JP2002130276A - Calibration/regulation method, and calibration/ regulation system for magnetic bearing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a calibration/regulation method, and a calibration/regulation system, capable of calibrating and regulating a local magnetic bearing device by communicating with an reference unit from a local side, when an abnormality is detected in the device, or when the interval of a date and time is preset, or when a self-contained magnetic bearing device combining a self-diagnostic mechanism determines the need for calibration and regulation, and the like. SOLUTION: The system for the calibration and regulation of a magnetic bearing device is one comprising a rotating machine 10 having a magnetic bearing that magnetically holds a displacement sensor for detecting the position of a rotor and also having the rotor in a non-conract state; and a control means 20 that controls the magnetic bearing, based on a signal from the displacement sensor; a reference unit 30 arranged apart from the control means 20 and a communication means for connecting the control means 20 and the reference unit 30 by using a communication circuit L. The control means 20 is equipped with a determination unit that self-determines the need for the calibration and regulation or an input unit that starts the calibration and regulation, and also comprises a communication mechanism for communicating the necessary data of the calibration and regulation between the reference unit and the input unit, based on the signal from the determination unit or the input unit.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and a system for calibrating and adjusting a magnetic bearing device for calibrating and adjusting a magnetic bearing device that supports a rotating body in a non-contact manner with a magnetic force.

[0002]

2. Description of the Related Art In the field of semiconductor manufacturing, products employing a large number of magnetic bearings are used. For example, in the high-speed rotation region, a) a turbo molecular pump, b) a neutron chopper, etc .; in the medium-speed rotation region, c) a CVD (thin-film vapor deposition) device that positively utilizes the pump effect of the rotating disk. E) In a low-speed rotation region such as a substrate rotation drying device, e) a gas circulation fan, and f) a CVD device or RT employing rotation for the purpose of equalizing the radiation energy received by the substrate.
There are mechanisms such as a P device (rapid heat treatment device) and g) a magnetically levitated substrate transfer device.

In a control type magnetic bearing, the control state may be unstable due to a change in characteristics of a supported member or a change in characteristics of a component such as a displacement sensor. In the above examples a) to g) as well, the supported member changes from the purpose of the device (exchange, modification, unloading, etc.). Also, c), d), f), g)
In such a case, it is necessary to make a configuration that allows an assumed change range.

[0004] Degradation of components such as a displacement sensor may occur to some extent due to the influence of corrosive gas or high temperature environment. In particular, changes in the sensitivity (gain) and offset amount of the displacement sensor function greatly affect the control state. As a countermeasure against such a problem, for example, technologies including various ideas as described below have been developed and published.

As for a magnetic levitation device, Japanese Patent Laid-Open Publication No. Hei 6-165315 discloses a remote control / remote system in which information is transmitted and received by a communication device between a moving supported member and a fixed monitoring device in a non-contact manner. A technique relating to a monitoring method is disclosed.

Japanese Patent Application Laid-Open No. 9-53181 discloses a technique relating to a self-standing magnetic bearing device having both a self-diagnosis function and a learning function, as the above-mentioned CVD apparatus (c), CVD apparatus or RTP apparatus (f). I have. Here, a configuration is provided that cooperates with a database that stores (stores) specifications to be controlled and a configuration that cooperates with a higher-level control unit via a communication function.

For a magnetic bearing device such as a turbo molecular pump, Japanese Patent Application Laid-Open No. Hei 9-177781 discloses that
A technique related to a method of remotely monitoring a user device from a magnetic bearing maker using a telephone line is disclosed.

For a magnetic bearing device such as a magnetic bearing spindle, Japanese Patent Laid-Open No. 2000-97236 discloses the same technology as described above.

Another method other than the technique disclosed in Japanese Patent Application Laid-Open No. 9-53181 is based on the idea that one monitoring side monitors and adjusts a plurality of magnetic bearing devices. Today, even in one semiconductor manufacturing plant, hundreds to thousands of devices using magnetic bearings are used. For this reason, in a system where the monitoring side monitors and adjusts magnetic bearing devices that are many orders of magnitude, the purpose and effect cannot be fully exhibited, and it is necessary to communicate and confirm normal devices, so this time can not be ignored. It is wasted time.

Also, from the user's point of view, there is a demand that the user wants to selectively realize automatic calibration and automatic adjustment of the magnetic bearing device when he / she wants to use the equipment employing the magnetic bearing. Can't respond to requests.

[0011]

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and in a local magnetic bearing device, when an abnormality is detected in the device, a user selects automatic calibration / automatic diagnosis. Magnetic bearing device that can communicate with the reference device from the local side and calibrate and adjust when the time and day interval are set in advance, when it is determined that it is necessary by a self-standing magnetic bearing device that also has a self-diagnosis function, etc. Calibration
It is an object to provide an adjustment method and a calibration / adjustment system.

[0012]

According to the first aspect of the present invention, there is provided a rotating machine having a displacement sensor for detecting a position of a rotating body and a magnetic bearing for magnetically supporting the rotating body in a non-contact manner. And a method of calibrating and adjusting a magnetic bearing device comprising control means for controlling a magnetic bearing based on a signal from a displacement sensor, wherein the control means is disposed at a remote position when calibrating and adjusting the magnetic bearing. A communication request is issued to the set reference device via a communication line, data necessary for the calibration / adjustment is exchanged with the reference device, and calibration / adjustment is performed based on the data obtained by the communication. It is characterized by performing.

As described above, the control means performs calibration and
When performing the adjustment, data necessary for the calibration / adjustment is exchanged via a communication line, so that unlike the conventional case where a large number of magnetic bearings are monitored and adjusted on the monitoring side, the user side of the magnetic bearing device is required. When calibration and adjustment are desired, the calibration and adjustment of the magnetic bearing device can be selectively performed.

According to a second aspect of the present invention, there is provided a rotating machine having a displacement sensor for detecting a position of a rotating body and a magnetic bearing for magnetically supporting the rotating body in a non-contact manner, and a magnetic bearing based on a signal from the displacement sensor. A calibration / adjustment system for a magnetic bearing device comprising control means for controlling the reference means, comprising: a reference device arranged at a position remote from the control means; and communication means for connecting the control means and the reference device via a communication line. The control means includes a judgment unit or a calibration / adjustment unit that determines whether calibration / adjustment is necessary.
An input device for starting the adjustment is provided, and a function of exchanging data necessary for calibration and adjustment with a reference device based on a signal from the determination device or the input device is provided.

[0015] As described above, the control means is such that the judging device performs calibration and
When it is determined that adjustment is necessary and a signal is issued, or when the input device issues a calibration / adjustment signal, data necessary for calibration / adjustment is exchanged with the reference device based on the signal. Unlike the system in which the monitoring side monitors and adjusts a large number of magnetic bearings, the calibration and adjustment of the magnetic bearing device can be performed at the request of the user. Further, since communication and confirmation with a normal magnetic bearing can be omitted, no time is wasted.

According to a third aspect of the present invention, in the magnetic bearing device calibration / adjustment system according to the second aspect, the reference device is arranged on a manufacturer side or for each user.

[0017]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a configuration of a calibration and adjustment system for a magnetic bearing device according to the present invention. The rotating machine 10 employing a magnetic bearing as a bearing is connected to control means 20 by a cable CB, and each control means 20 is connected via a communication line L to a reference device 30 arranged at a position remote from the control means 20. ing.

Each control means 20 includes a control unit 21, a calibration / adjustment judging unit 22 and a communication unit 23, and the reference unit 30 includes a communication unit 31 and a reference unit 32. Data can be transmitted and received between the communication device 23 of each control means 20 and the communication device 31 of the reference device 30 via a communication line (public telephone line, dedicated communication line, private communication line).

FIG. 2 is a diagram showing a configuration example of the rotating machine 10. The rotating machine 10 includes a rotating body 11, and the rotating body 11
Is an upper radial magnetic bearing 12, a lower radial magnetic bearing 13,
It is magnetically supported by an axial magnetic bearing 14 in a non-contact manner. The rotating body 11 is configured to rotate by the rotation force of the motor 16. The position of the rotating body 11 is detected by an upper radial sensor 17, a lower radial sensor 18, and an axial sensor 19.

A detection signal of the position of the rotating body 11 detected by the upper radial sensor 17, the lower radial sensor 18, and the axial sensor 19 is transmitted to the control unit 21 of the control means 20, and the control unit 21 performs the control based on the detection signal. The upper radial magnetic bearing 12, the lower radial magnetic bearing 13, and the axial magnetic bearing 14 are controlled to magnetically levitate and support the rotating body 11, and the rotating body 11 is rotated by the motor 16.

FIG. 3 is a diagram showing a configuration example of the control unit 21. The control unit 21 includes a control unit 21-1, an estimator / detector unit 2
1-2, a database unit 21-3 and the like. The control unit 21-1 gives a control force of each axis to the rotating body 11 to be controlled based on signals such as the relative displacement amount and the number of rotation pulses. That is, the control unit 21-1 is configured by control units such as a magnetic bearing local control, a rotation local control, and a positioning local control. Estimator /
The detector unit 21-2 estimates the unbalance amount of the rotating body 11 based on an acceleration signal from an acceleration detector provided on the stator side in addition to signals such as a relative displacement amount and a rotation pulse number.
To detect.

The estimated / detected result is sent to the control unit 21
−1, the rotating body control parameters are changed, and fed back to the control target. Further, signals such as magnetic bearing control currents, motor control currents, and the like are also input to the estimator / detector unit 21-2. The database unit 21-3 is referred to when estimating / detecting the rotational unbalance amount. Further, the control unit 21-1 is connected to the calibration / adjustment determination unit 22, and determines whether or not the unbalance amount of the rotating body can withstand continuation of use.

FIG. 4 shows a configuration example of the estimator / detector section 21-2. The estimator / detector unit 21-2 receives as input signals the relative displacement of each axis, the number of rotation pulses (number of rotations), the acceleration on the stator side, each axis control current, the motor control current, each axis deviation, and the rotation number deviation Are input. Items to be estimated / detected are the mass change, the moment of inertia (I
d, Ip), control stiffness, unbalance amount, rotational torque, natural frequency, each shaft frequency characteristic of the magnetic bearing, and the like are calculated and obtained based on the input signal. Signals such as a magnetic bearing control constant, an unbalance compensation control constant / variable, a motor control constant, and a bending vibration compensation constant are output to the control unit 21-1 as output signals.

FIG. 5 is a diagram showing a configuration example of the database unit 21-3. The database unit 21-3 has various functions such as a rotating body mass, a rotating body inertia moment, a magnetic bearing constant, a motor constant, and a rotating body reference specification.

FIG. 6 is a diagram showing a configuration example of the calibration / adjustment judging unit 22. The calibration / adjustment judging unit 22 judges whether rotation can be continued based on the relative displacement amount and the number of rotations of the rotating body 11 detected by the upper radial sensor 17, the lower radial sensor 18, and the axial sensor 19 based on the risk of rotation. . This determination is made by calculating a margin before touchdown. Further, it is determined whether the unbalance amount can be compensated based on the magnetic bearing constant, the unbalance amount estimated value, and the unbalance amount compensation constant / variable. Also, it is determined from the natural frequency whether natural frequency compensation is possible or not. Further, it is determined whether or not the rotation speed control can be performed based on the rotation speed deviation, the rotation torque, the motor constant (hardware constant), and the motor control constant. From the above determination, it is determined whether the use of the rotating body can be continued, that is, whether calibration / adjustment is necessary.

When the calibration / adjustment judging unit 22 judges that calibration / adjustment is necessary, an output signal is output to the communication unit 23 so that the communication unit 23 is connected to the communication unit L of the reference unit 30 via the communication line L. A communication request is issued to 31 and data necessary for the calibration and adjustment is exchanged with the reference unit 32 of the reference unit 30. The control unit 21 performs calibration and adjustment based on the data obtained by this communication.

In the above example, the control means 20 is provided with a calibration / adjustment judging unit 22 for self-determining the necessity of the calibration / adjustment. When the calibration / adjustment judging unit 22 judges that the calibration / adjustment is necessary, Although the communication with the reference device 30 is performed, an input device for starting calibration and adjustment is provided in place of the calibration / adjustment judging device 22, and the input device arbitrarily or periodically (set a time / day interval in advance). Alternatively, the communication request may be output to the reference device 30 in advance.

[0028]

As described above, according to the invention described in each claim, the following excellent effects can be obtained.

According to the first aspect of the present invention, when the control means performs calibration and adjustment of the magnetic bearing, it communicates data necessary for the calibration and adjustment via a communication line. Unlike the case where a large number of magnetic bearings are monitored and adjusted on the monitoring side, the calibration and adjustment of the magnetic bearing device can be selectively performed when the user wants to calibrate and adjust the magnetic bearing device.

According to the second and third aspects of the present invention, as described above, the control means determines whether calibration / adjustment is required by the determiner and issues a signal, or the input device transmits the calibration / adjustment signal. When issued, data necessary for calibration and adjustment is exchanged with the reference device based on the signal, so unlike a conventional system that monitors and adjusts a large number of magnetic bearings on the monitoring side,
Calibration and adjustment of the magnetic bearing device can be performed at the request of the user. In addition, communication with normal magnetic bearings
Since confirmation can be omitted, there is no waste of time.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of a calibration / adjustment system for a magnetic bearing device according to the present invention.

FIG. 2 is a diagram illustrating a configuration example of a rotating machine that is levitated and supported by a magnetic bearing device.

FIG. 3 is a diagram illustrating a configuration example of a control unit of a calibration and adjustment system for a magnetic bearing device according to the present invention.

FIG. 4 is a diagram showing a configuration example of an estimator / detector section of the calibration / adjustment system of the magnetic bearing device according to the present invention.

FIG. 5 is a diagram showing a configuration example of a database unit of the calibration / adjustment system of the magnetic bearing device according to the present invention.

FIG. 6 is a diagram showing a configuration example of a calibration / adjustment determiner of the calibration / adjustment system of the magnetic bearing device according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Rotating machine 20 Control means 21 Control part 22 Calibration / adjustment judging device 23 Communication device 30 Reference device 31 Communication device 32 Reference portion CB cable L Communication line

Claims (3)

[Claims] 1. A rotating machine having a displacement sensor for detecting a position of a rotating body, a magnetic bearing for magnetically supporting the rotating body in a non-contact manner, and control means for controlling the magnetic bearing based on a signal from the displacement sensor. A calibration / adjustment method for a magnetic bearing device, comprising: when the controller performs calibration / adjustment of a magnetic bearing, issues a communication request via a communication line to a reference device arranged at a distant position. , Communication of data necessary for the calibration and adjustment with the reference device, and calibration and adjustment of the magnetic bearing device characterized by performing calibration and adjustment based on data obtained by the communication.
Adjustment method. 2. A rotating machine having a displacement sensor for detecting a position of a rotating body and a magnetic bearing for magnetically supporting the rotating body in a non-contact manner, and a control for controlling the magnetic bearing based on a signal from the displacement sensor. A calibration / adjustment system for a magnetic bearing device comprising: a reference device disposed at a position distant from the control device; and a communication device for connecting the control device and the reference device via a communication line. The control means includes a determination unit for self-determining the necessity of calibration / adjustment or an input unit for starting calibration / adjustment, and performs calibration with the reference unit based on a signal from the determination unit or input unit. A calibration / adjustment system for a magnetic bearing device, which has a function of exchanging data necessary for adjustment. 3. A method for calibrating the magnetic bearing device according to claim 2,
A calibration / adjustment system for a magnetic bearing device, wherein the reference device is arranged on a manufacturer side or for each user.