JP2002072918A5 - - Google Patents
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- JP2002072918A5 JP2002072918A5 JP2001170104A JP2001170104A JP2002072918A5 JP 2002072918 A5 JP2002072918 A5 JP 2002072918A5 JP 2001170104 A JP2001170104 A JP 2001170104A JP 2001170104 A JP2001170104 A JP 2001170104A JP 2002072918 A5 JP2002072918 A5 JP 2002072918A5
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001170104A JP4869499B2 (en) | 2000-06-06 | 2001-06-05 | Element board inspection method |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000-168327 | 2000-06-06 | ||
| JP2000168327 | 2000-06-06 | ||
| JP2000168327 | 2000-06-06 | ||
| JP2001170104A JP4869499B2 (en) | 2000-06-06 | 2001-06-05 | Element board inspection method |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002072918A JP2002072918A (en) | 2002-03-12 |
| JP2002072918A5 true JP2002072918A5 (en) | 2008-07-17 |
| JP4869499B2 JP4869499B2 (en) | 2012-02-08 |
Family
ID=26593363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001170104A Expired - Fee Related JP4869499B2 (en) | 2000-06-06 | 2001-06-05 | Element board inspection method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4869499B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4017586B2 (en) | 2003-10-29 | 2007-12-05 | 三洋電機株式会社 | How to charge the battery |
| JP4301498B2 (en) | 2003-11-13 | 2009-07-22 | インターナショナル・ビジネス・マシーンズ・コーポレーション | Inspection device for inspecting TFT |
| JP4791023B2 (en) | 2004-11-08 | 2011-10-12 | インターナショナル・ビジネス・マシーンズ・コーポレーション | TFT inspection apparatus and inspection method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62115690A (en) * | 1985-11-13 | 1987-05-27 | 富士通株式会社 | Inspection of line defect of display device |
| JPH02140794A (en) * | 1988-11-21 | 1990-05-30 | Toshiba Corp | Defect checking method for liquid crystal display device |
| JP2889132B2 (en) * | 1994-10-12 | 1999-05-10 | 株式会社フロンテック | Thin film transistor inspection equipment |
| JP3271548B2 (en) * | 1997-04-30 | 2002-04-02 | 日新電機株式会社 | Disconnection detection method of electrostatic chuck circuit |
| JP3613968B2 (en) * | 1998-03-18 | 2005-01-26 | セイコーエプソン株式会社 | Semiconductor element inspection apparatus and semiconductor element inspection method |
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2001
- 2001-06-05 JP JP2001170104A patent/JP4869499B2/en not_active Expired - Fee Related