JP2002064136A - Cassette for conveying substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cassette for conveying a substrate with which a substrate can be inserted and removed easily without enlarging its dimensions more than necessary and ejection of the substrate can be stopped reliably. SOLUTION: A substrate holding portion 3 is formed between an upper frame and a lower frame 2. A plurality of flange-like shelves 4 are formed at equal intervals in the substrate holding portion 3. A stopper 6 for preventing ejection of a substrate is provided on the front surface side. This stopper 6 for preventing ejection of a substrate is provided with a pawl 7. An end portion on one side of a trigger mechanism 13 having a fulcrum 11 is protruded from the lower frame 2. An end portion on the other side of the trigger mechanism 13 is connected to the stopper 6 for preventing ejection of a substrate via a connecting portion 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transport cassette and, more particularly, to a substrate transport cassette for preventing a substrate from jumping out of the substrate transport cassette when the substrates are transported in a substantially horizontal direction at intervals. It is about.

[0002]

2. Description of the Related Art When a glass substrate such as a liquid crystal substrate is transferred, a substrate transfer cassette is used so that a plurality of glass substrates can be transferred. An example of such a conventional substrate transport cassette will be described. As shown in FIG.
In a conventional substrate transport cassette, a substrate holding unit 103 is fixed between an upper frame 101 and a lower frame 102. A plurality of flange-shaped shelves 106 for mounting the edge of the substrate are formed at equal intervals on the substrate holding unit 103.

[0003] On the back side, a pillar 104 for preventing the board from sliding down.
Is provided. On the front surface side where the substrate is taken in and out, a substrate ejection prevention stopper 105 having claw portions 107 formed at equal intervals in the vertical direction for preventing the substrate from being ejected is fixed. The claw 107 provided on the substrate jump-out prevention stopper 105 is fixed so as to be located slightly above the upper surface of the shelf 106 formed on the substrate holder 103.

Next, a description will be given of the operation of taking in and out a substrate using the above-described substrate transport cassette. First, as shown in FIG. 7, the substrate 108 to be stored by the handler 109 is held substantially horizontally from below. The lower portion (lower end) of the handler 109 is above the claw portion 107 provided on the substrate jump-out prevention stopper 105, and the upper portion (upper end) of the substrate 108 is the lower portion (lower portion) of the shelf 106 provided on the substrate holding portion 103. Adjust the height of the handler 109 to a position below the lower end).

[0005] Then, the handler 109 is moved in the horizontal direction as indicated by an arrow 110, and the glass substrate 108 is inserted into the substrate transport cassette.

Next, as shown in FIG. 8, when the substrate 108 is inserted to a predetermined position, the hand roller 109 stops. Thereafter, the edge of the substrate 108 is placed on the shelf 106 by lowering the hand roller 109. Then, as shown in FIG.
Retract in the direction shown in 2.

As a result, the storing operation of the substrate 108 is completed. By repeating this storing operation, a plurality of substrates 108
Are stored in the respective shelves 106. When taking out the stored substrate 108, the substrate is taken out by performing an operation reverse to the above-described storing operation. Conventional substrate transport cassettes have been used in this manner.

[0008]

However, the above-mentioned conventional substrate transport cassette has the following problems.

The hand roller 10 on which the substrate 108 is placed
When the substrate 9 is moved substantially horizontally to store or unload a substrate, it is necessary to dodge the claw 107 and the shelf 106 of the stopper 105 for preventing the substrate from being ejected, which is fixed to the front side.

As shown in FIG. 7, in this case, for example,
The pitch L1 of the shelf 106 is about 16 mm, the distance L2 between the lower end of the shelf 106 and the upper end of the claw 107 is about 10.5 mm,
The thickness of the substrate 108 is about 0.7 to 1.1 mm. In order to secure the interval L2 so that the substrate 108 does not contact the claw 107 or the shelf 106, the size (height direction) of the substrate storage cassette is eventually changed by the height corresponding to the thickness of the claw 107. I needed to make it bigger.

On the other hand, if it is attempted to reduce the thickness of the claw portion 107 in order to suppress the size of the substrate storage cassette from increasing, there is a problem that the claw portion 107 cannot reliably prevent the substrate 108 from jumping out. Was.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and a substrate can be easily taken in and out without increasing the dimensions more than necessary. It is an object of the present invention to provide a substrate transport cassette capable of reliably preventing the above.

[0013]

SUMMARY OF THE INVENTION A substrate transport cassette according to the present invention includes a storage main body and substrate jump-out preventing means. The storage body stores the plurality of substrates substantially horizontally. The board pop-out prevention means has a claw for preventing the board stored in the storage body from jumping out. The board jump-out preventing means retracts the claw portion downward from a position facing the edge portion of the substrate in the direction of loading and unloading the substrate when loading and unloading the substrate. It has a function of disposing it at a position facing the unit.

According to this structure, first, when the substrate is taken in and out, the claw portion is retracted downward from a predetermined position facing the end of the substrate, so that the size of the substrate transport cassette is made larger than necessary. Therefore, a space is provided for allowing the substrate to be taken in and out without bringing the substrate into contact with the claws and the housing body, and the substrate can be easily taken in and out.
On the other hand, when transporting the substrate, the substrate can be reliably prevented from jumping out by disposing the claw portion at a predetermined position.

Preferably, the means for preventing the board from flying out retreats the claw from a position facing the end to a lower side in conjunction with an operation of placing the storage body on the stage where the substrate is taken in and out. The mechanism includes a mechanism for disposing the claw portion at a position facing the end portion in conjunction with the operation of lifting the storage main body from above.

In this case, by interlocking with the operation of putting the storage main body on the stage portion or the operation of lifting the storage body from the stage portion, the claw portion is retracted from the predetermined opposing position, or is moved to the predetermined opposing position. It can be easily arranged.

Preferably, the means for preventing the substrate from jumping out includes:
Including a lever portion provided on one side of the rotation center and in contact with the stage portion, and a connection portion provided on the other side of the rotation center and connected to the claw portion In.

In this case, when the contact portion comes into contact with the stage portion, the claw portion can be easily retracted downward from a predetermined facing position.

[0019] More preferably, the means for preventing the board from jumping out includes an elastic member for applying a biasing force to the lever portion in such a direction that the claw portion is disposed at a position facing the end portion.

In this case, when the contact portion is in contact with the stage portion, the claw portion is retracted downward from a predetermined facing position, while the contact portion is not in contact with the stage portion. Occasionally, the claws are placed in predetermined opposing positions by the urging force. That is, in a state where the substrate transport cassette is lifted, the claw portions are located at predetermined predetermined opposing positions, so that the substrate can be prevented from jumping out of the storage main body.

[0021]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A substrate transfer cassette according to an embodiment of the present invention will be described. As shown in FIG. 1, a substrate holding unit 3 is fixed between an upper frame 1 and a lower frame 2. A plurality of flange-shaped shelves 4 are formed at equal intervals in the vertical direction (substantially vertical direction) on the substrate holding unit 3. The edge of the substrate is received on the upper surface of each shelf 4 and the substrate is supported from below.

On the back side of the substrate transport cassette, a column 5 for preventing the substrate from slipping is provided between the upper frame 1 and the lower frame 2.
Has been fixed. On the front side of the substrate transport cassette (on the side where substrates are taken in and out), a substrate jumping-out stopper 6 provided with a claw portion 7 is provided. A long hole 6a is provided in the substrate protrusion prevention stopper 6. The substrate protrusion prevention stopper 6 is attached to the substrate holding portion 3 via a screw 17 inserted into the elongated hole 6a so as to be slidable in the vertical direction.

Further, as shown in FIG. 2, the substrate transport cassette is provided with a trigger mechanism 13 as a lever portion for releasing the substrate jump-out prevention stopper 6. The trigger mechanism 13 has a fulcrum 11 as a center of rotation.
The end of the trigger mechanism 13 on one side of the fulcrum 11 projects further below the lower frame 2.

A connection portion 10 is provided at the other end of the trigger mechanism 13 with the fulcrum 11 interposed therebetween, and is connected to the stopper 6 for preventing the board from jumping out. A spring 1 for applying a downward biasing force to one end of the trigger mechanism 13 as shown by an arrow 18 is provided on one side of the trigger mechanism 13 with the fulcrum 11 interposed therebetween.
2 is installed.

Next, the operation of the above-described substrate transport cassette will be described. First, as shown in FIG. 3, when storing or removing a substrate, the substrate transport cassette is placed on the stage 20. By placing the substrate transport cassette on the stage 20, the one end of the trigger mechanism 13 that has protruded below the lower frame 2 is pushed upward as indicated by an arrow 21. And fulcrum 11
, The other end of the trigger mechanism 13 is lowered as shown by the arrow 22.

When the other end of the trigger mechanism 13 is lowered, the board jumping stopper 6 connected to this end and the connecting section 10 slides downward, and is provided on the board jumping stopper 6. The claw portion 7 becomes almost the same height as the shelf portion 4. That is, the claw portion 7 located at the position facing the direction in which the substrate 8 is taken out of the substrate 8 is retracted downward from the position facing the same.

Thus, the size of the cassette for transporting substrates (in the height direction) can be increased without increasing the size of the
The distance (interval) between the lower end of the claw and the upper end of the claw portion 7 can be ensured. As a result, in this state, the substrate 8 is not brought into contact with the claws 7 and the shelf 4 by a hand roller (not shown).
Can be easily stored or taken out.

Next, a case where the accommodated substrate is transported will be described. As shown in FIG. 2, when transporting,
The substrate transfer cassette is lifted from the stage 20. When the substrate transport cassette is lifted from the stage 20, the end of one side of the trigger mechanism 13 is moved by an arrow 1 by the urging force of the spring 12 mounted on the trigger mechanism 13.
It goes down in the direction shown in FIG. On the other hand, the other end of the trigger mechanism 13 rises in the direction shown by the arrow 23.

When the other end of the trigger mechanism 13 rises, the board jumping-out stopper 6 connected to this end and the connection portion 10 via the connection portion 10 slides upward, so that the height is substantially the same as that of the shelf 7. The claw portion 7 is slid from the position (1) to a position at a height opposite to the direction in which the substrate 8 is taken out of the substrate 8. By disposing the claw portion 7 at a position facing the substrate 8 at a predetermined position, it is possible to reliably prevent the substrate 8 from jumping out of the substrate transport cassette during transport.

As described above, according to the present substrate transport cassette, the claw portion 7 of the substrate pop-out prevention stopper 6 is linked with the operation of mounting the substrate transport cassette on the stage, so that the And the distance L2 between the lower end of the shelf 4 and the upper end of the claw 7 can be secured without unnecessarily increasing the dimension (height direction) of the substrate transport cassette. The substrate 8 without contacting the claws 7 and the shelf 4
Can be easily stored or taken out.

On the other hand, the substrate transport cassette is
By interlocking with the lifting operation from above, the claw portion 7 of the substrate jump-out prevention stopper 6 is disposed at a position facing the substrate 8 at a predetermined position, so that the substrate 8 can be reliably prevented from jumping out.

In the substrate transport cassette according to this embodiment, one end of the trigger mechanism 13 projects from the lower frame 2 in a state where the substrate transport cassette is lifted. In addition, as shown in FIG. 4, for example, a trigger mechanism 14 may be employed in which the length of one arm is shortened so that the end does not protrude from the lower frame 2.

In this case, it is preferable that the projection 15 is formed on the stage 20. In particular, FIG.
As shown in FIG. 5, a projection 15 having a size such that one end of the trigger mechanism 14 contacts the projection 15 and is pushed upward when the substrate transport cassette is placed on the stage 20 is formed. It is preferred that

One end of the trigger mechanism 14 has a protrusion 15
3, the claw portion 7 of the substrate jump-out prevention stopper 6 can be positioned at the same height as the shelf portion 4 as in the case shown in FIG. The substrate 8 can be easily taken out without increasing the size. Further, at the time of transport, it is possible to reliably prevent the substrate from flying out.

In the above embodiment, the trigger mechanism 1
Although a spring is given as an example that applies a downward biasing force to one end of 3, the spring is not limited to a spring, and another elastic member may be used.

Further, in the above embodiment, the glass substrate of the liquid crystal display device has been described as an example of the substrate, but the substrate transport cassette is not limited to such a glass substrate.
The present invention can be applied to substrates that are stacked and conveyed at intervals in a substantially horizontal direction.

Further, the values of the dimensions given in this specification are merely examples, and the present invention is not limited to these values.

The embodiments disclosed this time are to be considered in all respects as illustrative and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

[0039]

According to the substrate transport cassette of the present invention, first, at the time of loading and unloading the substrate, the claw portion is retracted downward from a predetermined position facing the end of the substrate, whereby the substrate transport Without making the size of the cassette unnecessarily large, an interval at which the substrate can be taken in and out without making contact with the claw portion or the housing body is secured, and the substrate can be taken in and out easily. On the other hand, when transporting the substrate, the substrate can be reliably prevented from jumping out by disposing the claw portion at a predetermined position.

Preferably, in accordance with the operation of placing the storage body on the stage for loading and unloading the substrate, the means for preventing the substrate from being ejected retreats the claw from the position facing the end to the lower side. Includes a mechanism to place the claw at the position facing the end, in conjunction with the operation of lifting the storage body from, in conjunction with the operation of placing the storage body on the stage or lifting it from the stage , Retract the claw from a predetermined facing position, or
It can be easily arranged at a predetermined opposing position.

Preferably, the means for preventing the substrate from jumping out includes:
Including a lever portion provided on one side of the rotation center and in contact with the stage portion, and a connection portion provided on the other side of the rotation center and connected to the claw portion As a result, the contact portion comes into contact with the stage portion, and the claw portion can be easily retracted downward from a predetermined facing position.

More preferably, the means for preventing the board from jumping out includes an elastic member for applying a biasing force to the lever portion in a direction to dispose the claw portion at a position facing the end portion, so that the contact portion has the stage. When in contact with the part, the claw part is in a state of retreating downward from a predetermined facing position,
On the other hand, when the contact portion is not in contact with the stage,
The claws are placed in predetermined opposing positions by the urging force.

[Brief description of the drawings]

FIG. 1 is a front view of a substrate transport cassette according to an embodiment of the present invention.

FIG. 2 is a side view of the substrate transport cassette for describing an operation of the substrate transport cassette in the embodiment.

FIG. 3 is a side view of the substrate transport cassette for explaining the operation of the substrate transport cassette in the embodiment.

FIG. 4 is a side view for explaining an operation of the substrate transport cassette according to the modification in the embodiment.

FIG. 5 is a side view for explaining an operation of a substrate transport cassette according to a modification in the embodiment.

FIG. 6 is a perspective view of a conventional substrate transport cassette.

FIG. 7 is a first diagram illustrating the operation of a conventional substrate transport cassette.

FIG. 8 is a second diagram for explaining the operation of the conventional substrate transport cassette.

FIG. 9 is a third diagram for explaining the operation of the conventional substrate transport cassette.

[Explanation of symbols]

1 upper frame, 2 lower frame, 3 substrate holder, 4
Shelf, 5 pillars, 6 Board stop prevention stopper, 7
Claws, 8 boards, 13 trigger mechanism, 12 springs, 11
Support point, 10 connection part, 14 trigger mechanism, 15 protrusion.

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Manabu Takahama 22-22, Nagaike-cho, Abeno-ku, Osaka City, Osaka F-term (reference) 3E096 AA06 BA15 CA08 CB03 DA09 DB01 DC02 FA01 5F031 CA05 DA01 EA09 EA19

Claims (4)

[Claims] 1. A storage body for storing a plurality of substrates substantially horizontally, and a board jump-out preventing means having a claw for preventing a board stored in the storage body from jumping out. When the substrate is taken in and out, the claw portion is retracted downward from a position facing an end portion of the substrate in a direction in which the substrate is taken in and out. A substrate transfer cassette having a function of disposing a portion at a position facing the end. 2. The device according to claim 1, wherein said substrate ejection preventing means retracts said claw portion downward from a position facing said end portion in conjunction with an operation of placing said storage body on a stage portion where said substrate is taken in and out. 2. The substrate transport cassette according to claim 1, further comprising a mechanism configured to dispose the claw portion at a position facing the end portion in conjunction with an operation of lifting the storage main body from the stage portion. 3. 3. The device according to claim 1, wherein the substrate jump-out prevention means is provided on one side of the rotation center, and is provided on the other side of the rotation center. 3. The substrate transport cassette according to claim 2, further comprising a lever portion having a connection portion connected to the claw portion. 4. The device according to claim 2, wherein the substrate jump-out preventing means includes an elastic member for applying a biasing force to the lever portion in a direction to dispose the claw portion at a position facing the end portion. Substrate transfer cassette.