JP2002061329A - Micro vibration control frame - Google Patents

Abstract

PROBLEM TO BE SOLVED: To lower floor height and to reduce a construction cost besides suppressing vertical vibration while securing required rigidity. SOLUTION: This micro vibration control frame has a concrete floor 5 on the upper face of an upper chord member 4 of truss beam structure 1. A steel frame 8 of approximately U-shaped cross section opened on the upper side is used as a lower chord member 7 of the truss beam structure 1, and post-cast concrete 9 is filled in the steel frame 8.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro-vibration control frame employed particularly in a production facility which involves fine processing of semiconductors and the like.

[0002]

2. Description of the Related Art In a facility for producing semiconductors, fine processing and precision inspection are performed, so even small vibrations hinder production. Therefore, in order to minimize the vibration of the building frame as much as possible, conventionally, the frame is stiffened, or the frame weight is increased for a finite excitation source.

On the other hand, the layout of production equipment often requires a space with as few pillars as possible, and the floor below the floor where the main production line is located has a space for auxiliary equipment for supporting production equipment. The upper and lower floors function as a production factory. Further, there is a demand for a so-called multi-layer structure in which such a pair of upper and lower floors are further mounted on an upper floor.

As described above, in a facility such as a semiconductor, a long-span frame having high rigidity is required, but generally, in order to suppress vertical vibration,
A steel truss beam structure with a large beam structure or a steel reinforced concrete beam is arranged to ensure necessary rigidity.

[0005]

However, in such a conventional building frame, when a steel truss beam structure is adopted, the steel frame has poor damping performance against vibration, and the beam structure is increased to increase the rigidity. Needs to be increased,
As a result, the floor height becomes too large and height restrictions become a problem.On the other hand, when steel-framed reinforced concrete beams are used, the damping performance against vibration caused by concrete can be improved, but the cost of the beams themselves is only high. On the other hand, since the weight is heavy and the time required for transportation and building is long, there is a disadvantage that the construction period is long and the construction cost is high.

SUMMARY OF THE INVENTION The present invention has been made to solve such inconveniences. In addition to securing required rigidity and suppressing vertical vibrations, the present invention can reduce floor height. It is another object of the present invention to provide a micro-vibration control frame capable of reducing the construction cost.

[0007]

In order to achieve the above object, a micro vibration control frame according to the present invention is a micro vibration control frame having a concrete floor on an upper surface of an upper chord of a truss beam structure. At least one of the upper chord member and the lower chord member of the beam structure has a substantially U-shaped cross-section and is filled with post-cast concrete.

Here, the truss of the present invention refers to not only a normal truss in which the end portions of the diagonal members and the bundle columns are connected but also a modified truss in which the diagonal members are connected to intersect with the bundle columns. It is a concept that includes.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is an explanatory view for explaining a micro-vibration control frame which is an example of an embodiment of the present invention, FIG. 2 is a cross-sectional view taken along line aa of FIG. 1, and FIG. 3 is a partial perspective view of a lower chord material. FIG. 4 is an explanatory cross-sectional view for explaining a micro-vibration control frame according to another embodiment of the present invention. In each embodiment, a micro-vibration control frame used in a semiconductor production facility is taken as an example.

Referring to FIG. 1, this micro-vibration control frame comprises:
A truss truss beam structure 1 (a portion surrounded by a chain line) is provided above and below the truss beam structure 1, and a pair of upper and lower floors are arranged, and the upper floor of the pair of upper and lower floors is used for semiconductor production. The production area 2 in which the equipment and the like are arranged is set as the production area 2, and the lower floor is the auxiliary equipment space 3 in which the auxiliary equipment for supporting the production equipment and the like is arranged.

As shown in FIG. 2, a concrete floor 5 on which auxiliary equipment is installed is attached to the upper surface of the upper chord member 4 of the truss beam structure 1. The concrete floor 5 and the upper chord member 4 are, for example, A composite structure is formed by being integrally connected by a connecting tool such as a stud 6 projecting from the upper chord material 4. Here, in this embodiment, the lower chord material 7 of the truss beam structure 1 is used.
A steel frame 8 having a substantially U-shaped cross section with an upper opening is used, and the steel frame 8 is filled with post-cast concrete 9.

As shown in FIG. 3, a round bar 10 extending in the width direction of the steel frame 8 is provided at a predetermined interval in the longitudinal direction of the steel frame 8 in the upper part of the steel frame 8 in order to prevent local buckling of the steel frame 8. The two ends of the round steel 10 are fixed to the inner surfaces of both side plates of the steel frame 8 by welding or the like. In addition, in round steel 10,
A wire mesh 11 for preventing the concrete 9 from cracking is placed. Note that the round steel 10 also functions as a positioning guide for the wire mesh 11.

As described above, in the present embodiment, the lower chord member 7 of the truss beam structure 1 is made of a steel frame 8 having a substantially U-shaped cross-section and is filled with concrete 9 to be integrated. The improvement effect and the excellent vibration damping performance by the concrete 9 can be obtained at low cost. Therefore, it is possible to secure the required rigidity and suppress the vertical vibration without increasing the beam structure of the truss beam structure 1 so much. As a result, the floor height can be reduced, and the problem of height limitation can be avoided.

Further, since the post-cast concrete 9 filled in the steel frame 8 of the lower chord member 7 is cast after the truss beam structure 1 is constructed, it is necessary to transport and build the lower chord member 7 (steel frame 8). , Lightweight and easy to handle,
The time required for transportation and how to build is shortened, so that the construction period can be shortened and the construction cost can be reduced. Further, the steel frame 8 having a substantially U-shaped cross section of the lower chord 7 has its opening facing upward. Since they are arranged, it is possible to easily place the post-cast concrete 9 into the steel frame 8.

In the above-described embodiment, the case where a plurality of round bars 10 are welded to the upper portion inside the steel frame 8 to prevent local buckling of the steel frame 8 is taken as an example. A flat bar or the like is erected vertically on the bottom plate surface of the steel frame 8 and welded.
Local buckling may be prevented. In the above embodiment, the wire mesh 11 is used to prevent the concrete 9 from cracking. However, instead of this, the concrete 9 may be prevented from cracking using a reinforcing bar or the like.

Further, in the above-described embodiment, as the lower chord member 7, a steel frame 8 having a substantially U-shaped cross section is used, and the steel frame 8 is filled with post-cast concrete 9 and integrated. Instead of or in addition to this, as shown in FIG. 4, the post churned concrete 9 may be filled in the steel chord 8 using the steel chord 8 having a substantially U-shaped cross section as shown in FIG. 4. . In this case, the casting of the post-cast concrete 9 can be performed simultaneously with the casting of the concrete floor 5.

[0017]

As is apparent from the above description, according to the present invention, not only the required rigidity can be ensured and the vertical vibration can be suppressed, but also the floor height can be reduced. At the same time, the effect that the construction cost can be reduced can be obtained.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram for explaining a micro-vibration control frame which is an example of an embodiment of the present invention.

FIG. 2 is a sectional view taken along line aa of FIG.

FIG. 3 is a partial perspective view of a lower chord material.

FIG. 4 is an explanatory cross-sectional view illustrating a micro vibration control frame according to another embodiment of the present invention.

[Explanation of symbols]

 1 ... truss beam structure 2 ... production area 3 ... auxiliary equipment space 4 ... upper chord material 5 ... concrete floor 7 ... lower chord material 8 ... steel frame 9 ... post-cast concrete

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Claims (1)

[Claims] 1. A microvibration control frame having a concrete floor on an upper surface of an upper chord of a truss beam structure, wherein at least one of an upper chord material and a lower chord material of the truss beam structure has a substantially U-shaped cross section. A micro-vibration control frame, characterized in that a steel frame having a U-shape is used, and the steel frame is filled with post-cast concrete.