JP2002096285A5 - - Google Patents

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Publication number
JP2002096285A5
JP2002096285A5 JP2000280763A JP2000280763A JP2002096285A5 JP 2002096285 A5 JP2002096285 A5 JP 2002096285A5 JP 2000280763 A JP2000280763 A JP 2000280763A JP 2000280763 A JP2000280763 A JP 2000280763A JP 2002096285 A5 JP2002096285 A5 JP 2002096285A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000280763A
Other languages
Japanese (ja)
Other versions
JP4286441B2 (en
JP2002096285A (en
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2000280763A external-priority patent/JP4286441B2/en
Priority to JP2000280763A priority Critical patent/JP4286441B2/en
Priority to KR1020010040963A priority patent/KR100730661B1/en
Priority to TW090116860A priority patent/TW521028B/en
Priority to CN200610151598XA priority patent/CN1939676B/en
Priority to US09/901,859 priority patent/US6729201B2/en
Priority to DE60116194T priority patent/DE60116194T2/en
Priority to CNB011203064A priority patent/CN1282838C/en
Priority to EP05009521A priority patent/EP1561549B1/en
Priority to EP01116859A priority patent/EP1172182B1/en
Priority to DE60134285T priority patent/DE60134285D1/en
Publication of JP2002096285A publication Critical patent/JP2002096285A/en
Publication of JP2002096285A5 publication Critical patent/JP2002096285A5/ja
Publication of JP4286441B2 publication Critical patent/JP4286441B2/en
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2000280763A 2000-07-10 2000-09-14 Transport device Expired - Lifetime JP4286441B2 (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP2000280763A JP4286441B2 (en) 2000-09-14 2000-09-14 Transport device
KR1020010040963A KR100730661B1 (en) 2000-07-10 2001-07-09 Traction drive speed reducer, Conveyance apparatus using traction drive speed reducer, and Arrangement of two-axis output encoder in conveyance apparatus
CNB011203064A CN1282838C (en) 2000-07-10 2001-07-10 Drag driven speed ruducer, transporting device and double-shaft output coder structure
DE60134285T DE60134285D1 (en) 2000-07-10 2001-07-10 promoter
US09/901,859 US6729201B2 (en) 2000-07-10 2001-07-10 Traction drive speed reducer, conveyance apparatus using traction drive speed reducer, and arrangement of two-axis output encoder in conveyance apparatus
DE60116194T DE60116194T2 (en) 2000-07-10 2001-07-10 Friction drive speed reduction and conveyor with friction drive speed reduction
TW090116860A TW521028B (en) 2000-07-10 2001-07-10 Traction drive speed reducer, conveyance apparatus using traction drive speed reducer, and arrangement of two-axis output encoder in conveyance apparatus
EP05009521A EP1561549B1 (en) 2000-07-10 2001-07-10 Conveyance apparatus
EP01116859A EP1172182B1 (en) 2000-07-10 2001-07-10 Traction drive speed reducer and conveyance apparatus using traction drive speed reducer
CN200610151598XA CN1939676B (en) 2000-07-10 2001-07-10 Conveyance apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000280763A JP4286441B2 (en) 2000-09-14 2000-09-14 Transport device

Publications (3)

Publication Number Publication Date
JP2002096285A JP2002096285A (en) 2002-04-02
JP2002096285A5 true JP2002096285A5 (en) 2007-05-10
JP4286441B2 JP4286441B2 (en) 2009-07-01

Family

ID=18765536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000280763A Expired - Lifetime JP4286441B2 (en) 2000-07-10 2000-09-14 Transport device

Country Status (1)

Country Link
JP (1) JP4286441B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100464161C (en) * 2006-01-12 2009-02-25 中国科学院长春光学精密机械与物理研究所 Absolute double-axis photoelectric shaft-position encoder
JP5996857B2 (en) * 2011-09-30 2016-09-21 東京エレクトロン株式会社 Drive device and substrate processing system
EP3421193B1 (en) * 2016-02-25 2022-11-23 Daihen Corporation Drive device
CN108698233B (en) * 2016-02-25 2022-02-18 株式会社达谊恒 Drive device
WO2017145836A1 (en) * 2016-02-25 2017-08-31 株式会社ダイヘン Drive device

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