JP2002134390A5 - - Google Patents

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Publication number
JP2002134390A5
JP2002134390A5 JP2000323095A JP2000323095A JP2002134390A5 JP 2002134390 A5 JP2002134390 A5 JP 2002134390A5 JP 2000323095 A JP2000323095 A JP 2000323095A JP 2000323095 A JP2000323095 A JP 2000323095A JP 2002134390 A5 JP2002134390 A5 JP 2002134390A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000323095A
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Japanese (ja)
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JP2002134390A (ja
JP4405071B2 (ja
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Priority to JP2000323095A priority Critical patent/JP4405071B2/ja
Priority claimed from JP2000323095A external-priority patent/JP4405071B2/ja
Publication of JP2002134390A publication Critical patent/JP2002134390A/ja
Publication of JP2002134390A5 publication Critical patent/JP2002134390A5/ja
Application granted granted Critical
Publication of JP4405071B2 publication Critical patent/JP4405071B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000323095A 2000-10-23 2000-10-23 送り装置及びそれを具備する光ディスク原盤記録装置 Expired - Fee Related JP4405071B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000323095A JP4405071B2 (ja) 2000-10-23 2000-10-23 送り装置及びそれを具備する光ディスク原盤記録装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000323095A JP4405071B2 (ja) 2000-10-23 2000-10-23 送り装置及びそれを具備する光ディスク原盤記録装置

Publications (3)

Publication Number Publication Date
JP2002134390A JP2002134390A (ja) 2002-05-10
JP2002134390A5 true JP2002134390A5 (enrdf_load_stackoverflow) 2006-06-01
JP4405071B2 JP4405071B2 (ja) 2010-01-27

Family

ID=18800849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000323095A Expired - Fee Related JP4405071B2 (ja) 2000-10-23 2000-10-23 送り装置及びそれを具備する光ディスク原盤記録装置

Country Status (1)

Country Link
JP (1) JP4405071B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG139733A1 (en) 2003-04-11 2008-02-29 Nikon Corp Apparatus having an immersion fluid system configured to maintain immersion fluid in a gap adjacent an optical assembly
KR101419663B1 (ko) 2003-06-19 2014-07-15 가부시키가이샤 니콘 노광 장치 및 디바이스 제조방법
US7589822B2 (en) 2004-02-02 2009-09-15 Nikon Corporation Stage drive method and stage unit, exposure apparatus, and device manufacturing method
JP4655039B2 (ja) * 2004-06-07 2011-03-23 株式会社ニコン ステージ装置、露光装置及び露光方法
USRE43576E1 (en) 2005-04-08 2012-08-14 Asml Netherlands B.V. Dual stage lithographic apparatus and device manufacturing method
EP2128703A1 (en) 2008-05-28 2009-12-02 ASML Netherlands BV Lithographic Apparatus and a Method of Operating the Apparatus

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