JP2002096285A5 - - Google Patents
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- JP2002096285A5 JP2002096285A5 JP2000280763A JP2000280763A JP2002096285A5 JP 2002096285 A5 JP2002096285 A5 JP 2002096285A5 JP 2000280763 A JP2000280763 A JP 2000280763A JP 2000280763 A JP2000280763 A JP 2000280763A JP 2002096285 A5 JP2002096285 A5 JP 2002096285A5
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Priority Applications (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000280763A JP4286441B2 (en) | 2000-09-14 | 2000-09-14 | Transport device |
KR1020010040963A KR100730661B1 (en) | 2000-07-10 | 2001-07-09 | Traction drive speed reducer, Conveyance apparatus using traction drive speed reducer, and Arrangement of two-axis output encoder in conveyance apparatus |
CNB011203064A CN1282838C (en) | 2000-07-10 | 2001-07-10 | Drag driven speed ruducer, transporting device and double-shaft output coder structure |
DE60134285T DE60134285D1 (en) | 2000-07-10 | 2001-07-10 | promoter |
US09/901,859 US6729201B2 (en) | 2000-07-10 | 2001-07-10 | Traction drive speed reducer, conveyance apparatus using traction drive speed reducer, and arrangement of two-axis output encoder in conveyance apparatus |
DE60116194T DE60116194T2 (en) | 2000-07-10 | 2001-07-10 | Friction drive speed reduction and conveyor with friction drive speed reduction |
TW090116860A TW521028B (en) | 2000-07-10 | 2001-07-10 | Traction drive speed reducer, conveyance apparatus using traction drive speed reducer, and arrangement of two-axis output encoder in conveyance apparatus |
EP05009521A EP1561549B1 (en) | 2000-07-10 | 2001-07-10 | Conveyance apparatus |
EP01116859A EP1172182B1 (en) | 2000-07-10 | 2001-07-10 | Traction drive speed reducer and conveyance apparatus using traction drive speed reducer |
CN200610151598XA CN1939676B (en) | 2000-07-10 | 2001-07-10 | Conveyance apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000280763A JP4286441B2 (en) | 2000-09-14 | 2000-09-14 | Transport device |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2002096285A JP2002096285A (en) | 2002-04-02 |
JP2002096285A5 true JP2002096285A5 (en) | 2007-05-10 |
JP4286441B2 JP4286441B2 (en) | 2009-07-01 |
Family
ID=18765536
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000280763A Expired - Lifetime JP4286441B2 (en) | 2000-07-10 | 2000-09-14 | Transport device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4286441B2 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100464161C (en) * | 2006-01-12 | 2009-02-25 | 中国科学院长春光学精密机械与物理研究所 | Absolute double-axis photoelectric shaft-position encoder |
JP5996857B2 (en) * | 2011-09-30 | 2016-09-21 | 東京エレクトロン株式会社 | Drive device and substrate processing system |
EP3421193B1 (en) * | 2016-02-25 | 2022-11-23 | Daihen Corporation | Drive device |
CN108698233B (en) * | 2016-02-25 | 2022-02-18 | 株式会社达谊恒 | Drive device |
WO2017145836A1 (en) * | 2016-02-25 | 2017-08-31 | 株式会社ダイヘン | Drive device |
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2000
- 2000-09-14 JP JP2000280763A patent/JP4286441B2/en not_active Expired - Lifetime