JP2002040223A5 - - Google Patents

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Publication number
JP2002040223A5
JP2002040223A5 JP2000221892A JP2000221892A JP2002040223A5 JP 2002040223 A5 JP2002040223 A5 JP 2002040223A5 JP 2000221892 A JP2000221892 A JP 2000221892A JP 2000221892 A JP2000221892 A JP 2000221892A JP 2002040223 A5 JP2002040223 A5 JP 2002040223A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000221892A
Other languages
Japanese (ja)
Other versions
JP2002040223A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000221892A priority Critical patent/JP2002040223A/ja
Priority claimed from JP2000221892A external-priority patent/JP2002040223A/ja
Publication of JP2002040223A publication Critical patent/JP2002040223A/ja
Publication of JP2002040223A5 publication Critical patent/JP2002040223A5/ja
Pending legal-status Critical Current

Links

JP2000221892A 2000-07-24 2000-07-24 被加熱体保持部材およびそれを用いた加熱炉 Pending JP2002040223A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000221892A JP2002040223A (ja) 2000-07-24 2000-07-24 被加熱体保持部材およびそれを用いた加熱炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000221892A JP2002040223A (ja) 2000-07-24 2000-07-24 被加熱体保持部材およびそれを用いた加熱炉

Publications (2)

Publication Number Publication Date
JP2002040223A JP2002040223A (ja) 2002-02-06
JP2002040223A5 true JP2002040223A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2007-09-06

Family

ID=18716215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000221892A Pending JP2002040223A (ja) 2000-07-24 2000-07-24 被加熱体保持部材およびそれを用いた加熱炉

Country Status (1)

Country Link
JP (1) JP2002040223A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100943375B1 (ko) 2002-05-29 2010-02-18 도레이 카부시키가이샤 감광성 수지 조성물 및 내열성 수지막의 제조 방법
JP2007226128A (ja) * 2006-02-27 2007-09-06 Toppan Printing Co Ltd カラーフィルタ製造用ホットプレート及びカラーフィルタ製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3014770B2 (ja) * 1990-12-20 2000-02-28 富士通株式会社 半導体製造装置
JPH08279548A (ja) * 1993-12-28 1996-10-22 Sharp Corp ホットプレート型のプロキシミティベーク炉に使用するピン及びそれを使用した炉
JPH11337266A (ja) * 1998-05-28 1999-12-10 Toray Ind Inc カラーフィルタ製造用オーブンおよびこれを用いたカラーフィルタの製造方法
JP2000119737A (ja) * 1998-10-16 2000-04-25 Nsk Warner Kk ワークの炉内配置方法

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