JP2002122094A5

JP2002122094A5 -

Info

Publication number: JP2002122094A5
Application number: JP2000315630A
Authority: JP
Filing date: 2000-10-16
Publication date: 2004-12-02

Description

【０００７】
【課題を解決するための手段】
請求項１に記載の発明は、ケーシング内部に、ロータ側の回転翼とステータ側の固定翼が交互に配置された翼排気部を有し、前記翼排気部は、第１の翼排気部と、該第１の翼排気部の下流側に配置され、前記回転翼と固定翼間の軸方向クリアランスによる排気作用を有する第２の翼排気部から構成されているターボ型真空ポンプにおいて、前記ターボ型真空ポンプのケーシングが前記第１の翼排気部を固定するケーシングと、前記第２の翼排気部を固定するケーシングとに少なくとも二分割されていることを特徴とするターボ型真空ポンプである。[0007]
[Means for Solving the Problems]
The invention according to claim 1 has a vane exhaust portion in which rotors on the rotor side and fixed vanes on the stator side are alternately arranged in a casing, and the wing exhaust portion is a first vane exhaust portion , is disposed downstream of the blade exhaust portion of the first, in the turbo vacuum pump and a second blade pumping section having an exhaust action of axial direction click clearance between the fixed blades and the rotary blades, The turbo-type vacuum pump is characterized in that a casing of the turbo-type vacuum pump is divided into at least a casing for fixing the first blade exhaust part and a casing for fixing the second blade exhaust part. is there.

【００１２】
請求項５に記載の発明は、ロータ下側に固定された軸方向クリアランスによる径方向排気作用を有する回転翼に対して、固定翼をクリアランスを調整して積み上げて固定し、該固定翼に対して下側ケーシングを固定し、次いで、ロータ上側に固定された回転翼に対して固定翼を積み上げて固定し、該固定翼に対して上側ケーシングを固定し、前記下側ケーシングと上側ケーシングとを接合することを特徴とするターボ型真空ポンプの製造方法である。[0012]
The invention according to claim 5, with respect to the rotating blades having a radial exhaust action of axial Direction click clearance fixed to the rotor lower, fixed vanes fixed stacked by adjusting the clearance, the fixed blade The lower casing is fixed to the upper casing, and then the stationary vanes are stacked and secured to the rotor vanes fixed to the upper side of the rotor, and the upper casing is secured to the stationary vanes, the lower casing and the upper casing And a method of manufacturing a turbo-type vacuum pump.

Claims

The casing has a blade exhaust portion in which rotors on the rotor side and fixed blades on the stator side are alternately arranged, and the blade exhaust portion includes a first blade exhaust portion and the first blade exhaust portion. disposed downstream, in the turbo vacuum pump and a second blade pumping section having an exhaust action of axial direction click clearance between the fixed blades and the rotor blades, the casing of the turbo vacuum pump is the A turbo-type vacuum pump is divided into at least a casing for fixing a first wing exhaust part and a casing for fixing the second wing exhaust part.

The turbo-type vacuum pump according to claim 1, wherein the second wing exhaust portion has a helical unevenness formed on at least one of the surfaces of the fixed wing or the rotary wing facing each other.

The turbo type vacuum pump according to claim 1 or 2, wherein the first blade exhaust part is constituted by a turbine blade.

The turbo type vacuum pump according to claim 1 or 2, wherein the first blade exhaust portion is a cylindrical thread groove rotor having a thread groove on at least one of a rotor side and a stator side.

With respect to the rotating blades having a radial exhaust action of a fixed axis Direction click clearance to the rotor lower, fixed vanes fixed stacked to adjust the clearance to fix the lower casing with respect to the fixed wing Then, the fixed blades are stacked and fixed to the rotor fixed to the upper side of the rotor, the upper casing is fixed to the fixed blades, and the lower casing and the upper casing are joined. Method of manufacturing turbo type vacuum pump.