JP2002050939A5 - - Google Patents

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Publication number
JP2002050939A5
JP2002050939A5 JP2000235859A JP2000235859A JP2002050939A5 JP 2002050939 A5 JP2002050939 A5 JP 2002050939A5 JP 2000235859 A JP2000235859 A JP 2000235859A JP 2000235859 A JP2000235859 A JP 2000235859A JP 2002050939 A5 JP2002050939 A5 JP 2002050939A5
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JP
Japan
Prior art keywords
film
coating method
surface protective
metal alkoxide
polysilazane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000235859A
Other languages
Japanese (ja)
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JP2002050939A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2000235859A priority Critical patent/JP2002050939A/en
Priority claimed from JP2000235859A external-priority patent/JP2002050939A/en
Publication of JP2002050939A publication Critical patent/JP2002050939A/en
Publication of JP2002050939A5 publication Critical patent/JP2002050939A5/ja
Pending legal-status Critical Current

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Description

本発明の第２の様態は、第１の様態において、前記露出部を被覆する表面保護膜が、ポリシラザンによるコーティング法によって形成されたもの及び金属アルコキシドの縮合膜のいずれかであることを特徴とする圧電振動子にある。 According to a second aspect of the present invention, in the first aspect, the surface protective film covering the exposed portion is either a film formed by a polysilazane coating method or a condensation film of a metal alkoxide. Piezoelectric vibrators.

Claims (1)

前記表面保護膜は、ポリシラザンを用いたコーティング法により形成されたもの及び金属アルコキシドの縮合膜のいずれかであることを特徴とする請求項１記載の圧電振動子。The piezoelectric vibrator according to claim 1, wherein the surface protective film is one of a film formed by a coating method using polysilazane and a condensation film of a metal alkoxide.
JP2000235859A 2000-08-03 2000-08-03 Piezoelectronic vibrator Pending JP2002050939A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000235859A JP2002050939A (en) 2000-08-03 2000-08-03 Piezoelectronic vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000235859A JP2002050939A (en) 2000-08-03 2000-08-03 Piezoelectronic vibrator

Publications (2)

Publication Number Publication Date
JP2002050939A JP2002050939A (en) 2002-02-15
JP2002050939A5 true JP2002050939A5 (en) 2005-05-19

Family

ID=18727999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000235859A Pending JP2002050939A (en) 2000-08-03 2000-08-03 Piezoelectronic vibrator

Country Status (1)

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JP (1) JP2002050939A (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006303761A (en) * 2005-04-19 2006-11-02 Seiko Instruments Inc Surface mount piezoelectric oscillator
JP4690146B2 (en) * 2005-08-26 2011-06-01 セイコーインスツル株式会社 Quartz crystal oscillator, oscillator and electronic equipment
JP5176276B2 (en) * 2006-01-24 2013-04-03 富士電機株式会社 Semiconductor device and manufacturing method thereof
US7867807B2 (en) * 2006-03-29 2011-01-11 Hamamatsu Photonics K.K. Method for manufacturing photoelectric converting device
JP5121493B2 (en) 2008-02-21 2013-01-16 セイコーインスツル株式会社 Method for manufacturing piezoelectric vibrator
JP5101369B2 (en) * 2008-03-31 2012-12-19 京セラクリスタルデバイス株式会社 Piezoelectric device
JP4988799B2 (en) * 2009-09-16 2012-08-01 日本電波工業株式会社 Piezoelectric vibration device and method for manufacturing piezoelectric vibration device
JP5559588B2 (en) * 2010-04-15 2014-07-23 日鉄住金エレクトロデバイス株式会社 Electronic component element storage package
JP5134045B2 (en) * 2010-06-23 2013-01-30 日本電波工業株式会社 Piezoelectric device and manufacturing method thereof
JP5642436B2 (en) * 2010-07-01 2014-12-17 セイコーインスツル株式会社 Electronic device, electronic apparatus, and electronic device manufacturing method
JP5769482B2 (en) * 2011-04-18 2015-08-26 セイコーインスツル株式会社 Manufacturing method of glass sealed package and optical device
JP6056162B2 (en) * 2012-03-12 2017-01-11 三菱マテリアル株式会社 Power module manufacturing method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1032454A (en) * 1996-07-15 1998-02-03 Olympus Optical Co Ltd Micro piezoelectric vibrator
JPH10297931A (en) * 1997-04-24 1998-11-10 Matsushita Electric Ind Co Ltd Production of composite piezoelectric substrate
JP3603571B2 (en) * 1997-11-06 2004-12-22 セイコーエプソン株式会社 Piezoelectric element and method of manufacturing the same
JP3390348B2 (en) * 1998-08-21 2003-03-24 セイコーインスツルメンツ株式会社 Quartz crystal resonator and manufacturing method thereof

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