JP2002118399A - Apparatus for holding printed circuit board - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily obtain a printed circuit board holding unit having a backup pin mounted on a holding base in a short time. SOLUTION: A negative pressure supply hole 224 is provided at a base 218 made of aluminum, and an opening/closing valve 260 is provided at an end of its opening. The valve 260 has a ball 268 made of steel and a valve seat 262 provided at the base 218 to shut off the hole 224. A release preventive plate 216 made of steel having a communication hole 240 prevents drawing of the ball 268 from a valve hole 226. The pin 212 has a pin 286, a pedestal 320, a permanent magnet 328 or the like. When the pin 212 is mounted on the base 210, the plate 215 and the ball 268 are magnetized. The pin 212 is fixed to the base 210 by its magnetic force, the ball 268 is separated from the seat 262, and the hole 224 is opened. The hole 224 in which the pin 212 is not mounted remains seated on the seat 262 as it is so that no negative pressure is leaked.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a printed wiring board holding device, and more particularly to a device for attracting and supporting a printed wiring board by negative pressure. In addition, a printed wiring board is strictly a printed circuit board when electric components are mounted. It is referred to as a plate.

[0002]

2. Description of the Related Art Many printed wiring boards are formed by forming a circuit pattern made of a conductive material on a relatively thin substrate made of an electrical component insulator such as a synthetic resin, and have flexibility. Therefore, when electrical components (including electronic components) are mounted on such a printed wiring board, or when an adhesive or cream-like solder is applied for mounting the electrical components, a considerable number of printed wiring boards are mounted on the back side. If it is not supported at this point, it cannot be supported while maintaining a flat surface with high accuracy.

For this reason, conventionally, for example, Japanese Patent Laid-Open No.
As described in Japanese Patent Publication No. 189, it is known that a printed wiring board is attracted and supported by negative pressure. The printed wiring board holding device described in this publication includes a base plate and a plurality of backup pins. The base plate is formed with a plurality of negative pressure supply holes opened on the upper surface thereof, and is connected to a negative pressure source via a passage or the like provided in the base plate. The backup pin includes a long pin portion and a container-like pedestal portion, and the pin portion has a passage formed therethrough in the axial direction, and communicates with a space in the pedestal portion. The backup pin is mounted on the upper surface of the base plate at the lower end surface of the pedestal portion in close contact with the periphery of the opening of the negative pressure supply hole. When a negative pressure is supplied, the printed wiring board is sucked and supported from below.

[0004] The backup pin is used for the printed wiring board,
On the back surface opposite to the work surface or the front surface on which the mounting of the electric component is performed, the printed wiring board is held while avoiding the unevenness of the printed wiring board itself and the mounted electric component. Therefore, on the back surface of the printed wiring board, the area that can be held by the backup pin is limited, and the installation position of the backup pin on the base plate is limited according to the position of the holdable area,
A backup pin is attached to a selected one of the plurality of negative pressure supply holes provided in the base plate. For this reason, the negative pressure supply hole to which the backup pin is not attached is covered with a cap so that leakage of negative pressure is prevented.

[0005]

However, it is troublesome to cover the negative pressure supply hole to which the backup pin cannot be attached, so that the backup pin is attached to the base plate and the printed wiring board is mounted. It takes time to obtain a printed wiring board holding device that is attracted and supported by negative pressure. The present invention is based on the above circumstances, and an object of the present invention is to easily and quickly obtain a printed wiring board holding device that sucks and holds a printed wiring board by negative pressure by a holding member attached to a holding table. According to the present invention, a printed wiring board holding device of each of the following embodiments can be obtained. As in the case of the claims, each aspect is divided into sections, each section is numbered, and if necessary, the other sections are cited in a form in which the numbers are cited. This is for the purpose of facilitating the understanding of the present invention and should not be construed as limiting the technical features and combinations thereof described in the present specification to those described in the following sections. .
Further, when a plurality of items are described in one section, the plurality of items need not always be adopted together. It is also possible to select and adopt only some of the items. (1) A holding base having a plurality of negative pressure supply holes opened in a flat upper surface, and a lower end surface closely attached to the periphery of the openings of the plurality of negative pressure supply holes, attached to the upper surface of the holding base, and And at least one holding member formed with a negative pressure passage that is opened at the upper end surface through the holding member, supports the printed wiring board at the upper end surface of the holding member, and from the negative pressure supply hole through the negative pressure passage. In a printed wiring board holding device that sucks the printed wiring board by the supplied negative pressure,
Each of the plurality of negative pressure supply holes is closed when the holding member is not attached, but is opened according to attachment of the holding member to the holding table, and the negative pressure supply hole and the negative pressure passage are opened. A printed wiring board holding device provided with an on-off valve for communicating with a printed circuit board (claim 1). The holding member is attached only to a position corresponding to a negative pressure supply hole selected from a plurality of negative pressure supply holes provided in the holding table. The on-off valve is opened according to the attachment, the negative pressure supply hole is communicated with the negative pressure passage in the holding member, and the negative pressure is supplied to the negative pressure passage. Since the holding member supports the printed wiring board from below at its upper end surface, the printed wiring board does not lower, and the negative pressure causes the printed wiring board to be attracted. Can be held without warping in a direction approaching or moving away from the holding table. In the negative pressure supply hole where the holding member is not attached, the on-off valve remains closed, as in the past,
Even if the negative pressure supply hole where the holding member is not attached is not closed with a plug or cap, the negative pressure will not leak,
A printed wiring board holding device capable of holding a desired portion of the printed wiring board at a position at a desired distance from the holding table can be obtained easily and in a short time. (2) A state in which the on-off valve is provided with an upwardly facing valve seat at the opening-side end of the negative pressure supply hole, and is disposed in the valve hole and seated on the valve seat. A part that forms at least a valve seat peripheral part of the negative pressure supply hole of the negative pressure supply hole, the valve including a valve element that shuts off the negative pressure supply hole and a release prevention part that prevents the valve element from being released from the valve hole. Is made of a non-magnetic material, and one of the vicinity of the lower end face of the holding member and the valve element is made of a permanent magnet, and the other is made of a ferromagnetic material. (Claim 2). Since at least a portion of the negative pressure supply hole forming the peripheral portion of the valve seat is made of a non-magnetic material, the holding member can be made of a permanent magnet or a ferromagnetic material even if the valve element is made of a ferromagnetic material. When not attached to the holding table, the valve element is seated on the valve seat by its own weight, and the on-off valve is closed. When the holding member is attached to the holding table, the valve element and the holding member made of a ferromagnetic material are magnetized, the valve element is attracted to the holding member by magnetic force, separates from the valve seat, and the on-off valve is opened. . Since the valve hole is provided with a separation preventing portion, the valve element does not separate from the valve hole, and when the holding member is removed from the holding base, the valve element returns to a state of sitting on the valve seat by its own weight, The on-off valve is closed. The valve element of the on-off valve provided for the negative pressure supply hole to which the holding member is not attached remains seated on the valve seat. In a state where the negative pressure is supplied to the negative pressure supply hole, suction is performed by the negative pressure. Then, the valve is seated on the valve seat, the on-off valve is kept closed, and leakage of negative pressure is prevented well. The valve has various shapes such as a sphere, a hemisphere, a cone, a truncated cone, a cylinder having a hemisphere at one end, or a truncated cone at one end, and a cylinder at the other end. Shapes can be employed. The heddle is a hemisphere, a cone, a truncated cone,
When one end forms a hemispherical cylinder or one end forms a truncated cone, and the other end forms a cylindrical member, the one end has a flat surface perpendicular to the axis of the valve. The suction surface is provided, and the valve element is disposed in the valve hole with the suction surface positioned on the side of the separation preventing portion. Therefore, the area of the surface to be suctioned by the vicinity of the lower end surface of the holding member of the valve element is large, and the suction is performed with a strong suction force. When the valve has a directional shape, such as a hemisphere, that is, when a portion that sits on the valve seat of the valve and a portion that contacts the disengagement prevention portion are determined,
Even if the valve repeats the separation from the valve seat and the seating, it is desirable that the predetermined portion of the valve is seated flat on the valve seat without tilting, and a means for regulating the tilt of the valve is provided. It is desirable. For example, if the distance between the attracted surface of the valve element and the detachment preventing portion is reduced, the inclination of the valve element is regulated by the engagement of the two, and the valve element is seated on the valve seat without tilting,
The on-off valve is properly closed. In this case, a portion of the valve element that comes into contact with the attracted surface and the detachment preventing portion that contacts the attracted surface constitutes the inclination restricting means. Alternatively, the gap between the outer peripheral surface of the valve element and the inner peripheral surface of the valve hole may be reduced so that the engagement of the two restricts the inclination of the valve element. In this case, the outer peripheral surface of the valve and the inner peripheral surface of the valve hole constitute the inclination restricting means. Alternatively, when the valve element is a member including a cone, a truncated cone, or a truncated cone and a cylindrical body, an axial distance between a portion seated on the valve seat and an end opposite to the side of the separation preventing portion. Is preferably longer than the axial distance between the portion to be seated on the valve seat and the end on the side of the separation preventing portion. With this configuration, when the valve element is seated on the valve seat, the valve element is hung on the valve seat, and the valve element is easily inclined and can be easily seated on the valve seat without being inclined. In this case, the portion between the portion of the valve seat that sits on the valve seat and the end opposite to the disengagement prevention portion constitutes the inclination restricting means. (3) The printed wiring board holding device according to (2), wherein the portion near the lower end surface of the holding member is made of a permanent magnet, and the valve body is made of a ferromagnetic material. In many cases, the portion near the lower end surface of the holding member is larger than the valve element, and according to this aspect, a large permanent magnet can obtain a larger magnetic force, and the valve element can be reliably separated from the valve seat. Further, if the valve is made of a ferromagnetic material, the detachment preventing portion can be made of a ferromagnetic material, and a valve of a ferromagnetic material is attached to the detachment preventing portion magnetized by the permanent magnet of the holding member. It is sucked and reliably separated from the valve seat. In particular, as described later, a detachment prevention plate made of a ferromagnetic material is fixed to a holding base body made of a nonmagnetic material, and a portion of the detachment prevention plate corresponding to the valve hole functions as a detachment prevention portion. In this case, the retaining member is magnetized by the permanent magnet forming the vicinity of the lower end surface of the holding member, so that the holding member is fixed to the releasing preventing plate with a sufficiently large magnetic force, and the magnetized detachment plate is magnetized. The valve element is sucked by the prevention plate, and the on-off valve is opened. Further, the degree of freedom of the shape of the valve is increased. If the valve is made of a permanent magnet, the direction of the magnetic pole must be kept unchanged even if the valve is repeatedly separated from the valve seat and seated. Regardless, the phase may change each time the valve is repeatedly separated from the valve seat and seated, and the degree of freedom of the shape is high. If the valve is made of a permanent magnet, for example, a direction maintaining means for keeping the direction of the valve fixed and preventing the direction of the magnetic pole from changing may be provided. If it has a directional shape, such as a cylindrical body having a hemispherical part at one end,
As described in the section (2), by providing the inclination restricting means, the inclination of the valve element is prevented, the rotation is prevented, and the direction of the magnetic pole is prevented from changing. A direction maintaining means may be provided separately from or together with the inclination restricting means. (4) The printed wiring board holding device according to the mode (3), wherein the valve element is a sphere. If the valve element is a sphere, it is easy to sit on the valve seat, and the on-off valve is securely closed. Further, a commercially available steel ball can be used as a valve, and an on-off valve can be manufactured at low cost. (5) The disengagement prevention portion covers the opening of the valve hole, contacts the valve element to prevent the valve element from being detached from the valve hole, and operates even when the valve element is in contact with the valve element. Includes a detachment prevention member provided with a communication hole that is not closed and maintains the communication between the negative pressure supply hole and the negative pressure passage.
(4) The printed wiring board holding device according to any one of the above (4). One or more communication holes may be provided. As the shape of the communication hole, various shapes can be adopted, for example,
It may be circular or fan-shaped. The negative pressure is supplied from the negative pressure supply hole to the negative pressure passage through the communication hole. (6) The printed wiring board holding device according to (5), wherein a portion near the lower end surface of the holding member is made of a permanent magnet, and the detachment prevention member is made of a ferromagnetic material. When the holding member is placed on the holding table, the valve element and the separation preventing member are magnetized, and the valve element is sucked by the separation preventing section, and the holding member is also sucked by the valve element and the separation preventing member, and Fixed. The detachment preventing member made of a ferromagnetic material, the valve element, and the portion formed by the permanent magnet of the holding member constitute a fixing device. The holding member may be fixed to the holding table by a fixing device such as a bolt. However, mounting on the holder,
Removal work is troublesome, but if you want to fix by magnetic force, you only need to put the holding member on the holding table,
Attachment and removal of the holding member to and from the holding table can be easily performed in a short time. When the holding member holds the printed wiring board, the holding member is attracted to the holding table by the negative pressure and is firmly fixed. The lower end of the holding member is brought into close contact with the periphery of the opening of the negative pressure supply hole. At the same time that the printed wiring board is sucked by the negative pressure supplied to the negative pressure passage, the holding member is sucked by the holding table by the negative pressure. It is. In order to use this suction function positively even when the holding member does not hold the printed wiring board, a throttle may be provided in a negative pressure passage penetrating through the inside of the holding member. In a state where the holding member does not hold the printed wiring board, air flows into the negative pressure passage from the upper end opening of the holding member. Sufficient negative pressure can be obtained inside the lower end closely attached to the periphery of the opening of the pressure supply hole. (7) A positioning recess for accommodating at least a part of the valve element and positioning the valve element in the radial direction of the valve hole is formed on a lower surface of the detachment preventing member. The printed wiring board holding device according to any one of the above items). According to this aspect, the position in the radial direction of the valve hole between the valve and the communication hole in a state where the valve is prevented from being separated by the separation preventing member is determined, and the communication hole may be closed by the valve. Therefore, a state in which the negative pressure supply hole and the negative pressure passage communicate with each other can be reliably obtained. (8) The detachment prevention member has a size that covers a plurality of valve holes corresponding to at least a part of the plurality of negative pressure supply holes, and is a detachment prevention plate fixed to an upper surface of the holding base. The printed wiring board holding device according to any one of (5) to (7) (Claim 4). The detachment prevention plate may have a size that covers a plurality of valve holes corresponding to all of the plurality of negative pressure supply holes, and a size that covers a plurality of valve holes corresponding to some of the negative pressure supply holes. You may have. In this section, the portion corresponding to the valve hole of the separation prevention plate functions as a separation prevention portion, the portion near the lower end surface of the holding member is made of a permanent magnet, the valve element is made of a ferromagnetic material, and the separation prevention portion plate is If the holding member is made of a ferromagnetic material, the holding member is fixed to the holding table with a sufficiently large magnetic force by a separation preventing plate made of a ferromagnetic material. A plurality of valve holes can be covered by one detachment prevention plate, and the detachment prevention member can be easily attached to the holding table. (9) The on-off valve is formed at the opening end of the negative pressure supply hole with a larger diameter than the negative pressure supply hole, and the opening / closing valve covers the opening of the valve hole with respect to the holding table. A valve seat member that is fixedly provided and has a through hole and a valve seat formed around the through hole, and in the valve hole, a closed position for sitting on the valve seat and an open position away from the valve seat. , A spring member for urging the valve element toward the valve seat, and protruding from one of the holding member and the valve element, wherein the holding member supplies the negative pressure. In the state in which the holding member is in close contact with the periphery of the hole, the holding member contacts the other of the valve member and the valve member is separated from the valve seat against the urging force of the spring member. The valve opening allows the valve to be seated on the valve seat by the biasing force of the spring member when the valve cannot be brought into close contact with the periphery of the valve. Including electromotive Tokyo (1) PWB holding apparatus according to claim. In the printed wiring board holding device of this aspect, in a state where the holding member is attached to the holding table, the valve opening projection comes into contact with the other of the holding member and the valve member, so that the valve element is separated from the valve seat, The negative pressure passage is communicated with the negative pressure supply hole. When the holding member is removed from the holding table, the valve is seated on the valve seat and the on-off valve is kept closed, so it is necessary to close the negative pressure supply hole to which the holding member is not attached with the closing member. Therefore, it is possible to easily and quickly obtain a printed wiring board holding device capable of holding a desired portion of the printed wiring board at a position at a desired distance from the holding table. (10) The printed wiring according to item (9), wherein the valve opening projection projects from the valve element, and when the valve element is seated on the valve seat, projects through the through hole to the outside. Plate holding device. (11) The valve-opening projection is provided on the holding member so as to protrude downward from a lower end surface of the holding member. When the holding member is attached to the holding table, the valve-opening protrusion penetrates the through-hole. (9) It protrudes into the valve hole and pushes the valve element away from the valve seat against the urging force of the spring member.
Item 6. The printed wiring board holding device according to item 1. As long as the valve-opening projection is fitted in the through hole, communication between the negative pressure supply hole of the holding table and the negative pressure passage of the holding member can be ensured,
The valve opening projection also serves as the communication assurance projection. (12) The on-off valve includes a seal member for preventing leakage of negative pressure from between the valve element and the valve seat when the valve element is seated on the valve seat. (2) to (11). The printed wiring board holding device according to any one of the above. (13) The printed wiring board holding device according to (12), wherein the seal member is made of a material softer than the valve seat and includes a pad that covers the valve seat. The pad is made of, for example, synthetic resin or rubber. When the holding member is removed from the holding base and the valve seats on the valve seat, the valve seats on the valve seat via the pad. Therefore, in the on-off valves described in the items (2) to (8), when the negative pressure is supplied to the negative pressure supply hole, the valve element is sucked by the negative pressure and pressed against the pad, thereby deforming the pad. As a result, the valve closely contacts the valve element without any gap, and leakage of negative pressure is more reliably prevented. Further, in the on-off valve described in any one of the modes (9) to (11), the valve element is pressed against the pad by the bias of the spring member, and leakage of the negative pressure is more reliably prevented. The valve seat may be covered with a pad, and the valve may be covered with a pad, or only the valve may be covered with a pad. (14) The printed wiring board holding device according to the mode (12), wherein the seal member includes an O-ring. The O-ring may be provided separately from the valve seat, or may be provided so as to function as a valve seat. Further, the O-ring may be provided in the valve element or in the valve hole. When the O-ring is provided separately from the valve seat, the valve element is seated on the valve seat provided in the valve hole to close the on-off valve and contact the O-ring. The valve element is pressed against the O-ring by the suction of the valve element by the supply of the negative pressure or the urging of the spring member, and the O-ring is elastically deformed and closely adhered to the valve element, thereby reliably preventing leakage of the negative pressure. The elastic deformation limit of the O-ring is defined by the seating of the valve element on the valve seat, and the O-ring is prevented from being excessively elastically deformed and the sealing function is deteriorated. When the O-ring functions as a valve seat,
The O-ring comes into contact with the inner peripheral surface of the valve hole and the valve element, and the valve element is seated while elastically deforming the O-ring by suction of the valve element by the supply of negative pressure or urging of the spring member. As well as being closed, the O-ring prevents leakage of negative pressure. (15) The printed wiring board holding device according to any one of (12) to (14), wherein at least one surface of at least one of the seal member and the valve element is formed of an anti-sticking material. If at least one surface of at least one of the seal member and the valve is formed of an anti-sticking material, the seal member and the valve remain in contact with each other, so that the on-off valve is not opened and the printed wiring board is not sucked. Is avoided. As the anti-sticking material, for example, a chemically stable material that is chemically more stable than rubber and the like thereof, which is usually used as a material of the sealing member, or a low friction coefficient material having a smaller friction coefficient than rubber and the like is preferable. It is. The former is particularly effective in preventing sticking when the seal member and the valve are kept in contact for a long time, and the latter is effective in preventing sticking (separation failure) when contact and separation are frequently repeated. When only the surface of the seal member or the valve element is formed of the anti-sticking material, an anti-sticking layer is formed on the surface of the base material, and the anti-sticking layer is made of a material that is chemically more stable than the base material, or The material has a low coefficient of friction. As the anti-sticking material, for example, polytetrafluoroethylene is preferable. Polytetrafluoroethylene is chemically stable and also has a low coefficient of friction. (16) The plurality of negative pressure supply holes are opened substantially uniformly and regularly in the upper surface of the holding table.
The printed wiring board holding device according to any one of the above modes (1) to (15). Even if the distribution of the parts that can be held by the holding member of the printed wiring board is irregular, if the negative pressure supply holes are provided almost uniformly and regularly, it corresponds to any of the negative pressure supply holes The printed wiring board can be held by attaching the holding member at the position where the printed wiring board is to be mounted. (17) The holding member has a rod-shaped portion, and supports the printed wiring board at the upper end surface of the rod-shaped portion, and closely adheres to the upper end portion of the rod-shaped portion around the upper end surface of the rod-shaped portion. The printed wiring board holding apparatus according to any one of the above modes (1) to (16), wherein a suction cup made of rubber or a similar substance is attached. The suction cup prevents leakage of negative pressure from between the holding member and the printed wiring board, and the printed wiring board is more reliably held by the holding member. (18) The holding member has a mounting seat at a lower end portion, and a connection recess having an opening area twice or more the area of the opening of the negative pressure supply hole is formed on a lower surface of the mounting seat. The printed wiring board holding device according to any one of items) to 17). The portion of the holding member for holding the printed wiring board may be provided at the center of the mounting seat, or may be provided at a position off the center. The holding member can be attached to an arbitrary position on the holding table as long as the connection recess does not come off the opening of the negative pressure supply hole. It is possible to change the holding position of the printed wiring board of the holding member attached to one negative pressure supply hole. Even without this, the printed wiring board can be held and the number of negative pressure supply holes can be reduced.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which the present invention is applied to a printed wiring board holding device of an electric component mounting system will be described below in detail with reference to the drawings. In FIG.
Is a base which is a main body frame of an electric component mounting system 12 as an electric component mounting system which is a kind of wiring board working system, and an electronic component mounting device as an electric component mounting device which is a kind of a working device is provided on the base 10. 16,
An electronic component supply device 18 as an electrical component supply device, a printed wiring board support and transport device 20, and the like are provided. The printed wiring board supporting and transporting device 20 has a wiring board conveyor 22 arranged in the X-axis direction (the left-right direction in FIG. 1), and the printed wiring board 24 is transported by the wiring board conveyor 22 and shown in FIG. The stopper, which is a stop device to be omitted, is stopped at a predetermined electronic component mounting position, positioned and supported. The printed wiring board supporting and conveying device 20 will be described later in detail. One side of the wiring board conveyor 22 has an electronic component supply device 1
8 are provided. The description of the electronic component supply device 18 is omitted because it is not directly related to the present invention.

The electronic component mounting apparatus 16 of the present embodiment has the same configuration as the electronic component mounting apparatus described in Japanese Patent No. 2824378, and will be described briefly. In the electronic component mounting apparatus 16, the component mounting head 30, which is a work head, linearly moves in the X-axis direction and the Y-axis direction orthogonal to each other, and conveys and mounts the electronic component 32, which is a type of electric component. I have. Therefore, ball screws 34 are provided on both sides of the wiring board conveyor 22 of the base 10 in the Y-axis direction in parallel with the X-axis direction, and two nuts (not shown) provided on the X-axis table 36 are provided on each of the two nuts. These ball screws 34 are screwed,
When rotated by the X-axis table driving motor 38, the X-axis table 36 is moved in the X-axis direction. The two ball screws 34 are provided on the base 10.
Guide rails, not shown, are provided on the lower side of the X-axis table 36. The X-axis table 36 is slidably fitted to the guide rails in a guide block, not shown, which is a guided member. Is done.

A ball screw 40 is placed on the X-axis table 36.
(See FIG. 2) are provided in parallel with the Y-axis direction,
The Y-axis table 42 is screwed on a nut (not shown). When the ball screw 40 is rotated by a Y-axis table driving motor 44 (see FIG. 1), the Y-axis table 42 is guided by a pair of guide rails 46 as guide members and is moved in the Y-axis direction. that's all,
A nut, a ball screw 34, an X-axis table 36 and an X-axis table driving motor 38, and a nut, a ball screw 40, a Y-axis table 42, a Y-axis table driving motor 44, etc. constitute an XY robot 48, and a component mounting head. 30 is moved by an XY robot 48 in a direction parallel to the surface of the printed wiring board 24. Printed wiring board 2
4 is conveyed horizontally, positioned and supported, and the component mounting head 30 is moved by the XY robot 48 to an arbitrary position in the horizontal plane.

The X-axis table 36 holds the electronic component 32 at a position below the Y-axis table 42 and between the electronic component supply device 18 and the printed wiring board holding device 20 in the Y-axis direction. A CCD camera is provided as an imaging device for imaging the posture. Since the CCD camera is not directly related to the present invention, the description is omitted. As shown in FIG. 2, the component mounting head 30 is attached to the vertical side surface 50 of the Y-axis table 42 so as to be able to move up and down and rotatably, and an elevating device 52 for raising and lowering the component mounting head 30 and the component mounting head 30. A rotation device 54 for rotating around a center line, a CCD as an imaging device for imaging a reference mark provided on the printed wiring board 24
A camera 56 (see FIG. 1; the CCD camera 56 is not shown in FIG. 2) is provided.

As shown in FIG. 2, the component mounting head 30 has a suction nozzle 60, which is a type of component holding for sucking the electronic component 32, and a holder 62 for detachably holding the suction nozzle 60. Holder 62 is XY robot 48
By this, it can be moved to any position in the horizontal plane. In the present embodiment, the suction nozzle 60 is suctioned and held by the holder 62 by negative pressure. Therefore, the holder 62 is connected to the negative pressure source 70 and the atmosphere via the air passage 64, the rotary valve 66, and the electromagnetic direction switching valve 68, and the holder 62 is connected to the negative pressure source 70 by switching the electromagnetic direction switching valve 68. The suction nozzle 60 is held and opened by being selectively communicated with the atmosphere. Further, the suction nozzle 60 is connected to the air passage 7.
4, connected to a negative pressure source 70, a positive pressure source 82 and the atmosphere via a rotary valve 76, electromagnetic directional switching valves 78 and 80,
By switching the electromagnetic direction switching valves 78 and 80, the suction nozzle 60 is selectively communicated with the negative pressure source 70, the positive pressure source 82 and the atmosphere. The suction nozzle 60 is used to release the electronic component 3 by negative pressure.
2, and the electronic component 32 is opened by supplying a positive pressure. The negative pressure source 70 is a negative pressure supply device or an air suction device, and the positive pressure source 82 is an air supply device for supplying positive pressure air. In the present embodiment, the electromagnetic directional valves 68, 78, and 80 are mounted on the Y-axis table 42. The electromagnetic directional valves 68 and 80 are connected to the negative pressure source 70 by a connector (not shown) provided on the Y-axis table 42. , Positive pressure source 82.

The printed wiring board supporting and conveying device 20 is shown in FIG.
As shown in FIG. 7, a wiring board elevating device 170, a wiring board clamping device 172, and a printed wiring board holding device 174 are provided. The wiring board lifting / lowering device 170 includes a wiring board lifter 176.
have. A pair of guide rods 178 extend from the lower surface of the wiring board lifter 176 and are fitted to a guide cylinder 180 fixed to the base 10 so as to be able to move up and down. A ball screw 182 is fixed to the lower surface of the wiring board lifter 176, and is screwed to a nut 184 attached to the base 10 so as to be rotatable about a vertical axis and immovable in the axial direction. The ball screw 18 is rotated by a motor 186 (see FIG. 12).
2 moves up and down, and the wiring board lifter 176 is raised and lowered.

As shown in FIG. 1, the wiring board clamping device 172 has a fixed guide 188 and a movable guide 190 provided in parallel with the wiring board transport direction (X-axis direction). The above-mentioned wiring board conveyor 22 is provided on the surfaces of the fixed guide 188 and the movable guide 190 facing each other, so that the printed wiring board 24 is conveyed.
As shown for the movable guide 190 in FIG. 3, wiring board pressing portions 194 slightly protruding inward are integrally provided on the upper end surfaces of the fixed guide 188 and the movable guide 190, respectively. 194 is
The wiring board conveyor 22 is provided with a slight gap between the printed wiring board 24 and the upper surface of the printed wiring board 24 placed on a transport belt 196 as a transport member.

The fixed guide 188 and the movable guide 190
Although not shown, a clamp plate as a movable clamp member that clamps the printed wiring board 24 in cooperation with the wiring board holding portion 194 is provided on the surfaces facing each other. These clamp plates have a longitudinal shape parallel to the longitudinal direction of the fixed guide 188 and the movable guide 190, and are always separated from the wiring board holding portion 194 by the urging of a plurality of springs as urging means. Thus, it is held at an unclamping position located below the transport belt 196. When the printed wiring board 24 is clamped, the clamp plate is caused to approach the wiring board holding portion 194 by a plurality of clamp cylinders serving as driving devices, and clamps the edge of the printed wiring board 24 in cooperation with the wiring board holding portion 194. . In the present embodiment, these circuit board holding portions 194, clamp plates, springs, clamp cylinders, etc.
Is composed.

The movable guide 190 is supported by the base 10 so as to be movable in a direction orthogonal to the wiring board transport direction. As shown in FIG. 3, on the upper end surface of the support block 198 fixed to the base 10, a guide rail 2 serving as a guide member extending in a horizontal plane in a direction orthogonal to the wiring board transport direction.
The movable guide 190 is movably fitted to the guide rail 200 on the lower surface of the guide block 202 which is a fixed guided member. The movable guide 190 is guided by the guide rail 200 and is moved by a moving device or a conveyor width changing device including a feed screw, a nut (not shown), and a conveyance width changing motor which is a driving source, and approaches and separates from the fixed guide 188. Then, the conveyance width of the printed wiring board 24 by the conveyor 22 is automatically changed. The change of the transport width may be manually performed by an operator.

The printed wiring board holding device 174 is provided on the wiring board lifter 176, and
It is raised and lowered by 0. Printed wiring board holding device 17
4 is a holding table 210 and a holding table 21 as shown in FIG.
A plurality of backup pins 212 as a holding pin, which is a kind of a holding member attached to the printed circuit board 0, suck and support the back surface 215 (see FIG. 2) of the printed wiring board 24. The holding table 210 is provided with the separation preventing plates 2
16, a base 218, a spacer 220, and a cover 222. The base 218 as a main body member of the holding table 210 has a flat plate shape and is made of a non-magnetic material, for example, aluminum. The base 218 has a plurality of negative pressure supply holes 2.
24 penetrates in the thickness direction, and is formed so as to open on both upper and lower surfaces of the base 218. The negative pressure supply hole 224 has a stepped shape, the side on which the spacer 220 overlaps has a small diameter, the side on which the separation preventing plate 216 overlaps has a large diameter, and the large diameter portion forms a valve hole 226. The plurality of negative pressure supply holes 22
4 are provided in a staggered arrangement as shown in FIG.

The spacer 220 has a thin flat plate shape, and has a communication passage forming opening 232 penetrating in the thickness direction at a portion corresponding to the plurality of negative pressure supply holes 224. The cover 222 also has a flat plate shape, and interposes the spacer 220 in cooperation with the base 218, thereby forming the communication passage forming opening 23.
2 is closed on both sides to form a communication passage 234.

Although not shown, the cover 222 has a communication hole (not shown) penetrating in the thickness direction and communicating with the communication passage 234. The holding table 210 is fixed on the wiring board lifter 176 by a fixing device (not shown). In this state, the communication hole formed in the cover 222 is connected to a passage (not shown) formed in the wiring board lifter 176. Then, it is connected to the negative pressure source 70 through the passage or the like. Although not shown, a switching valve device is provided between this passage and the negative pressure source 70, and the negative pressure supply hole 224 is selected between the negative pressure source 70 and the atmosphere by switching the switching valve device. Communication.

In the present embodiment, the separation preventing plate 216 is made of a ferromagnetic material, for example, steel, has a thin plate shape, and is superposed on the upper surface of the base 218. In the present embodiment, the detachment prevention plate 216 has substantially the same size as the base 218, and has a size to cover all the valve holes 226.
The detachment prevention plate 216, the base 218, the spacer 220, and the cover 222 are fixed to each other by fixing means (not shown) such as bolts at an outer peripheral portion of the portion deviating from the communication passage 234. 210
Function as

A plurality of communication holes 240 are formed at portions corresponding to the plurality of valve holes 226 of the detachment prevention plate 216, respectively, at portions deviated from the center of the valve holes 226. As shown in FIG. 5, these communication holes 240 have a circular cross-sectional shape and a diameter smaller than the diameter of the valve hole 226.
The valve holes 226 are formed at equal angular intervals on a circle around the center of the valve hole 226. As shown in FIG. 14, a support plate 5 made of a ferromagnetic material is attached to a base 582 made of a non-magnetic material of the holding table 580.
84, and a through-hole 586 is provided in each of the portions of the support plate 584 corresponding to the plurality of valve holes 226,
A lid 588 made of a ferromagnetic material, which is a release preventing plate serving as a release preventing member, and is fitted with a lid 588 having a plurality of communication holes 590 similar to the communication hole 240 to cover the valve hole 226. The detachment prevention plate 2 of the present embodiment
Reference numeral 16 is the same as that in which the support plate 584 and the plurality of lids 588 are integrally provided. Therefore, the through hole 58
6 is an open end of the valve hole 226, and the valve hole 226 is an upper surface 5
92, and the holding table 210 is also provided with the valve hole 2
It can be said that the opening 26 is opened in the upper surface 244 of the holding table 210 formed by the upper surface of the separation preventing plate 216, and the negative pressure supply hole 224 is opened in the upper surface 244 of the holding table 210.

The base 218 and the spacer 22
0, the cover 222 is formed with a high degree of flatness as in the printed wiring board holding device described in JP-A-7-15189. The separation preventing plate 216 is also formed with a high flatness, and a high flatness is obtained on the upper surface 244 of the holding table 210. The surface of the wiring board lifter 176 to which the printed wiring board holding device 176 is fixed is horizontal in this embodiment, and the holding table 210 can be attached to and detached from the wiring board lifter 176 in a horizontal posture by a fixing means (not shown). , And the upper surface 244 is horizontal.

As shown in FIG. 4, a plurality of negative pressure supply holes 22 are provided.
4 is provided with an on-off valve 260. The bottom of the valve hole 226, the valve hole 226 and the negative pressure supply hole 2
The portion between the small diameter portion 24 and the small diameter portion is formed with a tapered surface whose diameter gradually decreases toward the small diameter hole side, that is, downward, and a valve seat 262 facing upward is provided. The valve seat 262 provided on the base 218 is made of aluminum, which is a nonmagnetic material. The valve seat 262 is covered with a pad 266 made of synthetic resin, which is a kind of material softer than the valve seat 262 made of aluminum. A ball 268, which is a sphere serving as a valve, is disposed in the hole 226. The diameter of the ball 268 is smaller than the diameter of the valve hole 226, and the ball 268 is movable in the valve hole 226. In the present embodiment, the ball 268 is formed of a ferromagnetic material, for example, steel. The lower surface 270 (the surface on the valve hole 226 side) of the separation preventing plate 216 is a portion corresponding to the valve hole 226 and includes a plurality of communication holes 240.
A positioning recess 272 is formed in a more inner part. The inner surface of the positioning recess 272 forms a partial spherical shape that is a part of the spherical surface corresponding to the outer peripheral surface of the ball 268.

The backup pin 212 will be described. As shown in FIG. 4, the backup pin 212 has a pin 280 serving as a bar, a cup 282, and a mounting seat 284. The pin 286 constituting the pin portion 280 has a circular cross-sectional shape, and has a smaller diameter at the tip (upper end).
The upper end surface, which is the distal end surface, forms the support surface 288. In the center of the lower surface 290 of the pin 286, a circular stepped projection 29 is provided.
2, a passage 296 is provided in the pin 286, penetrating in the axial direction, and opening to the support surface 288 and the protruding end surface of the projection 292. Near the upper end of the pin 286,
A neck member 299, which is a gripped member, is fixed by appropriate fixing means such as brazing, and forms a neck portion 300, which is a gripped portion. As shown in FIG. 9, the neck 300 has a circular cross-sectional shape, and has an annular groove 302 at an intermediate portion in the axial direction.
Are formed. As shown in FIG. 4, the annular groove 302 has a trapezoidal cross section parallel to the axis, and the pair of groove side surfaces 304 is inclined in such a direction as to be further away from each other toward the outer peripheral side of the neck portion 300. .

The suction cup 310 is provided at the upper end of the pin 280.
Is detachably fitted and cannot be pulled out.
2. In the present embodiment, the suction cup 310 is made of rubber, has a diameter larger than the support surface 288, has an upper portion projecting upward from the support surface 288, and has an upper surface having an annular shape larger in diameter than the support surface 288. And a flat upward facing contact surface 312 located around the support surface 288.

At the lower end of the pin 286, the pedestal 320 serving as a mounting seat is fixed at the portion having the largest diameter.
84. The pedestal 320 is shown in FIGS.
As shown in FIG. 5, the width of the inner space is slightly larger than the diameter of the valve hole 226, and the length is a multiple of the width. The distal end surface or the lower surface of the pedestal 320 forms an annular seating surface 329, and the space in the pedestal 320 forms a connection recess having an opening area twice or more as large as the valve hole 226. The pin 286 is attached to the pedestal 320 at the protrusion 292.
From the outside in the longitudinal middle part of the bottom wall 322 of the seat surface 32
9 and is fixed by a suitable fixing means such as brazing. The pedestal 320 is opened on the side opposite to the pin 286, and the passage 296 provided in the pin portion 280 is communicated with the space in the pedestal 320. In the pedestal 320, two permanent magnets 328
Are fixed to both sides of the portion where the passage 296 opens. The portion near the lower end surface of the backup pin 212 is made of a permanent magnet. The passage 296 communicates with the center of the space in the pedestal 320. The permanent magnet 328 has a rectangular parallelepiped shape, a thickness slightly smaller than the depth of the pedestal 320, and is retracted inward from the seating surface 329. Further, the width of the permanent magnet 328 is slightly smaller than the width inside the pedestal 320, and there is a gap between the permanent magnet 328 and the pedestal 320. In this embodiment, the gap between the passage 296 formed in the pin 286 and the permanent magnet 328 in the pedestal 320 is opposite to the bottom surface of the backup pin 212 formed by the seating surface 329 of the backup pin 212. A negative pressure passage 326 extends to the support surface 288 and passes through the inside of the backup pin 212.

As shown in FIG. 1, a backup pin storage device 340 (hereinafter, simply referred to as a storage device 340) as a holding member storage device is provided adjacent to the printed wiring board holding device 174. Although not shown, the storage device 340 includes a support base or a storage base that supports and stores the backup pins 212. At least the surface of the support base, which supports the backup pins 212, is In the embodiment, it is formed of steel which is a kind of ferromagnetic material. Therefore, backup pin 2
When the support 12 is placed on the support, the support is magnetized, and the backup pins 212 are fixed to the support by magnetic force and stored.

A plurality of backup pins 212 are held in the storage device 340 in a vertical and upward posture, and the height of a support surface for supporting the backup pins 212 of the storage device 340 from below is located at the lower end position. Upper surface 244 of holding table 210 of printed wiring board holding device 174
And the same height. Therefore, the height of the backup pin 212 stored in the storage device 340 and the height of the backup pin 212 attached to the holding table 210 located at the lower end position are the same. In the present embodiment, the thickness of the printed wiring board 24 is constant, and the height of the plurality of backup pins 212 (the seating surface 329 and the supporting surface 28
8) are the same. The storage device 34
0 is provided on the fixed guide 188 side (the electronic component supply device 18 side), and the width (dimension in the direction parallel to the Y-axis direction) is set slightly smaller than the minimum distance between the fixed guide 188 and the movable guide 190. 190 so as not to interfere.

The attachment and detachment of the backup pins 212 to and from the holding table 210 are automatically performed in this embodiment, and are performed using the XY robot 48 of the electronic component mounting apparatus 16. Therefore, as shown in FIG.
Is provided with a holding unit 360. The holding unit 360 includes a holding head 362 and a holding head 362.
A rotating device 364 that rotates the vertical axis, which is an axis perpendicular to the upper surface 244 of the holding table 210, and an elevating device 366 that raises and lowers the device. The holding head 362 is
A pin holder 368 as a holding member holder and a pin holder 3
And a claw driving device 372 (see FIG. 7) for opening and closing a pair of gripping claws 370 constituting the 68. Holding head 3
60 is moved by the XY robot 48 with respect to the holding table 210 in a direction parallel to the horizontal upper surface 244 which is the surface of the holding table 210, and together with the XY robot 48, constitutes a mechanical mechanism of the automatic setup changer. In addition, a portion for controlling a mechanical mechanism of the control device, a storage device 340, and the like, which will be described later, constitute an automatic setup change device for a backup pin mounting device or a printed wiring board holding device 174 as a holding member mounting device.

On the vertical side surface 50 of the Y-axis table 42,
As shown in FIGS. 2 and 10, a pair of guide rails 376 serving as guide members is provided vertically,
8 are movably fitted to a plurality of guide blocks 380 as guided members provided on the elevating table 378. The Y-axis table 42 is provided with an air cylinder 382 as a pneumatic actuator, which is a type of fluid pressure actuator as a drive source, and is provided downward.
As shown in FIG. 11, the piston rod 384 is engaged with the lifting table 378. The two air chambers of the air cylinder 382 are provided with the electromagnetic directional control valve 3 serving as a control valve.
By switching 86, the positive pressure source 82 and the atmosphere are selectively communicated, the piston rod 384 is expanded and contracted, and the elevating table 378 is raised and lowered. Air cylinder 38
2 and the like constitute a lifting device 366. In the present embodiment, the electromagnetic directional control valve 386 is mounted on the Y-axis table 42, and is connected to the positive pressure source 82 by the connector provided on the Y-axis table 42.

FIG. 7 and FIG.
As shown at 0, the air cylinder 394 is held via a bearing 396 so as to be relatively rotatable about a vertical axis and relatively immovable in the axial direction. The piston 400 is fitted into the cylinder housing 398 of the air cylinder 394 so as to be relatively liquid-tight and relatively movable in the axial direction, and the piston rod 402 provided integrally with the piston 400 is
It extends downward from the piston 400, penetrates through the cylinder housing 398 in a liquid-tight and relatively movable manner, and extends out of the cylinder housing 398.

When the piston 400 is fitted into the cylinder housing 398, air chambers 404 and 406 are provided on the upper side and the lower side of the piston 400, respectively, and the ports 408 provided on the cylinder housing 398 are provided respectively. , 410, and annular passages 412, 414, passages 416, 418 provided in the lifting table 378.
(See FIG. 10) and the solenoid directional control valve 419 and is connected to the positive pressure source 82. Electromagnetic directional valve 419
Is connected to the connector and connected to the positive pressure source 82. The two air chambers 404 and 406 are selectively connected to the positive pressure source 82 and the atmosphere by switching the electromagnetic directional control valve 419. Then, the piston 400 is moved, and the piston rod 402 is extended and contracted.

In the present embodiment, various electromagnetic directional control valves including the electromagnetic directional control valve 68 are mounted on the Y-axis table 42, and mounted on the Y-axis table 42 such as the component mounting head 30 so that the positive pressure, Since the switching between the supply of the positive pressure and the supply of the negative pressure to various devices requiring the supply of the negative pressure is performed on the Y-axis table 42, the operation is performed by each electromagnetic directional control valve and the supply of the positive pressure air or the negative pressure. The distance to the device
High operation responsiveness can be obtained in those devices.

At the lower end of the piston rod 402, FIG.
As shown in FIG. 7, a pair of links 430 are attached by pins 432 so as to be rotatable around a horizontal axis. The gripping claw 370 is connected to each free end of the pair of links 430 by a pin 434 so as to be rotatable around a horizontal axis. As shown in FIGS. 7 and 8, each of the pair of gripping claws 370 has an ear 436 provided at a portion near the side connected to the link 430, and a bracket 4 provided integrally with the cylinder housing 398.
It is rotatably supported by a pin 440 supported by 38.

The lower ends of the pair of gripping claws 370 are respectively
Claws 444 are provided that are bent at right angles so as to approach each other. As shown in FIG. 9, a notch 446 having a V-shaped cross section is provided at each of the distal ends of the claws 444. Also, as shown in FIG. 7, the upper surface and the lower surface of the claw portion 444 each have an inclined surface 448 having an inclination corresponding to a pair of groove side surfaces 304 of the annular groove 302 provided in the neck portion 300 of the backup pin 212. Have been. 1
In the pair of gripping claws 370, each of the claws 444 fits into the annular groove 302 of the neck 300 and grips the backup pin 212. In the present embodiment, the pair of gripping claws 444 have the pair of inclined surfaces 448. Engages with the groove side surface 304 of the annular groove 302 and grips the backup pin 212 without tilting.
The V-shaped surface defined by the notch 446
8 without disturbing engagement with the groove side surface 304.
The backup pin 212 is provided so as to be engaged with the backup pin 212 or to have a slight gap with the neck 300.

The pair of gripping claws 370 are connected to the piston rod 4
02, each claw 44 is extended as shown by a two-dot chain line.
4 are rotated away from each other to release the backup pin 212, and the contraction of the piston rod 402 causes the claw portions 444 to rotate in the direction approaching each other, as shown by the solid line, and the backup pin 212 is pinned. The holder 368 is concentrically gripped with the axis of the air cylinder 394 which is the axis of the holder 368. Piston rod 402, link 430,
The gripping claws 370 and the bracket 438 include a pair of gripping claws 37.
0 is connected by a toggle mechanism so as to grip the backup pin 212, and the backup pin 212 is firmly gripped by the pin holder 368. In the present embodiment, the bracket 438 forms a holder main body, and together with the link 430 and the pair of gripping claws 370 form a pin holder 368. The rotation device 364 is moved up and down together with the pin holders 368 and the like,
To rotate. The air cylinder 394 and the like constitute the claw driving device 372.

As shown in FIG. 7, a driven gear 460 is provided concentrically and non-rotatably on the upper surface of the cylinder housing 398. As shown in FIG. 11, the driven gear 460 is meshed with the driving gear 462. When the driving gear 462 is rotated by the rotation driving motor 464, the air cylinder 394 is rotated around the vertical axis, and Holder 368 is air cylinder 3
It is rotated about 94 vertical axes. The rotation drive motor 464 is provided on the lifting table 378, and forms a rotation device 364 together with the drive gear 462, the driven gear 460, and the like. The rotation device 364 is moved up and down together with the pin holder 368 and the like. Air chamber 4 of air cylinder 394
04, 406 is supplied with air by annular passages 412, 414.
Is kept in a state where the air is supplied even if is rotated.

The electronic component mounting system 12 is controlled by a control device 500 shown in FIG. Control device 500
Is mainly composed of a computer 510 having a PU 502, a ROM 504, a RAM 506, and a bus connecting them. , A Y-axis table driving motor 44, a lifting / lowering motor 186 for the wiring board lifter 176, and other various actuators, and a CCD camera 56 via a control circuit 520. CCD camera 5
The image data obtained by the imaging of the computer 6
10 is input. The X-axis table driving motor 3
Each of the motors 8 and the like is a servomotor which is a kind of an electric motor as a drive source, but any motor that can control the rotation angle can be used, and a step motor or the like can be used. Although not shown, the rotation angles of these motors are detected by an encoder serving as a rotation detection device.

The RAM 506 of the control device 500 is provided with a pin setting data memory and the like. The pin setting data memory stores setting data for setting the backup pins 212 for each type of the printed wiring board 24. Have been. The installation data includes the backup pin 212,
The position information includes horizontal position data that defines a horizontal position that is a position parallel to the horizontal upper surface 244 of the holding table 210 and rotational position data that defines a position of the backup pin 212 around the axis of the pin 286. Backup pin 21
2 is set about the axis of the pin 286,
The rotational position is defined by X and Y coordinate values. For example, when the backup pin 212 is viewed from the support surface 288 side, the rotational direction in the clockwise direction is a positive direction, and the rotational direction in the counterclockwise direction is a negative direction. The position where the longitudinal direction of the pedestal 320 is parallel to the X-axis direction is set as a reference (angle 0). The ROM 504 has a program for mounting the electronic component 32 on the printed wiring board 24,
Various programs such as a program for attaching the backup pin 212 to the PU 502 are stored in the PU 502.
Executes these programs while using the RAM 506.

In the present embodiment, a plurality of backup pins 212 are attached to the holding table 210 to suck and support the printed wiring board 24 from below, and are attached to and detached from the holding table 210 during setup change. Hereinafter, first, a state in which the backup pin 212 is attached to the holding table 210 and supports the printed wiring board 24 will be described.

On the back surface 215 of the printed wiring board 24, that is, the surface opposite to the surface on which the electronic component 32 is mounted,
The electronic component 32 is already attached or has irregularities, and cannot support all surfaces. The holding table 210 is used in common for a plurality of types of printed wiring boards 24 on which the electronic components 32 are mounted, and is larger than the largest printed wiring board 24. Therefore, the backup pins 212 are not attached to all the negative pressure supply holes 224, and the printed wiring board 24 is smaller than the holding table 210 and comes off from the printed wiring board 24, as shown in FIG. Backup pin 2 for
There is a region where the backup pin 212 is not attached and a region where the backup pin 212 is not attached and a region where the backup pin 212 is not attached.

In the negative pressure supply hole 224 to which the backup pin 212 is not attached, as shown on the right side of FIG. 4, the ball 268 is seated on the valve seat 262 by its own weight, and the on-off valve 260 is closed. Backup pin 212
For the negative pressure supply hole 224 to which is attached, the backup pin 212 is connected to the seat surface 32 which is the lower surface of the base 320.
9 is attached to the upper surface 244 of the holding table 210 so as to be in close contact with the periphery of the opening of the negative pressure supply hole 224. The backup pin 212 has a plurality of communication holes 240 provided on the upper surface 244 at a portion corresponding to the valve hole 226 of the negative pressure supply hole 224.
The communication hole 240 is covered by the pedestal 320. A permanent magnet 328 is fixed to the pedestal 320, and
Is formed of steel, which is a ferromagnetic material, the separation preventing plate 216 is magnetized, and the backup pin 212 is attracted and fixed to the holding table 210 by magnetic force. In the present embodiment, the detachment prevention plate 216 has substantially the same size as the base 218, and has a size to cover all the valve holes 226. When the backup pin 212 is placed on the holding table 210, , Permanent magnet 328 and separation prevention plate 2
16 provides a large magnetic force, and the backup pin 2
12 is fixed to the holding table 210 with a sufficiently large force. Since the permanent magnet 328 is retracted inward from the seating surface 329 of the pedestal 320, the seating surface 329 is brought into close contact with the upper surface 244 and leakage of negative pressure is prevented. The plurality of backup pins 212 have the same size, and the height of each support surface 288 of the plurality of backup pins 212 is the same when mounted on the holding table 210, and is one plane (horizontal plane in the present embodiment). Located within.

The ball 2 serving as a valve of the on-off valve 260
The ball 268 is magnetized by the permanent magnet 328, but the valve seat 262 is magnetized because the base 68 provided with the valve seat 262 is formed of aluminum as the non-magnetic material. Without
The ball 268 is attracted to the separation preventing plate 216 by magnetic force, separated from the valve seat 262, and the on-off valve 260 is opened. At this time, the ball 268 comes into contact with the separation prevention plate 216, and separation from the valve hole 226 is prevented by the separation prevention plate 216. Since the separation prevention plate 216, which is a member to which the ball 268 directly contacts, is formed of a ferromagnetic material and is magnetized, the magnetic force acting on the ball 268 is large, and the ball 268 is easily separated from the valve seat 262. Also, the ball 268 is
A part thereof is accommodated in a positioning concave portion 272 formed in the separation preventing plate 216, and the valve seat 262 is
It is positioned in the direction that intersects the approaching and separating directions. Thus, the communication hole 240 is not closed by the ball 268, and the negative pressure passage 326 and the negative pressure supply hole 2 are not closed.
24 is maintained. In this state, the negative pressure supply hole 224 is communicated with the negative pressure passage 326 through the communication hole 240 and the like formed in the valve hole 226 and the separation preventing plate 216, and the negative pressure is supplied to the negative pressure passage 326. Becomes

When the electronic component 32 is mounted on the printed wiring board 24, the printed wiring board 24 is carried in by the wiring board conveyor 22. At this time, the printed wiring board holding device 17
4 is lowered to the lower end position by the wiring board lifting / lowering device 170, and the printed wiring board 24 is carried into the printed wiring board holding device 174, abuts against a stopper (not shown), and is stopped. Holding device 174
Is raised to the rising end position by the wiring board lifting device 170. When the wiring board lifter 176 is lifted, the negative pressure supply hole 224 is connected to the negative pressure source 70 by switching of an electromagnetic direction switching valve (not shown), and the negative pressure is supplied to the backup pin 212. Therefore, the backup pins 212 rise while adsorbing the printed wiring board 24 by negative pressure, lift the printed wiring board 24 from the transport belt 196 of the wiring board conveyor 22, and press the printed wiring board 24 against the wiring board holding portion 194. In the present embodiment, the rising distance of the printed wiring board holding device 174 is determined by the distance between the support surface 288 of the backup pin 212 and the wiring board pressing portion 194 in the state of being located at the lower end position. The suction cup 310 is elastically deformed while adsorbing the printed wiring board 24, and the printed wiring board holding device 174.
Is moved to the raised end position, the support surface 288
Abuts on the printed wiring board 24 and supports the printed wiring board 24 from below with the holding member 194. The contact surface 312 of the suction cup 310 adheres to the printed wiring board 24 around the support surface 288 to prevent leakage of negative pressure. Even if the printed wiring board 24 is bent upwardly, it is attracted by the backup pins 212 and
The printed wiring board 24 is lifted up from below by the support surface 288 and corrected into a single plane even if there is a downward bending, so that the printed wiring board 24 is horizontally oriented by the printed wiring board holding device 174. Is held.

After raising the printed wiring board holding device 174,
The clamp plates provided on the fixed guide 188 and the movable guide 190 are raised by a clamp cylinder, and the printed circuit board 24
And hold it between the edges.

While the electronic component 32 is being mounted on the printed wiring board 24, the backup pin 212 is kept supplied with negative pressure. As a result, the printed wiring board 24 is sucked by the backup pins 212 and is maintained in a horizontal state, and at the on-off valve 260 of the negative pressure supply hole 224 to which the backup pins 212 are not attached,
The ball 268 is seated on the valve seat 262 by its own weight, and is pressed against the valve seat 262 by the suction force of the negative pressure. In particular, the valve seat 262 is covered by the pad 266, the pad 266 is deformed and adheres to the ball 268, and the negative pressure supply hole 224 is kept in a closed state, so that the negative pressure leakage is more reliably prevented. Is done.

After the printed wiring board 24 is thus held by the printed wiring board holding device 174, the XY
The CCD camera 56 is moved by the robot 48 to a position facing the wiring board reference mark provided on the printed wiring board 24, and the wiring board reference mark is imaged. An error in the holding position of the printed wiring board 24 is detected based on the obtained image of the wiring board reference mark,
Is stored in the RAM 506. Thereafter, the component mounting head 30 takes out the electronic component 32 from the electronic component supply device 18 and conveys the electronic component 32 to the component mounting position. The position error is detected, the moving distance of the electronic component 32 is corrected based on the holding position error of the printed wiring board 24 that has already been imaged, and the holding position error of the electronic component 32. The electronic component 32 is rotated, and the holding position error is corrected. Also, the electronic component 32 by correcting the rotational position error.
Is also corrected by correcting the moving distance of the electronic component 32. Since the electronic component 32 is mounted on the printed wiring board 24 after the correction, the electronic component 32 is mounted in an accurate component mounting position in a proper posture.

After the electronic component 32 is mounted on the printed wiring board 24, the clamp of the printed wiring board 24 by the clamp plate is released, and the printed wiring board holding device 174 is lowered to the lower end position. At this time, the negative pressure supply hole 224
The supply of the negative pressure to the printed circuit board is cut off, the backup pins 212 do not attract the printed wiring board 24, and the printed wiring board 24 is supported from below by the conveyor belt 196. Move away from 24. Then, the printed wiring board 24 is carried out by the wiring board conveyor 22, and then the printed wiring board 24 on which the electronic components 32 are mounted is carried in.

When the mounting of the electronic components 32 on all the printed wiring boards 24 to which the electronic components 32 are to be mounted is completed,
Setup change is performed. At the time of setup change, for example, replacement of electronic components supplied by the electronic component supply device 18,
The width of the conveyor 22 for carrying the printed wiring board 24 is changed, and the printed wiring board holding device 1
At 74, the collection and installation of the backup pins 212 attached to the holding table 210 are performed. Since the replacement of the suction nozzle 60 is not directly related to the present invention, the description is omitted, and the setup change of the printed wiring board holding device 174 will be described.

The collection and installation of the backup pins 212 are automatically performed according to a preset program and the installation data of the backup pins 212. The setup change of the printed wiring board holding device 174 is automatically performed. As described above, the installation data of the backup pin 212 includes data defining the horizontal position and the rotation position of the backup pin 212, respectively, and these positions are set for the printed wiring board 24 in the present embodiment. Holding condition and printed wiring board holding device 17
4 is determined as a position that satisfies both of the holding conditions set for. The holding conditions set for the printed wiring board 24 are such that the electronic component 32 is not mounted, there is no unevenness, and there is a space where the suction cup 310 can adhere to the electronic component 32 and the like without interference. is there. The mounting position of the electronic component 32 and the position of the unevenness on the back surface of the printed wiring board 24 are obtained from the design data of the printed wiring board 24.

The holding conditions set for the printed wiring board holding device 174 are as follows: the pedestal 320 does not interfere with the pedestal 320 of the other backup pin 212; Supply hole 22
4 is not covered, and only a part of the negative pressure supply hole 224 is not covered. Pedestal 320 has negative pressure supply hole 2
This is because the on-off valve 260 may be opened even if only a part of the negative pressure supply 24 is covered, and if a part of the negative pressure supply hole 224 is open, the negative pressure may leak. The pedestal 320 of the backup pin 212 has an elongated shape,
6 is fixed to the middle part of the pedestal 320 in the longitudinal direction, so that the backup pin 212 is
The distance between the axis of 86 and the center of the negative pressure supply hole 224 is defined as a radius, and the pin 286 can be located at an arbitrary position within a circle centered on the center of the negative pressure supply hole 224. Pin 28
6, the distance between the center of the negative pressure supply hole 224 and the center of the negative pressure supply hole 224 is maximized when the negative pressure supply hole 224 and one end of the pedestal 320 are aligned. Can be positioned at any position. In the present embodiment, if the positionable areas set in each of the plurality of negative pressure supply holes 224 overlap, almost the entire upper surface 244 of the holding table 210 can be covered.
86 can be positioned at any position on the upper surface 244 of the holding table 210, but when a plurality of backup pins 212 are installed on the holding table 210, the pedestals 320 of the plurality of backup pins 212 do not interfere with each other. The position of the pin 286 will be limited in this regard. Thus, the printed wiring board 24
And conditions set for the printed wiring board holding device 1
In order to satisfy both of the conditions set on the 74 side, the horizontal position and the rotational position of the backup pin 212 are determined by an operator or automatically. The printed wiring board 24 whose conveyance by the conveyor 22 has been stopped by the stopper is placed on the holding table 2 in accordance with the position determined as described above.
The backup pins 212 provided on the printed wiring board 10 hold the printed wiring board 24 and the printed wiring board holding device 174 while satisfying the respective conditions set therein.

When the setup of the printed wiring board holding device 174 is changed, the printed wiring board 24 is carried out by the wiring board conveyor 22 and retracted from the printed wiring board holding device 174, and the printed wiring board holding device 174 is moved to the lower end position. And the space above it is open. Further, at the time of the setup change, the movable guide 190 is moved so that the distance from the fixed guide 188 is maximized. In this state, the holding unit 360 is moved by the XY robot 48, the backup pin 212 currently attached to the holding table 210 is removed from the holding table 210, and returned to the storage device 340. When all the backup pins 212 attached to the holding table 210 are returned to the storage device 340, the printed wiring board 2 on which the electronic component 32 is to be mounted is next mounted.
4 to hold the backup pin 21
2 is attached. The collection of the backup pins 212 is performed based on the installation data used to attach the backup pins 212 to the holding table 210. The installation of the backup pins 212 on the holding table 210 then holds the printed wiring board 24. This is performed based on the installation data of the backup pin 212 for obtaining the printed wiring board holding device 174 to be executed.

In the present embodiment, the plurality of backup pins 212 installed on the holding table 210 are removed from the holding table 210 in the reverse order of the order of installation on the holding table 210, and the order of removal from the storage device 340 is changed. Are the storage devices 340 in the reverse order.
Is returned to. In the present embodiment, the installation order is the holding table 21.
The backup pin 212 is installed first from the installation position far from the storage device 340 of the storage device 3.
The removal order from the holding table 210 of the storage device 340
The backup pin 212 stored in a storage position close to the storage pin 212 is first taken out and placed on the holding table 210. Therefore, the backup pins 212 are collected by the plurality of backup pins 212 installed on the holding table 210.
Among them, the backup pin 212 close to the storage device 340
, And are stored in the storage device 340 from the storage position far from the holding table 210 first.

When the backup pins 212 are collected, first, the holding unit 360 is moved onto the pins 286 of the backup pins 212 to be removed according to the installation position data of the backup pins 212. During this movement, the holding head 362 is rotated by the rotation device 364, and the rotation position of the pin holder 368 (a pair of gripping claws 370) is set.
Are aligned with each other as a rotational position at which the backup pin 212 is gripped. This rotation position is determined by a pair of gripping claws 370.
Are positions parallel to the longitudinal direction of the pedestal 320. A pair of gripping claws 370 are attached to pedestal 320 and pin 2
86, which is opened and closed in a plane perpendicular to the holding table 210, and when the backup pin 212 is gripped, the pedestal 3 in a direction parallel to the width direction of the backup pin 212.
20 and does not protrude from the adjacent backup pin 212.
It is made not to interfere with. The backup pin 212 is attached to the holding table 210 at a preset rotation position, the pin holder 368 is rotated according to this position, and the pair of gripping claws 370 are set to the rotation position where the backup pin 212 is gripped. Is located.

After the movement, the holding head 362 is moved up and down
6, the pin holder 368 grips the backup pin 212. When descending, a pair of gripping claws 37
When the pin holder 368 is lowered, as shown by a two-dot chain line in FIG. Is closed, and as shown in FIGS. 7 and 9, the claw portion 444 is fitted into the annular groove 302 and the inclined surface 44 is closed.
8 is engaged with the groove side surface 304, and grips the backup pin 212.

The pair of gripping claws 370 are the backup pins 2
After gripping 12, the lifting table 378 is raised, the pin holder 368 is raised, and the backup pin 212 is separated from the holding table 210 against the magnetic force. Each of the claws 444 of the pair of gripping claws 370 is formed in the annular groove 30.
2, the inclined surface 448 is engaged with the groove side surface 304, and the backup pin 212 having an elongated shape is gripped without tilting in a state of being separated from the holding table 210 and lifted from the holding table 210. . Then, the holding unit 360 is moved to the storage device 340 by the XY robot 48. During this movement, the holding head 3
62 is rotated and the rotational position of the backup pin 212 is stored in the storage device 340, for example, the pedestal 3.
20 is set to a position where the longitudinal direction is parallel to the X-axis direction.
In the present embodiment, the storage position where the storage device 340 is open and the position where the backup pin 212 is stored is managed by the computer 510. The pin holder 368 is moved so as to return to the storage device 340 in this order.

After the pin holder 368 moves, it is lowered, and the backup pin 212 is stored in the storage device 340. The height of the support surface for supporting the backup pin 212 of the storage device 340 from below, and the holding table 21 of the printed wiring board holding device 174 in a state of being located at the lower end position.
The height of the upper surface 244 of the “0” is the same, and the lowering of the pin holder 368 causes the backup pin 212 to be stored in a state supported by the storage device 340 from below.
The collection of the backup pins 212 is performed in the reverse order of the installation order.
Backup pins 21 in order from the storage position on the side farther from
2 are stored. After the descent, the pair of gripping claws 370 are opened to release the backup pin 212. Next, the pin holder 368 is raised and moved to the backup pin 212 to be subsequently removed from the holder 210.

When all the backup pins 212 attached to the holding table 210 are returned to the storage device 340, the backup pins 212 are attached to the holding table 210 in order to hold the printed wiring board 24 to which the electronic components 32 are to be attached next. Is attached. The holding head 362 is moved by the XY robot 48, the backup pin 212 is taken out of the storage device 340, transported to the holding table 210 and installed. At this time, the moving position of the pin holder 368 is controlled by the computer 510, and as described above,
The backup pins 212 are sequentially taken out from the storage position on the side closer to the holding table 210 of the storage device 340. The pin holder 368 is rotated while being moved onto the backup pin 212 to be taken out, and is positioned at a rotational position where the pair of gripping claws 370 grip the backup pin 212. The gripping rotation position is a direction in which the pair of gripping claws 370 are arranged, and the opening / closing surface of the gripping claw 370 including the gripping claws 370 is parallel to the longitudinal direction of the pedestal 320 of the backup pin 212 stored in the storage device 340. In the present embodiment, the positions are parallel to the X-axis direction. After the movement, the pin holder 368
Is lowered, and after the descent, the pair of gripping claws 370 are closed to grip the backup pin 212. After the grip, the pin holder 368 is raised, and the backup pin 212
Is taken out of the storage device 340.

The backup pin 212 is moved to a preset installation position on the holding table 210 according to the installation position data. During this movement, the pin holder 368 is
The backup pin 212 is rotated in accordance with the rotation position data, and the rotation position of the backup pin 212 is set to a predetermined position at the time of attachment to the holding table 210. After the movement, the pin holder 368 is lowered and placed on the holding table 210. At this time, the seating surface 329 of the pedestal 320 is
Of the plurality of communication holes 240. Around the opening of the negative pressure supply hole 224, that is, the valve hole 226
In the vicinity of the opening. After the placement, the pair of gripping claws 370 are opened to release the backup pin 212.

As described above, the backup pins 212 placed on the holding table 210 are attached to the holding table 21 by magnetic force.
At this time, the ball 268 is separated from the valve seat 262 by the magnetic force and the on-off valve 260 is opened. The permanent magnet 328 has a longitudinal shape, and the backup pin 212 is
4, the permanent magnet 328 is located at a position corresponding to the ball 268, and the ball 268 is attracted to the backup pin 212 by the magnetic force. Valve seat 26
Separated from 2. After the release of the backup pin 212, the pin holder 368 is moved to the storage device 340, and then the backup pin 2 attached to the holding table 210 is moved.
Take 10 out.

Of the plurality of negative pressure supply holes 224 provided in the holding table 210, the negative pressure supply hole 224 to which the backup pin 212 is attached opens and closes the on-off valve 260, and the backup pin 21
Regarding the negative pressure supply hole 224 to which No. 2 is not attached, the on-off valve 260 remains closed. Therefore, even if the negative pressure supply hole 224 is not closed with a cap or the like, the negative pressure does not leak, and the printed wiring board 24 can hold a desired portion of the printed wiring board 24 at a desired distance from the holding table 210. The plate holding device 174 can be obtained easily and in a short time, the time required for the setup change can be shortened, and the operation rate of the electronic component mounting system 12 can be improved. In particular, in the present embodiment, since the attachment and detachment of the backup pin 212 to and from the holding table 210 are performed automatically, the time required for the setup change can be reduced without bothering the operator, and the electronic component mounting system can be shortened. It does not hinder the automation of the changeover of the entire 12. In addition, the automatic changeover device shares the electronic component mounting device 16 and the XY robot 48, and can be configured at a low cost, and can simplify the configuration of the electronic component mounting system 12. The XY robot 48 moves the holding head 362 together with the elevating device 366 to the holding table 210.
And a relative movement device for relatively moving with respect to the storage device 340.
6. Printed wiring board supporting / transporting apparatus 20 including electronic component supply device 18, storage device 340, holding head 362, and printed wiring board holding device 174, base 10, control device 50.
0 constitutes the electronic component mounting system 12 in which the setup change of the printed wiring board holding device 174 is automatically performed.

In the above embodiment, the ball 268 serving as the valve element of the on-off valve 260 is formed of a ferromagnetic material.
The pedestal 320 is formed by a permanent magnet, but may be reversed. An example thereof will be described with reference to FIGS. Note that components having the same functions as the components of the above embodiment are denoted by the same reference numerals, and the corresponding relationship is shown, and the description is omitted. The same applies to the embodiments shown in FIG. 18 and subsequent figures. Components that perform the same operations as the components of the embodiments described before each embodiment are denoted by the same reference numerals.

The printed wiring board holding device 59 of this embodiment
6, the valve element 602 of the on-off valve 600 provided on the holding base 598 has a generally cylindrical shape with a diameter smaller than the diameter of the valve hole 226, is formed by permanent magnets, and has magnetic poles at both ends in the axial direction. Different from each other. One end of the valve element 602 in the axial direction has a hemispherical shape. The valve element 602 is disposed in the valve hole 226 so that the hemispherical part 604 is on the valve seat 606 side, and is seated on the valve seat 606. The negative pressure supply hole 224 is shut off. The outer peripheral surface 60 of the valve element 602 thus arranged in the valve hole 226
8 and the inner peripheral surface 610 of the valve hole 226, there is a gap, but the size in the radial direction is small, and the engagement between the outer peripheral surface 608 and the inner peripheral surface 610 causes the valve element 602 to 226 is restricted, and the valve element 602 is moved to the valve seat 606.
You can sit flat without leaning on
The rotation prevents the direction of the magnetic pole from changing. In the present embodiment, the outer peripheral surface 608 and the inner peripheral surface 610 constitute the inclination restricting means and the direction maintaining means.

The detachment prevention plate 612 is made of a non-magnetic material, for example, aluminum, like the base 218, and is integrally fixed with the base 218 and the like. A plurality of communication holes 614 similar to the communication holes 240 are formed in a portion of the separation prevention plate 612 corresponding to the valve holes 226, and the lower surface of a portion inside the communication holes 614 is a flat plane. I have. In addition, the backup pin 62
In the pedestal 320, there is a steel block 6 which is a ferromagnetic material.
22 is fixed. The block 622 has a rectangular parallelepiped shape, and has a thickness and width slightly smaller than the depth and width inside the pedestal 320 and communicates with a passage 296 provided in the pin 286 as shown in FIGS. Connecting passage 6
24 are formed. The communication path 624 is a block 622
The block 622 and the pedestal 32 are provided in parallel to the width direction of
It is opened in the space between 0 and communicates with the communication hole 614. The space between the passage 296, the communication passage 624, the block 622 and the base 320 forms a negative pressure passage 626.
Is composed.

In a state where the backup pin 620 is not attached to the holding base 598, as shown in FIG.
The valve element 602 is seated on the valve seat 606 by its own weight, and the on-off valve 6
00 is closed. When the backup pin 620 is attached to the holding base 598, as shown in FIG. 15, the block 622 is magnetized by the valve element 602, the valve element 602 is attracted to the block 622 by magnetic force, and the valve seat 606 is provided.
And the on-off valve 600 is opened. Also, the backup pin 620 is moved by the magnetic force to the holding table 598.
Is sucked and fixed. Block 622 and valve 602
There is an anti-separation plate 612 made of aluminum, which is a non-magnetic material, and the magnetic force cannot be reduced by that amount.
8, the block 622 is magnetized with a strength sufficient to obtain a magnetic force. In the present embodiment, it can be considered that the upper surface 628 of the separation prevention plate 612 is the upper surface of the holding base 598, and the backup pin 620 is fixed to the upper surface 628 of the separation prevention plate 612.
The upper surface 630 of 8 is the upper surface of the holding base 598, and the backup pin 620 can be considered to be fixed to the holding base 598 via a separation prevention plate 612 made of nonmagnetic material made of aluminum. In the latter case, the portion of the separation preventing plate 612 covering the valve hole 226 is provided together with the base 218 and the like on the holding base 59.
8 may be understood.

When the valve is made of a permanent magnet and the lower end of the backup pin is made of a ferromagnetic material as described above, FIG.
As in the printed wiring board holding device 648 shown in FIG.
It is desirable to provide an orifice 652, which is a kind of throttle, in a passage 296 that forms the negative pressure passage 626 of the backup pin 650. As described above, when the printed wiring board holding device 174 is raised, the negative pressure supply hole 224 is connected to the negative pressure source 7.
0, and a negative pressure is supplied to the backup pin 650. Therefore, when the backup pin 650 does not hold the printed wiring board 24, the orifice 652
As a result, the flow of air is restricted, and the negative pressure on the negative pressure source 72 side, that is, on the pedestal 320 side becomes larger than the orifice 652 of the passage 296. Therefore, the backup pin 650
Is fixed to the holding table 598 by the magnetic force, and is attracted and fixed to the holding table 598 by the negative pressure.

Then, the holding table 598 is moved to the pedestal 3 by the negative pressure.
When the backup pins 650 hold the printed wiring board 24, the force for attracting 20 is further increased. In this state, the passage 296 is closed by the printed wiring board 24, so that the negative pressure between the pedestal 320 and the holding base 598 increases. Therefore, when the electronic component 32 is mounted on the printed wiring board 24,
Even if a force acts on the backup pin 650 to move it with respect to the holding table 598, the movement of the backup pin 650 is favorably prevented.

On the other hand, when the printed wiring board holding device is moved to the lower end position, no negative pressure is supplied.
The backup pin 650 is used to hold the holder 59 only by magnetic force.
8 and is easy to remove from the holding table 598. The orifice 652 in the present embodiment can be adopted in an embodiment in which the valve element is made of a ferromagnetic material and the lower end of the backup pin is a permanent magnet.

In each of the above embodiments, the on-off valve 260 and the like are configured so that the valve element is separated from the valve seat by magnetic force and the on-off valve 260 and the like are opened. You may do so. Figure 1 shows an example
9 and FIG.

The printed wiring board holding device 69 of the present embodiment
8 has a base 702, a spacer 704,
A cover 706 and a valve seat plate 708 as a valve seat member are provided. The valve seat plate 708 has a plate shape having substantially the same size as the base 702, and the base 702, the spacer 704, the cover 706, and the valve seat plate 708 are superimposed on each other, and are shown at an outer peripheral portion of a portion separated from the communication passage 234. Not fixed to each other by a fixing device. A plurality of negative pressure supply holes 712 are formed in the base 702, and a valve hole 714 having a larger diameter than the spacer 704 is formed at an opening end of each of the negative pressure supply holes 712 on the valve seat plate 708 side. ing.

The valve seat plate 708 is made of a ferromagnetic material, for example, steel, and covers the plurality of valve holes 714 and
A through hole 720 having a smaller diameter than the valve hole 714 is formed concentrically with the valve hole 714 at a portion corresponding to each valve hole 714. The portion of the through hole 720 on the valve hole 714 side is a tapered hole whose diameter increases toward the valve hole 714 side.
22 are formed. The valve seat plate 708 includes a plurality of valve seats 72.
2, the maximum diameter of the valve seat 722 is smaller than the diameter of the valve hole 714, and the valve seat plate 708 is formed with the valve seat 722 and the valve hole 7
14 is covered.

A ball 730 as a valve element is movably accommodated in the valve hole 714, and is urged toward a valve seat 722 by a compression coil spring (hereinafter abbreviated as a spring) 732 as a spring member. A valve opening protrusion 734 having a circular cross section is provided to protrude from a portion of the ball 730 on the valve seat 722 side. The diameter of the valve opening projection 734 is smaller than the through hole 720, and allows the ball 730 to be seated on the valve seat 722. As shown in FIG. 20, when the ball 730 is located at the closed position where the ball 730 is seated on the valve seat 722, the valve opening protrusion 734 penetrates the through hole 720, and the upper surface 73 of the holding table 700.
It has a length that protrudes beyond 6 to the outside. Upper surface 736
Is constituted by the upper surface of the valve seat plate 708. Also,
The protruding end of the valve-opening projection 734 has a hemispherical shape. In this embodiment, the valve hole 714, the valve seat 722, the ball 730,
The on-off valve 73 including the spring 732 and the valve opening projection 734
8 are configured.

In the pedestal 742 of the backup pin 740, a permanent magnet 744 is fixed. Permanent magnet 744
Has a rectangular parallelepiped block shape, and has a thickness and width slightly smaller than the depth and width inside the pedestal 742. The permanent magnet 744 has a communication passage 746 that communicates with the passage 296 and extends parallel to the width direction. These passages 296,
A gap between the communication passage 746 and the permanent magnet 744 and the pedestal 742 forms a negative pressure passage 748.

In a state where the backup pin 740 is not attached to the holding base 700, as shown in FIG. 20, the ball 730 is seated on the valve seat 722 by the bias of the spring 732, and is located at the closed position. Is closed, and the valve opening projection 734 is
The ball 730 is projected upward from the valve seat 72.
2 is allowed to sit. Therefore, when the backup pin 740 is attached to the holding base 700, the permanent magnet 744 comes into contact with the valve opening protrusion 734, and the spring 73
The ball 730 is moved in a direction away from the valve seat 722 against the urging force of No. 2. When the pedestal 742 is in contact with the holding base 700 and is seated around the opening of the valve hole 714 of the negative pressure supply hole 712, the valve opening protrusion 734 contacts the permanent magnet 744 of the backup pin 740 and the ball 73.
0 is kept at an open position away from the valve seat 722, and the on-off valve 738 is opened. Thereby, the negative pressure passage 7
48 is communicated with the negative pressure supply hole 712 to supply a negative pressure. Then, the steel valve seat plate 708, which is a ferromagnetic material, is magnetized by the permanent magnet 744, and the backup pin 740 is attracted and fixed to the holding base 700 by the magnetic force obtained thereby. In this embodiment, the valve seat plate 708 made of a ferromagnetic material and the permanent magnet 744 of the backup pin 740 hold the backup pin 740 to the holding base 700.
To form a fixing device.

The valve opening projection may be provided on the backup pin. An example will be described with reference to FIGS. 21 and 22. The on-off valve 800 of the printed wiring board holding device 798 according to the present embodiment has, as a valve, a ball 802 having no valve opening projection. A pedestal 814 forming a mounting seat 812 for the backup pin 810 has a container shape larger than the lower end of the pin 286 and the through hole 720, and a permanent magnet 816 is fixed inside. The pedestal 814 has a circular cross section, for example. The permanent magnet 816 has the pedestal 81
4, the permanent magnet 816 communicates with the passage 296 and extends at right angles to the passage 296.
18, a passage 296, a communication passage 818, and a gap between the permanent magnet 816 and the pedestal 814 constitute a negative pressure passage 819, and the valve opening projection 82 is formed on the lower surface of the permanent magnet 816.
0 is protruding. The diameter of the valve opening protrusion 820 is the through hole 7
20 and projecting below the seating surface 822 which is the lower surface of the pedestal 814.
When 10 is attached to the holding base 700, the ball 80
2 are long enough to separate the valve seat 2 from the valve seat 722.

In a state where the backup pin 810 is removed from the holding base 700, as shown in FIG. 22, the ball 802 is seated on the valve seat 722 and is in the closed position, and the on-off valve 800 is closed. When the backup pin 810 is attached to the holding base 812, the valve opening projection 820 penetrates the through hole 720 and protrudes into the valve hole 714, and the ball 80
Contact 2 From this state, the valve opening projection 820 is
02 is pushed away from the valve seat 722 against the urging force of the spring 732, and the on-off valve 800 is opened by the movement of the ball 802 to the open position, and the negative pressure supply hole 712 is opened to communicate with the negative pressure passage 819. Can be Also, the seat surface 8 of the base 814
Reference numeral 22 is adhered to the periphery of the opening of the through hole 720 to prevent leakage of negative pressure, and the backup pin 810 is fixed to the holding base 700 by magnetic force. The backup pin 810 is movable with respect to the holding base 700 within a range in which the valve-opening projection 820 can move within the through-hole 720, and has a small moving range. , Permanent magnet 8
16 is small.

When the on-off valve is opened by moving the valve by magnetic force and moving away from the valve seat, the pedestal has a long shape, and the holding range of the printed wiring board by one backup pin has been widened. Alternatively, the backup pin may be attached to the holding table with its axis positioned at the center of the negative pressure supply hole to hold the printed wiring board. An example will be described with reference to FIG.

The printed wiring board holding device 84 of the present embodiment
The pedestal 854 constituting the mounting seat 852 for the backup pin 850 of the eighth shape has a container shape with a circular cross section. Pedestal 854
The inner diameter is slightly larger than the diameter of the valve hole 226, and a permanent magnet 856 is fixed inside. The permanent magnet 856 has a columnar shape, and its diameter is slightly smaller than the inner diameter of the pedestal 854, and a communication passage 858 communicating with the passage 296 is formed. The communication path 858 is formed to penetrate the permanent magnet 856 in the diameter direction, and
8. The gap between the permanent magnet 856 and the base 854 constitutes a negative pressure passage 860. The backup pin 850 is fixed to the holding table 210 by a magnetic force, and the ball 268 is attracted by the permanent magnet 856 and the separation preventing plate 216 to be separated from the valve seat 262, and from the negative pressure supply hole 224 through the communication passage 240 to be negative. A negative pressure is supplied to the pressure passage 860.

The mounting position of the backup pin 850 is such that the suction cup 310 sucks the printed wiring board 24 and the pin 2
The position of the axis 86 coincides with the center of the negative pressure supply hole 224. Since the inner diameter of the base 854 is slightly larger than the diameter of the valve hole 226, the backup pin 8
Although the position 50 can be shifted with respect to the negative pressure supply hole 224, the range of this allowable difference in position is smaller than when the pedestal has a long shape. Therefore, in order to increase the probability that the holding portion of the printed wiring board matches the position where the backup pin 850 can be attached, the negative pressure supply holes 224 are provided more in comparison with the case where the pedestal has a longitudinal shape. Have been. However, a plurality of negative pressure supply holes 22
4 is opened by the attachment of the backup pin 850, is closed when the backup pin 850 is not attached, and is closed when the backup pin 850 is not attached.
Since there is no need to cover the 24 with a cap or the like, even if a large number of negative pressure supply holes 224 are provided, the operation time for attaching the backup pins 850 to the holding table 210 does not become long.

Further, unlike the case where the pedestal has a longitudinal shape, the pedestals of the adjacent backup pins do not interfere with each other, and the pin installation data can be easily created. Furthermore, if the pedestal 854 has a circular shape, a rotating device for rotating a pin holder that holds the backup pin is unnecessary, regardless of the rotational position when the backup pin is attached to the holding table. The pedestal is preferably circular,
It may be square.

In each of the embodiments shown in FIGS. 1 to 18 and FIG. 23, a communication hole 240 and the like are provided in a portion corresponding to the valve hole 226 of the separation preventing plate 216 and the like, and the negative pressure supply hole 22 is provided.
4 and the negative pressure passage 326 are communicated with each other. However, through holes are formed in portions corresponding to each of the plurality of valve holes of the holding plate formed of a ferromagnetic material and constituting the upper surface of the holding table. In addition to this, the through hole may be covered with a lid or a separation preventing plate capable of communicating the negative pressure supply hole with the negative pressure passage so as to prevent the valve element from coming out of the valve hole. An example will be described with reference to FIG.
Note that components having the same functions as those of the embodiment shown in FIG. 1 to FIG.
Description is omitted.

The printed wiring board holding device 89 of the present embodiment
In FIG. 8, a steel holding plate 904 as a ferromagnetic material is fixed to the upper surface of a base 218 constituting the holding base 900, and the holding plate 904 is respectively penetrated into portions corresponding to the plurality of valve holes 226. A hole 906 is provided. Each of the through holes 906 has a large-diameter stepped portion on the side opposite to the upper surface 908 of the holding base 900 constituted by the upper surface of the holding plate 904, and a detachment preventing plate 914 is provided in the large-diameter hole portion 910. Fitted and fixed. In the present embodiment, the separation preventing plate 914 is formed by a wire mesh. The detachment preventing plate 914 is desirably made of a magnetic material, and in this embodiment, the wire netting 914 is made of a magnetic material. Therefore, the backup pin 2
12 is mounted on the holding plate 904 so as to cover the opening of the valve hole 226, and as shown by a two-dot chain line, the ball 268 is attracted by magnetic force and separated from the valve seat 262 to open and close. The valve 260 is opened. At this time, the ball 268 is prevented from coming out of the valve hole 226 by the release prevention plate 914, and the mesh of the release prevention plate 914 allows the negative pressure passage 326 to communicate with the negative pressure supply hole 224. And a negative pressure is supplied.

In the embodiment shown in FIG. 24, the detachment prevention plate may be formed of an iron plate having a large number of holes penetrating in the thickness direction instead of the wire mesh.

In each of the above embodiments, the on-off valves 260, 6
A pad 266 is provided on the valve seats 262 and 606 of the first valve 266 so that the ball 268 and the valve element 602 are seated on the valve seats 262 and 606 via the pads 266 so that leakage of negative pressure is more reliably prevented. However, an O-ring may be provided instead of the pad. The embodiment will be described with reference to the drawings. The present embodiment has the same configuration as the embodiment shown in FIGS. 1 to 14 except that an O-ring is provided instead of the pad, and a detailed description thereof will be omitted.

The printed wiring board holding device 95 of this embodiment
In FIG. 25, as shown in FIG. 25, an on-off valve 956 is provided for each of the plurality of negative pressure supply holes 954 provided in the holding base 952. A rubber O-ring 962 is fixedly provided at the bottom of the valve hole 958 provided at the opening end of the negative pressure supply hole 954. As shown in FIG. 26, the surface of the O-ring 962 is coated with polytetrafluoroethylene, which is a kind of an anti-sticking material, to provide an anti-sticking layer 964. In FIG. 26, the thickness of the anti-sticking layer 964 is exaggerated for easy understanding.

As for the negative pressure supply hole 954 to which the backup pin 212 is not attached, as shown on the right side of FIG. The O-ring 962 is in contact with the inner peripheral surface of the valve hole 958 and the ball 966. At this time, the ball 966 does not contact the inner peripheral surface of the valve hole 958, and the on-off valve 956 is closed by the seating of the ball 966 on the O-ring 962. The O-ring 962 functions as a valve seat. In the state where negative pressure is supplied to the negative pressure supply hole 954 to hold the printed wiring board,
The ball 966 is pressed against the O-ring 962 by the negative pressure to elastically deform the O-ring 962, and the O-ring 962 reliably prevents the negative pressure from leaking.

In the negative pressure supply hole 954 to which the backup pin 212 is attached, as shown on the left side of FIG. 25, a ball 966 made of a ferromagnetic material is attracted to the separation preventing plate 216 by magnetic force and separated from the O-ring 962. Then, the on-off valve 956 is opened, and a state is established in which the negative pressure is supplied to the negative pressure passage 326 of the backup pin 212. Since the anti-sticking layer 964 made of polytetrafluoroethylene is formed on the surface of the O-ring 962, even if the O-ring 962 and the ball 966 are kept in contact for a long time, the contact and separation are frequently repeated. However, if the ball 966 is fixed to the O-ring 962 and the ball 966 does not remain in contact with the O-ring 962, and the backup pin 212 is attached to the holding base 210, the on-off valve 95
6 is opened to obtain a negative pressure supply state, and the printed wiring board is sucked and held by the negative pressure.

As shown in FIG. 27, an anti-sticking layer 980 may be formed on the surface of the ball 966. Sticking prevention layer 98
0 is formed, for example, by coating the surface of the ball 966 with polytetrafluoroethylene. Also in FIG. 27, the thickness of the anti-sticking layer 980 is exaggerated. O-ring 962 and ball 966
Both may be provided with a sticking prevention layer.

In the case where the pedestal has a longitudinal shape as the backup pin, the pin may be provided at one end of the longitudinal shape of the pedestal.

When the valve-opening projection is provided on the backup pin as in the embodiment shown in FIGS. Although the range of movement with respect to the hole is limited, the pedestal has a circular cross-sectional shape and has a size that can be closely attached to the periphery of the opening of the negative pressure supply hole, but the pedestal may have a longitudinal shape. .

Further, in each of the above-described embodiments, the holding unit 360 and the like are mounted on the Y-axis table 42, and the suction nozzle 60
With the holding unit 36
0 may be moved by the XY robot 48 only when the backup pin is attached to or detached from the holding table, and may be made to stand by at the standby position or the retreat position when the electronic component 32 is mounted, and may be made to retreat. For example, the component mounting head 30, the rotating device 50, the elevating device 52, and the like, and the holding unit 360 are provided on separate tables, respectively. The two tables are also provided with air supply connections for supplying positive pressure air to the lifting device 366 and the like.
The air supply connections are connected to each other at the same time as the two tables are connected by the connection.

The table provided with the suction nozzles 60 and the like is always on the X-axis table 36 and functions as the Y-axis table 42. The table provided with the holding unit 360 is used when the electronic component 32 is mounted. X axis table 3
6 and is made to stand by at a waiting position. The standby position is provided, for example, at a position adjacent to the X-axis table 36 in the Y-axis direction when the X-axis table 36 is at the original position, and when the X-axis table 36 has returned to the original position at the time of setup change. In the holding unit 3
The table on which the component mounting head 30 and the like are mounted is connected to the table on which the component mounting head 30 and the like are mounted, and is moved by the XY robot 48. After attaching the backup pin to the holding table, the X-axis table 36 is moved to the original position, the table on which the holding unit 360 is mounted is separated from the table on which the component mounting head 30 and the like are mounted, and the standby position is set. At standby. This prevents the weight of the Y-axis table from increasing when the electronic component is mounted.

In each of the above embodiments, when replacing the backup pin at the time of setup change, after removing all the backup pins currently attached to the holding table, the printed wiring to which the electronic component is to be mounted next is removed. It was designed to attach a backup pin to hold the board,
With the backup pin actually attached to the holder,
If there is a backup pin with the same position and phase as the backup pin used to hold the next printed wiring board, leave the common backup pin as it is, remove the non-common backup pin, and use it to hold the next printed wiring board Of the backup pins used, backup pins other than the common backup pin may be attached to the holder.

Further, in each of the above embodiments, the Y-axis table 42 is equipped with various types of switching valves such as the electromagnetic direction switching valve 68.
It may be provided on the 0 side. As a result, the Y-axis table 42 becomes lighter, and for example, it becomes possible to increase the moving acceleration.

In each of the above embodiments, the installation and collection of the backup pin on the holding table are automatically performed, but may be performed manually by an operator.
Even if the worker performs, the negative pressure supply hole to which the holding member is not attached may not be closed with a cap or the like, and the printed wiring board holding device in which the holding member is installed at a predetermined position of the holding table may be used. It can be obtained quickly, and the time required for the setup change of the printed wiring board holding device in the electronic component mounting system can be reduced.

Further, in some of the above embodiments,
When the valve of the on-off valve is made of a ferromagnetic material, a steel ball is used as the valve, and the whole valve is made of a ferromagnetic material. Alternatively, the surface may be coated with a ferromagnetic material.

The automatic changeover device may be provided separately from the electronic component mounting device 16 without sharing the components with the electronic component mounting device 16.

Further, when a portion near the lower end surface of the holding member is formed of a ferromagnetic material, at least a portion of the support base of the storage device that supports the holding member is formed by a permanent magnet, and the holding member is fixed by magnetic force. What should I do?

In each of the above embodiments, the wiring board clamping device 172 includes the fixed guide 188 and the movable guide 19.
However, the clamp plate provided so as to be movable to zero is moved by a clamp cylinder to sandwich the edge of the printed wiring board 24 together with the wiring board pressing portion 194.
The clamp plate is engaged with the holding base when the printed wiring board holding device is raised, and is moved toward the wiring board holding portion against the urging of the spring with the rising of the holding base,
The printed wiring board 24 may be clamped. Alternatively, if the holding stand of the printed wiring board holding device is of a size corresponding to the size of the printed wiring board, and if the holding base is replaced according to the size of the printed wiring board during setup change, use the holding base. A clamp plate may be provided. For example, clamp plates are erected on both sides of the holding table parallel to the wiring board transport direction. The holding member has a height whose upper end surface is located in the same plane as the upper end surface of the clamp plate. When the printed wiring board holding device is raised, the holding member sucks and holds the printed wiring board, and the clamp plate supports the printed wiring board from below, and sandwiches the edge of the printed wiring board between the printed wiring board holding part and the holding part. Clamp with.

Further, the wiring board lifting / lowering device may use an air cylinder as a fluid pressure actuator as a driving source.

Further, according to the present invention, the component mounting head is moved in directions having two orthogonal components in a moving plane parallel to the surface of the printed wiring board to mount the electric component on the printed wiring board. Not only the printed wiring board holding device of the electrical component mounting system but also the component mounting head is moved by the mounting head moving device in one direction in a moving plane parallel to the surface of the printed wiring board, and the printed wiring board is printed wiring. By the board holding device moving device, the printed wiring board holding device of the electric component mounting system, which is moved in the moving plane in a direction orthogonal to the moving direction of the component mounting head, the plurality of component mounting heads are rotated around one axis. Provided on the rotating body,
By rotating the rotating body, the rotating body is swung about a swiveling axis which is the rotation axis of the rotating body, and is sequentially moved to a plurality of working positions or stop positions such as a component receiving position, a component mounting position, and the like, and the electric components are supplied. The present invention can be applied to a printed wiring board holding device or the like of an electric component system to be taken out of the device and mounted on the printed wiring board. When the component mounting head is rotated by the mounting head rotating device, the printed wiring board holding device is moved by the printed wiring board holding device moving device in a direction parallel to the board surface of the printed wiring board, and the electrical components of the printed wiring board are moved. Is mounted at a position corresponding to the component mounting position of the component mounting head. The electric component supply device is moved by the electric component supply device to supply the electric component. When the component mounting head is provided on the rotating body, for example, a pin storage device may be provided at one of a plurality of working positions, and a backup pin may be mounted on the holding table at the component mounting position. The rotating body may be an intermittent rotating body that is intermittently rotated by the intermittent rotating device, or a rotating body that is rotated by an arbitrary angle by the rotating device. Further, the rotation axis may be perpendicular to the surface of the printed wiring board, or may be an axis inclined with respect to a plane perpendicular to the surface of the printed wiring board. Further, the rotating body may be rotated by the rotating device and moved by the moving device, and may be moved to an arbitrary position in a moving plane parallel to the surface of the printed wiring board fixed and supported. The moving device for moving the component mounting head or the like is a relative moving device for relatively moving the component mounting head, the electric component supply device, and the printed wiring board holding device. The component mounting head may be considered to include a component holder such as a suction nozzle or the like, and may be considered to be a component mounting head up to a holder that detachably holds the component holder.

Further, the present invention provides a circuit inspection apparatus for inspecting a circuit formed on the surface of a printed wiring board as well as supporting the printed wiring board in an electric component mounting system.
Work equipment such as a screen printing device for screen-printing creamy solder on the surface of a printed wiring board, and a high-viscosity fluid coating device for sequentially applying one or more high-viscosity fluids such as an adhesive to the surface of the printed wiring board. The present invention is also applicable to a printed wiring board holding device for other purposes such as supporting a printed wiring board. Further, the present invention can be executed by changing the combination of the above embodiments.

Although some embodiments of the present invention have been described in detail above, these are merely examples, and the present invention is not limited to the above-mentioned [Problems to be solved by the invention, means for solving problems and effects]. The present invention can be implemented in various modified and improved forms based on the knowledge of those skilled in the art, including the described embodiment.

[Brief description of the drawings]

FIG. 1 is a plan view schematically showing an electronic component mounting system including a printed wiring board holding device according to an embodiment of the present invention.

FIG. 2 is a side view showing a state in which a component mounting head and a holding unit of the electronic component mounting apparatus of the electronic component mounting system are mounted on a Y-axis table.

FIG. 3 is a front view (partial cross section) showing a printed wiring board supporting and conveying device including the printed wiring board holding device.

FIG. 4 is a front sectional view showing a part of the printed wiring board holding device.

FIG. 5 is a plan view showing a communication hole provided in a detachment prevention plate of the printed wiring board holding device.

FIG. 6 is a plan view showing a base constituting a holding base of the printed wiring board holding device.

FIG. 7 is a side view (partial cross section) showing a holding head of the automatic setup changeover device for mounting a backup pin constituting the printed wiring board holding device on a holding table.

FIG. 8 is a sectional view taken along the line VIII-VIII in FIG. 7;

FIG. 9 is a sectional view taken along the line IX-IX in FIG. 7;

FIG. 10 is a rear view (partial cross section) showing a holding unit including the holding head.

FIG. 11 is a plan view showing a mechanical mechanism of the mounting device.

FIG. 12 is a block diagram schematically showing a control device for controlling the electronic component mounting system.

FIG. 13 is a view for explaining attachment of a backup pin to a holding base constituting the printed wiring board holding device.

FIG. 14 is a front sectional view showing another embodiment of the detachment prevention member of the printed wiring board holding device.

FIG. 15 is a front sectional view showing a printed wiring board holding device according to another embodiment of the present invention, showing a portion where a backup pin is attached to a holding table.

16 is a side sectional view of the printed wiring board holding device shown in FIG.

FIG. 17 is a front sectional view showing a state where the backup pin of the holding base is not attached in the printed wiring board holding device shown in FIG. 15;

FIG. 18 is a front cross-sectional view showing a printed wiring board holding device according to another embodiment of the present invention, showing a state where backup pins are attached to the holding base.

FIG. 19 is a front sectional view showing a printed wiring board holding device according to another embodiment of the present invention, showing a state in which backup pins are attached to the holding base.

20 is a front sectional view showing a state where the backup pin of the holding base is not attached in the printed wiring board holding device shown in FIG. 19;

FIG. 21 is a front sectional view showing a printed wiring board holding device according to another embodiment of the present invention, showing a state in which backup pins are attached to the holding base.

22 is a front sectional view showing a state where the backup pin of the holding base is not attached in the printed wiring board holding device shown in FIG. 21;

FIG. 23 is a front sectional view showing a printed wiring board holding device according to another embodiment of the present invention, showing a state where backup pins are attached to the holding base.

FIG. 24 is a front sectional view showing an on-off valve of a printed wiring board holding device according to another embodiment of the present invention.

FIG. 25 is a front sectional view showing an on-off valve of a printed wiring board holding device according to another embodiment of the present invention.

26 is a front sectional view showing an O-ring constituting an on-off valve of the printed wiring board holding device shown in FIG. 25;

FIG. 27 is a front sectional view showing an embodiment in which a ball is provided with a sticking prevention layer in an on-off valve provided with an O-ring of a printed wiring board holding device.

[Explanation of symbols]

24: Printed wiring board 48: XY robot 17
4: Printed wiring board holding device 210: Holder 2
12: Backup pin 216: Separation prevention plate 2
24: Negative pressure supply hole 226: Valve hole 244: Top surface
260: open / close valve 262: valve seat 266: pad 268: ball 272: positioning recess 28
6: Pin 310: Suction cup 320: Pedestal
326: Negative pressure passage 328: Permanent magnet 500: Control device 598: Printed wiring board holding device 59
8: Holder 600: On / off valve 602: Valve 6
06: Valve seat 612: Separation prevention plate 620: Backup pin 626: Negative pressure passage 648: Printed wiring board holding device 650: Backup pin 69
8: Printed wiring board holding device 700: Holding table 7
08: Valve seat plate 712: Negative pressure supply hole 714: Valve hole 722: Valve seat 730: Ball 732: Spring 734: Valve opening projection 736: Upper surface 73
8: On-off valve 740: Backup pin 742: Pedestal 74
4: Permanent magnet 798: Printed wiring board holding device
800: open / close valve 802: ball 810: backup pin 814: pedestal 820: valve opening projection
848: Printed wiring board holding device 850: Backup pin 854: Pedestal 856: Permanent magnet 8
98: Printed wiring board holding device 900: Holding table
914: separation prevention plate 950: printed wiring board holding device 962: holding table 954: negative pressure supply hole 95
6: On-off valve 958: Valve hole 962: O-ring
964: Sticking prevention layer 966: Ball 980: Sticking prevention layer

Claims (4)

[Claims] 1. A holding table having a plurality of negative pressure supply holes opened in a flat upper surface, and a lower surface attached to an upper surface of the holding table in a state of being in close contact with lower ends around the openings of the plurality of negative pressure supply holes. At least one holding member formed with a negative pressure passage penetrating the inside and opening to the upper end surface, supporting the printed wiring board on the upper end surface of the holding member, and supplying a negative pressure through the negative pressure passage. In a printed wiring board holding device that sucks a printed wiring board by a negative pressure supplied from a hole, the holding member is closed in a state where the holding member is not attached to each of the plurality of negative pressure supply holes. A printed circuit board holding device provided with an opening / closing valve which opens in accordance with the mounting of the device on the holding base and connects the negative pressure supply hole to the negative pressure passage. 2. The valve according to claim 2, wherein the on-off valve is provided with an upward valve seat at the open end of the negative pressure supply hole, and is disposed in the valve hole and seated on the valve seat. A valve that shuts off the negative pressure supply hole in the closed state, and a detachment preventing portion that prevents the valve from being released from the valve hole, and forms at least a valve seat peripheral portion of the negative pressure supply hole of the holding base. 2. A portion made of a non-magnetic material, and one of the valve element and the vicinity of the lower end face of the holding member is made of a permanent magnet, and the other is made of a ferromagnetic material. Printed wiring board holding device. 3. The printed wiring board holding device according to claim 2, wherein a portion near the lower end surface of the holding member is made of a permanent magnet, and the valve body is made of a ferromagnetic material. 4. The detachment preventing portion covers an opening of the valve hole, abuts on the valve element to prevent the valve element from being detached from the valve hole, and provides a valve even when the valve element is in contact with the valve element. A disconnection prevention member provided with a communication hole that is not closed by a child and keeps the negative pressure supply hole and the negative pressure passage in communication with each other, wherein the separation prevention member is at least a part of the plurality of negative pressure supply holes. Having a size to cover a plurality of valve holes corresponding to
4. The printed wiring board holding device according to claim 2, wherein the holding board is a detachment prevention plate fixed to an upper surface of the holding table.