JP2002115349A - Microvibration controlling frame - Google Patents

Abstract

PROBLEM TO BE SOLVED: To achieve enhancement of rigidity and reduction of vibration at low cost. SOLUTION: This frame includes a trussed girder structure 1 whose girder length is equal to an overall floor height; a lower floor 7 mounted on the lower chord 4 of the structure 1; and an upper floor 7 mounted on the upper chord 2 of the structure 1. A steel frame 10 of approximately U-shaped cross section open at its top is used as the upper chord 2 and filled with post cast concrete 11.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro-vibration control frame employed particularly in a production facility which involves fine processing of semiconductors and the like.

[0002]

2. Description of the Related Art In a facility for producing semiconductors, fine processing and precision inspection are performed, so even small vibrations hinder production. Therefore, in order to minimize the vibration of the building frame as much as possible, conventionally, the frame is stiffened, or the frame weight is increased for a finite excitation source. On the other hand, the layout of production equipment is often required to have as few pillar-free spaces as possible, and the floor below the floor where the main production line is located is a space for auxiliary equipment to support production equipment. The upper and lower floors function as a production factory. Further, there is a demand for a so-called multi-layer structure in which such a pair of upper and lower floors are further mounted on an upper floor.

As described above, in a facility such as a semiconductor, a long-span frame having a high rigidity is required. In general, in order to suppress vertical vibration,
As shown in FIG. 7, a large steel truss structure a,
b, or steel reinforced concrete beams (not shown) are arranged on the upper and lower floors to secure the required rigidity, and the steel truss structures a, b or the steel floor reinforced concrete beams are used for the concrete floors in the production area and auxiliary equipment space c. , D
Are individually received. Note that in FIG. 7, reference symbol e denotes a ceiling.

[0004]

However, in such a conventional building frame, when the steel frame truss beam structures a and b are employed, the steel frame has a poor damping performance against vibration.
In order to increase the rigidity, truss steel frames need to have a very large cross-sectional area, and moreover, truss beams are required to construct the truss beam structure on the upper and lower floors, which is uneconomical. There is.

On the other hand, when a truss beam made of steel reinforced concrete is adopted, although the damping performance against vibration due to concrete can be improved, the cost of the beam itself is high and the weight is heavy, so that it is difficult to transport and build. Since the time required is long, there is a disadvantage that the construction period is long and the construction cost is high. The present invention has been made to solve such a disadvantage, and an object of the present invention is to provide a microvibration control frame capable of improving rigidity and reducing vibration at low cost.

[0006]

In order to achieve the above object, a micro-vibration control frame according to a first aspect of the present invention is provided with a truss beam structure having an entire story height and a lower chord member attached to the truss beam structure. A lower floor, and an upper floor attached to the upper chord of the truss beam structure, wherein at least one of the upper chord and the lower chord has a substantially U-shaped cross section with an upper opening. Characterized in that a post-cast concrete is filled in the steel frame.

Here, the truss of the present invention refers to not only a normal truss in which the ends of the diagonal members and the bundle columns are connected but also a modified truss in which the diagonal members are connected to intersect with the bundle columns. It is a concept that includes. The microvibration control frame according to claim 2 uses the steel frame having a substantially U-shaped cross section in at least one of the upper chord material side and the lower chord material side in claim 1,
The steel frame is filled with post-cast concrete.

According to a third aspect of the present invention, in the micro vibration control frame according to the first or second aspect, semiconductor production equipment is disposed on the upper floor and auxiliary equipment for the production equipment is disposed on the lower floor. It is characterized by having done.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is an explanatory schematic diagram for explaining a micro-vibration control frame according to an embodiment of the present invention, FIG. 2 is a schematic perspective view of a truss beam structure, and FIG.
FIG. 4 is a sectional view taken along line bb of FIG. 1, and FIGS. 5 and 6 are explanatory sectional views illustrating a micro vibration control frame according to another embodiment of the present invention. . In this embodiment, a micro-vibration control frame used in a semiconductor production facility is taken as an example.

Referring to FIG. 1 to FIG. 4, this micro-vibration control frame includes a truss beam structure 1 made of a steel frame or the like whose entire height is a beam. The upper floor (upper floor) is a production area (clean room) 3 in which semiconductor production equipment and the like are arranged, and an upper chord material 2 and a lower chord material 4.
A floor (lower floor) between them is an auxiliary space 5 in which auxiliary machines for supporting production equipment are arranged.

A small beam 2a is connected to the upper chord material 2,
A concrete floor (upper floor) 6 on which production equipment and the like are installed is attached to the upper surfaces of the upper chord member 2 and the small beams 2a to form an integral structure. Here, in this embodiment, as the upper chord 2 of the truss beam structure 1, the cross-section is substantially U-shaped and opened upward.
In addition to using the steel frame 10 having a U-shape, a steel frame 10a having a substantially U-shaped cross section with an open upper portion is also used for the small beam 2a.
Post-cast concrete 11 is filled in the steel frames 10 and 10a. The placing of the post-cast concrete 11 is performed simultaneously with the placing of the concrete floor 6.

Further, a plurality of grandchild beams 2c are connected to a part between the small beams 2a at substantially equal intervals, and a concrete floor 6 is not cast into this part and is used as a blow-through part.
The grandchild beam 2c is made of precast concrete, and is a steel frame having a substantially U-shaped cross section, which is filled with concrete in advance. On the other hand, a small beam 4a is connected to the lower chord member 4, and both the lower chord member 4 and the small beam 4a are made of H-shaped steel. On the upper surface side of the lower chord member 4 and the beam 4a, a concrete floor (lower floor) 7 on which auxiliary equipment is installed is attached.
The concrete floor 7 and the lower chord member 4 are integrally connected by a connecting tool such as a stud (not shown) to form a composite structure. Note that the diagonal members 8 and the bundle columns 9 of the truss beam structure 1 are arranged on the floor of the auxiliary space 5, but there is no problem in function as the auxiliary space 5. In the diagonal material 8,
H-shaped steel filled with concrete is used at the center in the axial direction.

As is clear from the above description, in this embodiment, since the floor height can be directly used as the beam structure, a large beam structure can be obtained and the rigidity of the frame can be increased. Vibration can be satisfactorily suppressed. Further, the number of truss steel frames can be reduced as compared with the conventional case where the truss beam structures a and b are arranged on the upper and lower floors, respectively. Can be.

Further, as the upper chord 2 of the truss beam structure 1, a steel frame 10 having a substantially U-shaped cross section and a concrete 11 filled and integrated are used, and the small beam 2a is also used as a steel frame having a substantially U-shaped cross section. Since the concrete 10a is filled with the concrete 11 and integrated, the rigidity improving effect and the excellent vibration damping performance by the concrete 11 can be obtained at low cost, and as a result, the vertical vibration is suppressed. The effect can be further improved.

Further, the concrete floor 6, the upper chord 2 and the small beam 2a are integrally joined to form a composite structure, and the concrete floor 7 and the lower chord 4 and the small beam 4a are integrally joined to form a composite structure. As a result, the rigidity of the floors (slabs) 6 and 7 is added to the axial rigidity of the upper and lower chords 2 and 4, and as a result, the axial rigidity of the upper and lower chords 2 and 4 and thus the beam rigidity are greatly increased as a whole. Thus, vibration can be more effectively suppressed.

Further, the post-cast concrete 11 filled in the steel frame 10 of the upper chord 2 and the steel frame 10a of the small beam 2a is cast after the truss beam structure 1 is constructed.
When transporting or building the (steel frame 10) or the small beam 2a (steel frame 10a), it is lightweight and easy to handle. As a result, the time required for transporting and building is shortened, and the construction period is shortened and the construction is completed. Costs can be reduced,
Furthermore, since the steel frames 10, 10a having a substantially U-shaped cross section are arranged with their openings facing upward, the post-cast concrete 11 can be easily poured into the steel frames 10, 10a.

Further, there is no truss member in the ceiling 12 of the production area 3a on the lower floor of the truss beam structure 1, and there are truss members in the ceiling 13 of the auxiliary space 5, but the number is small. Effective use of the ceiling can be achieved. In the above embodiment, the upper chord member 2 and the small beams 2a use the steel frames 10, 10a having a substantially U-shaped cross section.
Although the post-cast concrete 11 is filled and integrated in 0, 10a, the lower chord material 4 and the lower chord are referred to in place of or in addition to this, with reference to FIGS. The steel beam 1 having a substantially U-shaped cross section is also used for the small beam 4a on the material 4 side.
The post-cast concrete 11 may be filled into the steel frames 10, 10a using 0, 10a. In this case, similarly, the placement of the post-cast concrete 11 is performed simultaneously with the placement of the concrete floor 7.

[0018]

As is apparent from the above description, according to the present invention, it is possible to improve rigidity and reduce vibration at low cost.

[Brief description of the drawings]

FIG. 1 is an explanatory schematic diagram for explaining a micro-vibration control frame which is an example of an embodiment of the present invention.

FIG. 2 is a schematic perspective view of a truss beam structure.

FIG. 3 is a sectional view taken along line aa of FIG. 1;

FIG. 4 is a sectional view taken along line bb of FIG. 1;

FIG. 5 is an explanatory cross-sectional view for explaining a micro vibration control frame according to another embodiment of the present invention.

FIG. 6 is an explanatory cross-sectional view illustrating a micro vibration control frame according to another embodiment of the present invention.

FIG. 7 is an explanatory schematic diagram for explaining a conventional micro-vibration control frame.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Truss beam structure 2 ... Upper chord material 3 ... Production area 4 ... Lower chord material 5 ... Auxiliary space 2a ... Small beam 6 ... Concrete floor (upper floor) 7 ... Concrete floor (lower floor) 10 ... Steel frame 10a ... Steel frame 11 ... Post-cast concrete

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2E001 DG01 EA02 EA06 FA01 GA55 GA64 HA04 HB02 KA03 KA07 LA10 3J048 AA06 AC02 BE20 EA38

Claims (3)

[Claims] 1. A truss beam structure having an entire story height,
A lower floor attached to the lower chord of the truss beam structure; and an upper floor attached to the upper chord of the truss beam structure, wherein at least one of the upper chord and the lower chord is a chord. A micro-vibration control frame, characterized in that a steel frame having a substantially U-shaped cross section with an opening is used and post-cast concrete is filled in the steel frame. 2. A steel beam having a substantially U-shaped cross section is used for a small beam on at least one of the upper chord material side and the lower chord material side, and the steel frame is filled with post-cast concrete. The micro vibration control frame according to claim 1. 3. The micro-vibration control according to claim 1, wherein semiconductor production equipment is provided on the upper floor, and auxiliary equipment for the production equipment is provided on the lower floor. Frame.