JP2002057385A - Laser system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser system capable of oscillating a laser beam having a predetermined optical quality level by stimulating a laser medium gas containing a toxic gas even in a facility in which a temperature management, a humidity management or a dustproof management is not sufficiently executed. SOLUTION: Components necessary to oscillate such as in a laser chamber filled with the laser medium gas containing a fluorine of the toxic gas are housed in a housing 11. A connector 13 for connecting to one of piping for guiding an inner atmosphere in the housing 11 to be forcibly exhausted to a scrubber is formed on an upper surface 11B of the housing 11. The other of the piping is connected to the scrubber for removing the toxic gas. A dustproof means 15 for cleaning (dustproofing) the atmosphere near the housing 1 to guide the atmosphere into the housing 11 is provided oppositely to an inlet 14 formed at a side face 11C of the housing 11.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser device having a housing for housing a device main body.

[0002]

2. Description of the Related Art Conventional gas laser devices include a fluorine (F2) laser device and excimer laser devices such as a krypton fluorine (KrF) excimer laser and an argon fluorine (ArF) excimer laser.

[0003] Such a gas laser device is generally
A laser chamber filled with a laser medium gas, an optical resonator, a discharge (excitation) power supply, and the like are housed in a housing.

A laser medium gas as a laser medium used in the above-described gas laser device will be described.
In an rF excimer laser device, krypton (Kr) as a rare gas and fluorine (F2) as a halogen gas
And helium (He) or neon (N
A laser medium gas composed of a mixed gas with e) is used.

In an ArF excimer laser device, argon (Ar) as a rare gas, fluorine (F2) as a halogen gas, and helium (H) as a diluent gas are used.
e) or a laser medium gas composed of a mixed gas with neon (Ne) is used.

On the other hand, in an F2 laser device, fluorine (F
2) A laser medium gas composed of a mixed gas of helium (He) or neon (Ne) is used.

[0007] Of the gases (gas) contained in these laser medium gases, fluorine (F2) is a toxic gas, and therefore, for example, in a conventional excimer laser apparatus, a laser medium gas containing fluorine (F2) is filled. To prevent fluorine (F2) from leaking out of the laser chamber and gas piping, and further to the outside of the housing, and not to affect the human body.
In many cases, a weak negative pressure is applied to the inside of the housing. That is, by forcibly exhausting the atmosphere in the housing, the pressure in the housing is made lower than the atmospheric pressure outside the housing.

[0008]

Among the conventional gas laser devices such as the above-described excimer laser device and F2 laser device, the gas laser device used as an exposure light source for an exposure device for semiconductor manufacturing (for example, a stepper) is installed in a clean room. It is assumed that it will be installed.

That is, an excimer laser device used as an exposure light source of an exposure device for semiconductor manufacturing is maintained at a predetermined temperature and humidity, such as a clean room, and is arranged in an environment of a relatively clean atmosphere. For this reason,
The laser light that has undergone laser oscillation is guaranteed to have a predetermined optical quality.

Moreover, since the excimer laser apparatus for such an exposure apparatus is presumed to be installed in a clean room as described above, no special apparatus is required for dust prevention measures, temperature and humidity measures. .

However, a high-output excimer laser device used for laser processing or the like is often installed in a facility other than a clean room (for example, a general room).

As described above, in a high-power excimer laser device installed in a facility (eg, a general room) other than a clean room, there is a large possibility that dust such as dust and dirt around the environment is taken into the housing of the laser device. There is a possibility that the dust taken in may cause contamination of the optical element and hinder the securing of electrical insulation.

[0013] Further, in the above-mentioned general room, the temperature and humidity are rarely controlled to be substantially constant as in a clean room. Therefore, in such a high-power excimer laser device installed in such a general room, a high-temperature and high-humidity environment is required. Laser operation (the operation of the laser device) must be carried out, and the optical characteristics of the optical element deteriorate as the inside of the housing becomes hot and humid. The quality will be degraded.

In view of the above, a room other than a general room, that is, a facility other than a clean room, in which temperature control and humidity control are not sufficiently performed and dust control is not performed, and the atmosphere is filled with dust and other dusty atmospheres. However, there has been a demand for a high-power excimer laser device for laser processing that can oscillate a laser beam that guarantees a predetermined optical quality.

However, in reality, such a high-power excimer laser device has not been realized.

Therefore, the present invention provides a method for exchanging laser light having a predetermined optical quality by exciting a laser medium gas containing a toxic gas even in a facility where temperature control, humidity control, or dust control is not sufficiently performed. It is an object to provide a laser device capable of laser oscillation.

[0017]

Means for Solving the Problems, Functions and Effects In order to achieve the above object, according to a first aspect of the present invention, there is provided a pipe for exhausting the atmosphere in the casing to the outside, which has a casing for accommodating the apparatus main body. A laser device in which a connection portion for connection is provided in the housing, the device further comprising dust removing means arranged in the housing.

The laser device according to the first invention is a gas laser device that excites a laser medium gas containing fluorine (F2) and oscillates laser, such as an excimer laser device or an F2 laser device.
The present invention is applied to a laser device, and further includes dust removing means for cleaning air on a housing surface of a housing for housing the device main body or inside the housing.

Such a laser device is installed in a facility where temperature control and humidity control are performed but dust control is not performed, for example, a facility other than a clean room, for example, a laser processing facility.

However, in a laser device, the external atmosphere is cleaned (dust removal) by dust removal means provided on the housing surface.
Then, the atmosphere inside the housing is cleaned by dust removing means provided inside the housing or by dust removing means provided inside the housing.

Therefore, even if the laser device is installed in a facility other than the clean room, for example, where laser processing is performed, the inside of the housing accommodating the laser device main body is
An environment equivalent to a clean room can be maintained.

As described above, according to the first aspect,
Even when the laser device is installed in a facility where dust control is not sufficiently performed, the inside of the housing that houses the laser device main body can be maintained in an environment equivalent to that of a clean room.

Next, according to a second aspect, in the first aspect, the housing is formed in a substantially closed structure.
The dust removing means is disposed on a housing surface of the housing having the substantially hermetic structure, and cleans an inflowing atmosphere and guides the cleaned atmosphere into the housing.

In a third aspect based on the second aspect, the dust removing means comprises a dust removing filter for removing dust, an oil mist filter for removing oil, and / or a moisture removing filter for removing moisture. Wherein the filter removes dust and / or oil and / or moisture from the flowed atmosphere.

Next, the second and third inventions will be described with reference to FIGS.
This will be described with reference to FIG.

In the gas laser apparatus 10 shown in FIG. 1, various components necessary for laser oscillation, such as a laser chamber filled with a laser medium gas containing a toxic gas of fluorine (F2), an optical resonator, and a power supply for discharge, are provided. Are housed in the housing 11.

A connection portion 13 is formed on the upper surface 11B of the housing 11 for connection to one of pipes (not shown) for guiding an atmosphere inside the housing 11 which is forcibly exhausted to a scrubber (not shown). . The other of the pipes is connected to the scrubber for removing toxic gas.

The reason why the forced exhaust is performed is as follows.
This is to prevent a laser medium gas (that is, a toxic gas) from leaking from the laser chamber or the gas pipe into the housing 11 and further out of the housing 11. That is, as a countermeasure against toxic gas leakage, the atmosphere in the housing 11 (atmosphere containing toxic gas) is forcibly exhausted and harmed by the scrubber.

An opening for introducing the atmosphere (air) near the housing 11 is provided below the side surface 11C of the housing 11 so that the atmosphere (air) inside the housing 11 is efficiently discharged. Is formed. Opposite to the inlet 14, the dust removing means 1 removes (cleans) the inflowing air from the general room and guides the air into the housing 11.
5 are provided.

As shown in FIG. 2, which is a cross-sectional view taken along the line AA in FIG. 1, the dust removing means 15 includes a dust-proof filter 15A for removing dust from the air flowing into the general room, and an oil component from the air. And an oil mist filter 15B for removing moisture from the air.

Of course, these filters 15A, 15B, 1
If the function of one or more combinations of the filters in 5C is performed in a general room, the filter (one or more combinations) excluding the filter having the function is provided.
May be used.

When the air in the general room passes through the dust removing means 15, dust is removed from the air by the dustproof filter 15A, the oil is removed from the air removed by the oil mist filter 15B, and the moisture removing filter 15C Removes moisture.

As described above, a clean atmosphere is introduced into the casing 11 by the cleaning (dust removing) function of the dust removing means 15, so that the inside of the casing 11 is maintained in an environment equivalent to a clean room. Laser light oscillated in such an environment is guaranteed to have a predetermined optical quality.

As described above, according to the second aspect,
Even when the laser device is installed in a facility where dust control is not sufficiently performed, the inside of the housing that houses the laser device main body can be maintained in an environment equivalent to that of a clean room.

According to the third aspect of the present invention, the atmosphere outside the housing is reduced by using a dust removing filter for removing dust and / or an oil mist filter for removing oil and / or a moisture removing filter for removing moisture. It can be cleaned (dust removed) and guided inside the housing.

Next, in a fourth aspect based on the first aspect, the dust removing means is arranged inside the housing.

In a fifth aspect based on the fourth aspect, the dust removing means comprises a fan for convection of the atmosphere in the housing, a dust removing filter for removing dust and / or an oil mist filter for removing oil. And / or a filter comprising a moisture removal filter for removing moisture, wherein the filter removes dust and / or oil and / or moisture from the atmosphere supplied by the fan.

FIGS. 3 and 4 show the fourth and fifth aspects of the present invention.
This will be described with reference to FIG.

In the gas laser device 20 shown in FIG. 3, the housing 11 has a structure that does not become a sealed state (a structure in a non-sealed state) even if the light outlet 12 and the connecting portion 13 are temporarily closed.

From the viewpoint of cleaning (removing dust) while circulating the atmosphere in the casing 11, the dust removing means 21 includes a laser device main body (a laser chamber, an optical resonator, a power supply for discharge (excitation), etc.), Is disposed at a predetermined distance from the side surface.

As shown in FIG. 4, the dust removing means 21 comprises a fan 22 with a built-in fan motor and a filter 23. The fan 22 forcibly sends the atmosphere inside the housing 11 to the filter 23. The filter 23 has a function similar to that of the filter as the dust removing means 15 shown in FIG. 2 and includes a dustproof filter 23A, an oil mist filter 23B, and a moisture removing filter 23C.

Of course, these filters 23A, 23B,
If the function of one or more combinations of the filters of 3C is performed in a general room, the filters (one or more combinations) excluding the filters having the functions are provided.
May be used.

In such a dust removing means 21, the fan 22 rotates in a predetermined direction as the fan motor rotates in a predetermined direction, thereby supplying the atmosphere in the housing 11 to the filter 23 and circulating the same. .

In the filter 23, dust is removed from the atmosphere by a dustproof filter 23A, oil is removed from the atmosphere removed by an oil mist filter 23B, and moisture is removed from the atmosphere by a moisture removal filter 23C.

As described above, since the atmosphere inside the housing 11 is cleaned by the cleaning (dust removing) function of the dust removing means 21, the inside of the housing 11 is maintained in the same environment as the clean room.

As described above, according to the fourth aspect,
Even when the laser device is installed in a facility where dust control is not sufficiently performed, the inside of the housing that houses the laser device main body can be maintained in an environment equivalent to that of a clean room.

According to the fifth aspect of the invention, the atmosphere inside the housing is reduced by using a dust filter for removing dust and / or an oil mist filter for removing oil and / or a moisture removal filter for removing moisture. Can be cleaned.

Next, in order to achieve the above-mentioned solution, the sixth
According to the invention, a laser device having a housing for housing the device body, and a connection portion connected to a pipe for exhausting an atmosphere in the housing to the outside is provided in the pipe, and the laser device is disposed in the housing. It is characterized by comprising control means for controlling the temperature and / or humidity in the housing.

In a seventh aspect based on the sixth aspect, the control means as means for controlling the temperature inside the housing is a heat exchanger for adjusting the temperature inside the housing, A fan for supplying an atmosphere in the housing to the heat exchanger.

According to an eighth invention, in the sixth invention, the control means as means for controlling the humidity inside the housing includes a dehumidifier for dehumidifying the inside of the housing. Features.

Next, the sixth to eighth inventions will be described with reference to FIGS.

In the gas laser device 30 shown in FIG. 5, a temperature controller 32 for controlling the temperature inside the housing 11 and a humidity controller 33 for controlling the humidity inside the housing 11 are provided inside the housing 11.
And a temperature / humidity control means 31 composed of

As shown in FIG. 6, the temperature controller 32 comprises a temperature sensor 32A, a fan 32B, a radiator 32C as a heat exchanger, and a controller 32D. On the other hand, as shown in FIG. 7, the humidity control unit 33 includes a humidity sensor 33A, a dehumidifier 33B, and a control unit 33C.

In such a gas laser device 30,
In the temperature controller 32, the temperature sensor 32A detects the temperature inside the housing 11, and sends out a detection signal corresponding to the detected temperature to the controller 32D. The control unit 32D controls driving of the fan motor of the fan 32B based on the received detection signal.

When the fan motor controlled in this way rotates in a predetermined direction, the fan 32B rotates in a predetermined direction and supplies the atmosphere to the radiator 32C. The atmosphere supplied to the radiator 32C is
Cooled by.

The temperature control by the control unit 32D is performed by a combination of the rotation speed of the fan motor, that is, the rotation speed of the fan 32B, the operation time of the fan 32B (ON / OFF switching), the temperature of the cooling water of the radiator 32C, and the flow rate. .

On the other hand, in the humidity control section 33, the humidity sensor 3
3A detects the humidity in the housing 11 and sends out a detection signal corresponding to the detected humidity to the control unit 33C. The control unit 33C controls the dehumidifier 33 based on the received detection signal.
Send an operation command to B. The dehumidifier 33B performs a dehumidification process according to the operation command.

By controlling the temperature and the humidity by the temperature / humidity control means 31 in this manner, the inside of the housing 11 is maintained in an environment equivalent to that of a clean room.

As described above, according to the sixth aspect,
Even when the laser device is installed in a facility where temperature control and / or humidity control is not performed, the inside of the housing that houses the laser device main body can be maintained in an environment equivalent to that of a clean room.

According to the seventh aspect of the present invention, even when a laser device is installed in a facility where temperature control is not performed, the inside of the housing accommodating the laser device main body is equivalent to a clean room. Can be maintained in the environment.

According to the eighth aspect of the present invention, even when a laser device is installed in a facility where humidity control is not performed, the inside of the housing accommodating the laser device main body is equivalent to a clean room. Can be maintained in the environment.

Further, according to a ninth aspect, there is provided a laser device according to any one of the first to eighth aspects, wherein
It is characterized in that the pressure inside the housing for housing the apparatus main body is lower than the atmospheric pressure outside the housing.

In the laser device according to the ninth aspect, as in the gas laser device shown in FIG. 1, FIG. 3, or FIG. A connecting portion 13 for connecting to one of the pipes (not shown) for guiding is formed. The other of the pipes is connected to the scrubber for removing toxic gas.

When functioning to forcibly exhaust gas as a measure against toxic gas leakage, the atmosphere inside the housing 11 is
3 and a scrubber (not shown) through a pipe (not shown), and air in the general room near the housing 11 is introduced into the housing 11 through the dust removing means 15. You.

At this time, the pressure inside the housing 11 is lower than the atmospheric pressure outside the housing 11 (so-called negative pressure).

For this reason, even if the laser medium gas, that is, the F2 gas (toxic gas) leaks from the laser chamber or the gas pipe into the housing 11, the leaked toxic gas is further transferred to the outside of the housing 11. No leakage.

As described above, according to the ninth aspect,
Even if a laser device that excites a laser medium gas containing a toxic gas and oscillates laser is installed in a facility where temperature control, humidity control, or dust control is not sufficiently implemented, the laser device main body is housed. Leakage of toxic gas from the housing can be prevented.

[0068]

Embodiments of the present invention will be described below with reference to the accompanying drawings.

The laser device according to the present invention has a fluorine (F)
A gas laser device that excites a laser medium gas containing 2) and oscillates laser, such as an excimer laser device or an F2 laser device, in which temperature control, humidity control, dust control and the like are not sufficiently performed, such as a laser other than a clean room It is assumed that it is installed in a processing facility (hereinafter referred to as a general room).

FIG. 1 shows a gas laser device 1 according to this embodiment.
0 is a conceptual diagram.

This gas laser device 10 is installed in a general room. In this general room, since the dust-proof treatment is not performed, the atmosphere (air) contains dust (dust that affects the optical quality of laser light).

In the gas laser device 10, components required for laser oscillation, such as a laser chamber filled with a laser medium gas containing toxic gas F2, an optical resonator, and a power source for discharge (excitation), are included in the laser device. It is housed in a housing 11 that houses the main body.

Here, the laser device main body refers to each component necessary for laser oscillation such as a laser chamber, an optical resonator, and a power supply for discharge. In the following description, the atmosphere in a general room is referred to as air.

A light outlet 12 having an opening corresponding to the optical axis of the laser light is formed on the side surface 11A of the housing 11 on the side where the laser light to be laser-oscillated is output (output). The opening of the light outlet 12 is formed in such a size that the laser light passes therethrough.

A connection portion 13 is formed on the upper surface 11B of the housing 11 for connection to one of pipes (not shown) for guiding the atmosphere inside the housing 11 which is forcibly discharged to a scrubber (not shown). ing. The other of the pipes is connected to the scrubber for removing toxic gas.

The reason why the forced exhaust is performed is as follows.
A laser medium gas (that is, a toxic gas) leaks from the laser chamber or the gas pipe into the housing 11, and
This is to prevent leakage to the outside. That is, as a countermeasure against toxic gas leakage, the atmosphere in the housing 11 (atmosphere containing toxic gas) is forcibly exhausted and harmed by the scrubber.

The connecting portion 13 is connected to the upper surface 11 of the housing 11.
Instead of being provided on B, it may be provided on any side surface.

Further, an opening for introducing the atmosphere (air) near the housing 11 is provided below the side surface 11C of the housing 11 so that the atmosphere (air) inside the housing 11 is efficiently discharged. Is formed.

Opposite to the inlet 14, there is provided dust removing means 15 for removing (cleaning) the incoming air in the general room and guiding the air into the housing 11.

As shown in FIG. 2, which is a cross-sectional view taken along the line AA in FIG. 1, the dust removing means 15 includes a dust-proof filter 15A for removing dust from the air flowing into the general chamber, and an oil component from the air. And an oil mist filter 15B for removing moisture from the air.

The housing 11 is closed (or substantially closed) if the inlet 14 before the light outlet 12, the connecting portion 13, and the dust removing means 15 are installed is temporarily closed. It has a structure. Of course, an optical window may be arranged at the light outlet 12.

Next, the operation of the gas laser device 10 having such a configuration will be described.

First, the case where the gas laser device 10 is operated for the first time after being installed in a general room will be described. In this case, since dust is present inside the housing 11 as in the environment of the general room, it is necessary to operate the gas laser device 10 after cleaning the atmosphere inside the housing 11.

Then, when a function of forcibly exhausting gas is provided as a countermeasure against toxic gas leakage, the atmosphere inside the casing 11 is forcibly applied to the scrubber (not shown) via the connecting portion 13 and piping (not shown). The air is exhausted, and the air in the general room near the housing 11 is introduced into the housing 11 through the dust removing means 15. At this time, the pressure inside the housing 11 is lower than the atmospheric pressure outside the housing 11 (so-called negative pressure).

When the air in the general room passes through the dust removing means 15, dust is removed from the air by the dustproof filter 15A, the oil is removed from the air removed by the oil mist filter 15B, and the moisture removing filter 15C Removes moisture.

As described above, a clean atmosphere is introduced into the casing 11 by the cleaning (dust removing) function of the dust removing means 15, so that the inside of the casing 11 is maintained in an environment equivalent to a clean room. Laser light oscillated in such an environment is guaranteed to have a predetermined optical quality.

Since the pressure inside the housing 11 is lower (negative pressure) than the atmospheric pressure outside the housing 11, the air in the general room flows in from the light outlet 12.
However, the light outlet 12 is approximately the same size as the beam cross section of the laser beam, and
That the atmosphere inside is forcibly exhausted,
In consideration of the above, the minute air flowing into the general room from the light outlet 12 is forcibly discharged, and does not affect the optical quality of the laser light oscillated by the laser. When the optical window is provided in the light outlet 12, the air in the general room does not flow into the housing 12 through the light outlet 12.

As described above, the gas laser device 10 is operated in a state where the inside of the housing 11 is filled with a clean atmosphere (that is, an environment equivalent to that in a clean room).
Thus, laser processing can be performed using laser light that is oscillated with a predetermined optical quality.

Further, since the inside of the housing 11 is filled with a clean atmosphere, the optical element can maintain predetermined optical characteristics without being contaminated by dust. Further, electrical insulation inside the laser device main body can be ensured.

Next, operation (operation) of the gas laser device 10
Is temporarily stopped, the cleaning (dust removing) process by the dust removing means 15 is performed in order to fill the inside of the housing 11 with a clean atmosphere. Then, when the operation is restarted after a predetermined period, since the inside of the housing 11 is already filled with a clean atmosphere, it is possible to oscillate the laser light whose predetermined optical quality is guaranteed.

Incidentally, since the laser chamber gas and the gas pipe are filled with the laser medium gas, the laser medium gas, that is, the F2 gas is supplied from the laser chamber or the gas pipe regardless of whether the gas laser device 10 is operating. (Toxic gas) may leak.

Therefore, in the gas laser device 10,
As a countermeasure against toxic gas leakage, the atmosphere in the housing 11 is constantly forcibly exhausted. The forcibly exhausted atmosphere is subjected to the detoxification treatment by the above-described scrubber.

Here, if the laser medium gas, that is, F2
Even if gas (toxic gas) leaks from the laser chamber or gas pipe, the leaked F2 gas (toxic gas)
Will be forcibly exhausted and the scrubber will be subjected to the abatement treatment.

The pressure inside the casing 11 is
Pressure (negative pressure) is lower than the atmospheric pressure outside the gas outlet, so that the leaked F2 gas (toxic gas)
Also, there is no leakage to the outside of the housing 11 via the dust removing means 15.

In this embodiment, the dust removing means 1
As 5, a filter composed of a dustproof filter 15 </ b> A, an oil mist filter 15 </ b> B, and a moisture removal filter 15 </ b> C is used, but the filter is not limited to this, and among these filters 15 </ b> A, 15 </ b> B, 15 </ b> C,
If the function of one or more combinations of filters is implemented in a general room, a filter (one or more combinations) other than a filter having the function may be used.

Although the filter shown in FIG. 2 is used as the dust removing means 15, the present invention is not limited to this, and an electrostatic dust remover may be used.

As described above, according to the present embodiment,
Even when the gas laser device is installed in a general room in an environment where dustproofing control is not performed, for example, a general room such as a laser processing room in a factory, the inside of the housing that houses the laser device main body is equivalent to a clean room. Environment can be maintained.

Therefore, it is difficult to cause performance degradation (for example, degradation of optical characteristics) or failure (for example, failure of components due to degradation of electrical insulation) due to an external environment, and a predetermined operation (operating) period and a maintenance cycle. Can be provided.

[Second Embodiment] The second embodiment is different from the first embodiment in that it is installed in, for example, a general room where laser processing is performed in an environment where dust removal processing is not performed. In common, they differ in that the housing is in an unsealed state.

FIG. 3 shows a conceptual diagram of a gas laser device 20 according to the second embodiment.

The gas laser device 20 has the same structure as the gas laser device 10 shown in FIG. 1, except that the inlet 14 and the dust removing means 15 are omitted, and the dust removing means 21 is added. In FIG. 3, parts performing the same functions as those of the components shown in FIG. 1 are denoted by the same reference numerals.

The housing 11 is provided with the light outlet 12 and the connecting portion 1.
Even if block 3 is temporarily closed, unlike the first embodiment, a structure that does not enter a sealed state (a structure in an unsealed state)
It has become. That is, the housing 11 in this case has a structure similar to that of the housing in a state where the gas laser device is installed in the clean room. This means that a small gap is formed in the housing 11.

From the viewpoint of cleaning (removing dust) while circulating the atmosphere in the casing 11, the dust removing means 21 includes a laser device main body (such as a laser chamber, an optical resonator, and a discharge (excitation) power supply) and a casing. 11 is arranged at a predetermined distance from the side surface.

As shown in FIG. 4, the dust removing means 21 comprises a fan 22 with a built-in fan motor and a filter 23. The fan 22 forcibly sends the atmosphere inside the housing 11 to the filter 23. The filter 23 has a function similar to that of the filter as the dust removing means 15 shown in FIG. 2 and includes a dustproof filter 23A, an oil mist filter 23B, and a moisture removing filter 23C.

The air in the general room flowing into the inside of the housing 11 from the light outlet 12 is forcibly exhausted through the connecting portion 13 and a pipe (not shown). Has no effect. Of course, an optical window may be provided in the light outlet 12 so that air in the general room does not flow into the housing 11 from the light outlet 12.

Next, the operation of the gas laser device 20 having such a configuration will be described.

First, a case where the gas laser device 20 is operated for the first time after being installed in a general room will be described.

In this case, it is necessary to operate the gas laser device 20 after sufficiently cleaning the atmosphere inside the housing 11. Therefore, the forced exhaust function by the scrubber and the cleaning (dust removing) function of the atmosphere by the dust removing means 21 are made to work.

When the forced exhaust function is activated as a countermeasure against toxic gas leakage, the atmosphere inside the housing 11 is forcibly exhausted to the scrubber (not shown) via the connection portion 13 and the piping (not shown). . Due to such forced exhaust, the inside of the housing 11 has a pressure (negative pressure) lower than the atmospheric pressure outside the housing 11.

On the other hand, in the dust removing means 21 having a cleaning function, the fan 22 rotates in a predetermined direction as the fan motor rotates in a predetermined direction, thereby supplying the atmosphere in the housing 11 to the filter 23. And circulate.

In the filter 23, dust is removed from the atmosphere by a dustproof filter 23A, oil is removed from the atmosphere removed by an oil mist filter 23B, and moisture is removed from the atmosphere by a moisture removal filter 23C.

As described above, since the atmosphere in the housing 11 is cleaned by the cleaning (dust removing) function of the dust removing means 21, the inside of the housing 11 is maintained in the same environment as the clean room.

Since the pressure inside the housing 11 is lower than the atmospheric pressure outside the housing 11 (negative pressure), the air in the general room is evacuated to the gap (for example, the housing 11). Gap from the cover)
With respect to the air from the light outlet 12, for the same reason as in the first embodiment, the minute air in the general room that has flowed in from the light outlet 12 is forcibly discharged. It does not affect the optical quality of the laser light. When the light outlet 12 is provided with an optical window, the air in the general room is supplied to the housing 1 through the light outlet 12.
1 does not flow inside.

On the other hand, since the space in the housing 11 is very small, the amount of the atmosphere to be cleaned by the dust removing means 21 is larger than the amount of air flowing into the housing 11 through the small space. Therefore, as a result, there is no influence on the optical quality of the laser light oscillated by the laser.

As described above, the gas laser device 20 is operated in a state where the inside of the housing 11 is filled with a clean atmosphere (that is, an environment equivalent to that in a clean room).
Thus, laser processing can be performed using laser light that is oscillated with a predetermined optical quality.

Since the inside of the housing 11 is filled with a clean atmosphere, the optical element can maintain predetermined optical characteristics without being contaminated by dust. Further, electrical insulation inside the laser device main body can be ensured.

When the operation (operation) of the gas laser device 20 is temporarily stopped, in order to fill the inside of the housing 11 with a clean atmosphere, a cleaning (dust removing) process by the dust removing means 21 is performed. I do. Then, when the operation is restarted after a predetermined period, since the inside of the housing 11 is already filled with a clean atmosphere, laser light having a predetermined optical quality can be oscillated.

Also in the second embodiment, if the laser medium gas, that is, F
Even if 2 gas (toxic gas) leaks, as in the first embodiment, the forced exhaust and the negative pressure in the housing 11 cause the leaked F2 gas The (toxic gas) does not leak out of the housing 11 through the gap between the light outlet 12 and the housing 11.

In the second embodiment, a filter composed of the dustproof filter 23A, the oil mist filter 23B and the moisture removing filter 23C is used as the dust removing means 21, but the present invention is not limited to this. If the function of one or more combinations of these filters 23A, 23B, and 23C is implemented in a general room, the filter (one or more combinations) excluding the filter having the function is used. It may be used.

Although the filter as shown in FIG. 4 is used as the dust removing means 21, the present invention is not limited to this, and an electrostatic dust remover may be used.

As described above, according to the second embodiment, the effects of the first embodiment can be expected.

Further, according to the second embodiment, since a housing having an unsealed structure is sufficient as compared with the first embodiment, the housing can be manufactured easily. In addition, since the housing can be easily manufactured, the manufacturing period can be shortened, and thus the housing can be manufactured (that is, the gas laser device can be manufactured).
Costs, such as labor costs, can be suppressed.

[Third Embodiment] In the third embodiment, it is assumed that a gas laser device is disposed in, for example, a general room for performing laser processing in an environment where temperature and humidity are not controlled.

FIG. 5 is a conceptual diagram of a gas laser device 30 according to the third embodiment.

The gas laser device 30 shown in FIG. 5 is different from the gas laser device 20 of the second embodiment shown in FIG.
Has been added. In FIG. 5, portions performing the same functions as the components shown in FIG. 3 are denoted by the same reference numerals.

The gas laser device 30 is installed in a general room where temperature and humidity are not controlled.

The temperature / humidity control means 31 is disposed inside the housing 11, and includes a temperature control unit 32 for controlling the temperature inside the housing 11, which will be described later, and a humidity control unit for controlling the humidity inside the housing 11. And a humidity control unit 33 that performs the control.

As shown in FIG. 6, the temperature controller 32 comprises a temperature sensor 32A, a fan 32B, a radiator 32C as a heat exchanger, and a controller 32D.

The temperature sensor 32A detects the temperature inside the housing 11, and outputs a detection signal corresponding to the detected temperature to the control unit 32D.
Output to The temperature sensor 32A is disposed near a component whose performance tends to decrease with temperature change (temperature rise) among components such as a laser chamber, an optical resonator, and a power supply for discharge (excitation). .

For example, optical characteristics such as a window of a laser chamber, a mirror of an optical resonator, etc., whose optical characteristics are reduced due to a temperature change (temperature rise) of the atmosphere in the housing 11 or a temperature rise due to absorption of laser light. It is preferable to dispose the temperature sensor 32A in the vicinity.

The fan 32B is a fan with a built-in fan motor. When the fan motor rotates in a predetermined direction under the control of the control unit 32D, the atmosphere in the housing 11 is supplied to the radiator 32C and the atmosphere is reduced. Circulate (convection).

The radiator 32C is a water-cooled radiator, and cools the atmosphere supplied by the fan 32B by flowing cooling water into a water tube (not shown). The flow rate of the cooling water flowing through the water tube (not shown) is adjusted by a flow rate adjustment unit (not shown) that adjusts the flow rate under the control of the control unit 32D.

Based on the detection signal corresponding to the detected temperature from the temperature sensor 32A, the control unit 32D sets the inside of the housing 11 to a predetermined temperature (the same temperature environment as that of a clean atmosphere whose temperature is controlled in a clean room is controlled). ), And controls the fan motor (not shown) of the fan 32B and the flow rate adjusting unit (not shown).

On the other hand, as shown in FIG. 7, the humidity control section 33 comprises a humidity sensor 33A, a dehumidifier 33B and a control section 33C.

The humidity sensor 33A detects the humidity in the housing 11, and outputs a detection signal corresponding to the detected humidity to the control unit 33C.
Output to

The humidity sensor 33A is arranged in the vicinity of a component whose performance tends to decrease with a change in humidity (increase in humidity) among components such as a laser chamber, an optical resonator, and a power supply for discharge. For example, it is preferable to dispose the humidity sensor 33A near a water-absorbing optical element such as a window of a laser chamber or a mirror of an optical resonator.

The dehumidifier 33B performs a dehumidification process in the housing 11 under the control of the control unit 33C.

Based on the detection signal corresponding to the detected humidity from the humidity sensor 33A, the control unit 33C adjusts the inside of the housing 11 to a predetermined humidity (a humidity environment equivalent to a clean atmosphere in a clean room where humidity is controlled). The dehumidifier 33B is controlled.

Next, the operation of the gas laser device 30 having such a configuration will be described.

The function of forcibly exhausting gas as a countermeasure against toxic gas leakage is the same as that of the first or second embodiment, so that the description thereof is omitted here, and the first operation after the gas laser device 30 is installed in the general room. The case in which it is performed will be described.

In this case, since the inside of the housing 11 is hot and humid enough to affect the optical quality of the laser beam, the inside of the housing 11 is controlled by the temperature / humidity control means 31, that is, the temperature control unit 3.
It is necessary to set the environment of predetermined temperature and humidity such that the optical quality can be guaranteed by the second and humidity control units 33.

Therefore, in the temperature control section 32, the temperature sensor 32A detects the temperature inside the housing 11, and sends out a detection signal corresponding to the detected temperature to the control section 32D.

The control section 32D controls the driving of the fan motor of the fan 32B based on the received detection signal. When the fan motor controlled in this way rotates in a predetermined direction, the fan 32B rotates in a predetermined direction and supplies the atmosphere to the radiator 32C.

The temperature control by the control unit 32D determines the rotation speed of the fan motor, that is, the rotation speed of the fan 32B,
2B operation time (ON / OFF switching), radiator 32C
The cooling water temperature and flow rate are combined.

For example, when the temperature inside the housing 11 is low (the amount of generated heat is small), there is no need to cool down so much, so the following control is performed.

(1) The rotation of the fan motor is slowed down. That is, the rotation speed of the fan 32B is reduced.

(2) Fan motor operation stop time (OFF
Time). That is, the rotation stop time (OFF time) of the fan 32B is lengthened.

(3) The radiator 32C
A signal is sent to the effect that the flow rate of the cooling water flowing in the water tube is reduced. That is, the flow rate of the cooling water flowing in the radiator 32C (water tube) is reduced.

The temperature control is performed by any one of the methods (1) to (3) or a combination of a plurality of methods.

On the other hand, when the temperature is high (the amount of generated heat is large), it is necessary to perform cooling surely, so the following control is performed.

(4) Speed up the rotation of the fan motor. That is, the rotation speed of the fan 32B is increased.

(5) The operating time (ON time) of the fan motor is extended. That is, the rotation time of the fan 32B (O
N hours).

(6) The radiator 32C
A signal is sent to the effect that the flow rate of the cooling water flowing in the water tube is increased. That is, the flow rate of the cooling water flowing in the radiator 32C (water tube) is increased.

The temperature control is performed by any one of these methods (4) to (6) or a combination of a plurality of methods.

On the other hand, in the humidity control section 33, the humidity sensor 3
3A detects the humidity in the housing 11 and sends a detection signal corresponding to the detected humidity to the control unit 33C.

The control section 33C sends an operation command to the dehumidifier 33B based on the received detection signal. Dehumidifier 33B
Then, the dehumidification process is performed according to the operation command.

By performing the temperature control and the humidity control by the temperature / humidity control means 31 in this manner, the inside of the housing 11 is maintained in the same environment as the clean room.

As described above, the temperature control and the humidity control are performed, and the inside of the housing 11 is at a predetermined temperature and humidity (that is, an environment having the same temperature and humidity as the clean room). Then, the gas laser device 30 is operated. Thus, laser processing can be performed using laser light that is oscillated with a predetermined optical quality.

Next, operation (operation) of the gas laser device 30
Is temporarily stopped, the temperature / humidity control means 31, that is, the temperature control unit 3 is maintained in order to maintain constant temperature and humidity.
2 and the humidity control unit 33 function. When the operation is restarted after a predetermined period, the housing 1
Since the inside of the device 1 is already maintained at a constant temperature and humidity, a laser beam having a predetermined optical quality can be oscillated.

The operation (operation) of the gas laser device 30
Is stopped and the function of the temperature / humidity control means 31 (the temperature control unit 32 and the humidity control unit 33) is also stopped, the inside of the housing 11 is set to the predetermined temperature and humidity as described above. It is necessary to restart the operation (operation) of the gas laser device 30 later.

However, in consideration of the operation efficiency of the gas laser device 30 and the water absorbing optical element, the temperature / humidity control means 31 (the temperature control unit 32 and the humidity control unit 3
It is preferable that 3) always function.

In the third embodiment, the temperature control unit 32 and the humidity control unit 33 are used as the temperature / humidity control unit 31, but the present invention is not limited to this. May be used.

In the third embodiment, the temperature controller 3
2, the temperature sensor 32A and the control unit 32D are used, but the temperature control unit 32 satisfies the performance (function) of setting the inside of the housing 11 to a required temperature range only by the fan 32B and the radiator 32C. In this case, the temperature sensor 32A and the control unit 32D may not be used for the temperature control unit 32.

Similarly, the humidity controller 33 uses the humidity sensor 33A and the controller 33C.
The humidity control unit 33 controls the housing 11 using only the dehumidifier 33B.
When the performance (function) of setting the inside to a required humidity range is satisfied, the humidity control unit 33 does not need to use the humidity sensor 33A and the control unit 33C.

Furthermore, in the third embodiment, the housing 11 has a non-sealing structure, but may have a sealing structure. However, from the viewpoint of simple manufacture of the housing 11,
It is preferable to use a non-closed structure.

As described above, according to the third embodiment, the case where the gas laser device is installed in a general room in an environment where temperature control and humidity control are not performed, for example, a laser processing room or the like in a factory. Even so, the interior of the housing that houses the laser device body can be maintained in an environment equivalent to a clean room.

Therefore, it is difficult to cause performance degradation (for example, degradation of optical characteristics) or failure (for example, failure of components due to degradation of electrical insulation) due to an external environment, and a predetermined operation (operating) period and a maintenance cycle. Can be provided.

[Fourth Embodiment] In the fourth embodiment, it is assumed that a gas laser device is installed in, for example, a general room for performing laser processing in an environment where temperature control and humidity control are not performed.

The gas laser device according to the fourth embodiment is installed in a general room in which temperature control and dust control are not performed, and the gas laser device 20 according to the third embodiment shown in FIG. In this configuration, the temperature / humidity control means 31 is deleted, and the temperature / dust removal control means 40 is added.

Here, only the temperature / dust removal control means 40 will be described, and the other components perform the same functions as the components shown in FIG. 5, so that the description thereof will be omitted.

The temperature / dust removing control means 40 comprises a temperature sensor 41, a fan 42, a filter 43, a radiator 44, and a control section 45, as shown in FIG.

Temperature sensor 41, fan 42, radiator 4
The control unit 4 and the control unit 45 perform the same functions as the temperature sensor 32A, the fan 32B, the radiator 32C, and the control unit 32D of the temperature control unit 32 in the third embodiment shown in FIG.

The fan 42 has a function of supplying an atmosphere to the filter 43 and the radiator 44.

The temperature control processing in the housing 11 by these components is the same as the temperature control processing by the temperature control unit 32 in the third embodiment.

The filter 43 has the same function as the filter 23 in the second embodiment shown in FIG.
That is, the filter 43 includes a dustproof filter 43A, an oil mist filter 43B, and a moisture removal filter 43C.

Of course, these filters 43A, 43B, 4
If the function of one or more combinations of the filters of 3C is performed in a general room, the filters (one or more combinations) excluding the filters having the functions are provided.
May be used.

The cleaning (dust removing) process by the fan 42 and the filter 43 is performed by the dust removing means 2 of the second embodiment.
1 is the same as the cleaning (dust removing) process.

By performing the cleaning (dust removing) process and the cooling process (temperature management) by the temperature / dust removing control means 40, the inside of the housing 11 is maintained in the same environment as the clean room.

As a result, since the inside of the housing 11 is filled with a clean atmosphere, the optical element can maintain predetermined optical characteristics without being contaminated by dust. Further, electrical insulation inside the laser device main body can be ensured.

In the fourth embodiment, the filter 43 is used as the dust removing means in the temperature / dust removing control means 40. However, the present invention is not limited to this.
An electrostatic dust remover may be used as dust removing means.

As described above, according to the fourth embodiment, the gas laser device is installed in a general room in an environment where temperature control and dustproof control are not performed, for example, a general room such as a laser processing room in a factory. Even so, the interior of the housing that houses the laser device body can be maintained in an environment equivalent to a clean room.

Therefore, it is difficult to cause performance degradation (for example, degradation of optical characteristics) and failure (for example, failure of components due to degradation of electrical insulation) due to an external environment, and a predetermined operation (operating) period and maintenance cycle. Can be provided.

[Fifth Embodiment] In the fifth embodiment, it is assumed that a gas laser device is installed in a general room for performing laser processing in an environment where humidity control and dustproof control are not performed.

The gas laser device according to the fifth embodiment is installed in a general room where humidity control and dust control are not performed, and the gas laser device 20 according to the second embodiment shown in FIG. In this configuration, the dust removing means 21 is deleted, and the humidity / dust removing control means 50 is added.

Here, only the humidity / dust removal control means 50 will be described, and the other components perform the same functions as the components shown in FIG. 3, so that the description thereof will be omitted.

As shown in FIG. 9, the humidity / dust removing control means 50 comprises a fan 51, a filter 52, a humidity sensor 53, a dehumidifier 54, and a controller 55.

The fan 51 and the filter 52 have the same functions as the dust removing means 21, ie, the fan 22 and the filter 23, of the second embodiment shown in FIG.

The cleaning (dust removing) processing of the inside of the housing 11 by these components is the same as the cleaning (dust removing) processing by the dust removing means 21 of the second embodiment.

Humidity sensor 53, dehumidifier 54 and control unit 5
Reference numeral 5 has the same functions as those of the humidity controller 33 of the third embodiment shown in FIG. 7, that is, the temperature sensor 33A, the dehumidifier 33B, and the controller 33C.

The dehumidification processing by these components is performed in the third step.
This is the same as the dehumidification process by the dehumidification control unit 33 of the embodiment.

By performing the cleaning (dust removing) process and the dehumidifying process by the humidity / dust removing control means 50, the inside of the housing 11 is maintained in the same environment as the clean room.

As a result, since the inside of the housing 11 is filled with a clean atmosphere, the optical element can maintain predetermined optical characteristics without being contaminated by dust. Further, electrical insulation inside the laser device main body can be ensured.

In the fifth embodiment, the fan 51 and the filter 52 are used as the dust removing means in the humidity / dust removing control means 50. However, the present invention is not limited to this. A container may be used.

As described above, according to the fifth embodiment, the gas laser device is installed in a general room in an environment where humidity control and dustproof control are not performed, for example, a general room such as a laser processing room in a factory. Even so, the interior of the housing that houses the laser device body can be maintained in an environment equivalent to a clean room.

Therefore, performance degradation (for example, degradation of optical characteristics) and failure (for example, failure of components due to degradation of electrical insulation) due to an external environment are unlikely to occur, and a predetermined operation (operation) period and maintenance cycle Can be provided.

Although the embodiments of the present invention have been described above, in order to solve the problems of the present invention, each means described in each of the above embodiments and the means included in each of the embodiments are set according to the environment in which the gas laser device is installed. You may use each part arbitrarily in combination.

[Brief description of the drawings]

FIG. 1 is a gas laser device 1 according to a first embodiment.
It is a conceptual diagram of 0.

FIG. 2 is a diagram illustrating an example of a dust removing unit according to the first embodiment.

FIG. 3 is a gas laser device 2 according to a second embodiment.
It is a conceptual diagram of 0.

FIG. 4 is a diagram illustrating an example of a dust removing unit according to a second embodiment.

FIG. 5 is a gas laser device 3 according to a third embodiment.
It is a conceptual diagram of 0.

FIG. 6 is a configuration diagram illustrating an example of a temperature controller in a temperature / humidity controller according to a third embodiment.

FIG. 7 is a configuration diagram illustrating an example of a humidity control unit in a temperature / humidity control unit according to a third embodiment.

FIG. 8 is a configuration diagram illustrating an example of a temperature / dustproof control unit used in a gas laser device according to a fourth embodiment.

FIG. 9 is a configuration diagram illustrating an example of humidity / dustproof control means used in a gas laser device according to a fifth embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Case 12 Light extraction port 13 Connection part 14 Inlet 15, 21 Dust removing means 31 Temperature / humidity controlling means 32 Temperature controlling part 33 Humidity controlling part 40 Temperature / dust removing controlling means 50 Humidity / dust removing controlling means

Claims (9)

[Claims] 1. A laser device having a housing for accommodating an apparatus main body, wherein a connection portion connected to a pipe for exhausting an atmosphere in the housing to the outside is provided in the housing, wherein the laser device is disposed in the housing. A laser device provided with a dust removing means. 2. The housing is formed in a substantially hermetic structure, and the dust removing means is disposed on a housing surface of the substantially hermetic structure housing, and cleans an inflowing atmosphere to clean the housing. The laser device according to claim 1, wherein the laser device is guided inside. 3. The filter according to claim 1, wherein said dust removing means comprises a dust removing filter for removing dust, an oil mist filter for removing oil, and / or a water removing filter for removing moisture. 3. The laser device according to claim 2, wherein dust and / or oil and / or moisture is removed from the atmosphere. 4. The laser device according to claim 1, wherein said dust removing means is disposed inside said housing. 5. The dust removing means comprises a fan for convection of the atmosphere in the housing, a dust removing filter for removing dust, an oil mist filter for removing oil, and / or a moisture removing filter for removing moisture. 5. The laser device according to claim 4, further comprising: a filter configured to remove dust and / or oil and / or moisture from an atmosphere supplied by the fan by the filter. 6. A laser device having a housing for accommodating an apparatus main body, wherein a connection portion connected to a pipe for exhausting an atmosphere in the housing to the outside is provided in the housing, and the laser device is disposed in the housing. And a control unit for controlling the temperature and / or humidity in the housing. 7. The control means as means for controlling the temperature inside the housing, a heat exchanger for adjusting the temperature inside the housing, and supplying an atmosphere inside the housing to the heat exchanger. The laser device according to claim 6, further comprising: 8. The laser device according to claim 6, wherein said control means as means for controlling the humidity inside said housing includes a dehumidifier for dehumidifying the inside of said housing. 9. The laser device according to claim 1, wherein a pressure in a housing for housing the device main body is lower than an atmospheric pressure outside the housing. A laser device characterized by the above-mentioned.