JP2002095946A - Heat exchange type stirring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simultaneously carry out a heat exchange and a stirring and to miniaturize a device. SOLUTION: A rotation shaft 10 is vertically and rotatably retained at an inside center of a stirring tank 1. The rotation shaft 10 is constituted of an outer cylinder 11 and an inner cylinder 12. A stirring blade 30 is mounted to a lower end of the rotation shaft 10 through a connection block 20 at the inside of the stirring tank 1. The stirring blade 30 is constituted of pipes 31, 32, 33 constituting flowing passages for a cooling water. The rotation shaft 10 is rotated and driven by a motor 41 and a processing liquid in the stirring tank 1 is stirred by the stirring blade 30. Also, the cooling water is circulated to the flowing passages 31-33 of the stirring blades 30.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a heat exchange type stirring device (also referred to as a stirring type heat exchange device).

[0002]

2. Description of the Related Art When performing heat exchange (cooling or heating or heating) and stirring of a liquid almost simultaneously, the size of the apparatus becomes considerably large, and sufficient heat exchange is achieved depending on the type of the apparatus. It may not be possible.

A description will be given by taking cooling and stirring of a working fluid of a wire saw as an example. In a wire saw, a material to be cut (a so-called brittle material such as a semiconductor material, a magnetic material, and a ceramic material) is pressed against a running saw wire, and a processing liquid containing abrasive grains (abrasive material) is supplied to a cut portion. The machining fluid supplied to the cutting location is collected and used repeatedly. Since the temperature of the working fluid increases due to frictional heat, cooling is required for reuse. In addition, since the working fluid contains abrasive grains, it is necessary to stir in a stirring tank in order to keep the concentration of the abrasive grains uniform.

[0004] In order to stir and cool the working fluid, there is a type in which a stirring device and a cooling device are separately provided. The working fluid collected by the wire saw is first sent to the stirring device, and then supplied again to the wire saw through the cooling device. Such a separated type requires a large space.

[0005] There is also an integrated device in which a cooling water jacket is provided outside the tank wall of the stirring tank to simultaneously stir and cool the processing liquid. Further, there is also a type in which a cooling pipe wound in a coil shape is disposed at a position in the stirring tank that does not hinder rotation of the stirring blade, and cooling water flows through the cooling pipe. Since the machining fluid generally has a high viscosity, in such an integrated device, abrasive grains tend to adhere to the inner surface of the tank wall of the cooled stirring tank or the tube wall of the cooling pipe, thereby reducing the heat exchange efficiency. become worse.

[0006]

DISCLOSURE OF THE INVENTION The present invention provides a heat exchange type stirring device (or stirring type heat exchange device) which can be downsized.

Another object of the present invention is to provide a heat exchange type stirring device (or a stirring type heat exchange device) capable of improving heat exchange efficiency (particularly, cooling efficiency).

In the heat exchange type stirring device (stirring type heat exchange device) according to the present invention, the rotation shaft is vertically rotatably supported substantially at the center (center) of the stirring tank, and the lower half of the rotation shaft is provided with the stirring shaft. A heat exchange liquid supply flow path and a discharge flow path are provided in the rotary shaft, and a stirring blade is attached to the rotary shaft in the stirring tank. At least one heat exchange liquid channel is formed,
One end of the heat exchange liquid flow path is connected (communicated) to the supply flow path, and the other end is connected (communicated) to the discharge flow path.

A liquid to be treated (a liquid to be heated or heated or cooled and to be stirred, for example, the above-mentioned wire saw processing liquid) is supplied to and discharged from the stirring tank. Supply and discharge of the liquid to be treated to the stirring tank may be performed continuously or intermittently.
The heat exchange heats or heats or cools the liquid to be treated, and the heat exchange liquid is a heating liquid (water), a heating liquid (water), or a cooling liquid (water).

According to the present invention, the flow path of the heat exchange liquid is provided on the stirring blade rotated in the stirring tank, and the heat exchange liquid flows in the flow path. Therefore, as compared with the above-mentioned separated type, the entire apparatus is downsized, and the space for setting the stirring tank is sufficient. In addition, since the flow path through which the heat exchange liquid flows is provided in the stirring blade moving inside the liquid to be treated,
The components of the liquid to be treated (eg, the above-mentioned abrasive of the processing liquid) are less adhered to the stirring blade, and high and stable heat exchange efficiency can be maintained.

In a preferred embodiment, the stirring tank is provided with an inlet for supplying the liquid to be treated to the stirring tank and an outlet for discharging the liquid to be treated (including a pump for pumping the liquid to be treated, if necessary).

The flow path of the heat exchange liquid can be formed by attaching (fixing) a pipe to the stirring blade. Preferably, the stirring blade is formed by a tubular body constituting a heat exchange liquid flow path.

The supply flow path and the discharge flow path of the heat exchange liquid can be formed by piping inside a hollow rotary shaft. Preferably, the rotating shaft comprises an outer tube (outer tube) and an inner tube (inner tube) supported inside the outer tube, and the inside of the inner tube and between the outer tube and the inner tube are provided. One is a heat exchange liquid supply channel and the other is a discharge channel. This simplifies the structure of the rotating shaft. In any case, a pipe joint for supplying and exchanging heat exchange liquid (connected to a supply flow path and a discharge flow path, respectively) will be provided above the rotary shaft.

In a double structure in which the rotating shaft is composed of an outer cylinder and an inner cylinder, the outer cylinder is rotatably supported with respect to the stirring tank, and the inner cylinder rotates relative to the outer cylinder. Freely supported. For example, the outer cylinder is rotatably supported by a bearing provided in the stirring tank. The outer cylinder is driven to rotate by a motor. Therefore, the stirring blade is attached to the outer cylinder. The fact that the inner cylinder is rotatably supported relative to the rotatably driven outer cylinder means that the inner cylinder can be held stationary with respect to the stirring tank. The inner cylinder is fixed to the connected part or other external structure.

In an embodiment in which the stirring blade is formed by a tubular body constituting a heat exchange liquid flow path, preferably, the structure is specifically as follows. That is, in the case where the rotating shaft has the double structure of the outer cylinder and the inner cylinder, a connecting block is provided at a lower end of the outer cylinder. The connection block includes a plurality of first flow paths that extend radially in communication with the lower end of the inner cylinder, and a radial flow path between the first flow paths that communicates with a flow path between the outer cylinder and the inner cylinder. And a plurality of second flow paths extending therefrom. A tubular body as a heat exchange liquid flow path that constitutes the stirring blade includes a plurality of first flow paths each having one end connected to the first flow path.
, A plurality of second pipes each having one end connected to the second flow path, and a third pipe connecting the adjacent first and second pipes.

By providing a plurality of first, second and third pipes, the liquid to be treated is uniformly heat-exchanged in the stirring tank.

[0017] Preferably, the first tube and the second tube are formed along the inner surface of the tank wall at a slight distance from the inner surface of the tank wall of the stirring tank. In addition, if the third tube is formed by connecting them to form an annular body, the strength can be increased.

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The heat exchange type stirring device of this embodiment is a device for stirring and cooling a working fluid for a wire saw.

In FIG. 1 and FIG. 2, the stirring tank 1 has a slightly shallow cylindrical shape with a bottom, the bottom surface (bottom wall) is rounded and curved, and is connected to the lower part of the peripheral surface (peripheral wall, side wall).

The upper surface of the opening of the stirring tank 1 is closed by a lid 2. The cover 2 has a processing liquid supply port 51 and a pump
52 are provided. The processing liquid containing the abrasive grains (abrasive) collected in the wire saw (not shown) is supplied into the stirring tank 1 from the supply port 51 through a pipe (not shown). The working fluid cooled and stirred in the stirring tank 1 is pumped up by a pump 52 and sent to a wire saw from a discharge port 53 thereof through a pipe (not shown).

A support cylinder 3 is fixed to the center of the lid 2 of the stirring tank 1. The support cylinder 3 has a rotating shaft via a bearing 4.
10 are supported vertically and rotatably. The rotating shaft 10 is supported so as not to move up and down. Rotary axis 10
The lower half extends through the hole in the lid 2 into the stirring tank 1 and reaches near the bottom thereof.

The rotating shaft 10 comprises an outer tube (outer tube) 11 and an inner tube (inner tube)
It has a double structure consisting of 12. The outer cylinder 11 has three component parts (cylindrical body or cylindrical part) 11a, 11b and 11c.
And these are fixedly connected to each other. The outer cylinder 11 is rotatably supported by the bearing 4 at the cylindrical portion 11b.

A pulley 43 is fixed to the cylindrical portion 11 b of the outer cylinder 11 above the bearing 4. On the other hand, a bracket 45 is fixed on the support cylinder 3, and a drive motor 41 is attached to the bracket 45. A pulley 42 slightly smaller than the pulley 43 is attached to the output shaft (rotary shaft) of the drive motor 41, and a belt 44 is hung between the pulleys 42 and 43. The outer cylinder 11 is driven to rotate by a motor 41. The motor 41 may include a speed reduction mechanism.

The inner cylinder 12 constitutes a cooling water supply passage, and the inner cylinder
The space between the outer cylinder 12 and the outer cylinder 11 forms a cooling water discharge passage.

A connecting member 16 is attached to the upper part of the outer cylinder 11, that is, the cylindrical portion 11a by a bearing 15 so as to be relatively rotatable. The connecting body 16 has a watertight structure, and a discharge port for connecting a cooling water discharge pipe joint 19 is formed on an upper peripheral surface thereof, and a supply port for connecting a bent pipe 17 is formed at an upper end thereof. A pipe joint 18 for supplying cooling water is connected to the distal end of the bent pipe 17. The upper part of the inner cylinder 12 passes through the connecting body 16
Is fixed at the upper end.

The pipe joints 18 and 19 are connected to a supply pipe and a discharge pipe (both not shown) of the cooling water. By some of these pipes or other structures,
The bending tube 17 and the inner cylinder 12 are kept stationary.

A connection block 20 is provided at the lower end of the rotating shaft 10 in the stirring tank 1. That is, the connection block 20 is fixed to the lower end of the outer cylinder 11 and rotatably receives the lower end of the inner cylinder 12.

As shown in an enlarged manner in FIGS. 3 and 4, two types of flow paths are formed in the connection block 20. The first flow path 21 communicates with the lower end (supply flow path) of the inner cylinder 12 and extends radially at 90-degree intervals. The second flow path 22 communicates between the lower end of the outer cylinder 11 and the lower end of the inner cylinder 12 (discharge flow path), and extends radially at 90-degree intervals via a vertical portion. The first flow path 21 and the second flow path 22 are arranged to be shifted from each other by 45 degrees.

The stirring blade 30 is composed of three kinds of tubes. The first tube 31 and the second tube 32 extend from the connection block 20 along the inner surface of the bottom wall and the inner surface of the peripheral wall of the stirring tank 1 at a small interval, and curve along these inner surfaces, and rise up. It has reached near the upper part of the stirring tank 1. The lower end of the first pipe 31 is fixed to the connection block 20 so as to communicate with the first flow path 21 of the connection block 20, and the lower end of the second pipe 32 is connected so as to communicate with the second flow path 22. Fixed to block 20. The upper ends of the first tube 31 and the second tube 32 are connected (connected) to each other by a third tube 33. The third tube 33 forms one end of a horizontal annular tube 33A. A partition 34 is provided in the annular pipe 33A so that the first pipe 31 and the second pipe 32 adjacent to the first pipe 31 on one side thereof communicate with each other through the pipe 33.

The flow of the cooling water is indicated by arrows in the drawing. The cooling water introduced from the supply pipe joint 18 descends through the inner cylinder 12, branches in four directions in the first flow path 21 of the connection block 20, and rises through the first pipe 31. It flows from the third pipe 33 into the adjacent second pipe 32, merges through the second flow path 22 of the connecting block 20, and rises in the space between the inner cylinder 12 and the outer cylinder 11, It is discharged from the discharge fitting 19. When such cooling water is continuously flowing, the outer cylinder 11 is rotated by the motor 41, and the stirring blade 30 including the pipes 31 to 33 in which the cooling water is flowing rotates in the stirring tank 1. Therefore,
The working fluid in the stirring tank 1 is efficiently cooled while being stirred. Since the tubes 31 to 33 through which the cooling water passes are moving, the abrasive in the working fluid is less likely to adhere to the tubes 31 to 33.

In the above embodiment, the stirring blade 30 is constituted by a flow path (pipe) of the cooling water. However, the cooling water pipe may be bonded to the surface of the stirring blade.

[Brief description of the drawings]

FIG. 1 shows a longitudinal section of a heat exchange type stirring device.
FIG. 3 is a sectional view taken along the line II of FIG. 2.

FIG. 2 is a plan view showing a part of the stirring blade in a cutaway manner.

FIG. 3 is an enlarged sectional view taken along line III-III of FIG.

FIG. 4 is an enlarged sectional view taken along line IV-IV of FIG. 1;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Stirrer blade 10 Rotating shaft 11 Outer cylinder 12 Inner cylinder 20 Connecting block 21 First flow path 22 Second flow path 30 Stirrer blade 31 First pipe 32 Second pipe 33 Third pipe 41 Motor

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) F28F 5/04 F28F 5/04

Claims (7)

[Claims] A rotating shaft is vertically rotatably supported substantially at the center of the stirring tank, a lower half of the rotating shaft extends into the stirring tank, and a heat exchange liquid is supplied into the rotating shaft. A flow path and a discharge flow path are provided; a stirring blade is attached to the rotating shaft in the stirring tank; at least one heat exchange liquid flow path is formed along the stirring blade; A heat exchange stirrer, one end of which is connected to the supply flow path and the other end of which is connected to the discharge flow path. 2. The heat exchange type stirring device according to claim 1, wherein the stirring blade is formed by a tubular body constituting the heat exchange liquid flow path. 3. The rotating shaft is composed of an outer cylinder and an inner cylinder supported inside the outer cylinder, and one of the inner cylinder and one between the outer cylinder and the inner cylinder is formed of the outer cylinder. Supply channel,
The heat exchange type stirring device according to claim 1 or 2, wherein the other is the discharge channel. 4. The heat exchanger according to claim 3, wherein the outer cylinder is rotatably supported with respect to the stirring tank, and the inner cylinder is rotatably supported with respect to the outer cylinder. Stirrer. 5. The outer cylinder is rotatably supported by a bearing provided in a stirring tank and is rotationally driven by a motor.
The heat exchange type stirring device according to claim 3. 6. A connecting block is provided at a lower end of the outer cylinder, and the connecting block communicates with a lower end of the inner cylinder to extend in a plurality of radially extending first flow paths; A plurality of second flow passages extending radially between the first flow passages in communication with the flow passages between the first and second flow passages, wherein the stirring blades constitute the heat exchange liquid flow passages; The tubular body is formed of a plurality of first pipes each having one end connected to the first flow path, a plurality of second pipes each having one end respectively connected to the second flow path, and an adjacent first pipe. The heat exchange stirrer according to any one of claims 3 to 5, wherein the stirrer comprises a third tube connecting the first tube and the second tube. 7. The heat exchange type stirring device according to claim 6, wherein the third tube forms a part of an annular body.