JP2002134400A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2002134400A5 JP2002134400A5 JP2000330957A JP2000330957A JP2002134400A5 JP 2002134400 A5 JP2002134400 A5 JP 2002134400A5 JP 2000330957 A JP2000330957 A JP 2000330957A JP 2000330957 A JP2000330957 A JP 2000330957A JP 2002134400 A5 JP2002134400 A5 JP 2002134400A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000330957A JP4666744B2 (en) | 2000-10-30 | 2000-10-30 | Measuring apparatus, exposure apparatus, and device manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000330957A JP4666744B2 (en) | 2000-10-30 | 2000-10-30 | Measuring apparatus, exposure apparatus, and device manufacturing method |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002134400A JP2002134400A (en) | 2002-05-10 |
| JP2002134400A5 true JP2002134400A5 (en) | 2007-12-13 |
| JP4666744B2 JP4666744B2 (en) | 2011-04-06 |
Family
ID=18807383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000330957A Expired - Fee Related JP4666744B2 (en) | 2000-10-30 | 2000-10-30 | Measuring apparatus, exposure apparatus, and device manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4666744B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7512454B1 (en) * | 2002-05-31 | 2009-03-31 | Advanced Micro Devices, Inc. | Display unit with processor and communication controller |
| JP2005227640A (en) * | 2004-02-16 | 2005-08-25 | Casio Comput Co Ltd | Projecting device, range finding processing method, and program therefor |
| JP2005302970A (en) * | 2004-04-09 | 2005-10-27 | Nikon Corp | Method for creating recipe, position detector, and misregistration detector |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59183583A (en) * | 1983-04-04 | 1984-10-18 | Nippon Hoso Kyokai <Nhk> | Flickering preventing method of picture of mobile body |
| JPS6414918A (en) * | 1987-07-08 | 1989-01-19 | Nikon Corp | Stepper |
| JPH01207603A (en) * | 1988-02-15 | 1989-08-21 | Nikon Corp | Position detecting device |
| JPH0313181A (en) * | 1989-06-12 | 1991-01-22 | Casio Comput Co Ltd | Image pickup device |
| JP2650066B2 (en) * | 1990-01-31 | 1997-09-03 | キヤノン株式会社 | Image capture device |
| JP3016818B2 (en) * | 1990-05-19 | 2000-03-06 | 日東電工株式会社 | Wire watertight treatment material |
| JP2908099B2 (en) * | 1992-01-17 | 1999-06-21 | キヤノン株式会社 | Substrate alignment method |
| JPH09106939A (en) * | 1995-10-13 | 1997-04-22 | Nikon Corp | Exposure and its device |
| JPH09224195A (en) * | 1996-02-19 | 1997-08-26 | Canon Inc | Image detection method and its device |
| JPH09266164A (en) * | 1996-03-28 | 1997-10-07 | Canon Inc | Apparatus and method for positioning |
| JPH11295056A (en) * | 1998-04-15 | 1999-10-29 | Nikon Corp | Position detecting method, positioning method, and exposing method |
| JP3065613B2 (en) * | 1999-06-21 | 2000-07-17 | キヤノン株式会社 | Alignment apparatus and method |
| JP2002100650A (en) * | 2000-09-22 | 2002-04-05 | Kaijo Corp | Wire bonder image processing apparatus |
-
2000
- 2000-10-30 JP JP2000330957A patent/JP4666744B2/en not_active Expired - Fee Related