JP2002090683A - Optical scanner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical scanner which is small-sized and large in the angle of deflection of its optical system, which has been difficult to actualize using the conventional optical scanning optical system. SOLUTION: This optical scanner comprises a deflection optical system 1, which deflects the radiation direction of an incident light 7 by reflecting it by a movable mirror 4 and an angle increase optical system 5, which increases the projection angles of deflected outgoing lights 8a and 8b.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a deflecting optical system for a beam-shaped light source, and more particularly to a three-dimensional shape measuring device, a reading device such as a bar code scanner, and an electrophotographic process such as an optical printer and a copying machine. The present invention relates to an optical scanning device provided in an optical writing optical system.

[0002]

2. Description of the Related Art An optical scanning optical system for scanning a light beam one-dimensionally or two-dimensionally has hitherto been known as a laser printer,
It has been used for a three-dimensional shape measuring device using parallax information. An optical scanning device using a polygon mirror and a galvanometer mirror together has been used for a commercially available laser printer and a three-dimensional shape measuring machine.

[0003] In particular, a three-dimensional shape measuring machine capable of capturing a three-dimensional shape has been used for generating a three-dimensional CAD model from a clay model, and measures the size of accessories, shoes, hats, etc. according to the size of an individual's body. It has been used for various purposes, but by attaching texture using a CCD camera, it is possible to create a three-dimensional model with more three-dimensionality and realism. By utilizing this feature, it is anticipated that a three-dimensional catalog will be prepared at a virtual store located on the Internet, and users who visit the site will be offered a three-dimensional catalog that can be freely enlarged, reduced, or rotated. ing.

[0004]

When the deflection angle is relatively large, as in a three-dimensional shape measuring instrument, it is practical to secure the deflection angle by reflecting the incident light on a mirror that deflects periodically. It is. Conventional three-dimensional shape measuring machines are large in size, and it has not been easy to reduce the size to a size that can be carried by hand. One of the reasons is that it was difficult to reduce the size of an optical scanning optical system using a deflecting mirror.

As an example of a conventional optical scanning optical system, for example, in JP-A-7-270137, a light beam is deflected by a galvanometer mirror driven by a motor. Referring to FIG. 12, the spot light beam emitted from the laser light source 101 is deflected and scanned by the X scanner 102 and the Y scanner 103, and is irradiated on the measurement object 104 as the spot light beam Gmn. Light Km reflected by object 104
n is a lens system 105, which is a PSD (Posit
An image is formed on an ion-sensitive device (106), and a pattern corresponding to the step of the object 104 is formed by the parallax between the projection light Gmn and the reflected light Kmn. The relationship between the step and the pattern is 3
It is determined based on the principle of angle measurement.

In this shape measuring apparatus, a galvanomirror is used for the optical scanning optical system, but it is not easy to reduce the size of the motor with respect to the size of the light beam. Therefore, it tends to be a problem when the optical scanning optical system is downsized.

[0007] For example, Japanese Patent No. 2722314 discloses an example in which the optical scanning optical system is downsized. In this patent, using a micromachine technology, a thin film movable mirror is provided on a silicon substrate, a spring force against torsion bar torsion, a coil provided on the mirror surface, and a magnetic field generated by a magnet provided outside the mirror are used, We have proposed a mechanism that vibrates a movable mirror by Lorentz force applied to a coil in a magnetic field and a torsion spring of a torsion bar.

[0008] Referring to FIG. 13, the galvanomirror 121 has a glass substrate 1 above and below a silicon substrate 122.
And permanent magnets 130A, 130B, 1
31A and 131B are arranged. Movable plate 125
Is a silicon substrate 122 by a torsion bar 126.
A planar coil 127 and a total reflection mirror 128 are formed on the movable plate 125, and the planar coil 127 is connected to an external circuit by an electrode terminal 129. When a current is applied to the electrode terminal 129, the permanent magnet 130
The Lorentz force is generated by the magnetic fields of A, 130B, 131A, and 131B, and the movable plate 125 rotates around the torsion bar 126.

In accordance with the rotation of the movable plate 125, the movable plate 1
The light applied to the total reflection mirror 128 provided in the mirror 25 is deflected by 2θ, where θ is the rotation angle of the movable plate 125. Since the optical scanning optical system is formed by anisotropic etching of the silicon substrate, it can be understood that an extremely small optical scanning optical system can be realized as compared with the motor driven galvanomirror shown in FIG.

This structure is sufficient if the light can be sufficiently deflected, but there is actually a trade-off relationship between the oscillation angle and the oscillation speed of the mirror. If the oscillation angle is too large, the torsion bar is destroyed. Therefore, the mirror is vibrated at an angle as small as possible. That is, when it is desired to deflect the light beam at a high speed and increase the deflection angle, there is a problem that it is difficult to cope with the problem by using only the movable micro mirror.

The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a small-sized optical system having a large deflection angle which is difficult to realize with a conventional optical scanning optical system. , An optical scanning device.

[0012]

According to a first aspect of the present invention, there is provided an optical scanning device, comprising: a deflecting optical system for deflecting a radiation direction of incident light by reflecting the light on a movable mirror; And an angle magnifying optical system that enlarges the emission angle of the emitted light.

According to the optical scanning device of the first aspect, by using the deflecting optical system and the angle expanding optics for expanding the deflection angle together, a larger deflection angle can be obtained than when a single deflecting optical system is used. Therefore, even if a deflection optical system that can realize only a small deflection angle is used, an optical scanning optical system having a large deflection angle can be configured as a whole.

[0014] The invention described in claim 2 is the first invention.
The deflection optical system and the angle magnifying optical system are integrally integrated.

According to the second aspect of the present invention, the same operation and effect as those of the first aspect are obtained, and in the optical scanning device of the first aspect, the deflection optical system and the angle magnifying optical system are integrally integrated. As a result, the optical scanning optical system can be downsized.

[0016] The invention according to claim 3 provides the invention according to claim 1.
Alternatively, in the invention according to claim 2, the deflecting optical system is a movable micromirror manufactured by a semiconductor process.

According to the third aspect of the invention, the same function and effect as those of the first or second aspect are obtained, and the movable micromirror manufactured by a semiconductor process is used for the deflection optical system. Therefore, the size of the deflection optical system can be reduced.

The invention described in claim 4 is the first invention.
Alternatively, in the invention according to claim 2, the angle magnifying optical system is a concave lens or a convex mirror.

According to the fourth aspect of the present invention, the same function and effect as those of the first or second aspect can be obtained, and a commonly available concave or convex mirror is used as the angle expanding optical system. Therefore, an optical scanning optical system can be easily formed.

The invention described in claim 5 is the first invention.
Alternatively, in the invention according to claim 2, the angle-magnifying optical system is a movable micromirror.

According to the fifth aspect of the invention, the same function and effect as those of the first or second aspect can be obtained, and the movable micro mirror is used as the angle expanding optical system. It is also possible to configure the magnifying optical system at the same time in the same manufacturing process as described above, thereby simplifying the manufacturing process.

The invention according to claim 6 is the first invention.
Alternatively, the deflecting optical system and the angle magnifying optical system are both movable micromirrors, and each of the two movable micromirrors reflects incident light only once. .

According to the sixth aspect of the invention, the same operation and effect as those of the first or second aspect can be obtained, and the incident light is reflected only once by the two movable micro mirrors. Since the area of the mirror can be reduced as compared with the case where the light is reflected twice, the cost can be reduced while increasing the deflection angle and the deflection speed of the mirror.

The invention described in claim 7 is the same as the claim 6.
In the invention described in (1), a movable micromirror serving as a deflection optical system and a movable micromirror serving as an angle magnifying optical system are generally opposed to each other.

According to the seventh aspect of the invention, the same function and effect as those of the sixth aspect are obtained, and the movable micromirror serving as the deflection optical system and the movable micromirror serving as the angle magnifying optical system are provided with: Since the optical scanning optical system is generally opposed to each other, the optical scanning optical system can be configured as a flat plate as a whole, and can be easily incorporated into a device.

The invention described in claim 8 is the same as that in claim 7.
In the invention described in the above, a plane mirror is arranged on the optical path of the movable micromirror which is a deflection optical system and the movable micromirror which is an angle expansion optical system to fold the optical path, and the plane mirror and the two movable micromirrors are It is characterized by being generally opposed.

According to the eighth aspect of the invention, the same operation and effect as those of the seventh aspect are obtained, and the optical path is folded by using the plane mirror so that the plane mirror and the two movable micro mirrors are substantially opposed to each other. Therefore, the structure is such that the movable micromirror can be easily integrated using the plane mirror as a substrate, so that the size of the optical scanning optical system can be easily reduced.

According to a ninth aspect of the present invention, there is provided a three-dimensional shape measuring apparatus for deflecting spot light or slit light using the optical scanning device according to any one of the first to eighth aspects. Features.

According to the ninth aspect of the invention, the same operation and effect as those of the first aspect of the invention can be obtained, and the optical scanning optical system of the three-dimensional shape measuring apparatus can be obtained. Since the compact optical scanning device having a large deflection angle is used in the system, the size of the three-dimensional shape measuring device can be reduced.

A laser printer according to a tenth aspect is characterized in that the laser beam is deflected by using the optical scanning device according to any one of the first to eighth aspects.

According to the tenth aspect, the same function and effect as those of the first aspect can be obtained, and the optical scanning optical system of the laser printer has the following advantages. Since the optical scanning device of the first to eighth aspects having a large deflection angle is used, the size of the laser printer can be reduced.

[0032]

Embodiments of the present invention will be described below with reference to the drawings.

FIGS. 1 and 2 show a first embodiment of the present invention. As shown in FIG. 1, the optical scanning device according to the present embodiment includes a deflection optical system 1 that deflects incident light 7 (see FIG. 2), a cylindrical lens 5 that is an angle magnifying optical system, and a deflection optical system 1. And an aluminum spacer 6 whose surface is subjected to black alumite treatment to suppress reflection, which is a housing for maintaining the interval between the cylindrical lens 5 and the cylindrical lens 5. FIG. 2 shows a state in which the deflection optical system 1 and the cylindrical lens 5 are combined via the spacer 6.

The deflecting optical system 1 has a structure in which a diaphragm 3 is supported from both sides by a hinge 2, and the torsional rotation about the hinge 2 is performed. A mirror surface 4 for reflecting incident light is provided on the diaphragm 3. In this deflection optical system 1,
When the direction of the magnetic flux is arranged in the horizontal direction of the drawing and a current is applied to a flat coil (not shown) provided below the mirror surface by wiring passing over the hinge 2, the hinge 2 is twisted by Lorentz force. Works. As another method, the movable mirror may be driven by electrostatic attraction between the opposing electrodes or vibration of a piezo actuator or the like. Also, by matching the resonance frequency and drive frequency of the movable micro mirror,
The deflection angle of the mirror can be increased.

The deflection optical system 1 is made of a silicon substrate, and is manufactured using anisotropic etching using hydrazine or the like, which is used in ordinary micromachining, and a thin film forming process using a semiconductor process. The mirror surface 4 is formed by vapor deposition of aluminum.

In such a configuration, as shown in FIG. 2, when the incident light 7 is irradiated toward the diaphragm from the portion where the cylindrical lens 5 is not provided, the reflected light 8
With the rotation of the diaphragm 3 about the hinge 2, the reflection direction changes to 8a and 8b. The reflected light 8 is refracted when transmitting through the cylindrical lens 5 which is an angle expanding optical system, the emission angle is expanded, and the reflected light 8 becomes the emission lights 9a and 9b.

As described above, when the cylindrical lens 5 is provided, the deflection angle can be made larger than when the light is scanned only by the deflection optical system 1. For example, if the vibration angle of the diaphragm 3 is 10 °, the deflection angle of the reflected light 8 is twice as large as 20 degrees.
°. When a cylindrical lens having an angular magnification of 2 is selected, the final deflection angle of the emitted light 9 is 4
0 °. In addition, both the deflection optical system and the angle magnifying optical system
Since the size can be reduced, the entire size can be manufactured to be several cm square or less. As described above, in the present embodiment, the deflecting optical system 1 that deflects the radiation direction of the incident light by reflecting the light on the movable mirror 4 and the angle expanding optical system 5 that expands the exit angle of the deflected exit light Constitutes an optical scanning device. Thus, the deflection optical system 1
If the deflection angle of the movable mirror 4 is θ, the deflection angle of the reflected light with respect to the incident light is 2
θ. If θ decreases for some reason such as limitation of the movable mirror 4, the deflection angle 2θ also decreases, which is not desirable. Therefore, if the light emitted from the deflecting optical system 1 passes through the angle-enlarging optical system 5 for further expanding the radiation angle, the deflection angle after passing through the angle-enlarging optical system 5 becomes large, and the entire light scanning optical system becomes In addition, the deflection angle of the exit angle with respect to the incident angle can be increased. For example, if the angle magnification of the angle magnifying optical system is β (where β> 1), the deflection angle of the entire optical scanning optical system is 2βθ, and the deflection angle can be increased.

In a preferred embodiment of the present embodiment, the deflection optical system and the angle magnifying optical system are integrated integrally. When manufacturing an optical scanning optical system, it is important to align the deflecting optical system and the angle-enlarging optical system, so if the deflecting optical system and the angle-enlarging optical system are integrated, the inspection process called alignment can be integrated. It can be incorporated into the process, resulting in improved alignment accuracy. In addition, it is also effective in the case where unnecessary members are removed by integration to reduce costs and reduce the size.

In this embodiment, the deflecting optical system 1 is a movable micro mirror manufactured by a semiconductor process. Micromirrors manufactured by micromachining technology using semiconductor processes,
It is compact and excellent in mass productivity, and is desirable as a deflection optical system. Even if the deflecting optical system 1 is integrated together with the angle-magnifying optical system 5, the process of simultaneously manufacturing and integrating the angle-magnifying optical system on a silicon substrate or the like has a good affinity for the semiconductor process, so There is a merit that it becomes easier.

FIGS. 3 and 4 show a second embodiment of the present invention. As shown in FIG. 3, the optical scanning device according to the present embodiment includes a deflecting optical system 16 including a variable micromirror 19 for deflecting incident light 20 (see FIG. 4) and an angle magnifying optical system including a variable micromirror 14. It comprises a system 11 and an aluminum spacer 15 which also serves as a housing for maintaining an interval between the deflection optical system 16 and the angle magnifying optical system 11. The deflecting optical system 16 and the angle magnifying optical system 11 both use movable micromirrors 19 and 14, and the diaphragms 13 and 18 rotate and vibrate around the hinges 11 and 12. This has the same structure as the first embodiment, and can be manufactured by a similar process. Further, in the present embodiment, the deflection optical system 16 and the angle magnifying optical system 11 are generally opposed via the spacer 15.

Next, the operation of the optical scanning device having the above configuration will be described with reference to FIG.

As shown in FIG. 4, the incident light 20 is reflected once by the diaphragm of the deflection optical system 16 (reflected light 21).
Is reflected by the diaphragm 18 around the hinge 17 and the reflection direction changes to 21a and 21b), and is reflected only once by the diaphragm 13 of the angle-magnifying optical system 11 (the reflected light 22 is Diaphragm 13 centering on hinge 12
The reflection direction changes to 22a and 22b along with the rotation of), and the light is emitted as emission light 22. By vibrating the vibration plate 13 in synchronization with the periodic vibration of the vibration plate 18 in the opposite phase, the angle magnifying optical system 11 including the vibration plate 13 functions as an angle magnifying optical system instead of a simple deflecting element. Assuming that the vibration angle between the vibration plate 18 and the vibration plate 13 is 10 °, the final deflection angle of the incident light is 40 ° which is the sum of twice the vibration angle of each vibration plate, and the vibration of the deflection optical system 16 is Board 18
Alone, the deflection angle is twice as large as when the incident light 20 is deflected. It should be noted that if the diaphragm is vibrated at its resonance frequency, it is necessary that the resonance frequencies of the diaphragms 18 and 13 match.

As described above, also in the present embodiment, the same operation and effect as in the first embodiment can be obtained. Further, in the present embodiment, in addition to the first embodiment, a configuration is adopted in which the angle expanding optical system 11 is a movable micro mirror. When the light emitted from the deflection optical system 16 at the deflection angle α is reflected by the movable micromirror 14, when the deflection angle of the movable micromirror 14 is φ in addition to the deflection angle α of the deflection optical system 16, The deflection angle of the entire optical scanning optical system is α + 2φ, and the deflection angle of the entire optical scanning optical system increases as compared with the case where only the optical deflection system 16 is used. When it is desired to keep the angular magnification constant, φ may be changed in proportion to α. That is, if φ = Kα (K is a constant), the angular magnification β becomes (1 + 2K).

In the present embodiment, the movable micromirror 19 serving as the deflection optical system 16 and the movable micromirror 14 serving as the angle magnifying optical system 11 each reflect incident light only once. . If the incident light is reflected many times by the movable micromirror surface, the reflection position on the mirror surface shifts every time the light is reflected, so that it is necessary to increase the size of the mirror surface. Assuming that the beam diameter of the incident light is d1, the beam displacement due to the deflection of the incident light is d2, and the beam displacement due to multiple reflections is d3, the size of the mirror surface is not larger than d1 + d2 + d3. Do not. Increasing the size of the mirror surface generally has a trade-off relationship with the deflection speed of the movable mirror. Therefore, in applications where high-speed deflection is required, the number of reflections is made one to minimize the mirror area. It is desirable.

In this embodiment, the movable micromirror 19 serving as the deflection optical system 16 and the movable micromirror 12 serving as the angle magnifying optical system 11 are substantially opposed to each other. When the two movable micromirrors 19 and 12 are substantially opposed to each other, the entire optical scanning optical system has a flat plate shape in which the two mirrors are provided at a certain interval. Therefore, the handling of the optical scanning device is facilitated, and the process of mounting the optical scanning optical system is facilitated. The concept of this configuration and operation will be described with reference to FIGS. 5 and 6.
Let me explain again clearly. As shown in FIG. 5, a movable micromirror 51, which is a deflection optical system, and a movable micromirror 52, which is an angle-magnifying optical system, are generally opposed to each other, and incident light 53 is incident obliquely. The incident light 53 is reflected only once by each of the movable micromirrors 51 and 52 (reflected light 54), and then is emitted as emission light 55. As shown in FIG. 6, when the movable micro mirrors 51 and 52 are rotated in the opposite directions in synchronization with each other, the movable micro mirror 5
The reflected light 54 and the emitted light 55 correspond to the rotation angles of
Is deflected. Actually, assuming that the deflection angle of the movable micromirror 51 is θ and the deflection angle of the movable micromirror 52 is φ, the deflection angle of the emission angle is −2 (θ−φ). The deflection angle can be expanded as compared with.

FIGS. 7 and 8 show a third embodiment of the present invention. As shown in FIG. 7, the optical scanning device according to the present embodiment includes two variable micro mirrors 34a and 34a.
4b, a deflection / angle expansion optical system 31; a reflection mirror 36 for folding the optical path; and a spacer 3 for maintaining the distance between the deflection / angle expansion optical system 31 and the reflection mirror 36.
5 In the present embodiment, the reflection mirror 3 for folding the optical path between the diaphragms 18 and 13 of the second embodiment is used.
6, the diaphragm 33a, 33b of the reflecting mirror 36 and the two movable micromirrors 34a, 34b.
Are generally opposed to each other, so that compared to the second embodiment,
It is a thinner optical system.

As shown in FIG. 8, also in this embodiment,
As in the second embodiment, the incident light 37 is reflected only once by the diaphragms 33a and 33b, which are a deflection optical system and an angle magnifying optical system (the reflected light 38 is reflected by the hinges 32a and 32b).
With the rotation of the diaphragms 33a and 33b around the center, the reflection direction changes to 38a and 38b). The incident light 37 is emitted as emission lights 39a and 39b while being reflected by the diaphragms 33a and 33b and the reflection mirror 36.
Unlike the second embodiment, since the optical path is reflected by the reflection mirror 36, the diaphragm 33a and the diaphragm 33b need to be synchronized and vibrated in phase.

Assuming that the vibration angle of the diaphragm 33a and the diaphragm 33b is 10 °, the final deflection angle of the incident light 37 is 40 °.
°, which is twice the deflection angle as compared to the case where the incident light 37 is deflected only by the diaphragm 33a. In the first and second embodiments, two optical systems each including a movable micromirror were necessary. However, in this embodiment, only one optical system is required. Therefore, the size of the optical path can be reduced by folding the optical path by the reflection mirror. Besides, there is an advantage that the manufacturing process is simplified.

As described above, in the present embodiment, in addition to the second embodiment, the plane mirror 36 is provided on the optical path of the movable micromirror 34a as the deflection optical system and the movable micromirror 34b as the angle magnifying optical system. Are arranged to fold the optical path, so that the plane mirror 36 and the two movable micro mirrors 34a and 34b are generally opposed to each other. That is, in the second embodiment, a mirror that folds the optical path is provided in the middle of the generally opposed movable micromirror surface. Since the two movable micromirrors are arranged substantially parallel to the folding mirror, as a whole the optical scanning optical system, the two mirrors and the folding mirror have a flat plate shape provided at a certain interval. Shape
Since the handling is easy, the process of mounting the optical scanning optical system becomes easy.

The concept of this configuration and operation will be clearly described again with reference to FIGS. 9 and 10. As shown in FIG. 9, when the optical path incident on the movable micromirror 51 serving as a deflection optical system and the movable micromirror 52 serving as an angle magnifying optical system is folded by a reflecting mirror 56, the incident light 5
3 is emitted as emission light 55 while repeating reflection halfway. As shown in FIG. 10, when each movable micromirror is rotated in the same direction in synchronization, the radiation directions of the reflected light 54 and the emission light 55 are deflected according to the rotation angle of the movable micromirror. In this arrangement, assuming that the deflection angle of the movable micromirror 51 is θ and the deflection angle of the movable micromirror 52 is φ, the deflection angle of the emission angle is −2 (θ + φ).

FIG. 11 shows a fourth embodiment of the present invention. This embodiment is a three-dimensional shape measuring apparatus using the optical scanning device of the third embodiment for an optical scanning unit.

As shown, the semiconductor laser unit 40
The light generated from is scanned by an optical scanning device 41, converted into slit light by a cylindrical lens 42, and emitted to an object 43 to be measured. Part of the light scattered by the measured object 43 is a CCD 45 which is a light receiving element by the imaging lens 44.
Is received at.

The direction in which the slit light 47 is projected and the CCD
Since the observation direction is different at 45, the slit light 47 is deformed on the CCD 45 according to the unevenness of the measured object. If the principle of triangulation is used, the shape of the measured object can be calculated back from the CCD image. By scanning the slit light 47 with the optical scanning device 41 and performing the same operation over the entire area of the measured object 43, the three-dimensional shape of the measured object 43 can be measured.

Conventionally, by using the optical scanning device 41 of the present invention, the optical scanning system can be miniaturized with respect to the optical scanning optical system using a polygon mirror or a galvanometer mirror driven by a motor. An optical scanning device 41, a cylindrical lens 42, an imaging lens 44,
The overall size of the three-dimensional shape measuring device including the CCD 45 can be reduced.

As described above, in this embodiment, the optical scanning system of the third embodiment is used as the optical scanning optical system for deflecting the spot light or the slit light of the three-dimensional shape measuring apparatus. Since the optical scanning device of the third embodiment is used as the optical scanning optical system of the three-dimensional shape measuring device, optical scanning with a large deflection angle at high speed can be realized. Also,
When an integrated micromirror is used, the size of the optical system can be reduced to about several centimeters, so that the size of the entire measurement device can be reduced.

In each of the embodiments described above, the angle magnifying optical system may be a concave lens or a convex mirror. By using a concave lens or a convex mirror, which is a general optical element, as the angle magnifying optical system, the design of the angular magnification of the optical system becomes easy, and the design cost can be reduced.

The optical scanning device of the first to third embodiments may be used as an optical scanning optical system of a laser printer. First to third optical scanning optical systems for laser printers
When the optical scanning device of the embodiment is used, the scanning speed is almost the same as the optical scanning performed by the ordinary polygon mirror, and in addition, since the integrated micro mirror is used, the size of the optical scanning optical system is large. The size can be reduced to several centimeters square, and the size of the laser printer can be reduced.

[0058]

According to the optical scanning device of the first aspect,
By using a deflecting optical system and an angle magnifying optics that expands the deflecting angle together, a larger deflecting angle can be obtained than using a single deflecting optical system. As a whole, an optical scanning optical system having a large deflection angle can be configured.

According to the invention described in claim 2, according to claim 1
The same effect as described above can be obtained, and in the optical scanning device of the first aspect, since the deflection optical system and the angle expansion optical system are integrally integrated, the optical scanning optical system can be downsized.

According to the third aspect of the present invention, the first aspect
Alternatively, the same effect as that of the second aspect can be obtained, and since the movable micromirror manufactured by the semiconductor process is used for the deflection optical system, the size of the deflection optical system can be reduced.

According to the fourth aspect of the present invention, the first aspect is provided.
Alternatively, the same effect as that of the second aspect can be obtained, and since an easily available general concave lens or convex mirror is used as the angle expanding optical system, an optical scanning optical system can be easily formed.

According to the invention described in claim 5, claim 1 is
Alternatively, the same effect as in claim 2 can be obtained, and since the movable micromirror is used as the angle-enlarging optical system, the enlarging optical system can be simultaneously formed in the same manufacturing process as the deflecting optical system. The process can be simplified.

According to the invention set forth in claim 6, according to claim 1,
Alternatively, the same effect as in claim 2 can be obtained, and since the incident light is reflected only once on the two movable micromirrors, the area of the mirror can be reduced as compared with the case of reflecting a plurality of times. The cost can be reduced while increasing the deflection angle and the deflection speed of the mirror.

According to the invention described in claim 7, according to claim 6,
The same effect can be obtained, and the movable micromirror, which is the deflection optical system, and the movable micromirror, which is the angle magnifying optical system, are generally opposed to each other, so that the optical scanning optical system can be configured as a flat plate as a whole. Therefore, it can be easily incorporated into the device.

According to the invention of claim 8, according to claim 7,
The same effect can be obtained, and the optical path is folded using a plane mirror. Since the plane mirror and the two movable micromirrors are generally opposed to each other, it is easy to integrate the movable micromirrors using the plane mirror as a substrate. , The size of the optical scanning optical system can be easily reduced.

According to the invention of claim 9, according to claim 1,
The same effect as the invention according to any one of claims 1 to 8 is obtained, and the optical scanning optical system of the three-dimensional shape measuring apparatus is provided with a small-sized optical scanning apparatus having a large deflection angle according to claims 1 to 8. Since the apparatus is used, the size of the three-dimensional shape measuring apparatus can be reduced.

According to the tenth aspect, the same effects as those of the first aspect can be obtained, and the light scanning optical system of the laser printer has the same effect. Since the compact optical scanning device having a large deflection angle according to any one of the first to eighth aspects is used, the size of the laser printer can be reduced.

[Brief description of the drawings]

FIG. 1 is a perspective view of an optical scanning device according to a first embodiment of the present invention.

FIG. 2 is a sectional view showing a polarization state by the optical scanning device of FIG.

FIG. 3 is a perspective view of an optical scanning device according to a second embodiment of the present invention.

FIG. 4 is a cross-sectional view showing a polarization state by the optical scanning device of FIG.

FIG. 5 is a sectional view conceptually showing a polarization state of an optical scanning device according to a second embodiment of the present invention.

FIG. 6 is a sectional view conceptually showing a polarization state of an optical scanning device according to a second embodiment of the present invention.

FIG. 7 is a perspective view of an optical scanning device according to a third embodiment of the present invention.

FIG. 8 is a cross-sectional view illustrating a polarization state of the optical scanning device of FIG. 7;

FIG. 9 is a sectional view conceptually showing a polarization state of an optical scanning device according to a third embodiment of the present invention.

FIG. 10 is a sectional view conceptually showing a polarization state of an optical scanning device according to a third embodiment of the present invention.

FIG. 11 is a perspective view of an optical scanning device according to a fourth embodiment of the present invention.

FIG. 12 is a perspective view of a conventional optical scanning device.

FIG. 13 is a plan view of another conventional optical scanning device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Deflection optical system 2 Hinge 3 Diaphragm 4 Mirror surface (movable mirror) 5 Cylindrical lens 6 Spacer 7 Incident light 8 Reflected light 9 Emitted light 11 Angle magnifying optical system 12 Hinge 13 Vibrating plate 14 Mirror surface (movable mirror) 15 Spacer 16 Deflection optical system 17 Hinge 18 Diaphragm 19 Mirror surface (movable mirror) 20 Incident light 21 Reflected light 22 Emitting light 31 Deflection / angle enlargement optical system 32 Hinge 33 Vibration plate 34 Mirror surface (movable mirror) 35 Spacer 36 Reflection mirror 37 Incident light 38 Reflected light 39 Emitted light 40 Semiconductor laser unit 41 Optical scanning device 42 Cylindrical lens 43 Object to be measured 44 Imaging lens 45 CCD 46 Scanning light 47 Slit light 51 Movable micromirror 52 Movable micromirror 53 Incident light 54 Reflected light 55 Emission light 56 Anti Mirror

Claims (10)

[Claims] 1. A deflecting optical system for deflecting a radiation direction of incident light by reflecting the light on a movable mirror, and an angle-enlarging optical system for expanding an emission angle of the deflected emitted light. Optical scanning device. 2. The optical scanning device according to claim 1, wherein the deflection optical system and the angle magnifying optical system are integrally integrated. 3. The optical scanning device according to claim 1, wherein the deflection optical system is a movable micro mirror manufactured by a semiconductor process. 4. The angle magnifying optical system is a concave lens or a convex mirror.
3. The optical scanning device according to claim 1. 5. The optical scanning device according to claim 1, wherein the angle expanding optical system is a movable micro mirror. 6. The deflecting optical system and the angle magnifying optical system are both movable micromirrors, and each of the two movable micromirrors reflects incident light only once. Item 3. The optical scanning device according to item 2. 7. The optical scanning device according to claim 6, wherein a movable micromirror serving as a deflection optical system and a movable micromirror serving as an angle magnifying optical system substantially face each other. 8. An optical path is folded by arranging a plane mirror in an optical path of a movable micromirror serving as a deflection optical system and a movable micromirror serving as an angle magnifying optical system, and the plane mirror and the two movable micromirrors are generally arranged. The optical scanning device according to claim 7, wherein the optical scanning device faces each other. 9. A three-dimensional shape measuring apparatus using the optical scanning device according to claim 1 to deflect spot light or slit light. 10. The method according to claim 1, wherein:
A laser printer, wherein the laser beam is deflected by using the optical scanning device described in the above section.