JP2002134585A5 - - Google Patents

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Publication number
JP2002134585A5
JP2002134585A5 JP2000324128A JP2000324128A JP2002134585A5 JP 2002134585 A5 JP2002134585 A5 JP 2002134585A5 JP 2000324128 A JP2000324128 A JP 2000324128A JP 2000324128 A JP2000324128 A JP 2000324128A JP 2002134585 A5 JP2002134585 A5 JP 2002134585A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000324128A
Other languages
Japanese (ja)
Other versions
JP2002134585A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000324128A priority Critical patent/JP2002134585A/ja
Priority claimed from JP2000324128A external-priority patent/JP2002134585A/ja
Publication of JP2002134585A publication Critical patent/JP2002134585A/ja
Publication of JP2002134585A5 publication Critical patent/JP2002134585A5/ja
Pending legal-status Critical Current

Links

JP2000324128A 2000-10-24 2000-10-24 ワーク搬送装置 Pending JP2002134585A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000324128A JP2002134585A (ja) 2000-10-24 2000-10-24 ワーク搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000324128A JP2002134585A (ja) 2000-10-24 2000-10-24 ワーク搬送装置

Publications (2)

Publication Number Publication Date
JP2002134585A JP2002134585A (ja) 2002-05-10
JP2002134585A5 true JP2002134585A5 (cg-RX-API-DMAC7.html) 2007-11-22

Family

ID=18801706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000324128A Pending JP2002134585A (ja) 2000-10-24 2000-10-24 ワーク搬送装置

Country Status (1)

Country Link
JP (1) JP2002134585A (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6852644B2 (en) * 2002-11-25 2005-02-08 The Boc Group, Inc. Atmospheric robot handling equipment
KR100914738B1 (ko) * 2007-08-03 2009-08-31 세메스 주식회사 웨이퍼 이송 로봇을 구비하는 반도체 제조 설비 및 그의웨이퍼 이송 방법
JP7078479B2 (ja) 2018-07-13 2022-05-31 株式会社安川電機 搬送ロボットおよびロボットシステム
CN115126841B (zh) * 2022-07-22 2023-03-24 沈阳新松机器人自动化股份有限公司 一种应用于真空机械手立柱的升降轴装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10100083A (ja) * 1996-09-27 1998-04-21 Tokico Ltd 工業用ロボット
JP3726978B2 (ja) * 1996-10-28 2005-12-14 株式会社安川電機 多関節ロボット
JPH11198070A (ja) * 1998-01-12 1999-07-27 Shin Meiwa Ind Co Ltd 搬送装置
JPH11216691A (ja) * 1998-02-03 1999-08-10 Hitachi Ltd フロッグレッグ形ロボット並びに処理装置および処理方法

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