JP2002098526A - Optical range finder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical range finder in an ultra-small size capable of measuring a short range with high resolution. SOLUTION: A light beam emitted from a light emitting element 104 passes through a first collimator lens 112, reflects on a reflective mirror 114, passes through a flat plate beam splitter 116 and is projected onto a reflective plate 142 through a second collimator lens 118 in the optical range finder 100. The light beam reflected by the reflective plate 142 passes through the second collimator lens 118 and enters into the flat plate beam splitter 116. The half of the light beams from the flat plate beam splitter 116 is directed to a double-sided cylindrical lens 122. The double-sided cylindrical lens 122 causes astigmatism in the light beam. The light beam passing through the double-sided cylindrical lens 122 is imaged on a photodetecting element 130 by an imaging lens 124.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultra-small optical distance measuring apparatus, and more particularly to an optical distance measuring apparatus of 1 mm to 2 m.
The present invention relates to an optical distance measuring device capable of measuring a distance of about m and having a resolution of the order of 1 to 3 microns. The optical distance measuring apparatus of the present invention is used for a video camera lens (including DVC), a DSC lens,
Includes a position sensor for an anti-vibration actuator incorporated in a photographic lens and other image input devices and the like.

[0002]

2. Description of the Related Art Conventionally, the optical type is 1 m in absolute.
High accuracy in the measuring range from m to 2mm (on the order of several microns)
An ultra-small sensor capable of measuring at a resolution of 1 has not been commercialized. For example, as an optical distance measuring sensor, there is a wide-range, ultra-high-precision displacement sensor using a triangulation method. In some devices, there is an optical ranging sensor aimed at mass production.

[0003]

However, since the above-mentioned displacement sensor uses a laser or a CCD, it is expensive, very large, and cannot be mounted on consumer electronic equipment. Further, the above optical distance measuring sensor is for measuring a very long (about 10 to 100 mm) range, and its resolution is relatively good on the short distance side.
Bad at long distances (around 100mm). Furthermore, since such an optical distance measuring sensor optically applies a triangulation method, the device itself does not become ultra-compact and the total length is 30%.
mm. In optical ranging sensors, ultra-miniaturization may be possible by specializing the application as it is and using a special reflector, but it is possible to use it for general purposes with versatility. It is out of the question to make the reflection plate special in order to make the device as described.

At present, an optical distance measuring sensor is ultra-compact with an overall length of 25 mm or less, and has a measuring range of 1 mm to 2 mm.
mm, the working distance is very short, about 3 mm (center position), the resolution is on the order of several microns, the resolution does not change significantly with the measurement distance, and it can be measured in absolute (absolute value). It is not necessary to use a special reflector on the measurement surface side, has high versatility, has a configuration that is cost-effective without using a semiconductor laser or a high-resolution CCD, and can tolerate some inclination of the measurement surface. Things have not been commercialized.

At present, in particular, there is a great demand for an optical distance measuring sensor that can be measured in an absolute (absolute value) manner, and a sensor that can be measured in an absolute (absolute value) has not been realized. However, it is necessary to use a special reflector on the measurement surface side, which causes a problem of low versatility. Unless it can be measured absolutely, it is common to detect the signal with a pulse and count it with a counter, but it is necessary to form some pattern or pattern on the measurement surface side to count the pulse Becomes Therefore, such a conventional configuration cannot be realized as a highly versatile optical distance measuring device.

For example, when used in a vibration isolation system, it can be dealt with only by installing an optical distance measuring sensor in the actuator, so that it is not necessary to change the position sensor (distance measuring sensor) for each actuator. Therefore, the type of the actuator body can be diversified based on the reverse idea. This is because the structure of the actuator greatly changes depending on the installation method of the position sensor. In addition to the optical sensor as a position sensor,
There are Hall element sensors, MR sensors, and the like. If any of these position sensors generates a magnetic field other than the object to be measured near the installation location, the linearity of the output is not guaranteed and the output fluctuates. In order to use a Hall element sensor, an MR sensor, or the like as a position sensor such as an actuator, strict examination and simulation are required.

[0007]

SUMMARY OF THE INVENTION An object of the present invention is to provide an optical distance measuring apparatus which can measure a short range with high resolution in a very small size. The above object of the optical distance measuring apparatus of the present invention is based on the fact that, in the future, the electronic equipment will be required to have a long measuring range and not to be very necessary in order to achieve extremely high precision and miniaturization. As an example, an optical distance measuring device is used in an optical image stabilization system that has recently been mounted on video cameras, digital cameras, and the like.
There is a use as a position sensor.

In recent years, generally, an anti-vibration system is mounted by mounting an anti-vibration actuator that shifts (eccentrically) a part of a lens of an optical system. There are various types of position sensors for detecting the amount of eccentricity of the lens inside the vibration isolation system. A position sensor using light, unlike other types of position sensors, is less likely to be affected by magnetism generated from inside the actuator, and is ideal because the detection accuracy and the detected value do not change.
Therefore, another object of the present invention is to provide an optical distance measuring device that can be applied to a vibration isolation system or the like and does not change the detection accuracy and the detection value.

[0009]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention relates to a distance measuring device, comprising: a light-emitting element for emitting light for irradiating a measurement object; An irradiating optical system for irradiating the object with light and irradiating it with light, and an imaging system for irradiating light reflected by the measuring object and forming light so as to generate astigmatism An optical system and a light receiving element for receiving the light from the imaging optical system and detecting the astigmatism are provided, and the irradiation optical system and the imaging optical system are configured as measurement optical systems. It is characterized by constituting a system. With this configuration, a resolution on the order of microns can be easily obtained in a measurement range of 2 mm, and an inexpensive and small optical distance measuring device can be manufactured.

In the optical distance measuring device of the present invention, it is preferable that the light emitting element is constituted by a high-brightness LED, and that a circular pinhole is provided in front of the light emitting element. With this configuration,
The alignment between the device and the measurement surface can be easily performed. In the optical distance measuring device of the present invention, the irradiation optical system includes a first collimator lens, the imaging optical system includes an imaging lens, and the first collimator lens and the imaging lens are glass aspheric lenses. Preferably, both lenses are common lenses. With this configuration, it is possible to greatly reduce costs such as reduction in the types of optical components.

In the optical distance measuring apparatus according to the present invention, the irradiation optical system includes a first collimator lens, the imaging optical system includes an imaging lens, and the first collimator lens and the imaging lens are plastic lenses. Is preferred. In the optical distance measuring device according to the present invention, it is preferable that the measuring optical system includes a second collimator lens, and the second collimator lens is a glass spherical lens or an aspherical lens. In the optical distance measuring device of the present invention, the measuring optical system preferably includes a second collimator lens, and the second collimator lens is preferably a plastic lens.

In the optical distance measuring device of the present invention, the measuring optical system preferably includes a second collimator lens, and the second collimator lens is preferably a biconvex lens, a plano-convex lens, or a flat plate. With this configuration, even if the measurement surface (reflection surface) is tilted to some extent (about ± 0.5 degrees), no problem occurs in the measurement accuracy.

In the optical distance measuring apparatus according to the present invention, the imaging optical system is a lens for generating astigmatism.
It preferably includes a double-sided cylindrical lens or a single-sided toroidal lens. In the optical distance measuring apparatus according to the present invention, the measuring optical system includes a flat-type beam splitter, and the beam splitter has a beam split film on the light emitting element side, and has a beam split film on a side opposite to the side on which the beam split film is provided. Is preferably provided with an antireflection film. In the optical distance measuring device of the present invention, the irradiation optical system includes the first collimator lens, and the mirror for changing the traveling direction of light includes:
It is preferably provided between the first collimator lens and the beam splitter. In the optical distance measuring device of the present invention, the light receiving element preferably includes a four-division optical sensor.

Further, the present invention provides an optical distance measuring apparatus, further comprising a package for accommodating the light emitting element, the measuring optical system, and the light receiving element, wherein the light emitting element, the measuring light An optical system and the light receiving element are arranged in the package. Further, the present invention provides an optical distance measuring device, comprising the above optical distance measuring device, further receiving an output signal output from the light receiving element, and forming an astigmatism imaged on the light receiving element. Is characterized by comprising a calculation unit for calculating the distance between the optical distance measuring device and the measurement object by analyzing the contents of the above. With this configuration, the absolute distance can be output, and the digital-related device can be used as it is by A / D conversion. The optical distance measuring device of the present invention further includes a package for accommodating the optical distance measuring device and an IC including the arithmetic unit, wherein the optical distance measuring device and the IC are included in the package. It is preferred to be arranged in.

Further, the present invention relates to a distance measuring device,
A ROM comprising the optical distance measuring device described above, and further storing distance calculation information for analyzing the content of astigmatism formed on the light receiving element by inputting an output signal output from the light receiving element. And an IC for calculating a distance between the optical distance measuring device and the measurement object and for realizing an interface function with an external device. The optical distance measuring device of the present invention further includes an optical distance measuring device, a package for accommodating the ROM and the IC, and the optical distance measuring device, the ROM and the IC are arranged in the package. Is preferred. According to this configuration, the external electronic device uses the distance calculation information stored in the ROM in the optical distance measuring device, and the IC performs an interface function, so that the distance between the optical distance measuring device and the measurement object is increased. Can be calculated.

[0016]

Embodiments of the present invention will be described below with reference to the drawings. (1) First Embodiment of Optical Distance Measuring Apparatus of the Present Invention A first embodiment of the optical distance measuring apparatus of the present invention will be described. (1.1) Configuration of First Embodiment of Optical Distance Measuring Apparatus of Present Invention Referring to FIGS. 1 and 2, optical distance measuring apparatus 100 of the present invention irradiates measurement object 140. A light emitting element 104 for emitting light, an irradiation optical system 110 for irradiating light emitted by the light emitting element 104 and irradiating light to the measurement object 140, and a light reflected by the measurement object 102 An image forming optical system 120 for forming light so as to generate incident light and generate astigmatism; and an image forming optical system 1
And a light receiving element 130 for receiving the light from the light source 20 and detecting the astigmatism. The irradiation optical system 110 and the imaging optical system 120 constitute a measurement optical system 108. A reflection plate 142 for reflecting light emitted toward the measurement object 140 is disposed on the measurement object 140.

The light emitting element 104 is an optical distance measuring device 10
0 light source unit. The light emitting element 104 employs an LED. As the light emitting element 104, a red LE having a wavelength of 660 nm is considered in consideration of high luminance and visible light.
It is better to use D. L whose wavelength is other than 660 nm
ED is also available. Referring to FIG. 3, a circular pinhole 106 is provided immediately after the light emitting element (LED) 104. Light emitted from the circular pinhole 106 is used as a point light source, and light emitted from the circular pinhole 106 is used as light for irradiating the measurement object 102.

Referring to FIGS. 1 and 2, the illumination optical system 110 includes a first collimator lens 112. The first collimator lens 112 has a function of refracting a light beam spreading from the pinhole 106 at an arbitrary angle in a converging direction. The first collimator lens 112 is basically formed of a glass molded lens having an aspheric surface on one side. The glass material for the first collimator lens 112 is Pyrex (registered trademark). As a modification, the first collimator lens 112 may be a plastic aspheric lens. Such a plastic aspherical lens can be used under conditions where there is no concern about temperature characteristics (temperature drift) due to thermal expansion of the lens itself, such as when used under a constant temperature environment condition.

The lens used in the optical distance measuring device of the present invention does not need to have an excellent wavefront aberration (about 3 / 100λ RMS) which is particularly used for an objective lens for CDP or the like. The reason is that the optical distance measuring device of the present invention does not use a laser and does not use light interference. Therefore, the accuracy of the lens used in the optical distance measuring device of the present invention may be of a general geometric optical level. Therefore, even when a plastic aspherical lens is used, a change in surface accuracy after the formation of the antireflection film can be ignored.

As shown in FIG. 1, a circular diaphragm 1 for shielding light is provided on the light emitting element 104 side of the first collimator lens 112.
12a are provided. Referring to FIGS. 1 and 2, a reflection mirror 114 for changing the traveling direction of light is provided in the irradiation optical system 110. By providing the reflection mirror 114, the size of the optical distance measuring device can be reduced. The light beam emitted from the first collimator lens 112 is configured to be bent 90 degrees by the reflection mirror 3. The reflecting surface of the reflecting mirror 114 may be formed by depositing aluminum and a protective film on a glass plate, or may be formed by forming a multilayer film on the glass plate to obtain a high reflectance. Good. A configuration in which aluminum and a protective film are deposited on a glass plate is more advantageous in cost than a configuration in which a multilayer film is formed on a glass plate.

A flat plate beam splitter 116 is provided in the irradiation optical system 110. Flat plate beam splitter 116
Is a type that causes 45/50 incidence, non-polarization, and 50/50 separation. Since the center wavelength of the light emitted from the light emitting element 104 is 660 nm (nanometers), the semi-reflective film of the flat plate beam splitter 116 may be designed so that this wavelength becomes a reference. The semi-reflective film of the flat plate beam splitter 116 is formed on a flat portion of the flat plate beam splitter 116 on the light emitting element side. Half of the light beam from the light emitting element 104 is reflected by the semi-reflective film, and the other half of the light beam passes through the flat plate beam splitter 116. On the surface of the flat plate beam splitter 116 opposite to the light emitting element side, a 45-degree incident anti-reflection film for efficiently transmitting a light beam is provided.

A second collimator lens 118 for projecting light having a small spot size on the reflecting plate 142 is provided in the irradiation optical system 110. Plate beam splitter 11
The light flux transmitted through 6 is incident on the second collimator lens 118 and is projected from the second collimator lens 118 to the reflection plate 142. If the reflection plate 142 is inclined, it is preferable to project light of a small spot size to the reflection plate 142 so as not to affect the measurement result of the distance.

The second collimator lens 118 is preferably a spherical lens. In the optical distance measuring device 100 of the present invention, the second collimator lens 118 is a convex lens having the same radius of curvature on both surfaces. If the temperature characteristics described above are ignored, the second collimator lens 118 may be a plastic lens. The second collimator lens 11
Reference numeral 8 may be an aspheric lens. It is preferable to form antireflection films on both surfaces of the second collimator lens 118. As a modified example, the second collimator lens 118 may be a plano-convex lens, or may be a flat plate that has some power but is somewhat difficult to miniaturize.

The light beam reflected by the reflection plate 142 is transmitted through the second collimator lens 118 again (double pass). The light transmitted through the second collimator lens 118 is configured to enter the flat plate beam splitter 116 again. Therefore, the flat plate beam splitter 116 and the second collimator lens 118 form the irradiation optical system 110 and also form the imaging optical system 120. That is, the flat plate beam splitter 116 and the second collimator lens 118 are connected to the measuring optical system 108.
Is configured.

Since the reflection surface of the plane beam splitter 116 is on the light emitting element side, the light beam once passes through the plane plate. The generated coma is corrected by the amount of eccentricity (from the optical axis) of the lens. This principle is like applying the optical path of a Twyman-Green interferometer as it is. Since the reflectivity of the plane beam splitter 116 is 50%, half of the light beam goes toward the light emitting element side at the time of reflection, but the other half of the light beam is reflected and goes to the double-sided cylindrical lens 122. . The double-sided cylindrical lens 122 is arranged to generate astigmatism in the light beam. Therefore, the double-sided cylindrical lens 122 is a very important optical element for the optical distance measuring device 100 of the present invention, and is an essential element for detecting the position of the reflector 142.

Reflector 142 and second collimator lens 11
8 changes, the reflection angle of the light beam reflected by the reflector 142 changes according to the change in the distance between the reflector 142 and the second collimator lens 118. When the reflection angle of the light beam reflected by the reflection plate 142 changes, the angle of the light beam incident on the double-sided cylindrical lens 122 also changes. A change in the degree of astigmatism occurs due to a change in the angle of the light beam incident on the double-sided cylindrical lens 122. As will be described later, the occurrence of astigmatism of the light transmitted through the double-sided cylindrical lens 122 is detected by a four-division photodiode.

Referring to FIGS. 4 to 6, one surface 122c (the surface on the front side in FIG. 4) of the double-sided cylindrical lens 122 and the other surface 122d on the opposite side (the back surface in FIG. 4). (Plane) is cylindrical so that the directions of the central axes of the cylindrical surfaces constituting the cylindrical lens are shifted from each other by 90 degrees in the vertical and horizontal directions. That is,
The direction of the central axis 122f of the cylindrical surface forming the surface 122c is 90 degrees with respect to the direction of the central axis 122g of the cylindrical surface forming the surface 122d, and is spaced apart. In other words, the central axis 122f is included in a plane perpendicular to the central axis 122g, and the central axis 122g is
The relation is such that it is included in a plane perpendicular to f. Face 122
The radius of curvature Rc of the cylindrical surface forming c is preferably the same as the radius of curvature Rd of the cylindrical surface forming surface 122d. The radius of curvature Rc of the cylindrical surface forming the surface 122c may be different from the radius of curvature Rd of the cylindrical surface forming the surface 122d.

Referring again to FIGS. 1 and 2, the imaging lens 124 is configured to form an image of the light beam which has passed through the double-sided cylindrical lens 122 and to which astigmatism has been added, on the light receiving element 130. That is, the light receiving element 130 is
The light transmitted through the double-sided cylindrical lens 122 is incident, and is provided to detect astigmatism added by transmitting the light through the double-sided cylindrical lens 122. The light receiving element 130 is preferably formed of, for example, a four-division photodiode (SPD). Imaging lens 124
Can have exactly the same shape as the first collimator lens 112. Therefore, the imaging lens 124 is a glass aspherical surface and is formed of a lens having the same shape as the first collimator lens 112.

As a modified example, the imaging lens 124 has a first
A plastic lens having exactly the same configuration as the collimator lens 112 may be used. Thus, the imaging lens 124
By making the first collimator lens 112 and the first collimator lens 112 have exactly the same configuration, it is not necessary to prepare lenses of various shapes, and an aspherical mold for the imaging lens 124 and a non-spherical mold for the first collimator lens 112 can be used. Since a spherical mold can be used, cost reduction can be achieved.

Referring to FIGS. 7 and 8, the optical distance measuring apparatus 100 of the present invention further comprises a light emitting element 104,
A package 150 for accommodating the light receiving element 130 and the measuring optical system 108 is provided. The substrate 152 is disposed in the package 150. The substrate 152 may be a glass epoxy substrate or a polyimide substrate.

A plurality of input terminals 154 and a plurality of output terminals 156 are fixed to substrate 152. Input terminal 154
And the output terminals 156 extend from the inside of the package 150 to the outside of the package 150, respectively. Light emitting element 1
The input terminal 04 is connected to the input terminal 154 for the light emitting element. The input terminal of the light receiving element 130 is connected to the input terminal 154 for the light receiving element. The output terminal of the light receiving element 130 is connected to the output terminal 156 for the light receiving element. Light emitting element 10
4 and light receiving element 130 are mounted on substrate 152. As a modification, without providing the substrate 152,
The plurality of input terminals 154 and the plurality of output terminals 156 may be integrally formed to form a lead frame structure. In this configuration, the light emitting element 104 and the light receiving element 130 are mounted on a lead frame structure.

The measuring optical system 108 is arranged inside the package 150. A window 150w is provided in a part of the package 150. The light beam transmitted through the second collimator lens 118 exits from the window 150w and enters the reflection plate 142, and the light beam reflected by the reflection plate 142 enters the window 150w and enters the second collimator lens 118. The window 150w is arranged. Filter 150f,
The window 150w is arranged. Therefore, package 1
The inside of the package 150 can be sealed by the filter 50 and the filter 150f.

If necessary, a reference position indicating unit 108t (shown by a phantom line in FIGS. 1 and 8) for determining the reference position of the measuring optical system 108 is provided in the measuring optical system 108 to indicate the reference position. The portion 108t may be configured to extend from inside the package 150 to outside the package 150. The reference position indicating unit 108t may be provided, for example, based on the second collimator lens 118. With this configuration, the reference position of the measurement optical system 108 with respect to the reflection plate 142 (and therefore with respect to the measurement object 140) can be accurately determined.

(1.2) Operation of First Embodiment of Optical Distance Measuring Apparatus of the Present Invention Referring to FIG. 1, in optical distance measuring apparatus 100, light flux emitted by light emitting element (LED) 104 is provided. The way of proceeding is indicated by arrows. Light emitting element (LED) 104
Irradiates the light beam passing through the circular pinhole 106, and the light emitted from the circular pinhole 106 becomes a point light source, and is incident on the first collimator lens 112. The first collimator lens 112 refracts a light beam that spreads from the pinhole 106 in the light collecting direction. First collimator lens 1
The light beam refracted at 12 is bent by 90 degrees by the reflection mirror 3. The light beam bent by the reflecting mirror 3 reflects half of the light beam on the flat plate beam splitter 116, and transmits the other half of the light beam through the flat plate beam splitter 116. The light beam transmitted through the flat plate beam splitter 116 enters the second collimator lens 118 and is projected from the second collimator lens 118 to the reflection plate 142.

The light beam reflected by the reflector 142 passes through the second collimator lens 118 again. The light transmitted through the second collimator lens 118 enters the flat plate beam splitter 116 again. Half of the light beam incident on the plane beam splitter 116 goes to the light emitting element side, and the other half of the light beam is reflected and goes to the double-sided cylindrical lens 122. Since the distance between the reflector 142 and the second collimator lens 118 changes, the reflector 1
The reflection angle of the light beam reflected by
It changes in accordance with a change in the distance between the first and second collimator lenses 118.

When the angle of reflection of the light beam reflected by the reflector 142 changes, the angle of the light beam incident on the double-sided cylindrical lens 122 also changes. Light transmitted through the double-sided cylindrical lens 122 is transmitted to the imaging lens 12.
4, the light receiving element (four-division photodiode) 130
Is imaged. At this time, the double-sided cylindrical lens 1
A change in the degree of astigmatism occurs due to a change in the angle of the light beam incident on 22.

Referring to FIGS. 9 to 13, in the optical distance measuring device of the present invention, the second collimator lens 11 is used.
4 divided light receiving element (for example, 4 divided photodiode) when the distance between 8 and reflecting plate 142 is changed
3 shows a schematic shape of a spot on 130. At this time, a portion where the light beam is projected on the light receiving element 130 is shown in black, and a portion where the light beam is not projected on the light receiving element 130 is shown in white.
The spot that passes through the imaging lens 124 and forms an image on the light receiving element 130 does not become a completely small point due to astigmatism, but has a diameter that clearly appears on the light receiving element 130 at the time of a circular spot. Has a spot size.

Referring to FIG. 9, the optical distance measuring device 1
At 00, the second collimator lens 118 and the reflector 1
4 shows a schematic shape of a spot on a light receiving element 130 divided into four when the distance between the light receiving element 42 and the light receiving element 42 is 1.75 mm (shortest distance). Referring to FIG. 10, the optical distance measuring device 1
At 00, the second collimator lens 118 and the reflector 1
4 shows a schematic shape of a spot on a light receiving element 130 divided into four when a distance between the light receiving element 42 and the light receiving element 42 is 2.35 mm.

Referring to FIG. 11, in the optical distance measuring apparatus 100, when the distance between the second collimator lens 118 and the reflecting plate 142 is 2.95 mm (substantially at the center of the measuring range), it is divided into four. The schematic shape of a spot on the light receiving element 130 is shown. 11 has a distance between the second collimator lens 118 and the reflector 142 of 2.
The approximate shape of the spot on the light receiving element 130 when it is 95 mm (almost the center of the measurement range) is a relatively large point having a diameter of about 8 mm even in such a circular spot.

Referring to FIG. 12, in the optical distance measuring device 100, when the distance between the second collimator lens 118 and the reflector 142 is set to 3.35 mm, the spots on the light-receiving element 130 divided into four sections are set. The schematic shape is shown.
Referring to FIG. 13, in the optical distance measuring device 100, the spot on the light-receiving element 130 divided into four when the distance between the second collimator lens 118 and the reflecting plate 142 is 3.75 mm (the longest distance). The schematic shape of is shown.
Further, referring to FIG. 14, the optical distance measuring device 10
At 0, the schematic shape of the spot on the light receiving element 130 divided into four when the reflecting plate 142 is tilted +0.5 degrees in the front, rear, left and right directions is shown. Thus, in a measurement range of 2 mm,
According to the change in the distance between the second collimator lens 118 and the reflecting plate 142, a very large difference occurs in the spot shape formed on the light receiving element 130.

FIG. 15 is a diagram showing a schematic shape of a spot on the light receiving element 130 divided into four parts in the optical distance measuring device of the present invention. Referring to FIG. 15, the light receiving element 130 has four light receiving element areas, AR1, AR2, and AR.
3. It is divided into AR4. FIG. 15A shows a case where the distance between the second collimator lens 118 and the reflection plate 142 is short. FIG. 15B shows the second collimator lens 1.
The case where the distance between 18 and the reflection plate 142 is substantially at the center of the measurement range is shown. FIG. 15C shows a case where the distance between the second collimator lens 118 and the reflector 142 is long.

FIG. 16 shows an optical distance measuring device 1 according to the present invention.
FIG. 10 is a block diagram showing an example of a typical configuration of a calculation unit for calculating an output signal from a light receiving element 130 divided into four parts at 00. Referring to FIG. 2, the calculation unit is provided in control device 160. The control device 160 may be configured by preparing an amplifier suitable for the optical distance measuring device 100 and inputting a program to a personal computer connected to the amplifier, or preparing an IC into which the program is input, and Optical distance measuring device 1 of the invention
It may be configured to provide an arithmetic unit dedicated to 00. The configuration of the light receiving element 130 is not limited to the configuration in which the light receiving element 130 is divided into four parts. If a program for analyzing the state of the light beam incident on the light receiving element 130 is prepared,
Any number of divisions corresponding to the program may be used.

Here, an output signal output from the light receiving element area AR1 is indicated by S1, an output signal output from the light receiving element area AR2 is indicated by S2, an output signal output from the light receiving element area AR3 is indicated by S3, The output signal output from the area AR4 is indicated by S4. Error signal Sg output by the operation unit
Is determined as Sg = (S1 + S3)-(S2 + S4) (Equation S1). This (Equation S1) forms distance calculation information. In the state shown in FIG. 15B, the values of the output signals output from the four light receiving element regions, AR1, AR2, AR3, and AR4, are all equal to Sm. Therefore, in this state, in (Equation S1), Sgb = (Sm + Sm) − (Sm + Sm) = 0.

In the state shown in FIG. 15A, the values of the output signals output from the two light receiving element areas, AR1 and AR3, are equal to Sx, and the output output from the two light receiving element areas, AR2 and AR4. The signal values are equally Sy. Then, the value of Sx is larger than the value of Sy. Therefore, in this state, in (Equation S1), Sga = (Sx + Sx) − (Sy + Sy) = 2 * (Sx
-Sy). In this state, Sga takes a positive value. In the state shown in FIG. 15C, the values of the output signals output from the two light receiving element regions, AR1 and AR3, are equal to Sy, and the values of the output signals output from the two light receiving element regions, AR2 and AR4. Are equally Sx. And S
The value of x is greater than the value of Sy.

Therefore, in this state, in (Equation S1), Sgc = (Sy + Sy)-(Sx + Sx) = 2 * (Sy
−Sx). In this state, Sgc takes a negative value. Here, the error signal Sg output from the calculation unit in the state shown in FIG.
The error signal Sg output from the arithmetic unit in the state shown in FIG.
1 (plus 1), and the error signal Sg output by the calculation unit in the state shown in FIG. 15C is -1 (minus 1). When the arithmetic unit is configured in this way, the error signal Sg output from the arithmetic unit has an analog relative output value as shown in FIG. The output signal from the light receiving element 130 divided into four, the second collimator lens 118 and the reflection plate 14
The relationship with the distance between the two can be obtained by a simulation calculation or can be obtained by a calibration experiment.

FIG. 14 shows an optical distance measuring device 10.
0, the second collimator lens 118 and the reflector 14
FIG. 9 is a diagram showing a schematic shape of a spot on a light-receiving element 130 divided into four when a reflector is inclined by +0.5 degrees in front, rear, left, and right when a distance between the light-receiving elements is set to 1.75 mm (shortest distance). is there. Referring to FIG. 14, second collimator lens 118 such that the spot diameter on reflector 142 has a maximum value.
Also in the case of the distance between the light source and the reflection plate 142, a spot shape that is almost the same as that in FIG. 9 is shown, and the relative output value of the error signal output by the calculation unit is shown in FIG.
As shown by the dotted line in FIG. 7, the result is almost the same as when the reflector 142 has no inclination.

(2) Second optical distance measuring apparatus of the present invention
Next, a second embodiment of the optical distance measuring device according to the present invention will be described. The following description mainly focuses on the point that the configuration and operation of the second embodiment of the optical distance measuring device of the present invention are different from the configuration and operation of the first embodiment of the optical distance measuring device of the present invention. State. Therefore, the description of the first embodiment of the optical distance measuring apparatus of the present invention described above applies mutatis mutandis to parts not described below. Referring to FIG. 18, the second embodiment of the optical distance measuring apparatus according to the present invention will be described.
In the embodiment, the optical distance measuring device 20 of the present invention is used.
0 has a single-sided toroidal lens 222 instead of the double-sided cylindrical lens 122. That is, if a single-sided toroidal lens 222 is used to form a surface having a curvature perpendicular to the vertical and horizontal directions only on one surface on one side, the first embodiment of the optical distance measuring apparatus of the present invention including the double-sided cylindrical lens 122 is realized. It is possible to generate substantially the same operation as the configuration of the embodiment.

Referring to FIGS. 19 and 20, one surface of single-sided toroidal lens 222, ie, surface 222
A toroidal surface is formed on c (the surface on the front side in FIG. 19). The other surface of the one-sided toroidal lens 222,
That is, the back surface 222d (the surface on the back side in FIG. 19) is a flat surface. Here, the toroidal surface refers to a curved surface (that is, a toroid surface or an annular surface) formed by rotating an arc of a circle as a rotation center axis on a straight line that is on the same plane as the circle but does not pass through the center. . That is, in FIG. 20, the toroidal surface forming the surface 222c is a curved surface that can be represented by the following (Formula 1).

(Equation 1) In this (Formula 1), k: conic constant, Z: distance from each meridional plane to the plane (SAG amount), c: radius of curvature (in the case of a toroidal plane, it may be different in the X and Y directions) .

Referring to FIG. 18, in the optical distance measuring device 200 of the present invention, the light beam reflected by the reflecting plate 142 passes through the second collimator lens 118 and enters the flat plate beam splitter 116. Planar beam splitter 1
Half of the light beam incident on the light source 16 is directed toward the light emitting element, and the other half of the light beam is reflected and directed toward the single-sided toroidal lens 222. When the reflection angle of the light beam reflected by the reflector 142 changes, the angle of the light beam incident on the one-sided toroidal lens 222 also changes. The light transmitted through the single-sided toroidal lens 222 is
It is imaged at 0. At this time, the single-sided toroidal lens 22
A change in the degree of astigmatism occurs due to a change in the angle of the light beam incident on 2.

(3) Third optical distance measuring apparatus of the present invention
Next, a third embodiment of the optical distance measuring device of the present invention will be described. The following description mainly focuses on the point that the configuration and operation of the third embodiment of the optical distance measuring device of the present invention are different from the configuration and operation of the first embodiment of the optical distance measuring device of the present invention. State. Therefore, the description of the first embodiment of the optical distance measuring apparatus of the present invention described above applies mutatis mutandis to parts not described below.

Referring to FIG. 21, an optical distance measuring apparatus 300 according to the present invention includes a light emitting element 104 and an irradiation optical system 1.
10, an imaging optical system 120, and a light receiving element 130. The irradiation optical system 110 and the imaging optical system 120 constitute a measurement optical system 108. The reflecting plate 142 for reflecting the light emitted toward the measuring object 140 is
0. The optical distance measuring device 300 includes a circular pinhole 106, a first collimator lens 112,
A reflection mirror 114, a flat plate beam splitter 116,
A second collimator lens 118, a double-sided cylindrical lens 122, and an imaging lens 124 are provided. As a modification, a single-sided toroidal lens 222 may be provided instead of the double-sided cylindrical lens 122.

Referring to FIGS. 21 and 23, the optical distance measuring device 300 of the present invention further includes a light emitting element 104.
And a package 310 for accommodating the light receiving element 130 and the measuring optical system 108. Substrate 312 is located within package 310. The substrate 312 may be a glass epoxy substrate or a polyimide substrate.

A plurality of input terminals 154 and a plurality of output terminals 156 are fixed to substrate 312. Input terminal 154
And the output terminals 156 extend from the inside of the package 310 to the outside of the package 310, respectively. Light emitting element 1
The input terminal 04 is connected to the input terminal 154 for the light emitting element. The input terminal of the light receiving element 130 is connected to the input terminal 154 for the light receiving element. The output terminal of the light receiving element 130 is connected to the output terminal 156 for the light receiving element. Light emitting element 10
4 and light receiving element 130 are mounted on substrate 312. As a modification, without providing the substrate 312,
The plurality of input terminals 154 and the plurality of output terminals 156 may be integrally formed to form a lead frame structure. In this configuration, the light emitting element 104 and the light receiving element 130 are mounted on a lead frame structure.

The measuring optical system 108 is arranged inside the package 310. A window 310w is provided in a part of the package 310. The filter 150f is connected to the window 310w.
Is placed. If necessary, the measurement optical system 108
The measurement optical system 108 can be provided with a reference position indicating unit 108t for determining the reference position. An IC (integrated circuit) 320 is mounted on the substrate 312. C inside the IC
A PU, a ROM, a RAM, and the like are provided. The input terminal of the IC 320 is connected to the input terminal 154. The output terminal of IC 320 is connected to output terminal 156.

Referring to FIG. 22, operation control unit 3 for controlling the operations of light emitting element 104 and light receiving element 130 is provided.
22, a light emission control unit 324 for controlling the light emission operation of the light emitting element 104, and a light reception control unit 326 for controlling the light reception operation of the light receiving element 130 are provided in the IC 320. The output terminal of the external electronic device 360 is the input terminal 154
, And the input terminal of the external electronic device 360 is connected to the output terminal 156. The external electronic device 360 includes, for example, a video camera, a DSC, a camera for photographing, and other image input devices. The light emission control unit 324 controls the light emitting element 104 according to a control signal from the external electronic device 360.
Is controlled to emit light. The light receiving control unit 326 controls the light receiving element 130 according to a control signal from the external electronic device 360.
Is controlled to operate.

The IC 320 is provided with a light receiving signal input section 328 for receiving an output signal output from the light receiving element 130 and outputting a signal for calculating a distance between the second collimator lens 118 and the reflector 142. Distance calculation expression storage unit 330 for storing a distance calculation expression for calculating the distance between second collimator lens 118 and reflector 142.
Are provided in the IC 320. Distance calculation expression storage unit 330
Are configured in ROM or RAM. Light receiving signal input unit 3
The output signal output from the distance calculation expression storage unit 3
A distance calculation unit 332 for calculating the distance between the second collimator lens 118 and the reflection plate 142 using the distance calculation formula stored in 30 is provided in the IC 320. The distance calculation unit 332 is configured in a CPU.

As described above in the first embodiment of the optical distance measuring device of the present invention,
The distance between the second collimator lens 118 and the reflector 142 is calculated using (Equation S1).
As described above, the relationship between the output signal from the light receiving element 130 divided into four and the distance between the second collimator lens 118 and the reflector 142 can be obtained by simulation calculation. Since it can be obtained by a calibration experiment, the distance calculation unit 332
May be configured to calculate the distance between the second collimator lens 118 and the reflector 142 using a simulation calculation result or a calibration experiment result. In this configuration, the distance calculation expression stored in the distance calculation expression storage unit 330 is a simulation calculation result,
Alternatively, it is created based on a calibration experiment result.

Further, a distance calculation table may be prepared instead of or together with the distance calculation formula. Therefore, the distance calculation formula and the distance calculation table constitute distance calculation information. Distance calculator 332
Calculated by the second collimator lens 118 and the reflector 142
The output control unit 334 for outputting an output signal for outputting the calculation result of the distance between the output terminal 156 and the
Is provided. Further, the IC may be a PLA-IC incorporating programs for performing various operations. Further, in the third embodiment of the optical distance measuring device of the present invention, a resistor, a capacitor,
External elements such as a coil, a diode, and a transistor can be used. With this configuration, the second collimator lens 118 and the reflection plate 142 are provided to the external electronic device 360.
An optical distance measuring device capable of outputting the calculation result of the distance between the optical distance measuring device and the distance measuring device can be realized. As described above, the optical distance measuring device 300 of the present invention constitutes a device for an analog interface.

(4) Fourth optical distance measuring apparatus of the present invention
Next, a fourth embodiment of the optical distance measuring device of the present invention will be described. The following description mainly focuses on the point that the configuration and operation of the fourth embodiment of the optical distance measuring device of the present invention are different from the configuration and operation of the third embodiment of the optical distance measuring device of the present invention. State. Therefore, the description of the above-described third embodiment of the optical distance measuring apparatus of the present invention applies mutatis mutandis to parts not described below.

Referring to FIG. 24, an optical distance measuring apparatus 400 according to the present invention comprises a light emitting element 104 and an irradiation optical system 1.
10, an imaging optical system 120, and a light receiving element 130. The optical distance measuring device 400 includes a circular pinhole 106, a first collimator lens 112, a reflection mirror 114, a flat plate beam splitter 116, a second collimator lens 118, and a double-sided cylindrical lens 122.
And an imaging lens 124. As a modification, a single-sided toroidal lens 222 may be provided instead of the double-sided cylindrical lens 122.

Referring to FIGS. 24 and 25, the optical distance measuring device 400 of the present invention further comprises a light emitting element 104.
And a package 310 for accommodating the light receiving element 130 and the measuring optical system 108. Substrate 312 is located within package 310. Multiple input terminals 154
And the plurality of output terminals 156 are fixed to the substrate 312. The input terminal 154 and the output terminal 156 are respectively
It extends from inside package 310 to outside package 310. An IC 420 for implementing an interface function with an external device, that is, an external electronic device 460 is mounted on the board 312. The ROM 422 is mounted on the board 312. The input terminal of the IC 420 is connected to the input terminal 154. The output terminal of the IC 420 and the output terminal of the ROM 422 are connected to the output terminal 156.

In use, the output terminal of the external electronic device 460 is connected to the input terminal 154, and the external electronic device 4
Sixty input terminals are connected to output terminal 156. The external electronic device 460 includes, for example, a video camera, a DSC, a camera for photographing, and other image input devices. IC
420 includes a light emission control unit 324 and a light reception control unit 326. The light emission control unit 324 controls the light emitting element 104 to emit light according to a control signal from the external electronic device 460. The light receiving control unit 326 performs control for operating the light receiving element 130 according to a control signal from the external electronic device 460. Further, the external electronic device 460 is configured to be able to read the contents stored in the ROM 422.

The relationship between the output signal from the light receiving element 130 divided into four parts and the distance between the second collimator lens 118 and the reflector 142 can be obtained by simulation calculation, or by a calibration experiment. Since it can be obtained, the simulation calculation result or the calibration experiment result is stored in the ROM 422. That is, in this configuration, the ROM 4
The distance calculation formula stored in 22 is created based on a simulation calculation result or a calibration experiment result. Further, a distance calculation table may be prepared instead of or together with the distance calculation formula. Therefore, the distance calculation formula and the distance calculation table constitute distance calculation information. Therefore, RO
M422 stores distance calculation information.

As described above in the first embodiment of the optical distance measuring apparatus according to the present invention, the external electronic device 460 reads the contents stored in the ROM 422 and uses the result to connect the second collimator lens 118 with the second electronic device 460. It is configured to calculate the distance to the reflector 142. The IC 420 is configured to operate according to a signal from the external electronic device 460. With this configuration, the external electronic device 460
However, the distance between the second collimator lens 118 and the reflector 142 can be calculated using the distance calculation information stored in the ROM 422. As described above, the optical distance measuring device 400 of the present invention constitutes a device for a digital interface.

[0065]

As described above, in the optical distance measuring device of the present invention, it is possible to easily obtain a resolution on the order of microns in a measuring range of 2 mm. Further, in the optical distance measuring device of the present invention, it is possible to design such that the overall size of the device is 25 mm or less in total length. It can be mounted on equipment. Further, since the optical distance measuring device of the present invention does not use a semiconductor laser or a high-pixel CCD, it can be configured with inexpensive components.

Further, in the optical distance measuring apparatus of the present invention, the first collimator lens and the imaging lens can be used in common, and the cost can be greatly reduced by reducing the types of optical components. Further, the optical distance measuring device of the present invention is ultra-small and has high utility value as a highly versatile optical electronic device for short distance measuring of about 1 mm to 2 mm. Further, since the optical distance measuring device of the present invention outputs an absolute distance, the A / D is directly transmitted to digital-related equipment.
Since it can be converted and used, it is very advantageous in the future market. Examples of applications of the optical distance measuring device of the present invention include a vibration proof relationship and a pixel shift position sensor mounted inside the actuator. Further, the optical distance measuring device of the present invention includes other optical mechanism systems and CCDs. It can also be used for detection and control of minute movements.

Since the optical distance measuring device of the present invention is optical, it can be installed in a strong magnetic field. The optical distance measuring device of the present invention uses visible light,
The alignment between the device and the measurement surface is easy. Since the optical distance measuring apparatus of the present invention employs the second collimator lens and is configured to condense a light beam with a small spot diameter on the measuring surface (reflective surface), the measuring surface (reflective surface)
Even if tilted to some extent (about ± 0.5 degrees), there is no problem in the measurement accuracy.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing a measuring optical system of a first embodiment of an optical distance measuring device of the present invention (a package, a substrate, an input terminal, an output terminal and the like are not shown).

FIG. 2 is a block diagram showing the overall configuration of the first embodiment of the optical distance measuring device of the present invention.

FIG. 3 is a cross-sectional view showing a light emitting element of the first embodiment of the optical distance measuring device of the present invention.

FIG. 4 is a plan view showing a double-sided cylindrical lens used in the first embodiment of the optical distance measuring device of the present invention.

FIG. 5 is a sectional view showing a double-sided cylindrical lens used in the first embodiment of the optical distance measuring device of the present invention along line 5A-5A in FIG. 4;

FIG. 6 is a sectional view showing a double-sided cylindrical lens used in the first embodiment of the optical distance measuring device of the present invention along line 6A-6A in FIG. 4;

FIG. 7 is a perspective view showing the external shape of the first embodiment of the optical distance measuring device of the present invention.

FIG. 8 is a sectional view showing a schematic structure of a first embodiment of the optical distance measuring device of the present invention.

FIG. 9 shows the optical distance measuring device according to the present invention, in which the distance between the second collimator lens and the reflector is 1.75 mm.
It is a figure which shows the schematic shape of the spot on the light receiving element divided into four when it is set to (the shortest distance).

FIG. 10 shows a second example of the optical distance measuring device according to the present invention.
2.35 mm distance between collimator lens and reflector
FIG. 7 is a diagram showing a schematic shape of a spot on a light receiving element divided into four when the light receiving element is set to the above.

FIG. 11 illustrates a second example of the optical distance measuring device according to the present invention.
2.95 mm distance between collimator lens and reflector
It is a figure which shows the general | schematic shape of the spot on the light receiving element divided into four when it is set to (substantially the center of a measurement range).

FIG. 12 shows a second example of the optical distance measuring device according to the present invention.
3.35 mm distance between collimator lens and reflector
FIG. 7 is a diagram showing a schematic shape of a spot on a light receiving element divided into four when the light receiving element is set to the above.

FIG. 13 shows a second example of the optical distance measuring device according to the present invention.
3.75 mm distance between collimator lens and reflector
It is a figure which shows the schematic shape of the spot on the light receiving element divided into four when it is set to (the longest distance).

FIG. 14 shows a second example of the optical distance measuring device according to the present invention.
1.75 mm distance between collimator lens and reflector
(Shortest distance), and the reflection plate is +0.
It is a figure which shows the general | schematic shape of the spot on the light receiving element divided into four when it inclines by 5 degrees.

FIG. 15 is a diagram showing a schematic shape of a spot on a light receiving element divided into four in the optical distance measuring device of the present invention.

FIG. 16 is a block diagram showing an example of a typical configuration of a calculation unit for calculating an output signal from a four-divided light receiving element in the optical distance measuring device of the present invention.

FIG. 17 shows a second example of the optical distance measuring device according to the present invention.
6 is a graph showing output characteristics of output signals from a light receiving element divided into four with respect to a distance between a collimator lens and a reflector.

FIG. 18 is a sectional view showing a measuring optical system according to a second embodiment of the optical distance measuring apparatus of the present invention (a package, a substrate, an input terminal, an output terminal, and the like are not shown).

FIG. 19 is a plan view showing a one-sided toroidal lens used in a second embodiment of the optical distance measuring device of the present invention.

FIG. 20 is a perspective view of a single-sided toroidal lens used in a second embodiment of the optical distance measuring device of the present invention, showing a state where the single-sided toroidal surface is viewed from the right 30 ° direction.

FIG. 21 is a block diagram showing the overall configuration of a third embodiment of the optical distance measuring device of the present invention.

FIG. 22 is a block diagram showing a configuration of a part for controlling the operation of the third embodiment of the optical distance measuring device of the present invention.

FIG. 23 is a sectional view showing a schematic structure of a third embodiment of the optical distance measuring device of the present invention.

FIG. 24 is a block diagram showing an overall configuration of an optical distance measuring device according to a fourth embodiment of the present invention.

FIG. 25 is a sectional view showing a schematic structure of an optical distance measuring device according to a fourth embodiment of the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 100 Optical distance measuring device 104 Light emitting element 106 Pinhole 108 Measurement optical system 110 Irradiation optical system 112 First collimator lens 114 Reflection mirror 116 Plate beam splitter 118 Second collimator lens 120 Imaging optical system 122 Double-sided cylindrical lens 124 Imaging lens 140 Measurement object 142 Reflector 150 Package 152 Substrate 154 Input terminal 156 Output terminal 200 Optical distance measuring device 222 Single-sided toroidal lens 300 Optical distance measuring device 310 Package 312 Substrate 320 IC (integrated circuit) 312 Substrate 322 Operation control Unit 324 light emission control unit 326 light reception control unit 328 light reception signal input unit 330 distance calculation expression storage unit 332 distance calculation unit 334 output control unit 360 electronic device 400 optical distance measurement device 20 IC (integrated circuit) 422 ROM 460 the electronic device

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F065 AA06 AA24 BB01 CC21 DD00 DD02 DD03 FF10 FF42 GG07 GG12 HH04 HH13 JJ03 JJ22 LL00 LL08 LL10 LL12 PP12 PP22 QQ13 QQ25 UU03 UU05 2F112 AB05 DA05 DA26 DA32

Claims (16)

[Claims] 1. A light emitting element for emitting light to be emitted toward a measurement object, and an irradiation optical system for emitting light emitted from the light emitting element and emitting light toward the measurement object. And, the light reflected by the measurement object is incident, an imaging optical system for imaging light so as to generate astigmatism, and light from the imaging optical system is incident, An optical distance measuring device, comprising: a light receiving element for detecting the astigmatism; wherein the irradiation optical system and the imaging optical system constitute a measuring optical system. 2. The optical distance measuring device according to claim 1, wherein the light emitting device is constituted by a high-brightness LED, and a circular pinhole is provided in front of the light emitting device. 3. The irradiation optical system includes a first collimator lens, the imaging optical system includes an imaging lens, and the first collimator lens and the imaging lens are glass aspheric lenses. 3. The optical distance measuring apparatus according to claim 1, wherein the two lenses are a common lens. 4. The illumination optical system includes a first collimator lens, the imaging optical system includes an imaging lens, and the first collimator lens and the imaging lens are plastic lenses. The optical distance measuring device according to claim 1 or 2, wherein: 5. The apparatus according to claim 1, wherein the measuring optical system includes a second collimator lens, and the second collimator lens is a glass spherical lens or an aspherical lens. An optical distance measuring device according to item 1. 6. The optical system according to claim 1, wherein the measurement optical system includes a second collimator lens, and the second collimator lens is a plastic lens. Distance measuring device. 7. The measurement optical system includes a second collimator lens, wherein the second collimator lens is a biconvex lens, a plano-convex lens, or a plane plate.
The optical distance measuring device according to any one of claims 1 to 4. 8. The imaging optical system according to claim 1, wherein the imaging optical system includes a double-sided cylindrical lens or a single-sided toroidal lens as a lens for generating astigmatism. An optical distance measuring device according to item 1. 9. The measurement optical system includes a planar type beam splitter, the beam splitter having a beam split film on a light emitting element side, and a reflection on a side opposite to a side on which the beam split film is provided. The optical distance measuring device according to any one of claims 1 to 8, further comprising a prevention film. 10. The irradiation optical system includes a first collimator lens, and a mirror for changing a traveling direction of light is provided between the first collimator lens and the beam splitter. The optical distance measuring device according to any one of claims 1 to 9. 11. The light receiving element according to claim 1, wherein the light receiving element includes a four-division light sensor.
An optical distance measuring device according to the item. 12. A package for accommodating the light emitting element, the optical system for measurement, and the light receiving element, wherein the light emitting element, the optical system for measurement, and the light receiving element are arranged in the package. The optical distance measuring device according to any one of claims 1 to 11, wherein the optical distance measuring device is disposed inside the optical distance measuring device. 13. The method according to claim 1, wherein
The optical distance measurement device according to the above, further, by inputting an output signal output by the light receiving element, by analyzing the content of astigmatism imaged on the light receiving element, the optical type A distance measuring device with a calculating function, comprising: a calculating unit for calculating a distance between the distance measuring device and the measuring object. 14. The optical distance measuring device and an IC including the arithmetic unit are further provided in a package for accommodating the optical distance measuring device, and the optical distance measuring device and the IC are arranged in the package. The distance measuring device with an arithmetic function according to claim 13, characterized in that: 15. The method according to claim 1, wherein:
The optical distance measuring device according to the item, further, to input an output signal output from the light receiving element, to analyze the content of astigmatism imaged on the light receiving element, information for distance calculation Characterized by comprising a ROM storing the following, and an IC for calculating a distance between the optical distance measuring device and the measurement object and for realizing an interface function with an external device. 16. The optical distance measuring device, and the RO
M, and a package for accommodating the IC, wherein the optical distance measuring device, the ROM, and the IC
The distance measuring device according to claim 15, wherein? And? Are arranged in the package.