JP2002050319A - Electrode-less lamp resonator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a compact, light-weight and high-efficiency electrode-less lamp resonator. SOLUTION: The electrode-less lamp resonator comprises a first dielectric 21, a ground conductor arranged on the surface of the first dielectric 21, a signal wire 13 including matching circuit patterns 13C, 13L arranged opposite to the ground conductor 12 on the backside of the first dielectric 21, a second dielectric 22 arranged at the bottom part of the first dielectric 21 through the signal wire 13, a third dielectric 23 arranged at the bottom part of the second dielectric 22, a lamp-containing hole 31 for containing the electrode-less lamp arranged inside the third dielectric 23, and an embedded part 12b extended from an end of the ground conductor 12 up to the vicinity of the lamp-containing hole 31. The first dielectric 21, the ground conductor 12 and the signal wire 13 make up a microstrip line. The embedded part 12b makes up a one-side-open and one-side-grounded λg/4 resonator with the vicinity of the lamp-containing part 31 as an open end and a standard grounding point 12s for the resonator as a grounding end.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-frequency resonator (hereinafter, referred to as "electrodeless lamp resonator") used for an electrodeless lamp suitable for a light source of a lighting device.

[0002]

2. Description of the Related Art Microwave electrodeless lamps are easier to couple electromagnetic energy to an enclosure than electrode discharge lamps, and it is easier to eliminate mercury (Hg) from the enclosure for discharge emission. Has features. Furthermore, since there is no electrode in the discharge space, the inner wall of the bulb is not blackened by electrode evaporation, and the lamp life can be greatly extended. For this reason, use as a light source of a paint curing device, a surface cleaning device, a sterilizing device, a photochemical reaction device, a semiconductor manufacturing device, and the like has recently been promoted. In addition, it has begun to be used for OA equipment such as a projection type image display device, a digital copying machine, a scanner, and a facsimile, and night illumination of a bridge or a building.

[0003] The electrodeless lamp discharges a gas sealed in the electrodeless lamp by applying a predetermined microwave to the plasma. For example, the conventional electrodeless lamp resonator shown in FIG. 14 includes a cavity resonator 85 having a cylindrical wall surrounded by side portions 86 and ends 84 and 87. The electrodeless lamp 93 is located substantially near the center of the cavity resonator 85.

[0004] The magnetron 88 generates microwave energy of 2.45 GHz, which energy is transmitted to a waveguide 89.
To the coupling slot 90 in the cylindrical wall.
The electrodeless lamp 93 is supported by a stem 91, and a motor 92 rotates the electrodeless lamp 93 via the stem 91. On the other hand, the cooling gas is
Sprayed on top. The microwave cavity resonator 85
The frequency of the microwave energy used and the resonance mode determine its geometric dimensions. For example, the _TM010 mode is selected as the resonance mode. Although the height of the cavity resonator 85 is set sufficiently small, FIG.
Requires about 2.69 cm. Cavity resonator 8
The end portion 87 of 5 needs to have a structure for taking out the light emitted from the electrodeless lamp 93 to the outside. For this reason, the end 87 of the cavity resonator 85 transmits light such as ultraviolet light or visible light,
Further, it is constituted by a mesh or a screen having a function of confining microwave energy in the cavity.

[0005]

In the conventional method for supplying microwave energy to an electrodeless lamp resonator as shown in FIG. 14, the shape and the shape of the cavity resonator are taken into consideration in consideration of the frequency (wavelength) of the microwave. The dimensions are determined. For example, 7
Since the free space microwave 00MHz (electromagnetic waves) the wavelength λ ₀ = 428mm, resonant length λ _0/4 = 1
It is conceivable to operate at a higher frequency because it is as long as 07 mm.

However, at a frequency of 2.45 GHz, it becomes necessary to use a cavity resonator having a waveguide structure. For this reason, the cavity resonator having the waveguide structure needs to use a higher frequency microwave. At this stage, it is difficult for a semiconductor device such as a transistor to generate a microwave of 2.45 GHz or more having sufficient energy to discharge the electrodeless lamp 93, and the magnetron 88 is used. The magnetron 88 has a large size, requires a high voltage for operation, and requires a large driving power supply. For this reason, it has been difficult to realize a small and inexpensive electrodeless lamp resonator.

Further, the cavity resonator has a disadvantage that the transmission line and the matching device are also increased in size, and the overall system is further increased in size.

On the other hand, in order to generate strong coupling of microwave energy to the electrodeless lamp, it is preferable that the size of the cavity resonator having the waveguide structure is designed to be considerably small. However, as described above, since the physical dimensions determined by the resonance frequency of the required microwave (λ _0/4) is large, the gap between the dimensions of the cavity resonator of the electrodeless lamp is large, efficient electrodeless lamp It was difficult to emit light from the resonator.

The present invention has been made in view of the above points, and an object of the present invention is to solve the above-mentioned disadvantages of the prior art and to provide a smaller and lighter electrodeless lamp resonator.

Another object of the present invention is to provide an electrodeless lamp resonator having a high coupling efficiency between an electrodeless lamp and an electromagnetic field of a high frequency electromagnetic wave such as a microwave.

It is still another object of the present invention to provide an electrodeless lamp resonator capable of discharging an electrodeless lamp at a lower frequency.

Still another object of the present invention is to provide an electrodeless lamp resonator capable of reducing the size of an electrodeless lamp.

Still another object of the present invention is to provide an electrodeless lamp resonator capable of supplying microwave energy to an electrodeless lamp more efficiently by eliminating a matching device necessary for the operation principle. .

[0014]

In order to achieve the above object, the present invention provides a first dielectric, a ground conductor disposed on a surface of the first dielectric, and a ground conductor on a back surface of the first dielectric. A signal line including a matching circuit pattern disposed opposite to the first dielectric; a second dielectric disposed below the first dielectric via the signal line; a third dielectric disposed below the second dielectric; Lamp housing hole for housing the electrodeless lamp placed inside the body, embedded part extending with a constant line width from one end of the ground conductor to the vicinity of the lamp housing hole, microwave energy supply connected to the signal line That is, an electrodeless lamp resonator comprising means and the like. A microstrip line is composed of the first dielectric, the ground conductor, and the signal line. The “embedded portion” has one end of the ground conductor as a resonator reference ground point, and extends from this resonator reference ground point to the vicinity of the lamp receiving hole with a length that is an effective resonance length of high-frequency electromagnetic waves. When the guide wavelength of the dielectric body and λ _g, this "embedded portion"
Constitutes a one-sided, one-sided grounded λ _g / 4 resonator having an open end near the lamp housing hole and a ground end at the resonator reference ground point. That is, the “effective resonance length” of the present invention is λ _g / 4.

Normally, the microstrip line constituting the power transmission line is designed to have an impedance of about 50Ω, but in practice, the second and third dielectrics and one side open and one side grounded λ _g / 4 In order to form a resonance system with the resonator, the input impedance at the resonance frequency of the entire resonator takes a complex impedance value of R ± jX.
The real part R of the complex input impedance at the resonance frequency is 50
It is very difficult to design around Ω, and it is impossible to make the reactance jX of the imaginary part zero. For this reason, in a general microstrip line, a matching device is externally inserted into the input portion of the resonator, matching is performed with the impedance viewed from the input terminal of the matching device being 50Ω ± 0, and high-frequency power is transmitted efficiently. I have to. However, in the electrodeless lamp resonator, it is not preferable to newly add an external matching device in terms of cost, size, and matching performance. Therefore, in the present invention, by generating a matching circuit on the pattern of the microstrip line itself, it is possible to incorporate a matching circuit at a small size and at low cost, and to make the input impedance of the resonator 50Ω ± 0. I have. As a result, high-frequency power can be efficiently injected into the electrodeless lamp resonator.

The electrodeless lamp includes sodium (Na),
An enclosure made of thallium (Tl), indium (In), or a halide thereof and a rare gas of several kPa is sealed therein. The microwave power to the resonator is supplied from a feed point at one end of the microstrip line sandwiched between the first and second dielectrics having different thicknesses and the dielectric.
A high-frequency transmission line such as a power supply coaxial line, a power supply strip line (strip line), a power supply coplanar waveguide (coplanar waveguide), a power supply waveguide, or the like may be connected to this power supply point.

Since the electrodeless lamp resonator of the present invention uses a λ _g / 4 resonator having one side open and one side short-circuited, the permittivity of the second and third dielectrics between this resonator and the microstrip line is used. By selecting, the effective resonance wavelength λ _g can be shortened, and “effective resonance length (= λ _g / 4)” can be shortened as compared with the cavity resonator. In addition, resonance can be performed at a lower frequency as compared with a cavity resonator. In addition, since the electric field distribution of the λ _g / 4 resonator with one side open and one side grounded becomes strong at the open end, it is possible to more efficiently couple the electric field to the lamp by adopting this structure.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, first to third embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, the drawings are schematic,
It should be noted that the relationship between the thickness and the plane dimension, the ratio of the thickness of each layer, and the like are different from actual ones. Therefore, specific thicknesses and dimensions should be determined in consideration of the following description. In addition, it goes without saying that parts having different dimensional relationships and ratios are included between the drawings.

(First Embodiment) As shown in FIG.
The electrodeless lamp resonator according to the first embodiment of the present invention includes a plate-shaped first dielectric 21, a ground conductor 12 having a high thermal conductivity disposed on the surface of the first dielectric 21, A signal line 13 including matching circuit patterns 13C and 13L disposed on the back surface of the dielectric 21 so as to face the ground conductor 12, and a plate-shaped second disposed below the first dielectric 21 via the signal line 13. A lamp receiving hole 3 for receiving the dielectric 22, a block-shaped third dielectric 23 disposed below the second dielectric 22, and an electrodeless lamp disposed inside the third dielectric 23.
1. L-shaped bent from one end of the ground conductor 12,
And a buried portion 12b extending with a constant line width up to the vicinity of the lamp housing hole 31. A power supply coaxial line 11 is provided at the other end of the ground conductor 12, and one end of the power supply coaxial line 11 is connected to the signal line 13. The first dielectric member 21, the ground conductor 12, and the signal line 13 form a microstrip line. The line width of the signal line 13 is, for example, 2 mm, and the thickness t is, for example, 0.032 mm. On the other hand, the matching circuit pattern 13C
Is wider than the line width of the signal line 13 (= 2 mm), and the line width of the matching circuit pattern 13L is the line width of the signal line 13 (=
2 mm). Matching circuit pattern 13
The thickness of C, 13L is the thickness t (= 0.03) of the signal line 13.
2 mm) or different. However, the same thickness is easier to design and manufacture.

As shown in FIG. 2B, the embedded portion 12
“b” has one end of the ground conductor 12 as a resonator reference ground point 12 s, and extends from the resonator reference ground point 12 s to the vicinity of the lamp housing hole 31 so as to have an effective resonance length of a high-frequency electromagnetic wave. FIG. 2A is a plan view (development view) of the ground conductor 12 of the electrodeless lamp resonator according to the first embodiment of the present invention in an unfolded state, and FIG. FIG. 6 is a partially broken bird's-eye view for explaining a state in which) is bent. FIG.
As shown in (a) and (b), the ground conductor 12, by forming a thick plate thickness T ₁ of the flat surface 12a of the first dielectric 21 can be set low impedance to high frequency. Buried portion 12b extending at a predetermined width from the flat surface 12a is thinner plate thickness than the plate thickness _{T 1} of the flat surface 12a _{T 2}
And bent into an L-shape to be guided into the third dielectric 23. Refraction of this time, bent from the flat surface 12a buried portion 12b, as shown enlarged in FIG. 2 (c), to a differential impedance, the thickness T ₁ of the flat surface 12a On the other hand, the corner is beveled about 1.6 times. The buried portion 12b shown in FIG. 2 has an open end near the lamp housing hole 31 and a resonator reference ground point 12s.
Constitutes a λ _g / 4 resonator with one side open and one side grounded.

As shown in FIG. 2, a through hole 12h is formed on the opposite side of the ground conductor 12 from the resonator reference ground point 12s, which also serves as a ground portion of the feed coaxial line 11 shown in FIG. As shown in FIG. 3B, the feeding coaxial line 11 is provided with a center conductor 64.
And the outer conductor 62 are insulated by a dielectric 63. Further, the periphery of the outer conductor 62 is covered with a jacket 61. FIG. 3A is a top view of the electrodeless lamp resonator according to the first embodiment of the present invention, and FIG.
FIG. 4 is a cross-sectional view along the AA direction in FIG. The signal line 13 of the feed microstrip line immediately below the through hole 12h
Is the feeding point. As shown in FIG.
2, a signal line 13 of a feeding microstrip line having an impedance of 50Ω and a matching circuit pattern 13
C and 13L are sandwiched between the first dielectric 21 and the second dielectric 22 having different thicknesses. The microwave is fed to the feeding point of the microstrip line by the feeding coaxial line 11, and the λ _g / 4 resonator that is open on one side and short-circuited on one side resonates via the second dielectric 22 and the third dielectric 23. I do. A high-frequency power transmission line such as a power supply strip line (strip line), a power supply coplanar waveguide (coplanar waveguide), or a power supply waveguide other than the power supply coaxial line 11 may be connected to the power supply point of the microstrip line.

As an example, a description will be given here assuming that the frequency of the feeding microwave is 800 MHz. First dielectric 21
_{Is set} to ε _r1 = 10 (alumina). Characteristic impedance Z _c standard microstrip line at that time is calculated empirically as in FIG. FIG.
Is calculated for a standard microstrip line structure as shown in FIG. On the entire back surface of the dielectric 82 having a thickness h corresponding to the first dielectric 21,
A ground conductor 81 corresponding to the ground conductor 12 is arranged, and a width W and a thickness t corresponding to the signal line 13 are provided on the surface of the dielectric 82.
The standard microstrip line signal line 83 is running. According to FIG. 6, when the characteristic impedance is 50Ω, the ratio of the line width W of the signal line 13 of the feeding microstrip line to the thickness h of the first dielectric 21, that is, W / h ≒ 1.0, is sufficient. . Actually, there is an influence of the second dielectric 22 and it is necessary to measure and correct it. However, this value can be used as a guide. Referring to FIG. 6, in the electrodeless lamp resonator according to the first embodiment of the present invention, the line width W
= 2.0 mm, and the thickness h of the first dielectric 21 is 2.0 mm.

Next, a one-side open and one-side short circuit λ _g / 4 resonator having a resonance frequency at 800 MHz will be described. 800 MH in free space without using dielectric
The resonance wavelength of the resonator at z is λ _g0 = 37.5.

In the case of the configuration of the electrodeless lamp resonator according to the first embodiment of the present invention shown in FIG. 1, the propagation mode of the electric field and the magnetic field is considered to be the TEM mode, and the effective permittivity ε _eff.
Effective resonant wavelength lambda _g of the inner is shortened (ε _eff) ^1/2 minutes.

Λ _g = λ _g0 / (ε _eff ) ^1/2 (1) It is difficult to accurately calculate the effective dielectric constant ε _eff from the three-dimensional structure of FIG. Therefore, since the relative permittivity ε _r of the dielectric material is substantially the same as the effective permittivity ε _eff , the λ _g / 4 resonator with one side open and one side short-circuited in FIG. Estimate the effective resonance length at 800 MHz (= λ _g / 4).

The relative dielectric constant ε of the third dielectric 23 around the resonator
_Assuming that _r3 is 4.8, one-side open and one-side short-circuit λ _g / 4
The effective resonance length of the resonator at 800 MHz is λ _g /4=(37.5/(4.8) ^1/2 ) /4=4.28 cm (2) When no dielectric is used, the resonance length is 9.38 cm.
Therefore, the effective resonance length is reduced by about 45%.

The first, second and third dielectrics 21 and
Dielectric constant ε of 2,23_r1, Ε_r2, Ε _r3And the first and second
2. Third dielectrics 21, 22, 23 and microstrip
Arbitrary Z by changing the physical dimensions of the track_c, Λ_gTo
Adjustments are also possible.

At the tip of the buried portion 12b of the electrodeless lamp resonator according to the first embodiment of the present invention, a lamp housing hole 31 for burying the electrodeless lamp 32 is provided.
Here, the electrodeless lamp 32 is inserted together with the ceramic holder 33 (see FIG. 3A).

FIG. 4 shows matching circuit patterns 13C and 13L.
An example is shown below. Figure 4 (a), the line width _{W C} of the matching circuit pattern 13C, the line width W = 2 mm of the signal line 13
If it is made wider, it functions as a capacitor as shown in FIG. That it is, as is evident in the relationship between the reactance value and the elements physical dimensions of microstrip line reactance element in FIG. 8, the line width W '= W _C, the signal line 13
If it is wider than the line width W (W '/ W> 1), the capacitance becomes capacitive. On the other hand, FIG. 8 shows that if the line width W ′ is made smaller than the line width W of the signal line 13 (W ′ / W <1), the line becomes inductive. Accordingly, as shown in FIG. 4 (b), the line width W _L of the matching circuit pattern 13L, if narrower than the line width W of the signal line 13, a series of coils (reactance element such as shown in FIG. 4 (d) ). When a reactance element is formed in a microstrip line, as can be seen from FIG. 8, the capacitance is 0 to 3 pF,
About the inductance, about 0 to 4 nH is limited as a reactance value obtained by the microstrip line. Therefore, impedance matching design (examination)
At times, it is important to pay attention to this point and calculate the number and value of each reactance element.

On the basis of FIG. 4, various specific matching circuits can be formed by the combination. For example, a matching circuit pattern as shown in FIG. 5A can be used. The pattern of the matching circuit shown in FIG. 5A has a wide matching range and exhibits LPF (low-pass filter) characteristics, which is convenient for application to the electrodeless lamp resonator of the present invention. The equivalent circuit display of FIG.
(B). Capacitors C ₁ and C ₂ are connected in parallel on both sides of the coil L ₂ at the center in FIG. 5B to form a Π-shaped circuit. 5 to correspond to the coil _{L 2} of (b) is a pattern 13L ₂ of the central portion of FIG. 5 (a). FIG.
FIG. 5 corresponds to the capacitors C ₁ and C ₂ of FIG.
These are the patterns 13C ₁ and 13C ₂ in (a). Further, coils L ₁ and L ₃ are connected in series on both sides of the Π-shaped circuit. The coils L ₁ and L ₃ shown in FIG.
These are the patterns 13L ₁ and 13L ₃ in FIG. FIG.
The circuit shown in (b) is called an "L-Π-L circuit", has a relatively wide matching range, has LPF characteristics, and can reduce unnecessary harmonics.

The physical dimensions of the microstrip line used in the electrodeless lamp resonator according to the first embodiment of the present invention may be determined as follows.

(A) First, an electrodeless lamp resonator is manufactured using a 50Ω microstrip line in which no matching circuit is embedded.

(B) Next, the input impedance as viewed from the coaxial feed point of the microstrip line when the electrodeless lamp 32 is turned on is obtained from a network analyzer or the like.

(C) The values are obtained on the Smith chart of FIG. 9, and the matching values of the respective reactances are plotted and obtained on the assumption of the matching circuit of FIG. FIG. 9 shows a drawing locus of impedance matching when the input impedance at the resonance frequency 800 MHz when the electrodeless lamp 32 is turned on before the matching is 25 + j20Ω and an example of calculation of each reactance value at the time of matching.

(D) From the results shown in FIG. 9, the coil values of 2.0 nH and 2.1 nH and the capacitor values of 2.5 pF and 2.25 pF in the equivalent circuit of FIG. 10 are determined.

(E) From the equivalent circuit of FIG. 10, referring to FIG. 8, the pattern lengths L ₁ and L ₁ shown in FIG.
₂ , L ₃ , L ₄ and the patterns of the line widths W ₁ , W ₂ , W ₃ , W ₄ are determined. However, the values of the pattern lengths L ₁ , L ₂ , L ₃ , L ₄ and the line widths W ₁ , W ₂ , W ₃ , W ₄ indicating the reactance values to be obtained are naturally limited to the values in FIG. It should be noted that the present invention is not limited to this and can be realized by infinite combinations (FIG. 11 is an example). Further, the matching circuit is not limited to FIG.

The electrodeless lamp 32 is a hermetically sealed glass.
Various gases, metals and their compounds as shown below
Emits light when the enclosure consisting of the compound is sealed
You. The substance sealed in the electrodeless lamp 32 depends on the application.
On the other hand, for example, when using visible light, sodium
(Na), thallium (Tl), indium (In),
Scandium (Sc), Thorium (Th), Tin (S
n) or these halides and a rare gas of several kPa
Is sealed. In addition, place using ultraviolet rays
If the lamp outer wall is made of fused quartz (SiO₂), Suff
Wire (Al₂O ₃), Calcium fluoride (Ca
F₂), Magnesium fluoride (MgF₂), Lithi fluoride
Using a material with good transmittance of ultraviolet rays, such as aluminum (LiF)
However, in particular, fused quartz with few metallic impurities can be used.
Suitable for workability. Zinc as the filling
(Zn), cadmium (Cd), selenium (Se), arsenic
(As) or a halide thereof and a rare gas or
Udine (I₂) Gas, hydrogen (H₂) Gas, deuterium (D₂)
Gas, xenon (Xe) gas and the like are suitable. Electrodeless
The length of the lamp will vary depending on the application. Ceramic holder
33 has a reflecting mirror, from which the electrodeless lamp 32
The light is output in a direction opposite to that of the ceramic holder 33.

The tube diameter of the electrodeless lamp 32 is 800 MHz.
In this case, about 13 mm is good, but it can be made smaller by further increasing the frequency. The frequency of the feeding microwave is 800 MHz.
Although not limited to z, a microwave of 300 MHz or more is preferable. Therefore, the high frequency power supply is 300 MH
Various types can be adopted as long as they generate microwaves of z or more. MOSFET, HEM for miniaturization
A transistor power supply using a T, electrostatic dielectric transistor (SIT) or the like is preferable. Or a magnetron (2.45)
GHz). The power of the microwave varies from several hundred W to several kW, depending on the application. One side open,
In a single-sided short-circuited λ _g / 4 resonator, the strongest electric field is generated at the tip of the open end, so the structure of FIG.
An electric field can be coupled to the electrodeless lamp 32.

When the structure of the electrodeless lamp resonator shown in FIGS. 1 to 3 is adopted, if the electrodeless lamp 32 is designed to be small in size to be a point light source, it can be used before and after the electrodeless lamp 32 is turned on. There is also an advantage that the change in the characteristics of the resonator is small.

(Second Embodiment) As shown in FIG. 12, an electrodeless lamp resonator according to a second embodiment of the present invention includes a first dielectric 21 and a surface of the first dielectric 21. , The matching circuit pattern 13C, which is disposed on the back surface of the first dielectric 21 so as to face the ground conductor 12.
13L, a second dielectric 22 disposed below the first dielectric 21 via the signal line 13, a third dielectric 23 disposed below the second dielectric 22, and a third dielectric 21 below the first dielectric 21. Body 2
3 and a buried portion 12b extending with a constant line width from one end of the grounding conductor 12 to the vicinity of the lamp housing hole 31 for housing the electrodeless lamp 32 disposed inside. I have. The first dielectric member 21, the ground conductor 12, and the signal line 13 form a microstrip line. FIG. 12A is a top view of an electrodeless lamp resonator according to the second embodiment of the present invention.
FIG. 12B is a cross-sectional view along the AA direction in FIG. The line width of the matching circuit pattern 13C is wider than the line width of the signal line 13 (= 2 mm), and the line width of the matching circuit pattern 13L is smaller than the line width of the signal line 13 (= 2 mm).

In the electrodeless lamp resonator according to the second embodiment of the present invention, the electrodeless lamp 3 is more efficiently used.
The point that the tip of the buried portion 12b is formed in a ring shape so as to surround the electrodeless lamp 32 in order to couple the electric field to the electrodeless lamp 2 is different from the electrodeless lamp resonator according to the first embodiment of the present invention. Is different. The other parts are common to the electrodeless lamp resonator according to the first embodiment of the present invention, and thus redundant description will be omitted.

The electrodeless lamp resonator according to the second embodiment of the present invention uses a λ _g / 4 resonator with one side open and one side short-circuited like the first embodiment. By selecting the dielectric constants ε _r2 and ε _r3 of the second and third dielectrics between the device and the microstrip line, a substantial λ
_g can be shortened, and the effective resonance length can be shortened as compared with the cavity resonator. In addition, resonance can be performed at a lower frequency as compared with the cavity resonator. In addition, the electric field distribution of the λ _g / 4 resonator with one side open and one side grounded becomes strong at the open end, so that the electric field can be efficiently coupled to the electrodeless lamp 32.

(Third Embodiment) As shown in FIG. 13, an electrodeless lamp resonator according to a third embodiment of the present invention comprises a first dielectric 21 and a surface of the first dielectric 21. , The matching circuit pattern 13C, which is disposed on the back surface of the first dielectric 21 so as to face the ground conductor 12.
13L, a second dielectric 22 disposed below the first dielectric 21 via the signal line 13, a third dielectric 23 disposed below the second dielectric 22, and a third dielectric 21 below the first dielectric 21. Body 2
3 and a buried portion 12b extending with a constant line width from one end of the grounding conductor 12 to the vicinity of the lamp housing hole 31 for housing the electrodeless lamp 32 disposed inside. I have. The first dielectric member 21, the ground conductor 12, and the signal line 13 form a microstrip line. FIG. 13A is a top view of an electrodeless lamp resonator according to the third embodiment of the present invention.
FIG. 13B is a cross-sectional view along the AA direction in FIG. The line width of the matching circuit pattern 13C is wider than the line width of the signal line 13 (= 2 mm), and the line width of the matching circuit pattern 13L is smaller than the line width of the signal line 13 (= 2 mm).

The point that the tip of the buried portion 12b of the electrodeless lamp resonator according to the third embodiment of the present invention is formed in an arc shape so as to wrap around a half circumference of the electrodeless lamp 32 of the present invention. This is different from the electrodeless lamp resonators according to the first and second embodiments. Others are the same as those of the electrodeless lamp resonators according to the first and second embodiments of the present invention, and thus redundant description will be omitted.

The electrodeless lamp resonator according to the third embodiment of the present invention uses a λ _g / 4 resonator having a one-side open circuit and a one-side short circuit similar to the first and second embodiments. , the dielectric constant epsilon _r2 of the second and third dielectric between the resonator and the microstrip _line, by selecting the epsilon _r3, it is possible to shorten the substantial lambda _g, compared to the cavity resonator Thus, the effective resonance length can be shortened. In addition, resonance can be performed at a lower frequency as compared with the cavity resonator. In addition, the electric field distribution of the λ _g / 4 resonator with one side open and one side grounded becomes strong at the open end, so that the electric field can be efficiently coupled to the electrodeless lamp 32.

[0046]

As described above, according to the electrodeless lamp resonator of the present invention, there is provided an electrodeless lamp resonator that is smaller, lighter, and more efficient than one using a conventional cavity resonator. I can do it.

[Brief description of the drawings]

FIG. 1 is a partially broken bird's-eye view of an electrodeless lamp resonator according to a first embodiment of the present invention.

FIG. 2A is a plan view of a grounded conductor 12 of the electrodeless lamp resonator according to the first embodiment of the present invention in a developed state, and FIG. It is a partially broken bird's-eye view for explaining. FIG. 2C is an enlarged view of the refraction portion that transitions from the flat surface to the buried portion.

FIG. 3A is a top view of the electrodeless lamp resonator according to the first embodiment of the present invention, and FIG.
It is sectional drawing which followed the AA direction of (a).

FIG. 4 is a principle diagram showing an equivalent circuit corresponding to a plane pattern of a reactance element formed by a microstrip line.

FIG. 5 is a diagram showing a relationship between a plane pattern of a microstrip line and a corresponding equivalent circuit when a matching device is formed using the principle diagram of FIG. 4;

FIG. 6 shows the signal line W of a standard microstrip line.
FIG. 4 is a diagram showing a relationship between / h and characteristic impedance.

FIG. 7 is a bird's-eye view showing a structure of a standard microstrip line.

FIG. 8 is a diagram illustrating a relationship between a reactance value and a physical dimension of a reactance element for a microstrip line.

FIG. 9 is a diagram in which a matching condition of a matching circuit and a required reactance value are obtained using a Smith chart.

FIG. 10 is a diagram showing an equivalent circuit of a matching circuit and a reactance element value obtained from FIG. 9;

FIG. 11 is a diagram showing physical dimensions when the matching circuit obtained from FIG. 9 is replaced with a microstrip line.

FIG. 12 (a) is a top view of an electrodeless lamp resonator according to a second embodiment of the present invention, and FIG. 12 (b)
FIG. 13 is a cross-sectional view along the AA direction of FIG.

FIG. 13A is a top view of an electrodeless lamp resonator according to a third embodiment of the present invention, and FIG.
FIG. 13 is a cross-sectional view along the AA direction in FIG.

FIG. 14 is a bird's-eye view showing the structure of a conventional electrodeless lamp resonator having a waveguide structure using a magnetron.

[Explanation of symbols]

 REFERENCE SIGNS LIST 11 feed coaxial line 12 ground conductor 12 a flat surface 12 b buried portion 12 s resonator reference ground point 12 h through hole 13 signal line 13 C, 13 L matching circuit pattern 21 first dielectric 22 second dielectric 23 third dielectric 31 lamp housing hole Reference Signs List 32 electrodeless lamp 33 ceramic holder 61 jacket 62 outer conductor 63 dielectric 64 center conductor 81 ground conductor 82 dielectric 83 signal line 84, 87 end 85 cavity resonator 86 side 93 electrodeless lamp

Claims (1)

[Claims] 1. A first dielectric, a ground conductor disposed on a surface of the first dielectric, and a rear surface of the first dielectric opposed to the ground conductor to form a microstrip line. A signal line including a matching circuit pattern; a second dielectric disposed below the first dielectric via the signal line; a third dielectric disposed below the second dielectric; A lamp housing hole for housing an electrodeless lamp disposed inside the third dielectric, an end of the ground conductor being a resonator reference ground point, and an effective resonance length of a high-frequency electromagnetic wave from the resonator reference ground point An electrodeless lamp comprising: a buried portion having a length and extending to a vicinity of the lamp housing hole with a constant line width; and a microwave energy feeding unit connected to the signal line. Resonator.