JP2002127422A - Ink jet head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an ink jet head in which a driver substrate can be connected in a short time and the ink jet head can be made compact while increasing the nozzle density. SOLUTION: The ink jet head comprises a first substrate 10 having a first channel array formed through a plurality of barrier walls, electrodes 15 provided for the barrier walls, and take-out electrodes 16 provided continuously to respective electrodes 15, a second substrate 20 having a second channel array formed through a plurality of barrier walls, electrodes 25 provided for the barrier walls, and take-out electrodes 26 provided continuously to respective electrodes 25, and driver substrates 19b and 29b electrically connected with the first and second substrates, respectively. The first substrate 10 and the second substrate 20 are stuck to each other, the take-out electrodes 16 and 26 of the first and second substrates are connected with corresponding driver substrates 19b and 29b through an anisotropic conductive material 30, and the pitch width at the joint of the take-out electrodes 16 and 26 and the driver substrates 19b and 29b is set at 150 μm or less.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet head which applies a voltage to an electrode to deform a channel and discharge ink.

[0002]

2. Description of the Related Art As described above, an ink jet head for applying a voltage to an electrode to deform a channel to discharge ink has a channel row formed through a plurality of partition walls and an electrode provided for the partition wall. And a take-out electrode provided subsequent to each of the electrodes. A driver substrate is connected to the take-out electrode, and a voltage is applied to the electrodes by a drive power supplied from the driver board.

[0003]

A flexible substrate is used as the driver substrate. A conductive adhesive, an anisotropic conductive rubber,
Although there were wire bonding, etc., the curing time was long, it was disadvantageous for the connection of the head system that required a large amount of current to flow, and the connection time became longer when the number of channels of the head increased, and the head itself became longer. Became too large to be compact.

In order to increase the nozzle density, a structure in which a first substrate and a second substrate are bonded to each other to discharge ink from two channel rows is used.
It is very difficult to connect the driver board to both sides of the board.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an ink jet head which can connect a driver substrate in a short time, can be made compact, and can increase the nozzle density. The purpose is.

[0006]

Means for Solving the Problems In order to solve the above problems and achieve the object, the present invention has the following constitution.

According to a first aspect of the present invention, there is provided a first channel array formed via a plurality of partition walls, electrodes provided for the partition walls, and a plurality of electrodes provided following each of the electrodes. A first substrate having an extraction electrode, a second channel row formed through a plurality of partitions, an electrode provided for the partition, and an extraction provided subsequent to each of the electrodes. A second substrate having an electrode; and the first and second substrates.
A driver substrate electrically connected to each of the first and second substrates, wherein the first substrate and the second substrate are bonded together, and the first and second substrates are formed. Are connected to the corresponding driver substrates via an anisotropic conductive material, respectively, and a pitch width of a connection point between the extraction electrodes and the driver substrate is 1
An ink jet head having a thickness of 50 μm or less. ].

According to the first aspect of the present invention, the first
The substrate and the second substrate are bonded together, and the extraction electrodes of both substrates are connected to the driver substrate via an anisotropic conductive material, and the pitch width of the connection points is 150 μm or less,
The extraction electrode and the driver substrate can be reliably and compactly connected in a short time, and the nozzle density can be increased.

According to a second aspect of the present invention, there is provided a method as set forth in the first aspect, wherein the extraction electrodes of the respective substrates are provided on a surface side opposite to a surface at the time of bonding. Ink jet head. ].

According to the second aspect of the present invention, since the extraction electrode of each substrate is provided on the surface opposite to the surface on which the substrates are bonded, the operation of providing the extraction electrode is not required. The driver substrate can be easily and easily connected to the extraction electrode.

According to a third aspect of the present invention, there is provided a first channel array formed through a plurality of partition walls, electrodes provided for the partition walls, and a plurality of electrodes provided following each of the electrodes. A first substrate having an extraction electrode, a second channel row formed through a plurality of partitions, an electrode provided for the partition, and an extraction provided subsequent to each of the electrodes. A second substrate having an electrode; and the first and second substrates.
A driver substrate electrically connected to each of the substrates, and bonding the first substrate and the second substrate together such that the respective channel rows face away from each other. And wherein the extraction electrodes of each of the first and second substrates are provided on a side opposite to a side where the first substrate and the second substrate are bonded, and an anisotropic conductive material is provided. An ink-jet head connected to the corresponding driver substrate via a corresponding one of the ink jet heads. ].

According to the third aspect of the present invention, the first
And the second substrate are bonded together such that each channel row faces back, and the extraction electrodes of both substrates are provided on the side opposite to the side where the first substrate and the second substrate are bonded. And
Since each is connected to the driver substrate via the anisotropic conductive material, the extraction electrode and the driver substrate can be reliably and compactly connected in a short time, and the nozzle density can be easily increased.

According to a fourth aspect of the present invention, there is provided a first channel row formed through a plurality of partition walls, electrodes provided for the partition walls, and a plurality of electrodes provided following each of the electrodes. A substrate having an extraction electrode, and a driver substrate electrically connected to both sides of the substrate, and the extraction electrode is provided on both sides of the substrate,
An ink jet head which is connected to the driver substrates corresponding to both sides thereof via an anisotropic conductive material and has a pitch width of 150 μm or less at a connection point between the extraction electrode and the driver substrate. ].

According to the fourth aspect of the present invention, the extraction electrode of the substrate is connected to the driver substrate via the anisotropic conductive material, and the pitch of the connection points is 150 μm or less. And the driver board can be reliably and compactly connected in a short time, and the nozzle density can be increased.

According to a fifth aspect of the present invention, there is provided a method according to any one of the first to fourth aspects, wherein the channel and each of the extraction electrodes have substantially the same pitch width. Ink jet head. ].

According to the fifth aspect of the present invention, each channel and each extraction electrode have substantially the same pitch width,
The extraction electrode and the driver board can be reliably and compactly connected.

According to a sixth aspect of the invention, there is provided an ink jet head according to any one of the first to fifth aspects, wherein the ink channels are arranged every other ink channel. . ].

According to the sixth aspect of the present invention, the ink channels are arranged every other ink channel.
Even if the ink is ejected from the ink channel, the other ink channels are not affected, and the ink channel can be easily driven.

According to a seventh aspect of the present invention, there is provided an anisotropic conductive material, wherein an anisotropic conductive film containing conductive particles made of metal particles is used. The inkjet head according to any one of the above. 』
It is.

According to the present invention, since an anisotropic conductive film containing conductive particles made of metal particles is used as the anisotropic conductive material, the conduction between the electrodes is good. Even when the aluminum electrode formed by aluminum deposition is used as at least one electrode, metal particles can break through the oxide film and good conduction can be easily performed.

The invention according to an eighth aspect is directed to an ink jet head according to the seventh aspect, wherein the extraction electrode is formed by aluminum evaporation. ].

According to the eighth aspect of the present invention, good conductivity can be easily obtained in combination with the configuration using an anisotropic film containing conductive particles made of metal particles as the anisotropic conductive material. And a high-performance inkjet head free from poor connection can be obtained.

[0023]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the ink jet head of the present invention will be described, but the embodiments of the present invention are not limited to this example.

FIG. 1 is a schematic view showing a process of manufacturing an ink-jet head, FIG. 2 is a cross-sectional view showing a channel of the ink-jet head, FIG. 3 is a diagram for explaining the connection between an extraction electrode and a driver substrate, and FIGS. FIG. 3 is a diagram for explaining connection of a driver substrate using an anisotropic conductive material.

First, a first substrate 10 and a second substrate 20 are prepared. The first substrate 10 includes a thick substrate 11 and a thin substrate 1.
Similarly, the second substrate 20 also includes a thick substrate 21 and a thin substrate 22 (FIG. 1A).

A glass substrate (not shown) in which a dry film 13 is adhered on the thin substrate 12 of the first substrate 10 and a pattern for forming electrodes on the dry film 13 is provided.
Are arranged, exposed and developed to remove the dry film 13 of the electrode pattern (FIG. 1B). Further, a channel 14 is formed on the first substrate 10 by making a groove with a dicing disk while being in contact with the end of the electrode pattern, and after the Al deposition is performed, the remaining dry film 13 (electrode pattern) is formed. Electrodes 15 on the channels 14 by dissolving and removing the dry film other than the aluminum film) together with the aluminum deposited thereon.
An extraction electrode 16 connected to this electrode 15 is formed.
(C)).

Similarly, a dry film 23 is stuck on a thin substrate 22 of the second substrate 20, and a glass substrate (not shown) on which a pattern for forming an electrode is formed is arranged on the dry film 23. Exposure is performed using the glass substrate as a mask and development processing is performed to remove the dry film 23 of the electrode pattern. Similarly, a groove 24 is formed in the second substrate 20 to form a channel 24, and after performing Al deposition, the remaining dry film 23 is removed together with the aluminum deposited thereon. Channel 24
And an extraction electrode 26 connected to the electrode 25 is formed.

Next, the first substrate 10 and the second substrate 20
And a cover substrate 1 provided with an ink inlet, which covers most of the channels 14, 24 except for the extraction electrodes 16, 26.
7 and 27 (FIG. 1D), the first substrate 10 and the second
And the substrate 20 is bonded on the side opposite to the side where the cover substrates 17 and 27 are provided (FIG. 1 (e)).
A nozzle plate 18 having a nozzle hole 18a is provided at a portion corresponding to the channels 14 and 24, and two head bodies are manufactured (FIG. 1F).

Thereafter, the actuators 19a, 2 for supplying ink to the channels 14, 24 are provided on the first substrate 10 and the second substrate 20, respectively.
9a and the driver substrates 19b and 29b are connected to the extraction electrodes 16 and 26 to manufacture two ink jet heads simultaneously (FIG. 1 (g)).

Thus, as shown in FIGS. 1 and 2, the ink jet head includes a first channel row formed through a plurality of partition walls 11a and 12a, and a plurality of partition walls 11a and 12a.
a for each of the electrodes 15 provided for
, A first substrate 10 having an extraction electrode 16 provided subsequently, a second channel row formed via a plurality of partitions 21a, 22a, and an electrode provided for the partitions 21a, 22a. 25, a second substrate 20 including an extraction electrode 26 provided following each of the electrodes 25, and a driver substrate 19 electrically connected to the two substrates 10, 20.
b, 29b, the first substrate 10 and the second substrate 20
And are bonded together.

According to the present embodiment, both substrates 10, 20
On both sides of the substrate 1 on the side opposite to the channel provided respectively.
Since the two substrates 10 and 20 are bonded together in a form in which the first and second channel rows face each other, the extraction electrodes and ink are applied between the two substrates 10 and 20. The inkjet head can be easily manufactured with high accuracy in a short time without causing the bonding to be difficult due to the intervening actuator to be supplied.

Next, the connection between the extraction electrode and the driver substrate will be described. Since both substrates 10 and 20 can be performed by common operations, the following description will be made with reference to the first substrate 10. As shown in FIG. 3, a driver substrate 19 b is connected to the extraction electrode 16 of the inkjet head via an anisotropic conductive material 30 by heating and pressing using a heating and pressing tool 31. The pitch width of the connection point between the driver substrate 19b and the extraction electrode 16 is 150 μm or less. The pitch width of the connection point indicates the electrode pitch of the extraction electrode 16 in the direction orthogonal to the electrode row, as indicated by P in FIG. It is particularly preferable that both the pitch width of the extraction electrode (pitch width of the connection point) corresponding to the channel of the ink jet head and the pitch width of the electrode of the driver substrate be 150 μm or less.

When the pitch width exceeds 150 μm, there is a possibility that the connection by soldering can be more easily manufactured. However, when the pitch width is 150 μm or less, many short-circuit defects occur, making it difficult to increase the density of the nozzles. At this time, it is conceivable that the density of the nozzles is increased and the extraction electrodes corresponding to each nozzle are spread in a fan shape to reduce the density, but a compact ink jet head cannot be obtained, and such connection by soldering is not possible. Then, it is difficult to obtain a compact inkjet head with high density nozzles.
When connecting electrodes having a pitch width of 150 μm or less, it is very advantageous to make connections as follows.

Further, the connection of the driver substrate 19b using the anisotropic conductive material 30 will be specifically described with reference to FIGS.

As shown in FIG. 4A, an anisotropic conductive material 30 is temporarily pressure-bonded to the driver substrate 19b using a heating and pressing tool 31 via a Teflon (registered trademark) sheet 32. Temporary pressure bonding of the anisotropic conductive material 30 is 0.05 to 0.5M.
This is performed at Pa / cm ² , 50 to 100 ° C., and 3 to 10 seconds. The anisotropic conductive material 30 used includes a space between the electrodes of the extraction electrode 16 (a space between the electrode rows of the extraction electrode 16) and a space between the electrodes 19b1 of the driver substrate 19b (an electrode row of the electrode 19b1). (The space between them) so that it is thick enough to fill the space.

The total electrode height of the extraction electrode 16 and the electrode 19b1 is 30 μm, and the distance between the electrodes (when the pitch width of the electrodes is 100%, the area where the electrodes are located in the direction perpendicular to the electrode row and the area where the electrodes are not located) When the width ratio is 50%, the thickness of the anisotropic conductive material 30 is 15 μm or more.

As in the present embodiment, the driver board 19
It is preferable to perform the final press bonding after the anisotropic conductive material 30 is temporarily pressed on the b side because the time can be reduced in the double-sided connection in which the two substrates 10 and 20 are pasted to each other. At the time of pressure bonding, the Teflon sheet 32 is narrowed as shown in FIG. The Teflon sheet 32 has a function of preventing the protruding resin of the anisotropic conductive material 30 from adhering to the heating and pressurizing tool 31 and also has a function of making the pressure uniform.

The alignment of the extraction electrode 16 and the electrode 19b1 of the driver substrate 19b is performed by previously setting the electrode pitch of the driver substrate 19b1 at a minus intersection as shown in FIG. Electrode 16 and FIG.
Match as shown in (a). At this time, if the electrode pitch is set as shown in FIG. 5B, the driver substrate 19b cannot be fully extended and a connection failure occurs, which is not preferable.

Next, the anisotropic conductive material 30 is completely pressed. The final pressure bonding of the anisotropic conductive material 30 is 2-3 MPa / c.
m ² , 170-250 ° C., 10-30 sec.

As shown in FIG. 4B, the Teflon sheet 32 is narrowed between the heating / pressing tool 31 and the driver board 19b in the same manner as in the temporary compression bonding, and the protruding anisotropic conductive material 30
Is prevented from adhering to the heating and pressing tool 31, and the pressure by the heating and pressing tool 31 is made uniform. The Teflon sheet 32 preferably has a thickness of 20 to 150 μm.

As shown in FIG. 4B, the driver board 19b is connected such that the coverlay 19b2 avoids the edge of the first board 10.

Although the description is omitted as described above, the extraction electrode 26 is also similar to the extraction electrode 16 in the same manner as the extraction electrode 16.
0 is connected to the driver board 29b.

As described above, the first substrate 10 and the second substrate 20 are bonded together, and the extraction electrodes 16 and 26 of the two substrates 10 and 20 are connected via the anisotropic conductive material 30 to the driver substrates 19 b and 20 b. 29b, and the pitch width of the connection points is 150 μm or less, and the extraction electrodes 16, 26 and the driver substrates 19b, 29b can be reliably and compactly connected in a short time, and the nozzle density is increased. Can be.

The channel rows of the channels 14 and 24 and the electrode rows of the extraction electrodes 16 and 26 have substantially the same pitch width, and the extraction electrodes 16 and 26 and the driver substrate 19 have the same pitch width.
b and 29b can be reliably and compactly connected.

The channels 14 and 24 are arranged such that ink channels and dummy channel rows are alternately arranged, and every other ink channel is arranged. Partitions of the ink channels are arranged so that ink is ejected from the ink channels. Even if is shear-deformed, the other ink channels are not affected, and the driving of the ink channels is easy.

The extraction electrodes 16 and 2 of the respective substrates 10 and 20
6 is provided on the surface opposite to the surface at the time of bonding, so that the work of providing the extraction electrodes 16 and 26 is easy,
Moreover, the driver substrate 19 can be easily connected to the extraction electrodes 16 and 26.
b, 29b can be connected.

6 and 7 show another embodiment of the ink jet head. FIG. 6 is a schematic structural view of the ink jet head, and FIG. 7 is a sectional view showing a channel of the ink jet head.

The ink jet head of this embodiment has a first structure formed through a plurality of partition walls 41a and 42a.
, A thin substrate 4 and a thin substrate 4 provided on both sides with an electrode 45 provided for the partition walls 41a and 42a and an extraction electrode 46 provided following each of the electrodes 45.
2 and a driver substrate 49 electrically connected to each of the extraction electrodes 46 provided on both sides of the substrate 40. In the channel 44, ink channels and dummy channels are alternately arranged, and every other ink channel is arranged. Even if a partition wall of the ink channel is sheared so that ink is ejected from the ink channel, the channel 44 is deformed. The driving of the ink channel is easy without affecting other ink channels.

The extraction electrodes 46 provided on both sides are connected to the driver substrate 49 via the anisotropic conductive material 50, and the pitch width of the connection points is 150 μm or less. The connection via is the same as in FIG. 4 and FIG.

As described above, the driver substrates 49 are arranged on both sides of the substrate 40 via the anisotropic conductive material 50, and the electrodes can be drawn out at a pitch twice as large as the channel interval.

The first embodiment shown in FIGS.
The substrate and the second substrate, or the substrates shown in FIGS. 6 and 7, use a piezoelectric material. The piezoelectric material is not particularly limited as long as it causes a stress change by applying a voltage. A known material may be used, and a substrate made of an organic material may be used. The substrate is preferably a substrate made of a piezoelectric nonmetal material, for example, a ceramic substrate formed through a process such as molding and firing, or a substrate formed without the need for molding and firing. Examples of the organic material include an organic polymer and a hybrid material of an organic polymer and an inorganic substance.

As the ceramic substrate, PZT (Pb
There are ZrO ₃ -PbTiO ₃ and PZT with a third component added, and Pb (Mg _1/2 Nb _2/3 ) O ₃ and Pb (M
n _1/3 Sb _2/3 ) O ₃ , Pb (Co _1/3 Nb _2/3 ) O _{3 and the} like, and further, BaTiO ₃ , ZnO, LiNbO ₃ , LiT
It can be formed using aO ₃ or the like.

The substrate formed without the need for molding and firing can be formed, for example, by the Solgel method, coating of a laminated substrate, or the like. According to the Solgel method, a sol is converted into a homogeneous solution having a predetermined chemical composition, water,
It is adjusted by adding an acid or an alkali to cause a chemical change such as hydrolysis. Further, by performing a treatment such as evaporation or cooling of the solvent, a sol in which a precursor of fine particles of a desired composition or a non-metallic inorganic fine particle is dispersed is prepared and can be used as a substrate. A compound having a uniform chemical composition can be obtained, including the addition of a small amount of a different element, and a water-soluble metal salt or metal alkoxide such as sodium silicate is generally used as a starting material. A compound represented by the formula M (OR) n, in which the OR group has a strong basic property, is easily hydrolyzed, and changes into a metal oxide or a hydrate thereof through a condensation process like an organic polymer. .

As a method of coating a laminated substrate, there is a method of vapor deposition from a vapor phase. A method of forming a ceramic substrate from a vapor phase includes a vapor deposition method by physical means and a production method by a chemical reaction of the vapor phase or the substrate surface. The physical vapor deposition method (PVD) is further subdivided into a vacuum vapor deposition method, a sputtering method, an ion plating method, and the like, and the chemical method is a gas phase chemical reaction method (CVD) and a plasma CVD method. There are laws. Vacuum evaporation as physical vapor deposition (PVD) is a method in which a target substance is heated and evaporated in a vacuum, and the vapor is deposited on a substrate. Sputtering is a method in which high-energy particles are applied to a target substance (target). This method utilizes the sputtering phenomenon, in which atoms and molecules on the target surface exchange momentum with the colliding particles, and are repelled from the surface. Further, the ion plating method is a method of performing deposition in an ionized gas atmosphere. Further, in the CVD method, a compound containing atoms, molecules or ions constituting the film is made into a gaseous phase, and then guided to a reaction section with an appropriate carrier gas, and the film is reacted or deposited on a heated substrate to form a film. Forming
In the plasma CVD method, a gas phase is generated by plasma energy, and a film is deposited by a gas phase chemical reaction in a relatively low temperature range from 400 ° C. to 500 ° C.

The material of the cover substrate is not particularly limited, and may be a substrate made of an organic material. However, a substrate made of a non-piezoelectric non-metallic material is preferable. It is preferable to be selected from at least one of alumina, aluminum nitride, zirconia, silicon, silicon nitride, silicon carbide, quartz, and PZT.

This non-piezoelectric non-metallic substrate is formed, for example, by molding,
There is a ceramic substrate formed through a process such as firing, or a substrate formed without the need for forming and firing,
For example, Al ₂ O ₃ , SiO ₂ , a mixture thereof, a melt, ZrO ₂ , BeO, AlN, SiC, or the like can be used as a ceramic substrate formed by a process such as firing. Examples of the organic material include an organic polymer and a hybrid material of an organic polymer and an organic substance.

As a metal to be an electrode, platinum, gold, silver, copper, aluminum, palladium, nickel, tantalum, and titanium can be used. In particular, from the viewpoint of electrical characteristics and workability, gold, aluminum, copper, Nickel is good, plating,
It is formed by vapor deposition and sputtering.

As the anisotropic conductive material, it is preferable to use an anisotropic conductive film (film) having the three functions of adhesion, conductivity and insulation at the same time. As the binder and the conductive particles constituting the anisotropic conductive film, those made of various known materials can be used. In particular, the conductive particles are preferably metal particles. By using the metal particles, the metal particles can break through the oxide film of the aluminum electrode formed by aluminum vapor deposition, thereby achieving good conduction. Incidentally, as the anisotropic conductive material, it is preferable to exclude anisotropic conductive rubber. Generally, anisotropic conductive rubber is disadvantageous for electrode connection of an ink jet head which requires a large current to flow.

Also in the above-described two embodiments, a metal particle is used to connect an electrode provided on a flexible substrate as a driver substrate to an extraction electrode provided on a piezoelectric PZT substrate by aluminum evaporation. N
Connection and adhesion were performed using an anisotropic conductive film containing i-particles as conductive particles to obtain a high-performance inkjet head free from poor connection.

In the above embodiment, an ink jet head in which ink channels and dummy channels are alternately arranged has been described as an example. However, an ink jet head having no dummy channel is formed by the same manufacturing and the same structure. Can be obtained. For example, three adjacent channels in order from one side are grouped into one group (sequentially, the first, second, and third channels of the first group, the first, second, and third channels of the second group, ..), The same N-th channel (N: 1, 2 or 3) is driven to simultaneously eject ink, that is, for example, the first, second,. One channel may be simultaneously driven, and the first channel, the second channel, and the third channel may be sequentially shifted in phase to eject ink. This makes it possible to prevent the deformation from affecting the channel adjacent to the channel whose partition wall has been deformed so as to eject ink, and eliminates the necessity of a dummy channel next to the ink channel. It is preferable because it can further contribute to the production.

In the above embodiment, the electrodes of the ink jet head are formed using a dry film, but are manufactured in such a manner that an ultraviolet reactive (ultraviolet curable) resist is applied instead of the dry film. You can also. In the same manner as the dry film, the electrode pattern is baked on the resist by irradiating ultraviolet rays with the glass substrate provided with the electrode pattern as a mask, and the resist on the electrode portion is removed by performing a developing process. Groove processing with a dicing disk while contacting the part, except for the electrode part and the groove part which becomes the channel, the substrate covered with resist, gold, silver,
It can be manufactured by depositing or plating copper, aluminum, chromium, nickel or the like, and then dissolving and removing the resist.

[0062]

As described above, according to the first aspect of the present invention, the first substrate and the second substrate are bonded together, and the extraction electrodes of both substrates are connected to the driver via the anisotropic conductive material. It is connected to the substrate and the pitch width of the connection points is 150 μm or less, so that the extraction electrode and the driver substrate can be reliably and compactly connected in a short time, and the nozzle density can be increased.

According to the second aspect of the present invention, since the extraction electrode of each substrate is provided on the surface opposite to the surface on which the substrates are bonded, the operation of providing the extraction electrode is easy, and the extraction electrode can be easily extracted. The driver substrate can be easily connected to the electrodes.

According to the third aspect of the present invention, the first substrate and the second substrate are bonded together so that each channel row faces back, and the extraction electrodes of both substrates are connected to the first substrate and the second substrate. It is provided on the side opposite to the side where the substrate is bonded, and is connected to the driver board via an anisotropic conductive material, so that the extraction electrode and the driver board can be securely and compactly connected in a short time. In addition, the nozzle density can be easily increased.

According to the present invention, the extraction electrode of the substrate is connected to the driver substrate via the anisotropic conductive material,
Further, the pitch width of the connection points is 150 μm or less, so that the extraction electrode and the driver substrate can be reliably and compactly connected in a short time, and the nozzle density can be increased.

According to the fifth aspect of the present invention, each channel and each extraction electrode have substantially the same pitch width, and the extraction electrode and the driver substrate can be reliably and compactly connected.

In the invention according to claim 6, the channel is:
Since every other ink channel is arranged, even if the ink is ejected from the ink channel, the other ink channels are not affected, and the driving of the ink channel is easy.

According to the seventh aspect of the present invention, since an anisotropic conductive film containing conductive particles made of metal particles is used as the anisotropic conductive material, the conduction on the electrode side is good. When the aluminum electrode formed by the method is used as at least one electrode, the metal particles can break through the oxide film, and good conduction can be easily performed.

According to the eighth aspect of the present invention, good conduction is easily achieved in combination with the configuration using an anisotropic conductive film containing conductive particles made of metal particles as the anisotropic conductive material. Thus, a high-performance inkjet head free from poor connection can be obtained.

[Brief description of the drawings]

FIG. 1 is a schematic view showing a process of manufacturing an ink jet head.

FIG. 2 is a cross-sectional view illustrating a channel of the inkjet head.

FIG. 3 is a diagram illustrating connection between an extraction electrode and a driver substrate.

FIG. 4 is a diagram illustrating connection of a driver substrate using an anisotropic conductive material.

FIG. 5 is a diagram illustrating connection of a driver substrate using an anisotropic conductive material.

FIG. 6 is a schematic configuration diagram of an ink jet head.

FIG. 7 is a cross-sectional view illustrating a channel of the inkjet head.

[Explanation of symbols]

 Reference Signs List 10 first substrate 15 electrode 16 extraction electrode 19b driver substrate 20 second substrate 25 electrode 26 extraction electrode 29b driver substrate 30 anisotropic conductive material 44 electrode 46 extraction electrode 49 driver substrate 50 anisotropic conductive material

Claims (8)

[Claims] A first channel row formed through a plurality of partition walls, an electrode provided for the partition wall, and an extraction electrode provided following each of the electrodes.
A second channel row formed through a plurality of partition walls, an electrode provided for the partition wall, and an extraction electrode provided subsequent to each of the electrodes. A substrate, and a driver substrate electrically connected to each of the first and second substrates, wherein the first substrate and the second substrate are bonded to each other. The extraction electrodes of the first and second substrates, respectively,
An ink jet head connected to the corresponding driver substrate via an anisotropic conductive material, and a pitch width of a connection point between the extraction electrode and the driver substrate is 150 μm or less. 2. The ink jet head according to claim 1, wherein the extraction electrode of each of the substrates is provided on a surface opposite to a surface at the time of bonding. 3. A first channel comprising a first channel row formed through a plurality of partition walls, electrodes provided for the partition walls, and extraction electrodes provided subsequent to the respective electrodes.
A second channel row formed through a plurality of partition walls, an electrode provided for the partition wall, and an extraction electrode provided subsequent to each of the electrodes. A substrate, and a driver substrate electrically connected to each of the first and second substrates, respectively, wherein the first substrate and the first substrate are arranged such that the respective channel rows face back. A second substrate is bonded to the first substrate, and the extraction electrodes of the first and second substrates are
An ink jet head provided on a side opposite to a side where the first substrate and the second substrate are bonded, and connected to the corresponding driver substrates via an anisotropic conductive material. 4. A substrate comprising: a first channel row formed through a plurality of partition walls; electrodes provided for the partition walls; and extraction electrodes provided subsequent to the respective electrodes. A driver substrate electrically connected to both sides of the substrate, wherein the extraction electrodes are provided on both sides of the substrate and correspond to both sides via an anisotropic conductive material. An ink jet head connected to the driver substrate, wherein a pitch width of a connection point between the extraction electrode and the driver substrate is 150 μm or less. 5. The ink jet head according to claim 1, wherein said channel and each of said extraction electrodes have substantially the same pitch width. 6. The ink jet head according to claim 1, wherein the ink channels are arranged every other ink channel. 7. The anisotropic conductive material according to claim 1, wherein an anisotropic conductive film containing conductive particles made of metal particles is used as the anisotropic conductive material. Ink jet head. 8. The ink jet head according to claim 7, wherein said extraction electrode is formed by vapor deposition of aluminum.