JP2002043272A5 - - Google Patents
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- Publication number
- JP2002043272A5 JP2002043272A5 JP2000229104A JP2000229104A JP2002043272A5 JP 2002043272 A5 JP2002043272 A5 JP 2002043272A5 JP 2000229104 A JP2000229104 A JP 2000229104A JP 2000229104 A JP2000229104 A JP 2000229104A JP 2002043272 A5 JP2002043272 A5 JP 2002043272A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000229104A JP2002043272A (ja) | 2000-07-28 | 2000-07-28 | 基板洗浄装置及び基板処理装置 |
| US09/915,289 US6616512B2 (en) | 2000-07-28 | 2001-07-27 | Substrate cleaning apparatus and substrate polishing apparatus with substrate cleaning apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000229104A JP2002043272A (ja) | 2000-07-28 | 2000-07-28 | 基板洗浄装置及び基板処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002043272A JP2002043272A (ja) | 2002-02-08 |
| JP2002043272A5 true JP2002043272A5 (sl) | 2005-08-04 |
Family
ID=18722278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000229104A Pending JP2002043272A (ja) | 2000-07-28 | 2000-07-28 | 基板洗浄装置及び基板処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002043272A (sl) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5223091B2 (ja) * | 2006-03-20 | 2013-06-26 | 高橋金属株式会社 | 水系洗浄液を用いる洗浄装置 |
| JP4995669B2 (ja) * | 2007-08-30 | 2012-08-08 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
| JP5133305B2 (ja) * | 2009-08-19 | 2013-01-30 | 信越化学工業株式会社 | 基板の洗浄装置及び洗浄方法 |
| US10471479B2 (en) | 2012-12-28 | 2019-11-12 | SCREEN Holdings Co., Ltd. | Treatment device and exhaust switching device therefor, and exhaust switching unit and switching valve box |
| JP6310752B2 (ja) * | 2014-04-11 | 2018-04-11 | 株式会社ディスコ | 洗浄装置 |
| KR102478902B1 (ko) * | 2016-03-17 | 2022-12-20 | 주성엔지니어링(주) | 기판 처리장치 |
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2000
- 2000-07-28 JP JP2000229104A patent/JP2002043272A/ja active Pending