JP2002071312A - Irradiation location measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To non-contactly conduct the shape, displacement, and irradiation location measurements, without making an object to be measured. SOLUTION: A measuring light source system 100 comprises a first light source to emit a first light pencil of a first wavelength, and a second light source for emitting a second light pencil of a second wavelength and emits a measuring light pencil, on the basis of the first and second light pencils. An illuminating optical system 300 comprises a third light source for emitting a third light pencil to partially illuminate the object to be measured. A measuring optical system 200 comprises a beam splitter to divide the first and second light pencils into a reference light pencil toward a reference plane and a measuring light pencil toward the object to be measured; a reference reflecting mirror to reflect the reference light pencil; and a first light-receiving part for receiving both an interference light pencil obtained by making the reflected measuring light pencil reflected at the object to be measured interfere, with the reference reflected light pencil reflected at the reference reflecting mirror; and the third reflected light pencil of the third light pencil reflected at the object to be measured to form a first light reception signal. An image processing and control part 600 extracts a variable density pattern, which indicates the shape of the object to be measured from the first light reception signal by the interference light pencil and forms an object signal, which indicates changes in the shape and location of the object to be measured from the movement of the variable density pattern.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an irradiation position measuring apparatus, and more particularly, to an irradiation position measuring apparatus for measuring the shape and movement of an object to be measured and a light irradiation position on the object without contact. . The present invention is directed to, for example, measuring and controlling the irradiation position of an ophthalmic operation such as a LASIK operation, other operations, and an appropriate object other than a living body.

[0002]

2. Description of the Related Art Conventionally, regarding measurement of an irradiation position, marking is performed on an object for measuring the movement of an object to be measured (for example, a living body such as an eyeball), and the movement is continuously monitored to thereby mark the object. There was a way to measure movement. In addition, a method of optically measuring one-dimensionally a marking without contact, or a method of measuring three-dimensional movement by combining those methods has been adopted. In general, when an object is an object having an optically rough surface, a speckle interference measurement, a moiré fringe projection method, or the like is used as a method for optically measuring the shape or displacement of the object without contact.

[0003]

However, when a living body or the like is used as an object as in the prior art, the marking has a considerable effect on the living body. Conventionally, it has been difficult to perform three-dimensional measurement at a high speed with a simple configuration without contacting an object. Furthermore, conventionally, at the boundary surface having different reflectance,
The position measurement error was not always small.

In view of the above, the present invention provides an irradiation position measuring apparatus capable of measuring a shape, a displacement, and an irradiation position in a non-contact manner without newly marking a measurement object for displacement measurement. The purpose is to do. SUMMARY OF THE INVENTION It is an object of the present invention to accurately measure the shape and position of an object to be irradiated with irradiation light by reducing errors at a reflectance boundary surface by interference light. An object of the present invention is to measure the movement and displacement of an object by measuring the shape of the object over time. Another object of the present invention is to measure the irradiation position of the irradiation light and control the position of the irradiation light. Another object of the present invention is to perform automatic tracking control so as to irradiate irradiation light to a predetermined same position as necessary.

When an object is optically measured, the method of measurement differs depending on whether the surface is optically rough or smooth, but the present invention is particularly applicable to the case where the surface is optically rough. It is an object of the present invention to provide an irradiation position measuring device suitable for a surface object or a living body.

[0006]

According to a first solution of the present invention, a first light source unit for emitting a first light beam of a first wavelength;
A second light source unit that emits a second light beam of a second wavelength;
A measurement light source system that emits a measurement light beam based on the second light beam, an illumination optical system having a third light source that emits a third light beam that partially illuminates the measurement object, and first and second light sources from the measurement light source system. A beam splitter that separates the two light beams into a reference light beam directed to the reference surface and a measurement light beam directed to the measurement object, a reference reflecting mirror that reflects the reference light beam, and a reflected measurement light beam in which the measurement light beam is reflected from the measurement object. An interfering light beam in which the reference light beam interferes with the reference reflected light beam reflected by the reference reflecting mirror, and a third reflected light beam in which the third light beam from the illumination optical system is reflected from the object to be measured are first received. A measuring optical system having a first light receiving section for forming a light receiving signal, and a light / dark pattern indicating the shape of the measuring object is extracted from the first light receiving signal by the interference light beam of the measuring optical system, and the measuring object is extracted from the light / dark pattern. Shape and position Providing irradiation position measuring device and an image processing and control unit to form an object signal indicating a change.

In the present invention, further, the third light beam receives a third reflected light beam reflected from the object to be measured,
An object monitor system having a second light receiving unit for forming a second light receiving signal indicating a measurement object image including the third reflected light flux;

The image processing and control system corrects the display position of the measurement object in accordance with the obtained position change of the measurement object based on the second light receiving signal from the object monitoring system. Features.

[0009]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram of an irradiation position measuring apparatus according to a first embodiment of the present invention. FIG. 1 shows an embodiment in which a three-dimensional movement amount of an object is measured and output from a change in speckle interference fringes. An embodiment in which the present invention is applied to an ophthalmic laser surgery apparatus will be described below.

In this embodiment, a measurement light source system 100 for displacement / shape and a measurement optical system 20 for displacement / shape are described.
0, an illumination optical system 300, an object monitor system 400, and an image processing and control system 600. In the figure, the measuring object 500
Indicates a spherical living body such as an eyeball as an example.

The measuring light source system 100 for displacement and shape is
A first LD1, a first lens 2, a first optical switch 3,
A first fiber 4, a first modulator 5, a second LD 6, a second lens 7, a second optical switch 8, a second fiber 9, a second modulator 10, a fiber coupler 11, a third , And a third lens 13.

The first LD 1 is a light source that outputs a wavelength λ1, and for example, a laser diode (LD) or the like is used. The first lens 2 condenses the light of the first LD 1. The light collected by the first lens 2 enters the first fiber 4. The first optical switch 3 includes a first lens 2
And the first fiber 4 for passing or blocking the output light of the first LD 1. The first modulator 5 is a driver of the first optical switch 3. On the other hand, the second LD 6
The wavelength λ2 is output. The second lens 7 has a second LD 6
Of light. The second fiber 9 is connected to the second lens 7
The light condensed at is incident. The second optical switch 8 is disposed between the second lens 7 and the second fiber 9,
Pass or block the output light of the LD6. Second modulator 1
0 drives the second optical switch 8. The wavelength λ1
And λ2 may be, for example, slightly different ones around 800 nm. The fiber coupler 11 couples the first fiber 4 and the second fiber 9 and guides the first fiber 4 and the second fiber 9 to the third fiber 12. The third lens 13 is a third fiber 1
The output light of No. 2 is made parallel light.

The measuring optical system 200 for displacement / shape is
It includes a first beam splitter 14, a first mirror 15, a bandpass filter 16, a fourth lens 17, and an area sensor 18. The parallel light output from the third lens 13 of the measurement light source system 100 is incident on the first beam splitter 14. The first mirror 15 reflects the light split by the first beam splitter 14. The band pass filter 16 transmits a specific wavelength. Examples of the specific wavelength will be described later. The fourth lens 17 condenses the light incident from the measurement object 500 and the first mirror 15 via the first beam splitter 14. The area sensor 18 photographs the light collected by the fourth lens 17.

The illumination optical system 300 includes a surgical laser light source 1.
9, fifth lens 20, third LD 21, third LD2
1, a mirror 23 for reflecting guide light, a dichroic mirror 24, a reflecting mirror 25, a concave mirror 26, a second
Is provided.

The surgical laser light source 19 is an appropriate high-power laser such as an ultraviolet (193 nm) excimer laser. The fifth lens 20 is provided with a surgical laser light source 19.
Is provided with a mechanism for condensing the surgical laser light emitted from the device on the surface of the measurement object 500 and adjusting the condensing position by the image processing and control system 600. The third LD 21 has a third wavelength λ3 for adjusting the position of the surgical laser light source 19.
(For example, near-infrared light). The dichroic mirror 24 mixes surgical laser light and guide light, and transmits, for example, ultraviolet light and reflects near-infrared light.
The reflection mirror 25 has a mechanism for changing the reflection direction by the image processing and control system 600.

A specific example of the wavelength is as follows. A first wavelength λ1 = 790 nm, a second wavelength λ2 = 810 nm,
Third wavelength λ3 = 780 nm, contour line interval λ1λ2 /
(Λ2-λ1) = 32 μm, etc. Object monitor system 400
Is provided with a sixth lens 28 and a CCD camera 29. The sixth lens 28 condenses the light on the measurement object 500.
The CCD camera 29 photographs the light collected by the sixth lens 28.

The image processing and control system 600 includes an image processing device 30 for a displacement / shape measuring system, a CCD image processing and operation plan output device 31, an image display 32, and an optical axis of a laser (guide light and laser for operation). A focus control driving device 33 is provided. Details of the image processing and control system 600 will be described later.

Hereinafter, the measurement light source system 100 and the measurement optical system 2
The operations of the illumination optical system 300, the object monitor system 400, and the image processing and control system 600 will be described.

First, the operation of the measurement light source system 100 will be described below. The first LD 1 having the first wavelength λ 1 is condensed by the first lens 2, passes through the first optical switch 3, and enters the first fiber 4. Similarly, the second L of the second wavelength λ2
D 6 is condensed by the second lens 7, passes through the second optical switch 8, and enters the second fiber 9. The two lights are guided to the third fiber 12 by the fiber coupler 11.
Here, the first and second optical switches 3 and 8 are ON / OFF controlled by the first and second modulators 5 and 10.
Thereby, the wavelength λ can be set at a constant period or at an appropriate timing.
Lights of 1 and λ2 are output from the third fiber 12 alternately. The output light of the third fiber 12 is transmitted to the third lens 13
Is turned into parallel light. This parallel light becomes a measurement light source for measuring the shape of the displacement.

Next, the operation of the measuring optical system 200 will be described below. Third measurement light source system 100 for displacement and shape
The parallel light for measurement emitted from the lens 13 is divided by the first beam splitter 14, and one of the two
0 incidence. Since the surface of the measurement object 500 is an optically rough surface, light is scattered on the surface (scattered light). The other of the parallel lights split by the first beam splitter 14 enters the first mirror 15, where it is reflected (reflected light). The scattered light by the measurement object 500 and the reflected light by the first mirror 15 pass through the band-pass filter 16 through the first beam splitter 14, are collected by the lens 17, interfere with the area sensor 18, and Forming a pattern. The light detected by the area sensor 18 is converted into an electric signal and becomes an image signal. Here, the band-pass filter 16 has, for example, a characteristic that transmits the wavelengths λ1, λ2, and λ3, and does not transmit or hardly transmits other wavelengths. The aperture of the area sensor 18 is preferably reduced as much as possible so that the light amount is not too weak to increase the speckle size. The image signal detected by the area sensor 18 is output to the image processing system 3 of the image processing and control system 600.
At 0, image processing and displacement / shape of the object are calculated. In the embodiments, speckle interference will be described, but the present invention is not limited to this, and appropriate interference such as holography and moiré interference can be applied.

Next, the operation of the illumination optical system 300 will be described below. Illumination light from the illumination optical system 300 includes a surgical laser light source 19 (for example, an ultraviolet region) and a guide laser 21 (for example, a near-infrared region). The output beam of the surgical laser light source 19 passes through the fifth lens 20 for fine adjustment of the focal length, and enters the dichroic mirror 24. The output beam of the third LD 21 as a guide laser is
The light is reflected by 3 and enters the dichroic mirror 24. Here, as an example, the dichroic mirror 24 transmits ultraviolet light and reflects near-infrared light. The surgical laser beam and the guide light are mixed by the dichroic mirror 24 and travel in the coaxial direction. Next, the illumination light is reflected mirror 25, concave mirror 26,
The second beam splitter 27 reflects the object 50 to be measured.
Illuminates 0. Here, the reflection mirror 25 is arranged so that the laser spot position is the focal point of the concave mirror, and the reflection mirror 25 is provided with an adjustment mechanism that can be tilted about the laser spot position (concave mirror focal point). The fifth lens 20 and the reflection mirror 25 are adjusted and controlled by the optical axis / focus control driving device 33. Thus, the change in the reflection direction by the reflection mirror 25 is converted into a parallel shift by the concave mirror 26, and the illumination position on the measurement object 500 can be controlled.

Next, the operation of the object monitor system 400 will be described. The illumination light and the scattered light on the measurement object 500 are condensed by the sixth lens 28, form an image on the CCD camera 29, and photograph a large area two-dimensionally. CCD camera 2
7 is output to the image processing unit 31 of the image processing and control system 600.

Next, the operation of the image processing and control system 600 will be described. The operations of the image processing and control system 600 mainly include signal / image processing, image display position control, and irradiation position control of illumination light, which will be described below in order. Here, the symbols used will be described. P1 is an image of the area sensor AS measured in synchronization with the lighting of the first LD1. P2 is an image of the area sensor AS measured in synchronization with the lighting of the second LD 6. P3 is the third
Area sensor A measured in synchronization with the lighting of LD21
It is an image of S. P is a speckle image of the difference between successive images P1 and P2. Q represents P as spatial LPF
Contour image with less noise converted by. M is data obtained by converting Q to the same coordinates as the operation plan map. M_nom
Is the object shape information of the surgery plan. R is the difference between the two contour images Q. ΔCN is the center of the interference fringe or the highest position of the object. ΔX is the displacement of the object in the X direction. ΔY is the displacement of the object in the Y direction. ΔZ is the Z-direction displacement of the object. ΔX ′ is
Displacement of object in X 'direction (CCD coordinate system). ΔY ′ is the displacement of the object in the Y ′ direction (CCD coordinate system). LD3_AS is A
The beam spot position of the third LD 21 measured in S. L
D3_AS ′ is obtained by converting LD3_AS into the coordinate system of the surgery plan map. LD3_AS "is a conversion of LD3_AS into a CCD coordinate system. LD3_CCD is a CC
Third LD 21 measured at D or laser light source 1 for surgery
Nine beam spot positions. LD3_CCD 'is LD3
_ CCD corrected for displacement. LD3_nom is the beam spot position of the third LD 21 or the laser light source 19 for operation specified in the operation plan. P_CCD is an image photographed by the CCD, and P_CCD 'is an image obtained by cutting out the P_CCD and correcting the displacement. X_nom is the X of LD3_nom
A signal obtained by converting coordinates into a mirror drive signal. Y_nom is
A signal obtained by converting the Y coordinate of LD3_nom into a mirror drive signal. Z_nom is a signal obtained by converting the Z coordinate of LD3_nom into a lens drive signal. ΔX_eye is a signal obtained by converting ΔX into a mirror driving signal. ΔY_eye is a signal obtained by converting ΔY into a mirror driving signal. ΔZ_eye is a signal obtained by converting ΔZ into a lens drive signal. STOP is a signal for locking the surgical laser light source 19. ON is a signal indicating that the surgical laser light source 19 is turned on. ON-OFF
Is a lighting control signal of the surgical laser light source 19 based on a surgical plan. TR_1 is a conversion function for converting AS coordinates to CCD coordinates. TR_2 is a lens of LD3_nom,
Conversion function to convert to mirror drive signal. TR_3
Is a function for converting ΔX, ΔY, and ΔZ into lens and mirror drive signals. TR_4 is a conversion function for converting AS coordinates into surgical planning coordinates. ER1 is LD3_AS
"And an error signal indicating the error between LD3_CCD ', and thereby, it is possible to mainly judge whether the conversion between the AS coordinate and the CCD coordinate is correct. ER2 is an error signal indicating the error between LD3_nom and LD3_AS. The degree of coincidence between the actual displacement and the driving of the LD 21 or the mirror for displacement of the light of the surgical laser light source 19 can be determined.
An error signal indicating an error between nom and LD3_AS '. With this, it is possible to determine whether the target position on the object is irradiated with the light of the third LD 21 or the laser light source 19 for surgery by correcting the displacement of the object. . ERM is M and M_nom
Error signal representing the error of.

[Signal / Image Processing] FIG. 2 is a flowchart showing an example of image processing for extracting a moving amount from a speckle image. FIG. 3 is an explanatory diagram of a processed image. Hereinafter, description will be made with reference to these drawings. This process is mainly a process of obtaining a shape map from two speckle images of continuous wavelengths λ1 and λ2 (S10) and a process of calculating a displacement between the two shape maps from the two shape maps (S20).
including.

First, the arrangement of the measurement object 500, the setting of various parameters, and the like are performed by initial setting and work (S10).
1). Next, the shape measurement processing (S10) for creating a shape map (contour lines) will be described. The image captured by the area sensor is read in synchronization with the ON-OFF signals of λ1, λ2, and λ3 (S103). These images are respectively referred to as image P1
(N), P2 (N) and P3 (N). The images P1 (N) and P2 (N) at this time have a speckle pattern as shown in FIG. 3A. The image P3 (N) is an image of the spot position of the illumination light λ3. The signal processing will be described in detail. As described above, the measurement light source emitted from the measurement light source system 100 periodically emits light of wavelengths λ1 and λ2. At the same time, the illumination light of wavelength λ3 from the illumination optical system 300 also periodically (or continuously) illuminates the object. The image detected by the area sensor 18 is transmitted to the image processing system 30. The image processing system 30 has a wavelength λ
1. A speckle image of wavelength λ1 and a speckle image of wavelength λ2 are alternately read in synchronization with ON and OFF of λ2. Here, the reading cycle is repeated at such a high speed that the displacement of the measuring object 500 can be ignored, the time difference between the continuous speckle images P1 and P2 of λ1 and λ2 can be ignored, and both can be regarded as simultaneous. When measuring speckle interference fringes, two speckle images must be photographed at the same time, or the difference between the measurement times of the two images must be so short as to be negligible compared to the change speed of the target object. That is, the faster the displacement of the object to be measured, the faster the processing is required.

Next, the two speckle images P1
When the difference between (N) and P2 (N) is calculated, speckle interference fringes appear (S105). The stripes represent contour lines of the target object, and the interval is λ1λ2 / (λ1−λ2).
This is referred to as an image P (N) (P (N) = P2 (N) -P
1 (N)). Image P (N) is a speckle interference fringe as shown in FIG. 3b. Next, the speckle interference image P
(N) is divided into two or more gradation areas by a low-pass filter (LPF). This image Q (N)
As shown in FIG. The light and shaded stripes indicate contour lines. At the same time, a surface shape map M_AS (X, Y, Z) is created. Next, the spot position LD3_AS (X, Y, Z) of the guide light is obtained from the image P3 (N) (S1).
07). Then, the center point (or any reference point) CN (X, Y) of the stripe of the image Q (N) is determined (S10).
9).

Next, an example (S20) of measuring the moving direction and moving amount (displacement) of the object will be described. First, the difference between speckle interference images Q (N) -Q (N-1)
Is obtained, and this is set as an image R (N) (S111). Examples of image R (N) are shown in FIGS. 3d, h and f. The gray part is positive and the black part is negative. From the data of the image R (N), a plurality of straight lines ln passing through the center of the interference fringes are extracted. The extracted data on ln are shown in FIGS. 3e, i and g. From this data, the movement of the stripes can be seen. FIG. 3e shows that the stripes are shifting to the left, and FIG. 3i shows that they are moving up and down. Also, in the case of FIG. 3g, the vertical movement and the horizontal movement overlap due to asymmetry. The movement amount is obtained from the size of the gray and black areas, and the interval between the stripes is λ1λ2.
/ (Λ1-λ2), the absolute value of the movement amount is obtained (S113). By repeatedly performing this and comparing, for example, by performing the measurement in four directions of the horizontal direction, the vertical direction, and the oblique direction (two types) or more, the displacement of the measurement object 500 with respect to the displacement amounts ΔX, ΔY, ΔZ Ask for.

Next, the displacement amounts ΔX, ΔY, ΔZ and the guide light spot position LD3_AS (X, Y, Z) are output (S115). The displacement amounts ΔX, ΔY, ΔZ are used for controlling the spot position of the surgical laser beam and for correcting the position of the target object display image. The spot light LD3 position information of the guide light is used for monitoring the control status. As a result of the above processing, if the termination condition is satisfied, the processing is terminated.
Returning to step 103, the processing is repeated.

[Image Display Position Control] First, image display position control will be described. The display position control of the image is mainly control for displaying a part of the image of the moving measuring object 500 captured by the CCD camera 29 on the monitor 32 as if it were stationary. The configuration for that purpose particularly includes a CCD camera 29, an image processing unit 31, and a monitor 32.

FIG. 4 shows a flowchart of image processing in the image processing section 31. Also, FIG.
The explanatory view of the D image is shown. The CCD camera 29 captures an image of the measurement object 500 over a wide area as shown in the figure.
The image data is sent from the CCD camera 29 to the image processing system 3.
1 is transmitted. The sent image is the area 5 in FIG.
The image is a wide range as shown in FIG. 1 (S401). here,
The spot position 53 (LD3_CCD) of the guide light by the third LD 21 is obtained from the CCD image (S403).
Next, an area 52 having an arbitrary size including the guide light spot position LD3_CCD is cut out (S405).
Next, the displacement signals ΔX, ΔY, Δ
Z and LD3_AS (X, Y) are read (S40)
7). Then, the image position is corrected based on the displacement data (S
409). At this time, the spot position LD3_CCD is also corrected simultaneously with the corrected image P_CCD '. This is defined as a spot position LD3_CCD '. This corrected image P_CC
D 'and the spot position LD3_AS "are displayed on the monitor.

By the above-described image correction, it is possible to suppress the blur of the image accompanying the movement of the object, and the image looks like a still image.

[Control of Illumination Light Irradiation Position] Next, control of the illumination optical system 300 will be described. The irradiation position of the surgical laser light is programmed in advance based on a surgical plan (nomogram) for changing the shape of the measurement object 500 to a target shape. On the other hand, since the measurement object 500 is constantly moving, it is necessary to adjust the position of the irradiation light so as to correct this displacement. As described above, the illumination light (third
Illuminators) include guide illumination light (third LD 21) and surgical illumination light (surgical laser light source 19). The optical axes of the guide light and the surgical illumination light are adjusted to be equal, and the position of the surgical illumination light is adjusted while monitoring the position of the guide light.

Hereinafter, the position control of the illumination light will be described in detail. FIG. 6 shows a detailed configuration diagram of a control system of the illumination optical system. The control system is roughly divided into displacement and
The image processing apparatus 30 includes a shape measurement system image processing device 30, a CCD image processing and operation plan output device 31, and an optical axis / focus control drive device 33 for laser (guide light and laser for operation). less than,
Each of these devices will be described in detail.

First, the image processing apparatus 3 of the displacement / shape measuring system
0 will be described. The image data P1, P2, and P3 measured by the area sensor AS18 are input to the image processing device 30 of the image processing and control system 600. Images P1, P
2 is converted into a contour Q by a contour creator 30-2 and recorded. Next, the displacement calculator 30-3 calculates and outputs the movement amounts ΔX, ΔY, and ΔZ of the object between the two continuous or periodic sampled contour images. On the other hand, the image P3 is converted into position information by the LD3 position extractor 30-1. The converter (3) 30-4 converts the contour line into a shape, and superimposes the guide position LD3_AS on the contour line to convert the contour to M
This is a device for obtaining and outputting _AS.

Next, the CCD image processing and operation plan output device 31 will be described. This system is roughly divided into an image processing system and an operation planning system. The CCD image is converted into a still image P_CCD ′ by the image corrector 31-4 based on the displacement data ΔX ′ and ΔY ′. Displacement data ΔX ', ΔY
'Denotes that the data output from the image processing device 30 is converted by the coordinate converter (TR_1) 31-3 from the coordinates of the AS into the CCD.
It has been converted to coordinates. Also, TR_1 for the coordinate converter indicates its conversion function, and the comparator 31-5
Is a true / false judgment unit for calibrating the conversion function TR_1. The nomogram 31-1 is a device that outputs a prepared operation plan. The comparator 31-2 is a device that determines whether the position of the guide light is in accordance with the operation plan.

Next, the illumination light control / drive system 33 will be described. This device is a device for moving a reflection mirror 25 and a lens 20 for moving illumination light (surgery laser and guide light) to a position on a measurement target 500 determined by an operation plan. Converter (TR_2) 33-
Reference numeral 2 denotes a mirror lens drive signal X_nom, Y_nom, Z obtained by converting the operation plan LD3_nom output from the CCD image processing and operation plan output device 31 by a conversion function TR_2.
_Nom is converted and output. Converter (TR_3) 33-
1 is the displacement Δ of the object measured by the displacement measuring device 30
X, ΔY, and ΔZ are mirror / lens position correction signals ΔX_e
ye, ΔY_eye, ΔZ_eye conversion / output device, and TR_3 is a conversion function thereof. Adder 33-3
Is a device that outputs the signals output from the converters 33-1 and 33-2 to the superimposing reflection mirror 25 and the lens 20.

Next, an example of the control operation will be described with reference to a flowchart. The process is roughly divided into a calibration process and a control process. After the calibration process is completed, the control process is started. If the control process is not successful, a recalibration is performed. FIG. 7 shows a flowchart of the calibration process, and FIG. 8 shows a flowchart of the control process.

(TR_4 calibration) The conversion function TR_4 is a conversion function for making the measured object shape coincide with the coordinates of the operation plan, and is obtained as follows. First, the object shape M_AS is measured (S201). The object shape M_AS is compared with the operation plan M_nom, and the shape size and position are compared (S203). Object shape M_AS and surgical plan M_
When the size and position of nom are larger than the allowable error σ (S
205), a conversion function TR_4 when creating the object shape M_AS
Is corrected (S207). This operation is repeated several times, and when the error ER_M between the object shape M_AS and the operation plan M_nom falls within the allowable amount σ (S205), the calibration of the conversion function TR_4 ends.

(TR_2 calibration) The conversion function TR_2 is a spot position LD3_nom of the illumination light based on the operation plan.
Is a conversion function for converting into a mirror lens position control signal, which is obtained as follows.

First, the guide light LD3 by the third LD 21
Is turned on (S209). Next, the spot position LD3_nom (TestN) of the illumination light based on the operation plan is converted into a mirror lens drive signal, and a laser is irradiated to the TestN position. The irradiation position LD3_AS is measured by the area sensor AS (S211). Irradiation position LD3_A
S and the spot position LD3_nom (TestN) are compared and recorded (S211). The first comparison is the conversion function TR_
Adjust the origin of step 2 and proceed to the next position. In the case of the Nth comparison, the error ER_2 is larger than the allowable error σ (S21
3), calibrate the magnification of the conversion function TR_2, etc. (S21)
5). This operation is repeated a plurality of times. When the error ER_2 becomes equal to or smaller than the allowable error σ, the calibration of the conversion function TR_2 ends.

(TR_3 calibration) The conversion function TR_3 is a conversion function for converting into a mirror lens position control signal for correcting the spot position of the illumination light based on the displacement data, and is obtained as follows. First, the position data LD3
_Nom is fixed to an arbitrary point, and control of the irradiation position is started (S217). The displacement data ΔX, ΔY, ΔZ are converted into correction signals ΔX_eye, ΔY_eye, Δ by a conversion function TR_3.
It is converted to Z_eye, and the mirror lens position is corrected according to the fluctuation of the object (S219). Next, the irradiation position LD
3_AS is measured by the area sensor AS, and the conversion function TR_
In 4, the position is converted into the on-object position LD3_AS ′,
AS 'is compared with LD3_nom (S221). If the error ER_3 is larger than the allowable error σ (S223),
The magnification and the like of the conversion function TR_3 are calibrated (S225).
This operation is repeated a plurality of times, and the error ER_3 becomes the allowable error σ
When it becomes the following (S223), the calibration of the conversion function TR_3 ends.

(Calibration of TR_1) The conversion function TR_1 is
This is a conversion function for correcting a CCD image cut to an arbitrary size by following the displacement of an object, and converting the object displacement at the time of forming a still image from AS coordinates to CCD coordinates. Can be

First, when the CCD image stabilization control is started (S227), the object displacements ΔX, ΔY, ΔZ are converted into CCD coordinate displacements ΔX ′, ΔY ′ (S229). CC
The anterior ocular segment image detected at D29 is cut out into an arbitrary display range including the spot position of the guide light LD3, and the object displacement Δ
It is converted into a still image P_CCD 'based on X' and ΔY '. Then, the irradiation position LD3 of the guide light LD3 on the image
_CCD 'and irradiation position LD3_ converted to CCD coordinates
AS ". If the error ER_1 exceeds the allowable value σ (S233), the coordinate conversion function TR_1 is calibrated.

As described below, the conversion functions TR_1, T
Calibration of R_2, TR_3, TR_4 is performed. (Control) Next, with reference to FIG. 8, the processing of the measurement object based on the operation plan will be described. When the operation based on the nomogram is started (S301), the position data LD3 of the n-th step programmed based on the nomogram is obtained.
_Nom (n), n = 1 to n_max are converted to the converter 2 (TR
_2) Mirror and lens drive signal ΔX_no at 33-2
m, ΔY_nom and ΔZ_nom. On the other hand, the measured displacements ΔX, ΔY, and ΔZ of the object are measured by the converter 1 (T
R_3) Correction signals ΔX_eye and ΔY_ey at 33-1
e, ΔZ_eye. The signal of the operation plan and the correction signal are added and output as a drive signal of the reflection mirror 25 and / or the lens 20. Thereby, the illumination light moves to the correct operation position (S303).

If the error signal ER_2 between the on-object position LD3_AS '(actual measurement 1) and the position data LD3_nom (planned) is over a certain range (S305), the surgical laser light source 19
Is locked (S309). The irradiation position LD3_C
CD '(actual measurement 2) and position data LD3_nom (plan)
If the error signal ER_3 is equal to or more than a certain range (S307),
The operation laser light source 19 is locked (S309). If it is locked for a certain period (t-max) in step S309 (S311), the process returns to step S102 and is re-calibrated. On the other hand, if the locked time is equal to or less than the predetermined time, the processing is executed from step S303. Step S
The surgical laser light source 19 is turned on only when the irradiation lock in steps 305 and S307 is not executed (S313).
When the surgical laser light source 19 is turned on, a lighting signal (irradiation completion signal) is output to the nomogram, and the operation proceeds to the next operation step (S315, S317). When the scheduled irradiation (n_max) ends (S317), the operation ends.

FIG. 9 shows a second embodiment of the irradiation position measuring apparatus according to the present invention.
It is a lineblock diagram of an embodiment. FIG. 1 shows an embodiment which is used, for example, in a case where the target object is a sphere and has a certain degree of unevenness and rotates. In this case, the mirror 15 on the reference light side in the first embodiment is replaced with a spherical mirror 34 adapted to the curvature of the object to be measured. Further, by moving or replacing the lens 13 in the first embodiment, the irradiation beam condenses and enters the light so that the wavefront coincides with the spherical surface of the spherical mirror 34. In such a measurement light source system 100 and a measurement optical system 200, the rotational movement of the measurement object 500 can be captured as a parallel movement, and can be applied to more precise shape measurement and displacement measurement.

[0047]

According to the present invention, as described above, it is possible to provide an irradiation position measuring apparatus capable of measuring a shape, a displacement, and an irradiation position in a non-contact manner without marking a measurement object. According to the present invention, it is possible to accurately measure the shape and position of a measurement object to be irradiated with irradiation light by reducing errors at a reflectance boundary surface by interference light. According to the present invention, the movement and displacement of the object can be measured by measuring the shape of the object over time. Further, according to the present invention, it is possible to control the position of the irradiation light by measuring the irradiation position of the irradiation light. further,
According to the present invention, the automatic tracking control can be performed so that the irradiation light is irradiated to a predetermined same position as needed.

When an object is optically measured, the method of measurement differs depending on whether the surface is optically rough or smooth. According to the present invention, particularly, the surface is optically rough. An irradiation position measuring device suitable for an object or a living body having a rough surface can be provided.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a first embodiment of an irradiation position measuring device.

FIG. 2 is a flowchart illustrating an example of image processing for extracting a movement amount from a speckle image.

FIG. 3 is an explanatory diagram of a processed image.

FIG. 4 is a flowchart illustrating image processing performed by an image processing unit.

FIG. 5 is an explanatory diagram of a CCD image.

FIG. 6 is a detailed configuration diagram of a control system of the illumination optical system.

FIG. 7 is a flowchart of a calibration process.

FIG. 8 is a flowchart of a control process.

FIG. 9 is a configuration diagram of an irradiation position measuring device according to a second embodiment.

[Explanation of symbols]

1, 6, 21 LD 2, 7, 13, 17, 20, 28 Lens 3, 8 Optical switch 4, 9, 12, Fiber 5, 10 Modulator 11 Fiber coupler 14, 27 Beam splitter 15, 23 Mirror 16 Band pass Filter 18 area sensor 19 surgical laser light source 22 driver 24 dichroic mirror 25 reflecting mirror 26 concave and convex mirror 29 CCD camera 30 image processing device 31 operation plan output device 32 image display display 33 laser optical axis / focus control drive device 100 measurement light source system Reference Signs List 200 Measurement optical system 300 Illumination light source system 400 Object monitor 500 Measurement object 600 Image processing and control system

 ──────────────────────────────────────────────────続 き Continued on the front page F-term (reference) 2F064 AA09 AA11 CC04 FF01 GG02 GG12 GG20 GG22 GG24 GG42 HH03 JJ01 KK01 2F065 AA03 AA04 AA09 AA19 AA53 BB07 BB26 CC16 DD04 EE00 EE05 FF04 GG13 GG13 GG13 GG04 GG04 LL02 LL12 LL19 LL20 LL22 LL30 NN01 NN08 QQ00 QQ03 QQ04 QQ25 QQ27 QQ33 SS02 SS13

Claims (9)

[Claims] A first light source unit that emits a first light beam of a first wavelength; and a second light source unit that emits a second light beam of a second wavelength.
A measurement light source system that emits a measurement light beam based on the first and second light beams, an illumination optical system that includes a third light source that emits a third light beam that partially illuminates the measurement target, and a first light source system from the measurement light source system. A beam splitter that separates the second light beam into a reference light beam directed to the reference surface and a measurement light beam directed to the measurement object, a reference reflecting mirror that reflects the reference light beam,
And an interference light beam in which a reflected measurement light beam in which a measurement light beam is reflected from an object to be measured and a reference reflected light beam in which a reference light beam is reflected by a reference reflecting mirror, and a third light beam from the illumination optical system are measured objects. A measuring optical system having a first light receiving section for receiving a third reflected light beam reflected from the object to form a first light receiving signal; and a measuring object from the first light receiving signal by the interference light beam of the measuring optical system. An irradiation position measuring device including an image processing and control unit for extracting a shading pattern indicating a shape and forming an object signal indicating a shape and a position change of the measurement object from the shading pattern. 2. The irradiation position measuring apparatus according to claim 1, further comprising: a third light beam receiving a third reflected light beam reflected from the measurement object, and forming an image of the measurement object including the third reflected light beam. An object monitor system having a second light receiving unit for forming a second light reception signal shown in the figure, wherein the image processing and control system is configured to determine the position of the measurement object based on the second light reception signal from the object monitor system. An irradiation position measuring device for correcting a display position of a measurement object according to a change. 3. The irradiation position measuring apparatus according to claim 1, wherein the image processing and control system further irradiates the irradiation optical system with a third light beam based on the obtained position change of the measurement object. An irradiation position measuring device for controlling a position. 4. The irradiation position measuring apparatus according to claim 1, wherein the measurement light source system emits the first light beam and the second light beam so as to irradiate the measurement object alternately. Characteristic light beam irradiation position measuring device. 5. An irradiation position measuring apparatus according to claim 4, wherein said measuring light source system transmits a first light beam from said first light source unit and a second light beam from said second light source unit to a first frequency, respectively. And the second frequency modulates or performs switching control. The irradiation optical system outputs a third light flux from the third light source unit,
Performing modulation or switching control at a third frequency different from the first light flux and the second light flux, wherein the image processing and control system includes the first
By discriminating the output signal of the light receiving unit by frequency or time, the light and shade pattern by the first light beam or the second light beam and the third light beam
An irradiation position measuring device, wherein the irradiation position is separated into irradiation light by a light beam. 6. The irradiation position measuring device according to claim 4, wherein the image processing and control system outputs the first light beam from the first light receiving unit by a first reflected light beam reflected from the measurement target. The signal is subtracted from the output signal of the first light receiving unit by the second reflected light beam in which the second light beam is reflected from the measurement object, and the shape and position of the measurement object are calculated based on the movement of the shading pattern in the subtracted signal. An irradiation position measuring device characterized by measuring a change. 7. The irradiation position measuring device according to claim 1, wherein the third light beam is a guide light beam for surgery or a laser light beam for surgery. Irradiation position measuring device. 8. An irradiation position measuring apparatus according to claim 1, wherein said image processing and control system is configured to control the first position from said measuring optical system.
Based on the received signal and the second received signal from the object monitor system, calibration for matching the object shape with the coordinates of the surgical plan, the spot position of the illumination light based on the displacement of the surgical plan and / or the measurement target An illumination position measuring apparatus that executes one or more of calibration of the following and calibration for following a displacement of a measurement object, and controls the illumination optical system according to the calibration. 9. The irradiation position measuring apparatus according to claim 1, wherein the reference reflecting mirror of the measuring optical system has a spherical or substantially spherical reflecting surface corresponding to the curvature of the object to be measured. An irradiation position measuring device, wherein the measurement light source system irradiates the measurement light source such that the wavefront substantially coincides with the reflection surface of the reference reflection mirror.