JP2002048644A - Compact-shape double monochromator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a double monochromator capable of solving the defect that the double monochromator heightens monochromatic performance but requires the floor area of two monochromators, matching an incident slit with the optical path direction of an emergent slit, and maintaining the direction of the incident slit image to the location of the emergent slit. SOLUTION: A center partition wall is provided, and the monochromators of which the optical systems are in parallel with the center partition wall surfaces are each provided on both sides of the center partition wall. The two optical systems of the monochromators are serially maintained via an intermediate slit in the center partition wall.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a double monochromator having a compact shape.
Metor).

[0002]

2. Description of the Related Art A double monochromator in which monochromators are connected in series has been known as one of the techniques for removing stray light from the monochromator and improving monochromatic performance.

However, a double monochromator in which two monochromators are connected has a large external dimension, that is, the size of the optical system is often a problem when arranging the optical system.

[0004] Further, depending on the arrangement and the number of the constituted optical elements in some conventional double monochromators, the optical path in the monochromator changes or the incident slit image must be rotated about the optical axis. was there.

[0005] Changing the optical path makes it difficult to design an optical system arranged on a straight line, and rotation of an image necessitates a change in the direction in which the exit slits are arranged, and as a result, optical adjustment is complicated.

FIG. 4 and FIG. 5 show examples of a conventional double monochromator.

FIG. 4 shows a first monochromator on the right side and a second monochromator on the left side.
Is an entrance slit of the first monochromator, and C is an exit slit of the second monochromator. D, E, and F are a plane mirror, a diffraction grating, a concave mirror, or a parabolic mirror, respectively. In the figure, an optical path from the entrance slit A to the exit slit C via the intermediate slit B is shown.

The optical path of the exit slit C is on the extension of the optical path of the entrance slit A, but the distance between them is doubled and the installation area is doubled.

FIG. 5 shows an example in which the optical path of the entrance slit A and the optical path of the exit slit C are close to each other, but the installation area is doubled.

[0010]

DISCLOSURE OF THE INVENTION The present invention has been made in view of the above points, and has as its object the following:
In order to minimize the layout area of the optical system, keep the linear optical path of the monochromator optical system in one case, incorporate it without bending the linear optical path of the conventional monochromator optical system, and An object of the present invention is to provide a double monochromator having a high monochromatic performance and configured to maintain the direction of the slit image up to the position of the exit slit.

[0011]

In order to solve the above problems, a compact double monochromator according to the present invention is provided.
A variable wavelength motor irradiates a diffraction grating that can reciprocate and oscillate via a concave variable mirror on the incident side through an incident concave mirror that determines the optical path of the incident light, receives its spectral reflected wave by the concave concave mirror on the output side, and reflects the optical path on the output flat mirror. A first monochromator having an entrance slit is provided with two sets of monochromators each including an optical system that generates outgoing light in a direction defined by Is provided with an optical system so that the light path of the emitted light passes through the intermediate slit, and the second monochromator having the output slit is arranged such that the emitted light passing through the intermediate slit is used as the incident light. In the double monochromator that connects the optical paths of the first and second monochromator optical systems in series with each other, The first and second monochromator optical systems are arranged such that the optical paths through the projection-side concave mirror, the diffraction grating, and the emission-side concave mirror to the optical path entrance position of the emission-side flat mirror are all parallel to the central partition wall surface. It is characterized by having.

The optical path entering from the entrance slit of the first monochromator is perpendicular to the central partition wall, and is incident on the entrance side flat mirror of the first monochromator.
The first reflection is performed in the direction parallel to the central partition, and the optical path exiting to the intermediate slit of the first monochromator is changed from the optical path parallel to the intermediate partition to the optical path in the vertical direction by the output side flat mirror of the first monochromator. Perform a second reflection while the second
The optical path entering from the intermediate slit of the monochromator is perpendicular to the central partition, the third reflection is performed in the direction parallel to the central partition by the plane mirror on the entrance side of the second monochromator, and the exit slit of the second monochromator The light path exiting from the light source is subjected to fourth reflection from the light path in the direction parallel to the central partition to the light path in the vertical direction by the plane mirror on the exit side of the second monochromator, and on the extension of the light path entering from the entrance slit of the first monochromator. The optical path from the exit slit of the second monochromator matches.

The reflected light paths in the first and third reflections are parallel to the center partition and perpendicular to the horizontal plane, and the incident light paths in the second and fourth reflections are parallel to the center partition and If the rotation angle when the entrance slit image of the first monochromator is rotated about the optical axis is the direction perpendicular to the horizontal plane and the rotation angle is changed, the rotation of the image at the position of the exit slit of the second monochromator Angle is 0 °
Or 180 °.

Further, the incident side concave mirror and the exit side concave mirror are parabolic mirrors.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS.

FIG. 1 is a structural view of a compact double monochromator 1 of the present invention.

Here, reference numeral 10 denotes a central partition perpendicular to the horizontal plane. B indicates a slit through which an optical path in the central partition wall 10 passes. The central partition 10 is located between the first monochromator and its housing 11 on the left and the second monochromator and its housing 12 on the right. Does not transmit light.

A is an entrance slit of the first monochromator housing 11, and C is an exit slit of the second monochromator housing 12.

[0019] _{D 1in, D 1out} the first monochromator 11 incident side, the exit side plane _{mirror, D 2in,} D
_{Reference numeral 2out} denotes a plane mirror on the entrance and exit sides of the second monochromator 12.

[0020] _{F 1in, F 1out} concave mirror or a parabolic mirror of the first monochromator 11 incident side, the exit side, F
_{2in, F 2out} is a concave mirror or a parabolic mirror of the second monochromator 12 incident side, the exit side.

E ₁ and E ₂ are diffraction gratings of the first and second monochromators 11 and 12.

As shown in FIG. 1, incident light parallel to the horizontal plane and perpendicular to the central partition 10 from the entrance slit A is changed in the optical path in a direction parallel to the central partition 10 by the first reflection by the plane mirror D _{1 in} .

From the exit position of the plane mirror D ₁ in to the entrance side concave mirror F _{1 in} , the first monochromator 11
And the optical path of the optical system of the first monochromator 11 to the incident position of the plane mirror D _1out via the diffraction grating E ₁ and the exit side concave mirror F _1out sequentially reflected through the central partition wall surface 10
Parallel to

The second reflection at the incident position of the plane mirror D _1out is made parallel to the horizontal plane from the outgoing position by the second reflection, and passes through the intermediate slit B of the central partition wall 10 in the vertical direction.
The _transmitted light is used as incident light of the incident side mirror D _{2 in} of the second monochromator 12.

The third reflection by the incident side mirror D _{2 in} causes the optical path to change in a direction parallel to the central partition 10.

The incident-side concave mirror _{F 2in} from the exit position in the plane mirror _{D 2in,} second monochromator 1
All the optical paths of the optical system of the second monochromator 12 to the incident position of the plane mirror D _2out via the _second diffraction grating E ₂ and the exit-side concave mirror F _2out in turn are sequentially reflected.
Parallel to 0.

By the fourth reflection at the incident position of the plane mirror D _2out , it is made parallel to the horizontal plane from its exit position, and passes through the exit slit C of the second monochromator 12 so as to be perpendicular to the central partition 10. .

In this case, the optical path passing through the exit slit C is made to coincide with the extension of the optical path entering from the entrance slit A.

Further, the reflected light paths in the first and third reflections are parallel to the center partition 10 and perpendicular to the horizontal plane, and the incident light paths in the second and fourth reflections are parallel to the center partition 10. And perpendicular to the horizontal plane.

FIG. 2 shows how the optical path proceeds in this state.

Light rays from the optical path enter from the optical path 1 in FIG. 2 and travel in numerical order. Here, the XZ plane is a horizontal plane, and X
The -Y plane is a plane parallel to the central partition plane 10, and the YZ plane is a plane perpendicular to the central partition plane 10.

The optical path 1 is perpendicular to the entrance slit A and X
-Parallel to the Z plane and the YZ plane, that is, perpendicular to the central partition wall surface 10. The optical path 2 is an XZ plane and X
-Parallel to the Y plane, ie perpendicular to the horizontal plane.

The optical paths 3 and 4 are parallel to the XY plane, that is, parallel to the central partition wall surface 10.

The optical path 5 is parallel to the YZ plane and the XY plane, that is, perpendicular to the horizontal plane.

The optical path 6 is parallel to the XZ plane and the YZ plane, that is, passes through the intermediate slit B vertically.

The optical path 7 is parallel to the XY plane and the YZ plane, that is, perpendicular to the horizontal plane.

The optical paths 8 and 9 are parallel to the XY plane, that is, parallel to the central partition wall surface 10.

The optical path 10 is parallel to the XY plane and the YZ plane, that is, perpendicular to the horizontal plane.

The optical path 11 is parallel to the XZ plane and the YZ plane, that is, perpendicular to the central partition wall surface 10;
It exits vertically from the exit slit C.

Here, the optical systems of the first and second monochromators are arranged such that the optical path 11 is on an extension of the optical path 1.

The rectangular mark of the light beam shown in the figure indicates the image direction at the entrance slit A. The state where the entrance slit image is rotated around the optical axis is shown. This incident slit image indicates that the rotation angle of the exit slit image passing through the exit slit C is 0 ° or 180 °.

As described above, in the conventional double monochromator, as shown in FIGS. 4 and 5, the optical paths of the first and second monochromators are arranged in parallel in the direction parallel to the horizontal plane. While the installation area is large,
The double monochromator of the present invention can reduce the installation area by arranging the optical paths of the first and second monochromators on both sides in a direction parallel to the central partition wall surface 10.

Further, the distance between the entrance slit A of the first monochromator casing 11 and the exit slit C of the second monochromator casing 12 can be reduced. It is clear from comparison of the distance between the entrance slit A and the exit slit C in FIG.

Next, FIG. 3 shows a block diagram of the double monochromator control when the first monochromator 11 and the second monochromator 12 are connected in series via the intermediate slit C of the central partition 10.

The light from the entrance slit A is transmitted to the plane mirror D
_1in, enter the diffraction grating _{E 1} through the reflector _{F 1in.} Here, the diffraction grating E ₁ is so as to oscillate at the wavelength variable motor M _1.

The return from the diffraction grating _{E 1} shines spectral reflecting mirror _{F 1out,} plane mirror _{D 1ou t,} intermediate slit B, the plane mirror _{D 2in,} enter the diffraction grating _{E 2} through the reflector _{F 2in.} Here, the diffraction grating E ₂ is so as to oscillate at the wavelength variable motor M _2.

[0047] shines returned from the diffraction grating _{E 2,} further the dispersed light output from the output slit C passing through the reflector _{F 2out,} the plane mirror _{D 2out.}

The controller 13 includes a wavelength variable motor M ₁ ,
Respectively control the operation of the M _2. The control personal computer 14 controls the controller 13 so that the light output from the exit slit C is generated into a predetermined spectrum. The monitor 15 displays the generated spectral waveform.

[0049]

The compact double monochromator of the present invention has the following effects.

By arranging the optical path of the optical system so as to be parallel to the central partition wall surface, the floor area where the optical system is arranged can be significantly reduced in comparison with the related art, despite being a double monochromator.

Further, when the optical system is incorporated into the housing, it is easy to use since the distance between the exit optical path and the exit optical path can be made close to the extension of the incident optical path from the entrance slit.

Further, a double monochromator having a high monochromatic performance designed to maintain the direction of the entrance slit image at the position of the exit slit is provided.

[Brief description of the drawings]

FIG. 1 is a structural diagram of a compact double monochromator of the present invention.

FIG. 2 is an optical path diagram of a compact double monochromator of the present invention.

FIG. 3 is a control block diagram of a double monochromator.

FIG. 4 is a structural diagram of a conventional double monochromator.

FIG. 5 is a structural diagram of a conventional double monochromator.

[Explanation of symbols]

A entrance slit B intermediate slit C exit slit D flat mirror D _1in first incident side plane mirror D _2out of the exit-side planar mirror D _2in the incident side flat mirror D _1out first monochromator monochromator second monochromator Emission plane mirror of second monochromator E Diffraction grating E ₁ Diffraction grating of _first monochromator E ₂ Diffraction grating of second monochromator F Concave or parabolic mirror F ₁ in Incident side of first monochromator Concave mirror or parabolic mirror F _{1out Outgoing} concave mirror or parabolic mirror of first monochromator F _2in Incident side concave mirror or parabolic mirror of second monochromator F _{2out Outgoing} concave mirror of second monochromator or Parabolic mirror 1 Compact-shaped double monochromator 10 Central partition 11 First monochromator or its collection Housing 12 The second monochromator or its housing

Claims (4)

[Claims] 1. An incident-side flat mirror that defines an optical path of incident light irradiates a diffraction grating that can be reciprocally rotated and oscillated by a wavelength-variable motor via an incident-side concave mirror through an incident-side concave mirror. Are arranged on both sides of a central partition wall perpendicular to a horizontal plane having an intermediate slit, and have an entrance slit. The first monochromator is provided with an optical system so that the light path of the outgoing light passes through the intermediate slit, and the second monochromator having the outgoing slit uses the outgoing light passing through the intermediate slit as incident light. A double monochromator that connects the optical paths of first and second monochromator optical systems in series by arranging an optical system at First and second monochromator optical systems such that the optical paths from the reflection position to the optical path incident position of the exit plane mirror via the entrance side concave mirror, diffraction grating, and exit side concave mirror are all parallel to the central partition wall surface. A compact double monochromator characterized by the fact that is arranged. 2. An optical path entering from the entrance slit of the first monochromator is perpendicular to the central partition, and is reflected by the plane mirror on the entrance side of the first monochromator in a direction parallel to the central partition. And the light path exiting to the intermediate slit of the first monochromator makes a second reflection from the light path parallel to the middle partition to the light path perpendicular to the partition wall by the exit plane mirror of the first monochromator, while the second The optical path entering from the intermediate slit of the monochromator is perpendicular to the central partition, and the third reflection is performed in the direction parallel to the central partition by the plane mirror on the incident side of the second monochromator.
The optical path exiting to the exit slit of the monochromator performs the fourth reflection from the optical path parallel to the central partition to the optical path perpendicular to the central partition by the exit-side flat mirror of the second monochromator.
2. A compact double monochromator according to claim 1, wherein the optical path from the exit slit of the second monochromator coincides with the extension of the optical path entering from the entrance slit of the first monochromator. 3. The reflected light paths in the first and third reflections are parallel to a central partition and perpendicular to a horizontal plane, and the incident light paths in the second and fourth reflections are parallel to the central partition and If the rotation angle when the entrance slit image of the first monochromator is rotated about the optical axis is the direction perpendicular to the horizontal plane and the rotation angle is changed, the rotation of the image at the position of the exit slit of the second monochromator 3. The compact double monochromator according to claim 2, wherein the angle is 0 [deg.] Or 180 [deg.]. 4. The input side concave mirror and the output side concave mirror,
4. The compact monochromator according to claim 1, wherein the monochromator is a parabolic mirror.