JP2002042648A - Exposure device and exposure method for forming fluorescent screen of color cathode-ray tube - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an exposure device and method capable of easily, accurately correcting the position and size of a phosphor layer and forming a desired fluorescent screen. SOLUTION: A light source 36 of the exposure device has a mercury arc lamp 42 emitting light to a photosensitive fluorescent screen forming material layer formed on the inner surface of a panel, and the mercury arc lamp 42 generates a discharge arc 44 almost parallel to the inner surface of the panel. An electromagnet 50 for generating a magnetic field almost vertically crossing the discharge arc is installed in the vicinity of the mercury arc lamp, and the electromagnet reversely turns the direction of the magnetic field by synchronizing with the period of polarity change of voltage applied to the mercury arc lamp and displaces the discharge arc to one direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus and an exposure method for forming a fluorescent screen used for forming a fluorescent screen of a color cathode ray tube by a photographic printing method.

[0002]

2. Description of the Related Art Generally, a color cathode ray tube includes a vacuum envelope having a substantially rectangular panel and a funnel, and a dot-shaped three-color phosphor layer and a black non-luminescent layer are formed on the inner surface of an effective portion of the panel. A phosphor screen having a light emitting layer is formed. A shadow mask is arranged inside the vacuum envelope so as to face the phosphor screen. This shadow mask has a mask main body in which a large number of electron beam passage holes are formed, and a mask frame supporting a peripheral portion of the mask main body, and an elastic support attached to the mask frame is provided on a panel. It is detachably supported inside the panel by engaging with the stud pin.

On the other hand, an electron gun that emits three electron beams is arranged in the neck of the funnel. The color cathode ray tube deflects the three electron beams emitted from the electron gun by the deflection yoke mounted outside the funnel, and scans the phosphor screen horizontally and vertically through the electron beam passage holes of the shadow mask. Displays a color image.

In such a color cathode ray tube, in order to display an image without color shift on the phosphor screen, three electron beams passing through the electron beam passage holes of the shadow mask are applied to the corresponding three colors of the phosphor screen. It is necessary to correctly land each of the phosphor layers. For that purpose, when forming the phosphor screen, it is necessary to form each phosphor dot at a predetermined position in a predetermined size.

[0005] Usually, the phosphor screen is formed by a photographic printing method. According to this photo printing method, a photosensitive phosphor screen forming material layer formed of a photosensitive film or a photosensitive phosphor slurry layer applied on the inner surface of the panel is exposed through a shadow mask, and the material layer is exposed to a shadow mask. Then, a pattern corresponding to the electron beam passage holes is printed, and then the material layer is developed to remove unexposed portions. By repeating such exposure, development, and removal steps a plurality of times, a phosphor screen composed of a dot-shaped three-color phosphor layer and a light-shielding layer is formed.

An exposure apparatus for exposing a photosensitive phosphor screen forming material layer as described above generally has a support for supporting a panel on which a photosensitive phosphor screen forming material layer is applied and formed on an inner surface and a shadow mask is mounted. A table and a light source for irradiating the inside of the panel with light via a shadow mask are provided. Between the light source and the panel, an optical lens system for approximating the light emitted from the light source to the trajectory of the electron beam, a correction filter for correcting the light amount distribution on the inner surface of the panel, and the like are arranged. A mercury arc lamp is used as a light source, and a light-shielding plate having a slit for substantially controlling the size of the light source is arranged between the mercury arc lamp and the optical lens system.

In such an exposure apparatus, the position and size of the dot-shaped three-color phosphor layer formed are determined by the light source,
It is governed by the shape and relative position of the optical lens system, correction filter, shadow mask, and panel. And actually, due to design errors and manufacturing errors of each part,
Exposure light mislanding occurs, which affects image quality 3
In some cases, the position and size of the color phosphor layer cannot be accurately formed. In particular, in the peripheral portion of the panel, the deviation of the irradiation angle and the design error are more likely to affect the shape and size of the phosphor dots than in the central portion, and it is often desired to correct exposure light more in the peripheral portion than in the central portion.

In the above exposure apparatus, as a method for correcting the landing position and dot size of the exposure light with respect to the inner surface of the panel, a panel and a shadow mask are fixed, and an optical lens system, a correction filter, a light shielding plate, or a light source is positioned. Adjustment is conceivable. However, the adjustment of the position of the optical lens system, the correction filter, the light-shielding plate, or the light source often requires a long time and requires a large amount of labor, such as a need to reassemble the support.

Japanese Patent Application Laid-Open No. 7-307130 discloses an exposure apparatus that relatively easily corrects the positions and shapes of phosphor dots by moving or deforming a discharge arc of a mercury arc lamp by a magnetic field. An apparatus for performing the above is disclosed.

[0010]

However, a mercury arc lamp used as a light source is usually a sin lamp.
Driven with the wave as the applied voltage, the current direction of the discharge arc changes periodically. Therefore, Japanese Patent Application Laid-Open No. 7-307130
In the exposure apparatus disclosed in the publication, when the discharge arc is moved or deformed by the action of a magnetic field, the direction in which the discharge arc moves also changes periodically.

Therefore, in the above exposure apparatus, it is possible to change the dot shape of the exposure light on the inner surface of the panel or to increase the dot size.
It is difficult to displace the dot landing position only in a predetermined direction, or to control the amount of displacement. Therefore, it is difficult to more accurately correct the position, size, and shape of the formed phosphor dots.

An object of the present invention is to provide an exposure apparatus and an exposure method capable of easily and accurately correcting the position and size of a phosphor layer and forming a desired phosphor screen. Is to provide.

[0013]

In order to achieve the above object, an exposure apparatus according to the present invention has a photosensitive phosphor surface forming material layer formed on the inner surface of a panel and an electron beam passing hole of a shadow mask. In an exposure apparatus for printing a pattern, a mercury arc lamp that is arranged to face the inner surface of the panel with the shadow mask therebetween and generates a discharge arc substantially parallel to the inner surface of the panel, and the mercury arc lamp and the shadow mask. A light-shielding portion having a slit, a magnet that generates a magnetic field that crosses the discharge arc almost vertically, and a magnetic field that synchronizes with the polarity change cycle of the voltage applied to the mercury arc lamp. And a magnetic field reversing unit for reversing the direction.

According to the exposure apparatus of the present invention,
The magnet is constituted by an electromagnet having a core and a coil wound on the core, and the magnetic field reversing unit changes polarity in synchronization with a cycle of polarity change of a voltage applied to the mercury arc lamp. It is characterized by including a current supply unit for supplying a current to the coil.

Another exposure apparatus according to the present invention is an exposure apparatus for printing a pattern corresponding to an electron beam passage hole of a shadow mask on a photosensitive phosphor screen forming material layer formed on an inner surface of a panel. A mercury arc lamp that is disposed opposite to the inner surface of the panel and generates a discharge arc substantially parallel to the inner surface of the panel, and a light shield that has a slit and is disposed between the mercury arc lamp and the shadow mask. Part, a magnet that generates a magnetic field that crosses the discharge arc substantially vertically, and a magnetic field that changes the magnitude of the magnetic field that crosses the discharge arc in synchronization with a period of polarity change of a voltage applied to the mercury arc lamp. And an adjusting unit.

According to the exposure apparatus of the present invention,
The magnetic field adjustment unit includes a moving mechanism that reciprocates the magnet in a direction in which the magnet contacts and separates from the mercury arc lamp.

On the other hand, the exposure method according to the present invention is an exposure method for printing a pattern corresponding to an electron beam passage hole of a shadow mask on a photosensitive phosphor screen forming material layer formed on an inner surface of a panel. Exposure light emitted from a mercury arc lamp that generates a substantially parallel discharge arc is applied to the photosensitive phosphor screen forming material layer through the electron beam passage hole of the shadow mask, and a magnetic field that crosses the discharge arc almost vertically. The displacement direction of the discharge arc is maintained in one direction by generating and displacing the discharge arc and inverting the direction of the magnetic field in synchronization with the cycle of the polarity change of the voltage applied to the mercury arc lamp. The present invention is characterized in that a beam spot of exposure light formed on the photosensitive phosphor surface forming material layer is displaced in one direction.

Another exposure method according to the present invention is directed to an exposure method for printing a pattern corresponding to an electron beam passage hole of a shadow mask on a photosensitive phosphor screen forming material layer formed on an inner surface of the panel. Exposure light emitted from a mercury arc lamp that generates a discharge arc substantially parallel to the inner surface is applied to the photosensitive phosphor screen forming material layer through the electron beam passage hole of the shadow mask, and crosses the discharge arc substantially vertically. A magnetic field is generated to displace the discharge arc, and the magnitude of the magnetic field crossing the discharge arc is changed in synchronization with the cycle of the polarity change of the voltage applied to the mercury arc lamp, thereby displacing the discharge arc. The direction is maintained in one direction, and the beam spot of the exposure light formed on the photosensitive phosphor surface forming material layer is displaced in one direction. It is characterized in.

According to the exposure apparatus and the exposure method configured as described above, the direction of the electric field across the discharge arc is inverted in synchronization with the cycle of the polarity change of the voltage applied to the mercury arc lamp. Alternatively, by changing the magnitude of the electric field crossing the discharge arc in synchronization with the cycle of the polarity change of the voltage applied to the mercury arc lamp, the exposure light beam formed on the photosensitive phosphor surface forming material layer is changed. The spot can be displaced in one direction, the displacement can be controlled, and a phosphor layer having a desired dimension can be formed at a desired position. In addition, a correction optical lens system,
The position and size of the phosphor layer can be easily corrected without adjusting the position of the correction filter, light shielding plate, or light source.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An exposure apparatus according to an embodiment of the present invention will be described below in detail with reference to the drawings.

First, a color cathode ray tube having a phosphor screen formed by the exposure apparatus according to the present embodiment will be described. As shown in FIG. 1, the color cathode ray tube includes a vacuum envelope 10, which has a substantially rectangular panel 1 having a skirt portion 2 on its periphery and a flat outer surface, and a skirt of the panel. And a cylindrical neck 3 connected to the small diameter portion of the funnel.

On the inner surface of the panel 1, there are formed a plurality of dot-shaped phosphor layers which emit red, green and blue light, respectively, and a phosphor screen 6 comprising a light-shielding layer. A deflection yoke 7 having horizontal and vertical deflection coils is mounted on the outer periphery from the neck 3 to the funnel 4. Also,
In the neck 3, an electron gun 9 that emits three electron beams arranged in a line composed of a center beam 8G and a pair of side beams 8R and 8B passing on the same horizontal plane is arranged toward the phosphor layer of the phosphor screen 6. Have been.

In the vacuum envelope 10, a shadow mask 12 is provided so as to face the phosphor screen 6. The shadow mask 12 includes a mask body 20 in which a number of electron beam passage holes 19 for color identification are formed, a rectangular mask frame 14 fixed to a peripheral edge of the mask body,
have. The shadow mask 12 is detachably supported on the panel by engaging an elastic support 15 fixed to the mask frame 14 with a stud pin 17 protruding from the inner surface of the skirt portion 2 of the panel 1. Have been.

The vacuum envelope 10 including the panel 1 is
A tube axis Z extending through the center of the panel and the electron gun 9, a long axis (horizontal axis) X extending perpendicular to the tube axis, a short axis (vertical axis) Y extending perpendicular to the tube axis and the long axis, have.

In the color cathode ray tube having the above structure,
Three electron beams 8B, 8G, 8R emitted from the electron gun 9
Is deflected by a deflection yoke 7 mounted outside the funnel 4, and the phosphor screen 6 is horizontally and vertically scanned through an electron beam passage hole of the shadow mask 12, thereby displaying a color image.

Next, an exposure apparatus for forming a phosphor screen used for forming the phosphor screen of the above-mentioned color cathode ray tube by a photographic printing method will be described in detail. As shown in FIG. 2, the exposure apparatus includes a support 30 for supporting and positioning a panel 1 for forming a vacuum envelope of a color cathode ray tube. The support 30 has a mounting plate 32 extending horizontally, and an opening 33 having a size and shape corresponding to the panel 1 is formed on the mounting plate 32.

The panel 1 is supported and positioned on the mounting plate 32 with its inner surface facing the opening 33. On the inner surface of the panel 1, a photosensitive phosphor screen forming material layer 34 such as a photosensitive film or a photosensitive phosphor slurry layer for forming a phosphor screen is applied in advance. Further, a shadow mask 12 having an electron beam passage hole 19 is mounted on the panel 1 and faces the photosensitive phosphor screen forming material layer.

Further, the exposure apparatus includes a light source unit 36 provided below the mounting plate 32 and irradiating light for exposure toward the inner surface of the panel 1, and a light source unit and the mounting plate are provided between the light source unit and the mounting plate. A light source opening / closing shutter 37, a correction optical lens system 38 for approximating the light emitted from the light source unit to the trajectory of the electron beam, and a correction filter 4 for correcting the light amount distribution on the inner surface of the panel.
0 and the like are sequentially arranged and positioned by the support table 30.

As shown in FIG. 2 and FIG.
Comprises a straight mercury arc lamp 42 as a light source,
This mercury arc lamp is horizontal, that is, the panel 1
Are disposed so as to generate a discharge arc 44 in a direction substantially parallel to the inner surface of the discharge arc. A sine-wave voltage is applied to the mercury arc lamp 42, and the current direction A of the discharge arc 44 is reversed at a predetermined cycle, for example, about 60 Hz. Further, the light source section 36 has a light shielding plate 46 horizontally arranged facing the mercury arc lamp 42, and a slit 48 for substantially controlling the size of the light source is formed in the light shielding plate 46. . The slit 48 extends in a direction orthogonal to the longitudinal direction of the discharge arc 44 of the mercury arc lamp 42.

The exposure light emitted from the mercury arc lamp 42 is supplied to the slit 48 of the light shielding plate 46, the opening / closing shutter 37, the correction optical lens system 38, the correction filter 40, the opening 33, and the electron beam passage hole of the shadow mask 12. Irradiation is performed on the photosensitive phosphor screen forming material layer 34 through the light source 19. At this time, the exposure light passing through each electron beam passage hole 19 lands as a dot-like beam spot having a shape and a size corresponding to the electron beam passage hole on the photosensitive phosphor screen forming material layer 34, The photosensitive phosphor screen forming material layer is exposed. As a result, a pattern corresponding to the electron beam passage holes 19 is projected onto the photosensitive phosphor screen forming material layer 34 and printed.

Further, the light source unit 36 includes an electromagnet 50 that generates a magnetic field that crosses the discharge arc 44 almost vertically as a means for correcting the landing position and the dot shape of the exposure light.
And a current supply unit 52 for supplying a current to the electromagnet 50.
And a moving mechanism 54 for reciprocating the electromagnet in a direction orthogonal to the longitudinal direction of the discharge arc 44.

The electromagnet 50 has a columnar magnetic core 55 and a coil 56 wound around the core. The electromagnet 50 is arranged with its central axis extending horizontally and in a direction perpendicular to the longitudinal direction of the discharge arc 44, and with one end thereof adjacent to and facing the mercury arc lamp 42. Therefore, by flowing a current from the current supply unit 52 to the coil 56, the electromagnet 50 generates a magnetic field M that vertically crosses the discharge arc 44.

As shown in FIG. 3A, the discharge arc 44
When the current direction A is a direction flowing from left to right, this discharge arc moves in the direction B toward the panel 1 according to Fleming's law due to the action of the magnetic field M. The direction of the current supplied to the electromagnet 50 is reversed, and the generated magnetic field M
Is reversed, the discharge arc 44 is also reversed in the direction opposite to the moving direction B. As shown in FIG. 3B, when the discharge arc 44 moves in the panel direction, the beam spot C of the exposure light formed on the photosensitive phosphor screen forming material layer 34 moves outward of the panel 1, Conversely, when the discharge arc 44 moves away from the panel, the beam spot C of the exposure light moves inward of the panel.

The mercury arc lamp 42 has a sin
Since the wave voltage is applied, the current direction A of the discharge arc 44 changes in the opposite direction at a predetermined cycle. Therefore, when the direction of the magnetic field M generated from the electromagnet 50 is constant, the moving direction of the discharge arc 44 changes in the same cycle as the change in the current direction A, and the discharge arc moves up and down within a certain range. Therefore, the beam spot C of the exposure light formed on the photosensitive phosphor screen forming material layer 34 also oscillates within a certain range according to the magnitude of the magnetic field M, and any one of the inward and outward directions of the panel 1 is obtained. It cannot be moved only in the direction.

Therefore, according to the present embodiment, the power supply unit 52 functioning as the magnetic field reversing unit synchronizes the coil 56 of the electromagnet 50 with the cycle of the polarity change of the voltage applied to the mercury arc lamp 42. To supply a current whose polarity changes. Therefore, the discharge arc 44
The direction of the magnetic field M acting on the discharge arc is inverted in synchronization with the change in the current direction A of the discharge arc, and the moving direction of the discharge arc can be controlled in the panel direction or in the direction away from the panel. Thereby, the beam spot C of the exposure light formed on the photosensitive phosphor screen forming material layer 34 can be moved only in one of the inner and outer directions of the panel 1 and simultaneously supplied to the coil 56. The amount of movement of the beam spot C can be controlled by adjusting the magnitude of the current flowing.

Further, according to the present embodiment, the moving mechanism 54 functioning as a magnetic field adjusting unit reciprocates the electromagnet 50 in a direction orthogonal to the longitudinal direction of the discharge arc 44. Is configured to reciprocate the electromagnet in synchronization with a period of the polarity change of the voltage applied to the electromagnet.

That is, the magnetic field M generated from the electromagnet 50
When the current direction A of the discharge arc 44 is a direction in which the discharge arc moves in the direction of the panel due to the action of the magnetic field M, the moving mechanism 54 sets the electromagnet 50
Is moved in a direction approaching the discharge arc 44 to increase the magnetic field M acting on the discharge arc. The discharge arc 44
When the current direction is reversed, the moving mechanism 54 moves the electromagnet 50 in a direction away from the discharge arc 44 to weaken the magnetic field M acting on the discharge arc. As a result, the beam spot C landing on the peripheral portion of the inner surface of the panel has a larger displacement amount in the outward direction than the beam spot landing on the central portion of the inner surface of the panel. At the same time, the movement of the beam spot C in the inward direction of the panel is restricted, and as a result, the formed phosphor dots can be moved only in the outward direction of the panel.

Further, by making the reciprocating movement cycle of the electromagnet 50 by the moving mechanism 54 opposite to the above, the formed phosphor dots can be moved inward of the panel.

According to the exposure apparatus configured as described above, by supplying a current whose polarity changes in synchronization with the cycle of the polarity change of the voltage applied to the mercury arc lamp 42 to the electromagnet 50, The spot can be moved by a fixed amount while keeping the movement amount constant. Increasing the size according to the amount of movement of the spot by reciprocating the electromagnet 50 in the direction of coming and going with respect to the mercury arc lamp in synchronization with the cycle of the polarity change of the voltage applied to the mercury arc lamp 42. Can be. Also, by simultaneously performing the periodic change of the direction of the magnetic field by the current supply unit and the reciprocating movement of the electromagnet by the moving mechanism, the amount of change in the position and size of the phosphor dots formed on the inner surface of the panel is controlled. It is possible to form phosphor dots of desired dimensions at desired positions.

In the above embodiment, the electromagnet 5
0 is provided only on one side of the mercury arc lamp 42. However, as in the second embodiment shown in FIG. 4, two mercury arc lamps are sandwiched between the N pole and the S pole. The two electromagnets 50 may be arranged horizontally. In this case, by supplying a current whose polarity changes in synchronization with the polarity change cycle of the voltage applied to the mercury arc lamp 42 from the current supply unit 52 to each electromagnet 50, or by using the moving mechanism 54 respectively. Mercury arc lamp 4
By reciprocating the two electromagnets 50 in the direction of coming and going with respect to the mercury arc lamp in synchronization with the period of the polarity change of the voltage applied to 2, the same operation and effect as in the above-described embodiment can be obtained. it can.

As shown in FIG. 5, according to the light source unit 36 of the exposure apparatus according to the third embodiment of the present invention, an elongated rod-shaped permanent magnet 60 is provided instead of the electromagnet.
The permanent magnet 60 is disposed below the mercury arc lamp 42 in a direction perpendicular to the discharge arc 44 and parallel to the inner surface of the panel 1 supported by the support 30, that is, along the horizontal direction. . The moving mechanism 54 is configured to reciprocate the permanent magnet 60 in a direction perpendicular to the inner surface of the panel, that is, in a direction parallel to the tube axis of the panel 1.

In the exposure apparatus configured as described above, the moving mechanism 54 allows the permanent magnet 60 to synchronize with the polarity change cycle of the voltage applied to the mercury arc lamp 42.
Is reciprocated in the direction in which it comes into contact with and separates from the mercury arc lamp, it is possible to obtain the same operational effects as in the above-described first embodiment.

Further, in the third embodiment, the permanent magnet 60 is disposed so as to be rotatable around an axis parallel to the tube axis of the panel, and the rotation mechanism controls the voltage applied to the mercury arc lamp 42. 180 permanent magnets synchronized with the polarity change cycle
It may be configured to rotate by degrees. In this case, the direction of the magnetic field M can be reversed in synchronization with the cycle of the change in the current direction of the discharge arc, and the same operation and effect as described above can be obtained.

As shown in FIG. 6, according to the light source unit 36 of the exposure apparatus according to the fourth embodiment of the present invention, the electromagnet 5
0 is a direction whose central axis is orthogonal to the inner surface of the panel supported by the support base, that is, extends in the tube axis direction of the panel, and extends in the direction orthogonal to the longitudinal direction of the discharge arc 44;
In addition, one end is arranged adjacent to and facing the mercury arc lamp 42. Then, by passing a current from the current supply unit 52 to the coil 56, the electromagnet 50 generates a magnetic field M that vertically crosses the discharge arc 44.

As shown in FIG. 6 (a), when the current direction A of the mercury arc lamp 44 is a direction flowing from left to right, the discharge arc 44 causes the inner surface of the panel according to Fleming's law due to the action of the magnetic field M. Move in the direction B parallel to. When the direction of the current supplied to the electromagnet 50 is reversed and the direction of the generated magnetic field M is reversed, the discharge arc 44 also moves in the direction opposite to the moving direction B.

The power supply section 52 of the light source section 36 supplies the coil 56 of the electromagnet 50 with a current whose polarity changes in synchronization with the polarity change cycle of the voltage applied to the mercury arc lamp 42. Is configured. for that reason,
As shown in FIG. 6B, the beam spot C of the exposure light formed on the photosensitive phosphor screen forming material layer can be moved only in one of the inner and outer directions of the panel 1, At the same time, the amount of movement of the beam spot C can be controlled by adjusting the magnitude of the current supplied to the coil 56.

Further, the moving mechanism 54 of the light source unit 36 moves the electromagnet 50 in a direction orthogonal to the longitudinal direction of the discharge arc 44, in particular, in a panel, in synchronization with the cycle of the polarity change of the voltage applied to the mercury arc lamp 42. It is configured to reciprocate along the tube axis direction. Therefore, the discharge arc 4
The intensity of the magnetic field acting on the light-emitting surface 4 changes with the change in the distance between the mercury arc lamp and the electromagnet 50, and the beam spot C of the exposure light formed on the light-emitting phosphor screen forming material layer is formed inside the panel 1. The beam spot C can be moved only in one of the directions and the outward direction, and at the same time, the movement amount of the beam spot C can be controlled.

Therefore, in the fourth embodiment, similarly to the first embodiment, the position and size of the phosphor dot can be adjusted without adjusting the position of the correction optical lens system, the correction filter, the light shielding plate, or the light source. Can be easily corrected, and a color cathode ray tube with improved display characteristics can be provided. In the fourth embodiment, the electromagnet 5
A permanent magnet may be used instead of zero. In this case, the permanent magnet is rotated by 180 degrees in synchronization with the cycle of the polarity change of the voltage applied to the mercury arc lamp 42 by the rotating mechanism functioning as the electric field reversing unit, thereby changing the current direction of the discharge arc. May be configured to invert the direction of the magnetic field M in synchronization with the cycle of.

In the second to fourth embodiments described above, the other configuration is the same as that of the first embodiment, and a detailed description thereof will be omitted.

[0050]

As described above, according to the present invention, the position and size of the phosphor layer can be easily and easily adjusted without adjusting the position of the correction optical lens system, the correction filter, the light shielding plate, or the light source. It is possible to provide an exposure apparatus and an exposure method that can accurately correct and form a desired phosphor screen.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a color cathode ray tube.

FIG. 2 is a sectional view showing an exposure apparatus according to the first embodiment of the present invention.

FIG. 3 is a perspective view showing a light source unit of the exposure apparatus, and a plan view schematically showing a beam spot formed on an inner surface of the panel.

FIG. 4 is a view schematically showing a main part of a light source unit in an exposure apparatus according to a second embodiment of the present invention.

FIG. 5 is a perspective view schematically showing a light source unit of an exposure apparatus according to a third embodiment of the present invention.

FIG. 6 is a perspective view schematically showing a light source unit of an exposure apparatus according to a fourth embodiment of the present invention, and a plan view schematically showing a beam spot formed on an inner surface of a panel.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Panel 3 ... Neck 4 ... Funnel 6 ... Phosphor screen 9 ... Electron gun 10 ... Vacuum envelope 12 ... Shadow mask 19 ... Electron beam passage hole 30 ... Support base 36 ... Light source part 38 ... Correction optical lens system 40 ... Correction filter 42 Mercury arc lamp 44 Discharge arc 46 Light shielding plate 48 Slit 50 Electromagnet 52 Current supply unit 54 Moving mechanism

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Koichi Soneda 1-9-2 Harara-cho, Fukaya-shi, Saitama Pref. Toshiba Fukaya Plant Co., Ltd. (72) Inventor Hiroaki Ibuki 1-9-9, Harara-cho, Fukaya-shi, Saitama No. 2 F-term in Toshiba Fukaya Plant (reference) 5C028 GG02 GG06

Claims (8)

[Claims] 1. An exposure apparatus for printing a pattern corresponding to an electron beam passage hole of a shadow mask on a photosensitive phosphor screen forming material layer formed on an inner surface of a panel, wherein the exposure device faces the panel inner surface with the shadow mask interposed therebetween. A mercury arc lamp that generates a discharge arc substantially parallel to the inner surface of the panel and is disposed between the mercury arc lamp and the shadow mask and has a light-shielding portion having a slit; An exposure, comprising: a magnet that generates a magnetic field that crosses vertically, and a magnetic field reversing unit that reverses the direction of the magnetic field in synchronization with the polarity change cycle of the voltage applied to the mercury arc lamp. apparatus. 2. The magnet according to claim 1, wherein the magnet is constituted by an electromagnet having a core and a coil wound around the core, and the magnetic field reversing section is synchronized with a polarity change cycle of a voltage applied to the mercury arc lamp. The exposure apparatus according to claim 1, further comprising a current supply unit that supplies a current having a changed polarity to the coil. 3. The magnet according to claim 1, wherein the magnet is formed of a permanent magnet, and the magnetic field reversing unit rotates the permanent magnet in synchronization with a cycle of a polarity change of a voltage applied to the mercury arc lamp with respect to the discharge arc. The exposure apparatus according to claim 1, further comprising a rotation mechanism. 4. An exposure apparatus for printing a pattern corresponding to an electron beam passage hole of a shadow mask on a photosensitive phosphor screen forming material layer formed on an inner surface of a panel, wherein the pattern opposes the inner surface of the panel with the shadow mask interposed therebetween. A mercury arc lamp that generates a discharge arc substantially parallel to the inner surface of the panel and is disposed between the mercury arc lamp and the shadow mask and has a light-shielding portion having a slit; A magnet that generates a magnetic field that crosses vertically, and a magnetic field adjustment unit that changes the magnitude of the magnetic field that crosses the discharge arc in synchronization with the period of the polarity change of the voltage applied to the mercury arc lamp. An exposure apparatus comprising: 5. The exposure apparatus according to claim 4, wherein the magnetic field adjustment unit includes a moving mechanism for reciprocating the magnet in a direction in which the magnet comes into and out of contact with the mercury arc lamp. 6. An exposure method for printing a pattern corresponding to an electron beam passage hole of a shadow mask on a photosensitive phosphor screen forming material layer formed on an inner surface of a panel, wherein a discharge arc substantially parallel to the inner surface of the panel is generated. Exposure light emitted from the mercury arc lamp is applied to the photosensitive phosphor screen forming material layer through the electron beam passage hole of the shadow mask, and a magnetic field that crosses the discharge arc almost vertically is generated to displace the discharge arc. By inverting the direction of the magnetic field in synchronization with the cycle of the polarity change of the voltage applied to the mercury arc lamp,
An exposure method, wherein the direction of displacement of the discharge arc is maintained in one direction, and a beam spot of exposure light formed on the photosensitive phosphor surface forming material layer is displaced in one direction. 7. By adjusting the magnitude of the magnetic field,
7. The exposure method according to claim 6, wherein an amount of displacement of the beam spot in one direction is controlled. 8. An exposure method for printing a pattern corresponding to an electron beam passage hole of a shadow mask on a photosensitive phosphor screen forming material layer formed on an inner surface of a panel, wherein a discharge arc substantially parallel to the inner surface of the panel is generated. Exposure light emitted from the mercury arc lamp is applied to the photosensitive phosphor screen forming material layer through the electron beam passage hole of the shadow mask, and a magnetic field that crosses the discharge arc almost vertically is generated to displace the discharge arc. The displacement direction of the discharge arc is maintained in one direction by changing the magnitude of the magnetic field crossing the discharge arc in synchronization with the cycle of the polarity change of the voltage applied to the mercury arc lamp. An exposure method comprising displacing a beam spot of exposure light formed on a material layer for forming a phosphor layer in one direction.