JP2002066300A - Simple vacuum window frame using quick coupling and vacuum device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable the use of an optical window comprising an arbitrary optical material and to increase a window effective area without generating strain, in a simple vacuum window frame using a quick coupling and a vacuum device. SOLUTION: A flange 1, a recessed part 13 for inserting the optical window 3 in a center ring 2, which supports an O-ring 6 for sealing the flange 1 to a view port 7 under vacuum, and an O-ring groove 14 housing an O-ring 5 sealing the optical window 3 under vacuum are provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a simple vacuum window frame and a vacuum apparatus using a quick coupling, and in particular, to eliminate distortion introduced into an optical window upon mounting, and to be made of an arbitrary optical material. The present invention relates to a simple vacuum window frame and a vacuum apparatus using a quick coupling having a characteristic feature of a structure for increasing an effective area of an optical window while allowing an optical window to be attached.

[0002]

2. Description of the Related Art In recent years, with the progress of miniaturization of semiconductor devices, manufacturing steps involving an optical process have become more and more important, and manufacturing steps involving such an optical process, for example, an optical CVD method In such cases, a vacuum apparatus having a view port is used as a chemical reaction tank.

In Japan, a JIS standard bolted vacuum flange is used as a means for tightening a vacuum window frame having an optical window for observation constituting a view port of such a vacuum device. From the viewpoint of simplicity and functional flexibility, a quick-coupling type flange of ISO (International Standards Organization) standard, which is easy to install, is used instead of the conventional bolt-fastened JIS vacuum flange, The ultimate vacuum degree comparable to that of the conventional vacuum apparatus using an O-ring is obtained.

The features of the quick coupling of the ISO standard are that the flange and the viewport are simply tightened and fixed with a clamp member, and a center ring is used for fixing and supporting the O-ring.

At present, vacuum windows using quick couplings which are commercially available are roughly classified into two types. One is a quartz window member provided by MDC, which is manufactured by a silver brazing technique. A fixed stainless steel flange is provided, and the other is a glass flange provided by EVAC, which forms a flange itself also serving as an optical window using a fused quartz material or a glass material instead of stainless steel.

Here, a simple vacuum window frame using a conventional quick coupling will be described with reference to FIGS. 5 and 6. First, the former configuration will be described with reference to FIG. FIG. 5A is a schematic exploded cross-sectional view of a simple vacuum window frame using a quick coupling manufactured by MDC, and is constituted by a stainless steel flange 21 and a stainless steel center ring 22. Is done.

A concave portion for fitting a center ring and an opening for attaching an optical window 23 are formed inside the flange 21. The optical window 23 is fixed to an optical window support welding member 24 made of stainless steel. In the state, flange 2
Silver brazing is applied to the inside of 1. Meanwhile, center ring 2
An O-ring fitting recess for supporting and fixing an O-ring 25 for vacuum sealing is provided on the outer periphery of the O-ring 2.
The O-ring 25 is supported in the ring fitting recess.

The center ring 22 is fitted into the center ring fitting recess provided on the flange 21, and the other end of the center ring 22 is inserted into the inner periphery of the view port 26 of the vacuum device. The flange portion and the flange portion of the viewport 26 are tightened by a clamp member (not shown) to perform vacuum sealing.

FIG. 5 (b) is a schematic cross-sectional view of another flange 27 constituting a simple vacuum window frame using a quick coupling manufactured by MDC. Optical window 2
8 has a structure in which silver is brazed to the inner periphery of the flange 27 via an optical window support welding member 29. The center ring in this case is the same as that shown in FIG. 5A, and the flange of the flange 27 and the flange of the view port 26 are clamped by a clamp member, as in the case of FIG. 5A. It is tightened and vacuum sealed.

Next, with reference to FIG. 6, the latter example of another simple vacuum window frame using a conventional quick coupling will be described. FIG. 6 is a schematic exploded cross-sectional view of a simple vacuum window frame using a quick coupling manufactured by EVAC, in which a fused quartz glass flange 31 also serving as an optical window and a Teflon (registered trademark) center are shown. It is constituted by a ring 32.

The center ring 32 has an O-ring 3
3 is inserted, and on the outer periphery of the center ring 32, an eave portion for fitting the flange portion of the glass flange 31 and the flange portion of the viewport 34 is provided. With the flange portion of the flange 31 and the flange portion of the viewport 34 fitted together, a vacuum seal is performed by tightening with a clamp member (not shown).

By using such a simple vacuum window frame shown in FIGS. 5 and 6, the flange portion of the flange and the flange portion of the viewport are opposed to each other by the clamp member without performing a screwing operation with a bolt. By tightening in this state, vacuum sealing can be easily performed.

Also, in the vacuum apparatus using such a simple vacuum window frame, the ultimate degree of vacuum of the vacuum seal using an O-ring is 10 ⁻⁶ , similarly to the conventional vacuum apparatus using screw fastening with bolts. A degree of vacuum of about 10 ^-7 Torr can be realized.

[0014]

However, in the conventional quick coupling flange shown in FIGS. 5 (a) and 5 (b), the window effective area does not always meet the needs of the user due to the restriction due to the sectional shape. There is no problem. For example, in the case of the conventional quick coupling flange shown in FIGS. 5A and 5B, the effective area of the window is only about 1/2 of the area of the flange.

Further, since the optical windows 23 and 28 are welded to the flanges 21 and 27 by the optical window support welding members 24 and 29, the heat resistance of the optical members constituting the optical windows 23 and 28 is restricted. , Optical window 2 due to welding
There is a problem that distortion occurs in the optical windows 3 and 28, and the optical characteristics of the optical windows 23 and 28 change due to the distortion, which causes a problem in performing accurate optical measurement.

On the other hand, in the case of the other conventional quick coupling flange shown in FIG. 6, although there is no problem with the window effective area, the glass flange 31 itself needs to be tightened by a clamp member, so that the mechanical strength is reduced. There is a limitation that the optical material constituting the glass flange 31 also serving as the optical window is limited to Pyrex (registered trademark) or fused silica, and as a result, the transmitted light wavelength range as the optical window is limited. There's a problem.

That is, depending on the type of optical process, the peak wavelength of the emission spectrum generated by the reaction may be located in the absorption wavelength band of Pyrex or fused silica, and management and control of the optical process through the optical window may be performed. There is a problem that it becomes difficult.

Accordingly, an object of the present invention is to make it possible to use an optical window made of any optical material and to increase the effective area of the window without causing distortion in the optical window.

[0019]

FIG. 1 is a schematic structural view showing an attached state of a simple vacuum window frame according to an embodiment of the present invention. Referring to FIG. 1, the problem in the present invention is solved. The means will be described. See FIG. 1. (1) The present invention relates to a simple vacuum window frame using a quick coupling including a flange 1 and a center ring 2 supporting an O-ring 6 for vacuum-sealing the flange 1 to a view port 7. Optical window 3 on center ring 2
And an O-ring groove 14 for accommodating the O-ring 5 for vacuum-sealing the optical window 3 with the concave portion 13 for inserting and supporting the optical window 3.

As described above, since the center ring 2 is provided with the concave portion 13 for inserting and supporting the optical window 3 and is removably vacuum-sealed by the O-ring 5, the fused quartz is used as an optical member constituting the optical window 3. Any optical member such as KF other than the above can be used, and can be replaced with an arbitrary optical window 3 according to an emission spectrum generated in an optical process. Since the fastening by the clamp member 8 is performed at the flange of the flange 1, there is no problem in mechanical strength.

Further, since welding by silver brazing or the like is not used, a fused portion is not required, so that the effective area of the window can be increased, and the optical window 3 can be distorted due to welding. As a result, the optical absorption characteristics of the optical window 3 do not change, so that highly accurate optical measurement is always possible.

(2) The present invention is characterized in that in the above (1), the flange 1 is provided with an O-ring groove 12 for accommodating the O-ring 4 in contact with the optical window 3.

With such a configuration, the optical window 3 does not directly contact the flange 1 made of metal or the like.
The optical window 3 is not damaged by mechanical shock or mechanical pressing force.

(3) The present invention is characterized in that, in the above (1) or (2), an optical single crystal is used as the optical window 3.

As described above, by using an arbitrary optical single crystal as the optical window 3, the optical window 3 can be used in a wide wavelength range from the infrared region to the vacuum ultraviolet region.

(4) Further, the present invention is characterized in that the vacuum device is provided with a simple vacuum window frame using the quick coupling according to any one of the above (1) to (3).

By providing a simple vacuum window frame using the above quick coupling, a simple vacuum apparatus such as a chemical reaction tank or an optical cell can be realized.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A simplified vacuum window frame using a quick coupling according to an embodiment of the present invention will now be described with reference to FIGS. FIG. 2 is an exploded cross-sectional view of a simple vacuum window frame using the quick coupling according to the embodiment of the present invention, and includes a stainless steel flange 1 and a stainless steel center ring 2.

FIG. 3 is an explanatory view of the structure of the center ring 2. The center ring 2 is provided with a concave portion 13 for housing and supporting the optical window 3, and is provided on a surface where the optical window 3 abuts. Is provided with an O-ring groove 14 for accommodating the O-ring 5 for vacuum-sealing the optical window 3.

An O-ring fitting recess 15 for fitting and supporting an O-ring 6 for vacuum-sealing the flange 1 with respect to the view port 7 is provided on the outer periphery of the center ring 2. The O-ring 6 is supported by the ring fitting recess 15.

FIG. 4 is a view for explaining the structure of the flange 1. The center ring 2 accommodating and supporting the optical window 3 is accommodated in the flange 1.
A concave portion 11 for supporting the optical window 3 is provided, and an O-
An O-ring groove 12 for accommodating the ring 4 is provided.

Referring again to FIG. 1, first, the O-ring 5 is housed in the O-ring groove 14 of the center ring 2, and the optical window 3 made of KF single crystal or the like is housed and supported in the recess 13 so that the center ring is formed. The projection 16 provided on the other of the two is inserted and brought into contact with the inner periphery of the flange of the viewport 7 provided on the vacuum device.

Next, the O-ring 4 is inserted into the O-ring groove 12.
The flange 1 in a state where the center ring 2 is accommodated in the concave portion 11 provided in the flange 1 so as to accommodate the center ring 2, and the flange of the flange 1 and the flange of the viewport 7 are tightened by the clamp member 8. To perform vacuum sealing.

At this time, the gap between the collapse of the O-ring 6 and the O-
By designing the rings 4 and 5 so that the crushing margins coincide with each other, the optical window 3 and the flange 1 can be simultaneously vacuum-sealed. The O-ring 4 is not always necessary for vacuum sealing, but the O-ring 4
Is provided, the optical window 3 does not directly contact the flange 1, and the optical window 3 is not damaged by mechanical pressing force or the like.

As described above, in the embodiment of the present invention, the optical window 3 is connected to the center ring 2 via the O-ring 5.
Is detachably and exchangeably supported, so that distortion due to welding does not enter the optical window 3 and, therefore, the absorption wavelength characteristic of the optical window 3 does not change. Becomes possible.

Further, since welding is not used for supporting and fixing the optical window, there is no need to provide a structure for welding on the flange 1 and there is no need to use an optical window support welding member. The area can be made wider than before. For example, a simple vacuum window frame having a window effective area of about 3/4 of the area of the flange 1 can be provided.

Further, since the mechanical strength involved in the tightening is ensured by the metal flange 1, there is no particular limitation on the optical material constituting the optical window 3, and therefore, it is generated in the optical process as described above. It becomes possible to use an optical single crystal such as a KF single crystal having a transmitted light wavelength range according to the emission spectrum.

A recess 13 provided in the center ring 2
By adapting the dimensions of the optical window material to the dimensions of commercially available optical window materials, it becomes possible to incorporate any optical window without requiring any special skills.

Further, since the shape change of the center ring 2 and the flange 1 described above requires only a simple design change, it is possible to easily incorporate the conventional quick coupling flange into a production line for mass production.

Although the embodiments of the present invention have been described above, the present invention is not limited to the configurations and conditions described in the embodiments, and various modifications can be made. For example,
In the above embodiment, the KF single crystal is used as the optical window. However, the present invention is not limited to such an optical single crystal, and the transmission light wavelength corresponding to the emission spectrum generated in the optical process as described above. An optical material having a range may be used, and Pyrex or fused quartz may be used as in the related art.

In the above embodiment, the flange 1 is also provided with the O-ring groove 12, but from the viewpoint of vacuum sealing, the O-ring 4 is not necessarily provided on the flange side. In addition, a Teflon sheet or the like may be attached to a portion of the flange 1 where the optical window 3 contacts.

In the above embodiment, the support mechanism for the O-ring 6 in the center ring 2 is shown in FIG.
Although the configuration is the same as that shown in FIG. 6A, the shape may be such that a member having an eaves portion exists outside the O-ring 6 as in the support mechanism shown in FIG.

In the above embodiment, the vacuum device is described as a vacuum manufacturing device for an optical process. However, the present invention is not limited to the vacuum manufacturing device, and a vacuum optical device for housing an optical device or an optical device. It can be used also as a vacuum chamber for use, and the use is not limited.

Further, in the above-described embodiment, the description has been given of the vacuum window frame and the vacuum device. However, the present invention is not limited to the vacuum window frame and the vacuum device in a strict sense. The present invention is also applied to a closed device for performing processing or measurement.

[0045]

According to the present invention, since the center ring of the quick coupling is detachably supported and the center ring of the quick coupling is formed so as to be vacuum-sealed, the optical material of the optical window can be formed with a simple structure. The degree of freedom in selection is greatly increased, and the effective area of the window can be made wider than the conventional quick coupling flange shown in FIG. 5. Application and development are expected.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram showing an attached state of a simple vacuum window frame according to an embodiment of the present invention.

FIG. 2 is an exploded sectional view of the simplified vacuum window frame according to the embodiment of the present invention.

FIG. 3 is a structural explanatory view of a center ring according to the embodiment of the present invention.

FIG. 4 is a structural explanatory view of a flange according to the embodiment of the present invention.

FIG. 5 is an exploded sectional view of a conventional simple vacuum window frame.

FIG. 6 is an exploded sectional view of another conventional simple vacuum window frame.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Flange 2 Center ring 3 Optical window 4 O-ring 5 O-ring 6 O-ring 7 Viewport 8 Clamp member 11 Depression 12 O-ring groove 13 Depression 14 O-ring groove 15 O-ring fitting recess 16 Projection DESCRIPTION OF SYMBOLS 21 Flange 22 Center ring 23 Optical window 24 Optical window support welding member 25 O-ring 26 Viewport 27 Flange 28 Optical window 29 Optical window support welding member 31 Glass flange 32 Center ring 33 O-ring 34 Viewport

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Atsushi Nakajima 3-14-1 Hiyoshi, Kohoku-ku, Yokohama-shi, Kanagawa Prefecture Inside the Faculty of Science and Technology, Keio University (72) Inventor Shinomi Shinkata 3-3-Hiyoshi, Kohoku-ku, Yokohama-shi, Kanagawa Prefecture 14-1 Keio University Faculty of Science and Technology F-term (reference) 3J040 AA02 AA11 AA17 BA02 CA01 HA03 HA09 HA15 HA30 4K030 FA15 KA37 5F045 AA11 EB10 EC03

Claims (4)

[Claims] 1. A simple vacuum window frame using a quick coupling comprising a flange and an O-ring for vacuum-sealing the flange to a viewport, the optical window being inserted into the center ring.
A simple vacuum window frame using a quick coupling, wherein a concave portion for supporting and an O-ring groove for accommodating an O-ring for vacuum-sealing the optical window are provided. 2. A simplified vacuum window frame using a quick coupling according to claim 1, wherein an O-ring groove for accommodating an O-ring that abuts on the optical window is provided on the flange. 3. A simple vacuum window frame using a quick coupling according to claim 1, wherein an optical single crystal is used as the optical window. 4. A vacuum apparatus comprising a simple vacuum window frame using the quick coupling according to claim 1.