drawings. Note that the parts denoted by the same reference numerals in the drawings indicate the same parts.

(First Embodiment) FIG. 1 shows an optical element according to a first embodiment of the present invention.

First, as shown in FIG. 1, an optical waveguide groove 12 is formed on the surface of a substrate 11 made of glass or transparent resin by molding using a mold (not shown).

Next, the ultraviolet curable resin 14 is applied to the groove forming surface for the optical waveguide and filled in the groove, and then the ultraviolet curable resin 14 in the groove is cured by irradiating ultraviolet rays. By using a resin having a higher refractive index than that of the substrate 11 as the ultraviolet curable resin 14, the ultraviolet curable resin 14
Functions as an optical waveguide core.

Since the refractive index after curing of the ultraviolet curable resin changes within the range of 0.001 depending on the amount of light to be irradiated, by irradiating the ultraviolet curable resin 14 in the groove with light having a periodic intensity distribution, A periodic refractive index distribution can be formed on the ultraviolet curable resin 14 (FIG. 1A).
A periodic pattern is formed by using a phase mask method as a light irradiation method and utilizing a light interference phenomenon (FIG. 1B).
The ultraviolet curable resin starts its polymerization reaction and is solidified by irradiation with ultraviolet rays, but has a different refractive index because the degree of reaction is different due to the difference in the amount of light irradiated.

By making the distribution of the refractive index periodic, an optical waveguide type diffraction grating can be obtained. As shown in FIG.
UV curable resin 2 in the optical waveguide groove 22 formed on the surface of
When filling and curing 4, the period of the change in the refractive index is 1μ.
When it is less than m, a specific wavelength is reflected in a direction opposite to the light incident direction. The above specific wavelength is determined from the refractive index and the period of change of the refractive index. When the period of the change in the refractive index is changed from several tens of μm to several hundred μm as shown in FIG.
Since light having a specific wavelength is emitted to the outside of the core to cause a loss, it functions as a filter in both cases (a) and (b). In the case of FIG. 2B as well, the specific wavelength is determined from the refractive index and the period of change in the refractive index.

In this embodiment, an ultraviolet curable resin is used as the core material of the optical waveguide. However, the present invention is not limited to this. For example, a thermosetting resin may be used, and the curing temperature may be changed partially. No problem. Further, in the present embodiment, the phase mask method is used as the light irradiation method. However, the present invention is not limited to this. For example, an interference exposure method may be used. Alternatively, a photomask whose transmittance changes periodically may be used. Alternatively, laser light or an electron beam may be scanned for irradiation.

In this embodiment, a periodic refractive index distribution is used as the refractive index distribution. However, the present invention is not limited to this, and a refractive index distribution that partially changes non-periodically may be used. The groove for the optical waveguide is desirably formed by molding as described in the present embodiment, but is not limited to this, and may be formed by etching as needed.

(Second Embodiment) FIG. 3 shows an optical element according to a second embodiment of the present invention.

First, as shown in FIG. 3A, the surface of a substrate 31 made of glass or transparent resin is
4 is applied to form a thin film. By using a resin having a higher refractive index than the substrate 31 as the ultraviolet curing resin 34, the thin film ultraviolet curing resin 34 functions as an optical waveguide core.

Next, light is applied to the ultraviolet curing resin 34 in the form of a thin film. At this time, by sequentially moving the light-shielding plate and changing the area on the ultraviolet-curable resin to which light is irradiated, the amount of light irradiation on the ultraviolet-curable resin changes. A substantially monotonically increasing distribution is formed. Note that an arbitrary refractive index distribution can be formed by changing the moving speed of the light shielding plate.

As shown in FIG. 3B, when light beams λ1 and λ2 having different wavelengths are incident as incident light, a distribution in which the refractive index substantially monotonically decreases in the traveling direction of the light is formed. In a portion where the refractive index difference is large, the light that has been guided is radiated because the difference in the refractive index is reduced while traveling in the waveguide, so that the waveguide condition cannot be satisfied. Since the condition of emission differs depending on the wavelength of light, the position of emission differs. By arranging an optical fiber at a position where light of each wavelength is emitted, light of a desired wavelength can be selected and extracted.

Further, as shown in FIG. 3 (c), by forming a distribution in which the refractive index substantially monotonically increases in a direction substantially perpendicular to the traveling direction, the traveling direction of light is changed and guided. Wavelength separation can be performed as it is. By installing an optical fiber at the position where the light is emitted from the end face of the thin film,
A desired wavelength can be selected and extracted. In FIG. 3 (c), it is assumed that a distribution in which the refractive index substantially monotonically increases is formed in two directions (the directions may be reversed) of the light traveling direction and the direction substantially orthogonal to the traveling direction. However, as shown in FIG. 3D, a distribution in which the refractive index increases substantially monotonically only in a direction substantially orthogonal to the traveling direction of light may be formed.

The production of the refractive index distribution is preferably performed by light irradiation using a light shielding plate as described in this embodiment, but is not limited to this. It may be formed using a mask having a ratio.

In this embodiment, a thin film is deposited on a substrate, but it may be formed by filling a resin between two substrates. That is, similar to the first embodiment,
Filling the optical waveguide groove of the substrate having the optical waveguide groove with an ultraviolet curable resin, controlling the amount of light applied to the resin,
The refractive index of the resin may be substantially monotonically increased or decreased in the direction of the optical waveguide groove, and another substrate may be disposed thereon.

Further, in this embodiment, the refractive index is continuously changed (substantially monotonically increased or monotonically decreased) in all portions in one direction on the thin film. May be present. Further, in the present embodiment, the optical fiber is provided at a position where light is emitted, but a light receiving element such as a photodiode may be provided.

(Third Embodiment) FIG. 4 shows an optical element according to a third embodiment of the present invention.

First, an optical waveguide groove 42 is formed on the surface of a substrate 41 made of glass or transparent resin by molding using a mold (not shown), and an uneven portion 43 is formed on the bottom surface of the optical waveguide groove. Next, an ultraviolet curable resin 44 is formed in the optical waveguide groove 42.
Is applied to fill the groove, and then the ultraviolet curable resin 44 in the groove is cured by irradiating ultraviolet light. By using a resin having a higher refractive index than the substrate 41 as the ultraviolet curing resin 44, the ultraviolet curing resin in the groove functions as an optical waveguide core.

Since the depth of the core changes due to the uneven portion 43 on the bottom surface of the groove, the equivalent refractive index of the ultraviolet curable resin 44 changes periodically, and functions as a waveguide type diffraction grating. By changing the period of the concave-convex portions 43, a reflection-type or long-period waveguide-type diffraction grating is obtained as described in the first embodiment.

In this embodiment, an ultraviolet curable resin is used as the core material of the optical waveguide. However, the present invention is not limited to this. For example, a thermosetting resin may be used. Further, it is desirable from the viewpoint of production that the optical waveguide groove and the concave / convex portion are formed by molding using a mold as described in the present embodiment, but the present invention is not limited to this. It does not matter. Further, another flat substrate may be provided on the upper portion and used as an upper clad.

Further, in this embodiment, the groove for the optical waveguide is provided on the substrate and the unevenness is formed on the bottom surface of the groove for the optical waveguide. However, without providing the groove for the optical waveguide,
An optical element may be formed by forming irregularities in the light traveling direction, arranging an ultraviolet curable resin thereon, and irradiating ultraviolet rays to the light traveling direction portion, in which case the optical element shown in FIG. The same function can be exhibited.

Further, in the present embodiment, irregularities are formed in the light traveling direction in the optical waveguide groove provided on the substrate or on the substrate surface. Irregularities may be formed in the optical waveguide groove provided on the substrate or on the surface of the substrate only in the direction orthogonal to or in the direction substantially orthogonal to the traveling direction of light.

(Fourth Embodiment) FIG. 5 shows an optical element according to a fourth embodiment of the present invention.

As shown in FIG. 5A, first, an ultraviolet curing resin 54 is applied to the surface of a substrate 51 made of glass or transparent resin to form a thin film. By using a material having a higher refractive index than the substrate 51 as the ultraviolet curing resin 54, the thin film ultraviolet curing resin 54 functions as an optical waveguide core.

Next, the ultraviolet curable resin 54 is irradiated with ultraviolet rays to be cured. At this time, by irradiating a portion 540 of the thin film with varying ultraviolet intensity, a portion 540 having a relatively higher refractive index than the other portions is formed. Therefore, light is confined in a portion 540 having a higher refractive index than the surroundings, and functions as a three-dimensional optical waveguide.

Finally, the temperature control element 55 is placed on the portion 540 of the thin film having a high refractive index. Then, when using the optical element of the present embodiment, the ultraviolet curable resin 540 serving as the optical waveguide is heated using the temperature control element 55,
By changing the temperature of the ultraviolet curing resin 540,
The refractive index of the resin changes. Temperature control element 55 on waveguide
When the heating is performed by using the optical waveguide, the refractive index of the waveguide immediately below the optical waveguide changes, so that the temperature control element 55 functions as an optical switch or an optical deflector by ON / OFF.

In this embodiment, the optical element has been described by taking a linear optical waveguide as an example. However, the present invention is not limited to this, and can be applied to all commonly used optical waveguide patterns. In addition, it functions as a diffraction grating by periodically changing the temperature.

In the above-described embodiment, the temperature control element 55 is placed on the ultraviolet curing resin 540 having a different refractive index.
However, as shown in FIG. 5B, the temperature control element 5 is placed on the ultraviolet curable resin 54 having the same refractive index.
5 is disposed, and when the ultraviolet curable resin 54 is heated via the temperature control element 55, a portion having a different refractive index occurs in the ultraviolet curable resin 54.

In the above-described embodiment, the UV curable resin 54 is heated via the temperature control element 55 to generate a portion having a different refractive index in the UV curable resin 54. Is not limited to being generated only in the traveling direction of light, and may be produced in a direction substantially perpendicular to the traveling direction of light together with the traveling direction of light, or in a direction substantially perpendicular to the traveling direction of light. May occur only at

(Fifth Embodiment) FIG. 6 shows an optical element according to a fifth embodiment of the present invention.

As shown in FIG. 6A, first, an ultraviolet curable resin 64 is applied to the surface of a substrate 61 made of glass or transparent resin to form a thin film. By using a resin having a higher refractive index than the substrate 61 as the ultraviolet curing resin 64, the thin film ultraviolet curing resin 64 functions as an optical waveguide core.

Next, the ultraviolet curable resin 64 is irradiated with ultraviolet rays to be cured. At this time, by irradiating a portion 640 of the thin film with varying ultraviolet intensity, a portion 640 having a relatively higher refractive index than other portions is formed. Light is confined in a portion 640 having a higher refractive index than the surroundings, and 3
It functions as a two-dimensional optical waveguide.

Finally, the electrode 66 is placed on the portion 640 where the refractive index is high on the thin film. When the optical element of the present embodiment is used, a voltage is applied to the ultraviolet curable resin 640 serving as an optical waveguide using the electrode 66 to change the electric field of the ultraviolet curable resin 640, so that the resin is refracted. The rate changes. Thus, the optical element of the present embodiment functions as an optical waveguide type optical modulator and optical switch because the refractive index of the thin film changes.

The counter electrode of the electrode 66 can be provided on the interface between the substrate 61 and the resin 64 or on the surface of the substrate 61 opposite to the surface on which the resin 64 is arranged.

In this embodiment, the optical element has been described by taking a linear optical waveguide as an example. However, the present invention is not limited to this, and can be applied to all commonly used optical waveguide patterns. Alternatively, a branch or a directional coupler may be used. Further, in the present embodiment, the electrodes are provided on the optical waveguide. However, the present invention is not limited to this, and electrodes may be provided on both sides of the optical waveguide. A microstrip line or coplanar line may be used as an electrode.

In the above-described embodiment, the electrode 66 is provided on the ultraviolet curable resin 640 having a different refractive index. However, as shown in FIG. When an electrode 66 is disposed on the electrode 64 and an electric field is applied to the ultraviolet curable resin 64 via the electrode 66, a portion having a different refractive index is generated in the ultraviolet curable resin 64.

In the above-described embodiment, the electrode 66
By applying an electric field to the ultraviolet curable resin 64 through the above, a portion having a different refractive index is generated in the ultraviolet curable resin 64, but the portion having a different refractive index is limited to be generated only in the traveling direction of light. However, it may be generated in a direction substantially orthogonal to the light traveling direction together with the light traveling direction, or may be generated only in a direction substantially orthogonal to the light traveling direction.

(Sixth Embodiment) FIG. 7 shows a method for manufacturing an optical element according to a sixth embodiment of the present invention.

First, an ultraviolet curable resin 74 is applied to the surface of a substrate 71 made of glass or transparent resin to form a thin film. By using a resin having a refractive index higher than that of the substrate 71 as the ultraviolet-curable resin 74, the thin-film ultraviolet-curable resin 74 functions as an optical waveguide core.

Next, the ultraviolet curable resin 74 is irradiated with ultraviolet rays to be cured. Since the refractive index after curing of the ultraviolet curable resin changes within the range of 0.001 depending on the amount of light to be irradiated, the ultraviolet curable resin 74 is cured by irradiating a part of the thin film with the intensity of the ultraviolet light changed. In addition, a portion 740 having a relatively higher refractive index than other portions is formed. Therefore, light is confined in a portion 740 having a higher refractive index than the surroundings, and functions as a three-dimensional optical waveguide.

In the present embodiment, a single linear waveguide has been described as an example. However, the present invention is not limited to this, and can be applied to all commonly used optical waveguide patterns. It can also control the bending, branching and coupling of light waves. Further, another flat substrate may be provided as the upper clad.

(Seventh Embodiment) FIG. 8 shows a method of manufacturing an optical element according to a seventh embodiment of the present invention.

This embodiment is different from the above-described sixth embodiment in that the ultraviolet light applied to the ultraviolet curable resin 84 formed on the substrate 81 has a periodic intensity distribution. Therefore, in the present embodiment, components that are not particularly described are the same as those in the sixth embodiment. By irradiating the ultraviolet curable resin 84 with light having a periodic intensity distribution, the irradiation amount of light on the surface of the ultraviolet curable resin 84 is periodically changed, and
4, a periodic refractive index distribution is formed.

By making the distribution of the refractive index periodic, it functions as an optical waveguide type diffraction grating. As a light irradiation method, a phase mask method, an interference exposure method, or the like may be used. Alternatively, a photomask whose transmittance changes periodically may be used.
Alternatively, laser light or an electron beam may be scanned for irradiation.

(Eighth Embodiment) FIG. 9 shows a method for manufacturing an optical element according to an eighth embodiment of the present invention.

First, an ultraviolet curable resin 94 is applied to the surface of a substrate 91 made of glass or transparent resin to form a thin film. By using a resin having a higher refractive index than the substrate 91 as the ultraviolet-curable resin 94, the thin-film ultraviolet-curable resin 94 functions as an optical waveguide core.

Next, the ultraviolet curing resin 94 is irradiated with ultraviolet rays to be cured. The light-shielding plate 93 is inserted between the ultraviolet-curable resin and the light source, and the light-shielding plate 93 is sequentially moved while keeping the light-shielding plate 93 substantially parallel to the substrate 91, thereby changing the region of the light applied to the ultraviolet-curable resin 94. The amount of light irradiation on the ultraviolet curable resin 94 can be reduced substantially continuously and monotonously, and a continuous refractive index distribution can be formed.

Incidentally, an arbitrary refractive index distribution can be formed by changing the moving speed of the light shielding plate.

Although one light-shielding plate is used in this embodiment, a plurality of light-shielding plates may be used to form a refractive index distribution that continuously changes in a plurality of directions. Further, in the present embodiment, the irradiation amount is changed by moving the light-shielding plate 93 to change the irradiation area. However, the ultraviolet irradiation may be performed using a mask whose transmittance continuously changes. Further, in this embodiment, the irradiation amount is continuously changed, but there may be a portion where the irradiation amount is equal or a portion which changes discretely.

(Ninth Embodiment) FIG. 10 shows a method of manufacturing an optical element according to a ninth embodiment of the present invention.

First, as shown in FIG. 10, one end of an optical fiber 107 is placed on the surface of a substrate 101 made of glass or transparent resin, and an ultraviolet curable resin 104 is applied thereon.
After that, by irradiating ultraviolet rays, the ultraviolet curable resin 104 is irradiated.
Is cured, and the optical fiber 107 is fixed on the substrate 101. By using a material having a higher refractive index than the substrate 101 as the ultraviolet-curable resin 104, the ultraviolet-curable resin 104 functions as an optical waveguide core.

Since the refractive index of the ultraviolet curable resin after curing changes depending on the amount of light to be irradiated, by irradiating the ultraviolet curable resin 104 with light having a periodic intensity distribution,
A periodic refractive index distribution can be formed in the ultraviolet curable resin 104. By making the refractive index distribution periodic, it functions as a diffraction grating. Therefore, an optical element can be formed and an optical fiber can be connected at the same time.

In this embodiment, an ultraviolet curable resin is used as the core material of the optical waveguide. However, the present invention is not limited to this. For example, a thermosetting resin may be used. In this embodiment, an optical fiber is used as another optical component.
The present invention is not limited to this, and may be, for example, a wavelength filter, an isolator, a mirror, a lens, or the like. Further, in the present embodiment, the diffraction grating is formed, but the present invention is not limited to this, and a general optical waveguide may be used. Light and electronic components such as a light emitting element, a light receiving element, an electrode wiring, and a semiconductor element may be mounted.

[0082]

As described above, the present invention provides an optical element,
And a manufacturing method for manufacturing the same,
An optical element such as an optical waveguide can be easily mass-produced at low cost.

[Brief description of the drawings]

FIG. 1 is a diagram showing an optical element according to a first embodiment of the present invention.

FIG. 2 is a diagram showing functions of an optical waveguide type diffraction grating according to the first embodiment of the present invention.

FIG. 3 is a diagram showing an optical element according to a second embodiment of the present invention.

FIG. 4 is a diagram showing an optical element according to a third embodiment of the present invention.

FIG. 5 is a diagram showing an optical element according to a fourth embodiment of the present invention.

FIG. 6 is a diagram showing an optical element according to a fifth embodiment of the present invention.

FIG. 7 is a diagram showing a method for manufacturing an optical element according to a sixth embodiment of the present invention.

FIG. 8 is a diagram illustrating a method of manufacturing an optical element according to a seventh embodiment of the present invention.

FIG. 9 is a diagram illustrating a method of manufacturing an optical element according to an eighth embodiment of the present invention.

FIG. 10 is a diagram illustrating a method of manufacturing an optical element according to a ninth embodiment of the present invention.

FIG. 11 is a diagram showing a conventional optical element manufacturing method.

[Description of Signs] 11, 21, 31, 41, 51, 61, 71, 81, 9
1, 101, 111 substrate 12, 22, 42 Optical waveguide groove 14, 24, 34, 44, 54, 64, 74, 84, 9
4, 104 Resin 15 Phase mask 43 Concavo-convex part 55 Temperature control element 66 Electrode 93 Light shield 107 Optical fiber 114 Quartz-based material 118 Photoresist

Continuing on the front page (72) Inventor Masanori Iida 1006 Kadoma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. 2H047 KA03 KA11 LA02 NA01 NA02 PA17 PA22 PA28 PA30 QA04 QA05 TA43

Claims (18)

[Claims] An optical waveguide comprising: a substrate having or not having an optical waveguide groove; and a material having a higher refractive index than the substrate filled in or disposed on the optical waveguide groove. An optical element in which, in a direction, there is a portion where the refractive index of the material changes substantially periodically, or a portion where the refractive index increases or decreases substantially continuously. 2. A portion where the refractive index of the material changes substantially periodically or a portion where the refractive index increases or decreases substantially continuously in a direction substantially orthogonal to the traveling direction of the light. The optical element according to claim 1, wherein 3. A light propagation device comprising: a substrate having or not having an optical waveguide groove; and a material having a refractive index higher than that of the substrate, which is filled in the optical waveguide groove or disposed on the substrate. An optical element in which, in a direction substantially orthogonal to the direction, a portion where the refractive index of the material changes substantially periodically or a portion where the refractive index increases or decreases substantially continuously. 4. A substrate having or not having a groove for an optical waveguide, and a resin filled in the groove for an optical waveguide or disposed on the substrate and having a refractive index higher than that of the substrate. An optical element having a portion in which a refractive index of the resin is different in a direction and / or in a direction substantially orthogonal to a traveling direction of the light. 5. The optical element according to claim 4, wherein the portions of the resin having different refractive indices are formed by utilizing the photo-curing or thermosetting properties of the resin. 6. A substrate having or not having a groove for an optical waveguide, and a material filled in or disposed on the substrate for the optical waveguide and having a higher refractive index than that of the substrate. An optical element disposed on the material in a direction and / or in a direction substantially orthogonal to the direction of travel of the light, further comprising a temperature control element for partially changing the temperature of the material. 7. A light propagation device comprising: a substrate having or not having an optical waveguide groove; and a material having a higher refractive index than the substrate filled in or disposed on the optical waveguide groove. An optical element further comprising an electrode disposed on the material in a direction and / or in a direction substantially orthogonal to a direction of travel of the light, for partially changing an electric field of the material. 8. An optical waveguide comprising: a substrate having or not having a groove for an optical waveguide; and a material filled in the groove for an optical waveguide or disposed on the substrate and having a higher refractive index than the substrate. An optical element having a portion in which the material is convex toward the substrate and / or a portion in which the substrate is convex toward the material, in a direction and / or in a direction substantially orthogonal to a traveling direction of the light. 9. The optical element according to claim 8, wherein the convex portions are provided substantially periodically. 10. The optical element according to claim 1, wherein the material is a glass-based material or a resin. 11. A method for producing an optical element, comprising: forming a photocurable resin on a substrate; and irradiating the photocurable resin with light to cure the photocurable resin. A method of manufacturing an optical element for changing an irradiation amount of light. 12. The method according to claim 11, wherein the irradiation amount of the light is substantially periodically changed or substantially continuously monotonically increased or decreased in a predetermined direction on the photocurable resin surface. A method for manufacturing an optical element. 13. The production of the optical element according to claim 11, wherein an irradiation amount of the light on the photocurable resin surface is changed by changing an irradiation intensity of the light onto the photocurable resin. Method. 14. The method for manufacturing an optical element according to claim 13, wherein the irradiation intensity of the light on the photocurable resin surface is changed using a mask having a partially different light transmittance. 15. The irradiation amount is changed by sequentially changing an irradiation area of the light using a light shielding plate.
3. The method for manufacturing an optical element according to item 2. 16. A method of manufacturing an optical element, comprising: forming a photocurable resin on a substrate; and irradiating the photocurable resin with light to cure the photocurable resin. A method for manufacturing an optical element, wherein the optical component is connected to cure the photocurable resin, and the optical component is fixed to the photocurable resin. 17. The method for manufacturing an optical element according to claim 1, wherein the optical waveguide groove of the substrate is formed collectively by using a mold having an uneven surface. Of manufacturing an optical element. 18. The method for manufacturing an optical element according to claim 8, wherein the unevenness of the substrate of the optical element is collectively formed by using a mold having unevenness on the surface. Manufacturing method.