JP2002043272A5 - - Google Patents
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- Publication number
- JP2002043272A5 JP2002043272A5 JP2000229104A JP2000229104A JP2002043272A5 JP 2002043272 A5 JP2002043272 A5 JP 2002043272A5 JP 2000229104 A JP2000229104 A JP 2000229104A JP 2000229104 A JP2000229104 A JP 2000229104A JP 2002043272 A5 JP2002043272 A5 JP 2002043272A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000229104A JP2002043272A (ja) | 2000-07-28 | 2000-07-28 | 基板洗浄装置及び基板処理装置 |
| US09/915,289 US6616512B2 (en) | 2000-07-28 | 2001-07-27 | Substrate cleaning apparatus and substrate polishing apparatus with substrate cleaning apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000229104A JP2002043272A (ja) | 2000-07-28 | 2000-07-28 | 基板洗浄装置及び基板処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002043272A JP2002043272A (ja) | 2002-02-08 |
| JP2002043272A5 true JP2002043272A5 (https=) | 2005-08-04 |
Family
ID=18722278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000229104A Pending JP2002043272A (ja) | 2000-07-28 | 2000-07-28 | 基板洗浄装置及び基板処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002043272A (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101374609A (zh) * | 2006-03-20 | 2009-02-25 | 高桥金属株式会社 | 应用水类清洗液的清洗装置 |
| JP4995669B2 (ja) * | 2007-08-30 | 2012-08-08 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
| JP5133305B2 (ja) * | 2009-08-19 | 2013-01-30 | 信越化学工業株式会社 | 基板の洗浄装置及び洗浄方法 |
| JP6219848B2 (ja) * | 2012-12-28 | 2017-10-25 | 株式会社Ｓｃｒｅｅｎホールディングス | 処理装置とその排気切換装置並びに排気切換ユニットと切換弁ボックス |
| JP6310752B2 (ja) * | 2014-04-11 | 2018-04-11 | 株式会社ディスコ | 洗浄装置 |
| KR102478902B1 (ko) * | 2016-03-17 | 2022-12-20 | 주성엔지니어링(주) | 기판 처리장치 |
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2000
- 2000-07-28 JP JP2000229104A patent/JP2002043272A/ja active Pending