JP2002039718A5 - - Google Patents

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Publication number
JP2002039718A5
JP2002039718A5 JP2000219305A JP2000219305A JP2002039718A5 JP 2002039718 A5 JP2002039718 A5 JP 2002039718A5 JP 2000219305 A JP2000219305 A JP 2000219305A JP 2000219305 A JP2000219305 A JP 2000219305A JP 2002039718 A5 JP2002039718 A5 JP 2002039718A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000219305A
Other languages
Japanese (ja)
Other versions
JP2002039718A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000219305A priority Critical patent/JP2002039718A/ja
Priority claimed from JP2000219305A external-priority patent/JP2002039718A/ja
Publication of JP2002039718A publication Critical patent/JP2002039718A/ja
Publication of JP2002039718A5 publication Critical patent/JP2002039718A5/ja
Pending legal-status Critical Current

Links

JP2000219305A 2000-07-19 2000-07-19 薄膜の合否判定方法および装置 Pending JP2002039718A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000219305A JP2002039718A (ja) 2000-07-19 2000-07-19 薄膜の合否判定方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000219305A JP2002039718A (ja) 2000-07-19 2000-07-19 薄膜の合否判定方法および装置

Publications (2)

Publication Number Publication Date
JP2002039718A JP2002039718A (ja) 2002-02-06
JP2002039718A5 true JP2002039718A5 (enExample) 2007-08-02

Family

ID=18714109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000219305A Pending JP2002039718A (ja) 2000-07-19 2000-07-19 薄膜の合否判定方法および装置

Country Status (1)

Country Link
JP (1) JP2002039718A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010117161A (ja) * 2008-11-11 2010-05-27 Nikon Corp 検査装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3789515B2 (ja) * 1994-12-02 2006-06-28 株式会社キーエンス 膜厚測定機能付光学顕微鏡
JPH08210972A (ja) * 1995-02-03 1996-08-20 Hitachi Ltd 偏光解析装置
JP4460659B2 (ja) * 1997-10-22 2010-05-12 株式会社ルネサステクノロジ 薄膜の膜厚計測方法及びその装置並びにそれを用いた薄膜デバイスの製造方法及びその製造装置

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