JP2002036571A - Method for manufacturing liquid jet device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid jet device wherein the mutual joining of plates are sufficiently performed in a recording head integrated with plates made of ceramics. SOLUTION: In a method for manufacturing the recording head including a nozzle plate, a pressure generation chamber forming plate 10 made of ceramics having a pressure generation chamber 2 formed thereto, an ink storage chamber forming plate 16 made of ceramics having an ink storage chamber 4 formed thereto and a supply port forming plade 18 made of ceramics having an ink supply port 19, which supplies ink to the pressure generation chamber 2 from the ink storage chamber 4, formed thereto, the green sheet of the supply port forming plate 18 and the green sheet of the pressure generation chamber forming plate 10 are laminated to be bonded under pressure and, subsequently, the green sheet of the ink storage chamber forming plate 16 is laminated to the green sheet of the supply port forming plate 18 to be bonded thereto under pressure and the obtained laminate is integrated by baking to sufficiently join the plates mutually.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a method for manufacturing a liquid ejecting apparatus for ejecting liquid from a nozzle opening by vibration of a piezoelectric vibrator or the like.

[0002]

2. Description of the Related Art In general, a liquid ejecting apparatus using a piezoelectric vibrator (in the following description, an example in which the present invention is applied to an ink jet recording head, and is referred to as a "recording head") is shown in FIG. An actuator unit 1 on which a piezoelectric vibrator 6 is adhered and a pressure generating chamber 2 corresponding to the piezoelectric vibrator 6 is formed, and a nozzle opening 3 and an ink storage chamber 4 are formed and adhered on the lower surface of the actuator unit 1 The pressure generating chamber 2 is configured to generate pressure by the vibration of the piezoelectric vibrator 6 and eject ink droplets from the nozzle openings 3.

The actuator unit 1 includes a pressure generating chamber forming plate 1 in which a space for forming a pressure generating chamber 2 is formed.
0, a vibrating plate 11 located on the upper surface of the pressure generating chamber forming plate 10 and closing the upper opening of the space, and a communication hole forming plate 14 located on the lower surface of the pressure generating chamber forming plate 10. . The communication hole forming plate 14 has a communication hole 12 for communicating the ink storage chamber 4 and the pressure generating chamber 2, and a nozzle communication passage 8 for communicating the pressure generating chamber 2 and the nozzle opening 3.

In the actuator unit 1, a common lower electrode 19 is formed on the upper surface of the vibration plate 11. Then, a flat plate-shaped piezoelectric vibrator 6 is formed on the upper surface of the lower electrode 19, and on the upper surface of the piezoelectric vibrator 6,
An individual upper electrode 20 is formed. Then, a drive signal is input to the piezoelectric vibrator 6 via the lower electrode 19 and the upper electrode 20.

On the other hand, the flow channel unit 5 includes an ink storage chamber forming plate 1 in which a space for forming the ink storage chamber 4 is formed.
6, a nozzle plate 17 having a nozzle opening 3 formed therein and located on the lower surface of the ink storage chamber forming plate 16, and a supply port forming plate 1 located on the upper surface of the ink storage chamber forming plate 16.
And 8. The ink storage chamber forming plate 16
Is formed with a nozzle communication passage 8 for communicating the pressure generating chamber 2 with the nozzle opening 3. In addition, the supply port forming plate 1
An ink supply port 9 for supplying ink from the ink storage chamber 4 to the pressure generating chamber 2 through the communication hole 12 is formed in the ink storage chamber 4, and a nozzle communication path 8 for communicating the pressure generating chamber 2 with the nozzle opening 3. Are formed.

In the supply port forming plate 18, a space corresponding to the ink storage chamber 4 is formed as a damper chamber 7 for releasing pressure fluctuation in the ink storage chamber 4. A damper plate 13 for closing the opening of the damper chamber 7 is sandwiched between the supply port forming plate 18 and the ink storage chamber forming plate 16.

The actuator unit 1 includes a vibration plate 11 made of ceramics and a pressure generation chamber forming plate 1.
0, a communication hole forming plate 14 is laminated and integrally fired. On the other hand, the flow path unit 5 includes a supply port forming plate 18 and a damper plate 1 made of stainless steel.
3, the ink storage chamber forming plate 16 and the nozzle plate 17
It is laminated via an adhesive layer 15. The actuator unit 1 and the flow path unit 5 are connected to the adhesive layer 1
5 are joined.

[0008]

However, in the above recording head, the pressure generating chamber 2 is provided in the actuator unit 1, and the ink storage chamber 4 for supplying ink to the pressure generating chamber 2 and the ink in the pressure generating chamber 2 are stored in the actuator unit 1. Nozzle opening 3 to discharge
Are provided in the flow path unit 5. Moreover, the actuator unit 1 is made of ceramics, and the channel unit 5 is made of stainless steel. For this reason, in order to make the pressure generating chamber 2 communicate with the ink storage chamber 4 and the nozzle opening 3, it is necessary to bond and laminate a plurality of parts with an adhesive, which complicates the structure and the manufacturing process, and increases the cost. Has become. Further, there is a possibility that distortion or peeling may occur due to a difference in the thermal shrinkage ratio or the linear expansion coefficient of the bonded portion. Further, since the ink comes into direct contact with the stainless steel or the adhesive, for example, an ink having an etching action on the stainless steel or an ink that elutes the adhesive cannot be used, and the characteristics and characteristics of the ink used are In fact, there are some limitations in the field of application.

[0009] In the case of manufacturing a laminate of ceramic plates, if the green sheets are laminated and pressed sufficiently and then fired, the bonding at the interface between the plates tends to be insufficient. If the plates are not sufficiently joined, there is a possibility that ink leaks from the ink flow path and contaminates the surroundings. In particular, when the pressure generating chambers 2 are connected to each other, the pressure generating chambers 2 are not one-to-one with respect to the nozzle openings, and the pressures of the pressure generating chambers 2 interfere with each other to accurately discharge ink. Can not be done. Since the pressure generating chamber 2 has a high pressure for discharging ink droplets, the pressure generating chamber 2
The wall between the pressure generating chambers 2 that separates the two must be firmly joined.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a method of manufacturing a liquid ejecting apparatus in which a plate is sufficiently joined in a recording head in which ceramic plates are integrated. A first object is to provide a liquid ejecting apparatus which is not restricted by the characteristics of the liquid to be ejected and the field of application.

[0011]

In order to achieve the above object, a method of manufacturing a liquid ejecting apparatus according to the present invention comprises a nozzle plate having a nozzle opening formed therein and a pressure generating chamber communicating with the nozzle opening. A ceramic pressure generating chamber forming plate, a ceramic liquid storing chamber forming plate formed with a liquid storing chamber for storing a liquid to be supplied to the pressure generating chamber, and a liquid from the liquid storing chamber to the pressure generating chamber. A supply port forming plate made of ceramics having a supply port formed therein,
A sealing plate that seals the opening of the pressure generation chamber, and a method of manufacturing a liquid ejecting apparatus including a pressure generation element that generates pressure in the pressure generation chamber, wherein a green sheet of a supply port forming plate, A step of preparing a green sheet of the liquid storage chamber forming plate and a green sheet of the pressure generating chamber forming plate, and laminating and pressing the green sheet of the supply port forming plate and the green sheet of the pressure generating chamber forming plate and then pressing the liquid Laminating and pressing the green sheets of the storage chamber forming plate, and firing the obtained laminate to integrate them.
The summary of the

Further, a method of manufacturing a liquid ejecting apparatus according to the present invention includes a nozzle plate having a nozzle opening formed therein, a ceramic pressure generating chamber forming plate formed with a pressure generating chamber communicating with the nozzle opening, A ceramic liquid storage chamber forming plate in which a liquid storage chamber for storing liquid to be supplied to the pressure generation chamber is formed, and a ceramic liquid storage chamber in which a supply port for supplying liquid from the liquid storage chamber to the pressure generation chamber is formed. A method for manufacturing a liquid ejecting apparatus, comprising: a supply port forming plate, a sealing plate that seals an opening of the pressure generating chamber, and a pressure generating element that generates pressure in the pressure generating chamber. Preparing a green sheet of the plate, a green sheet of the liquid storage chamber forming plate, and a green sheet of the pressure generating chamber forming plate; The sheet and the green sheet of the liquid storage chamber forming plate are laminated and pressed by a pressure plate capable of forming a convex portion corresponding to the space that becomes the pressure generation chamber and / or the liquid storage chamber, and the obtained laminate is fired. A second gist is to include a step of integrating them.

That is, in the first method of manufacturing the liquid ejecting apparatus according to the present invention, the green sheet of the supply port forming plate and the green sheet of the pressure generating chamber forming plate are laminated and pressed, and then the green of the liquid storage chamber forming plate is formed. The method includes a step of laminating and pressing the sheets, and baking the obtained laminate to integrate them. As described above, first, the green sheet of the supply port forming plate and the green sheet of the pressure generating chamber forming plate are laminated and pressed, so that the green sheet of the supply port forming plate and the green sheet of the pressure generating chamber forming plate are separated. Adhere well. Thereafter, the green sheets of the liquid storage chamber forming plate are laminated and pressed together, so that the green sheets of the supply port forming plate and the liquid storage chamber forming plate are sufficiently adhered to each other. By firing and integrating the obtained laminated body, a recording head in which the plates are sufficiently joined together is obtained, and the liquid leaks from the liquid flow path, contaminates the surroundings, and interferes with the pressure in the pressure generating chamber. The occurrence of troubles due to insufficient bonding between plates, such as mutual interference, is almost eliminated.

Further, according to a second method of manufacturing a liquid ejecting apparatus of the present invention, a green sheet of a pressure generating chamber forming plate, a green sheet of a supply port forming plate, and a green sheet of a liquid storage chamber forming plate are laminated. Crimping with a crimping plate that can form a projection corresponding to the space that becomes the chamber and / or liquid storage chamber,
A step of integrating the obtained laminate by firing. As described above, by pressure-bonding with a pressure-bonding plate capable of forming a convex portion corresponding to the space that becomes the pressure generation chamber and / or the liquid storage chamber, the pressure is also applied to the space where the liquid storage chamber and the like are formed. Almost no escape, sufficient pressure is applied to the green sheet of the pressure generating chamber forming plate and the green sheet of the supply port forming plate, and the green sheets can be brought into close contact with each other. Then, by firing and integrating the obtained laminate, a recording head in which the plates are sufficiently bonded to each other is obtained, and the bonding between the plates is impaired, for example, the liquid leaks from the liquid flow path and contaminates the surroundings. The occurrence of troubles due to the sufficiency is almost eliminated.

In the method of manufacturing a liquid ejecting apparatus according to the present invention, when the pressing plate made of an elastic member is used, the pressing plate is deformed along a flow path of a liquid storage chamber or the like. Since the sheets can be crimped together,
The sheets can be securely adhered to each other.

In the method of manufacturing a liquid ejecting apparatus according to the present invention, the nozzle plate is formed by laminating and firing green sheets of a ceramic material, and the sealing plate is formed by laminating a green sheet of a ceramic material. When firing and integrating, the laminated body of each plate is integrally formed without the intermediary of the adhesive layer, and the work of laminating becomes unnecessary, and the heat shrinkage coefficient and linear expansion coefficient There is no risk of distortion or separation due to the difference. In addition, since most of the flow path in contact with the liquid is formed of ceramics, the liquid resistance of the flow path is improved. Therefore, the type of liquid used is not limited, and for example, a liquid having an etching action on stainless steel or a liquid having a property of eluting an adhesive can be used.

In the method for manufacturing a liquid ejecting apparatus according to the present invention, a plurality of positioning holes are formed in each green sheet.
When the green sheets are laminated while the positioning holes are being inserted through the positioning pins, or the supply port forming sheet, the liquid storage chamber forming sheet, and the pressure generating chamber forming sheet, a common positioning hole for positioning each sheet simultaneously. When the holes are formed, the laminating operation and the positioning operation can be performed at the same time, and the operation efficiency is extremely high, and the positioning of the flow path of each plate can be reliably performed.

In the method of manufacturing a liquid ejecting apparatus according to the present invention, when the positioning hole formed in the nozzle plate is formed in a portion where the recording head is bonded to the case, the positioning hole is inserted into the case. The liquid can be prevented from entering.

[0019]

Next, embodiments of the present invention will be described in detail.

FIGS. 1 and 2 show the basic structure of a liquid ejecting apparatus to which the present invention is applied. This embodiment shows an example in which the liquid ejecting apparatus of the present invention is applied to an ink jet recording head. The recording head includes a nozzle plate 17 having a nozzle opening 3 formed therein, and a flow path forming section 30 in which a flow path of ink ejected from the nozzle opening 3 is formed and stacked on the nozzle plate 17.
And a vibrating plate (sealing plate) 11 laminated on the flow path forming section 30. Here, FIG. 3 and FIG.
FIG. 3 is a plan view of each plate constituting the nozzle plate 17, the vibration plate 11, and the flow path forming unit 30.

The flow path forming section 30 is provided with the nozzle opening 3
Chamber forming plate 10 in which a pressure generating chamber 2 communicating with the pressure generating chamber 2 is formed, and an ink storage chamber forming plate 16 in which a space corresponding to the ink storing chamber 4 in which ink supplied to the pressure generating chamber 2 is stored is formed. And a damper chamber forming plate 21 in which a damper chamber 7 for absorbing pressure fluctuations in the ink storage chamber 4 is formed.

The flow path forming section 30 has an ink supply port 9 for closing the lower opening of the pressure generating chamber 2 and for supplying ink stored in the ink storing chamber 4 to the pressure generating chamber 2. A supply port forming plate 18 is provided.

Further, the flow path forming section 30 is sandwiched between the damper chamber forming plate 21 and the ink storage chamber forming plate 16 and is laminated between the damper chamber 7 and the ink storage chamber 4 to form a damper chamber. 7 is provided with a damper plate 13 which closes an upper opening of the ink storage chamber 4 and allows the pressure fluctuation in the ink storage chamber 4 to escape to the damper chamber 7 by being elastically deformed by the pressure fluctuation in the ink storage chamber 4.

The flow path forming section 30 is arranged such that the damper chamber forming plate 21 and the damper plate 1
3, the ink storage chamber forming plate 16, the supply port forming plate 18, and the pressure generating chamber forming plate 10 are laminated in this order. Here, the damper chamber forming plate 21, the damper plate 13, the ink storage chamber forming plate 16, and the supply port forming plate 18 are respectively provided.
A nozzle communication passage 8 for communicating the nozzle opening 3 with the pressure generating chamber 2 is provided.

On the other hand, on the upper surface of the diaphragm 11, a comb-shaped lower electrode 19 is formed. Each comb tooth 19A of the lower electrode 19 is formed at a portion that covers the upper part of the pressure generating chamber 2. Further, a flat-plate-shaped piezoelectric vibrator 6 is formed on the upper surface of each comb tooth portion 19A of the lower electrode 19, and an individual upper electrode 20 is formed on the upper surface of the piezoelectric vibrator 6. A drive signal is applied to each piezoelectric vibrator 6 via the upper electrode 20 and the lower electrode 19.

The flow path forming section 30 is laminated on the nozzle plate 17, and the vibration plate 11 on which the piezoelectric vibrator 6, the upper electrode 20, and the lower electrode 19 are formed is laminated on the flow path forming section 30. ing. In the drawing, reference numeral 26 denotes an ink supply port for supplying ink to the ink storage chamber 4 from an ink cartridge (not shown) or the like.

In the recording head, when a drive signal is applied to the piezoelectric vibrator 6, the piezoelectric vibrator 6 contracts in the horizontal direction. At this time, the lower surface side of the piezoelectric vibrator 6 fixed to the vibration plate 11 does not contract, but only the upper surface side contracts. Therefore, the piezoelectric vibrator 6 and the vibration plate 11 bend downward and compress the pressure generating chamber 2. . When the pressure in the pressure generating chamber 2 rises, the ink in the pressure generating chamber 2 is ejected from the nozzle openings 3 as ink droplets, and dots are formed on recording paper or the like to perform printing. Next, when the piezoelectric vibrator 6 is discharged and returns to the original state, the pressure in the pressure generating chamber 2 is reduced, and new ink is supplied from the ink storage chamber 4 to the pressure generating chamber 2 through the ink supply port 9.

In this recording head, as shown in FIG.
The pressure generating chambers 2 are arranged in two rows.
The distal end of each comb tooth 19A of the lower electrode 19 is disposed on the terminal raising member 27 and the pressure generating chamber 2
The end of each comb tooth 19A except for both ends of the row of
And is connected to the upper electrode 20 to form a segment terminal. The ends of the comb teeth 19A corresponding to both ends of the row of the pressure generating chambers 2 are used as common terminals 28 when a drive signal is input to the lower electrode 19, and the two ends of the row corresponding to each common terminal 28 The pressure generating chamber 2A is not driven and does not eject ink droplets.

Therefore, each of the damper chamber forming plate 21, the damper plate 13, the ink storage chamber forming plate 16, and the supply port forming plate 18 has a nozzle communication passage 8 at a portion corresponding to the pressure generating chamber 2A at both ends of the row. Is not formed. In addition, the ink supply ports 9 are not formed in portions of the supply port forming plate 18 corresponding to the pressure generating chambers 2A at both ends of the row,
Nozzle openings 3 are not formed in portions of nozzle plate 17 corresponding to pressure generating chambers 2A at both ends of the row.

Thus, the pressure generating chambers 2A at both ends of the row are provided.
Is an independent space other than the ink flow path that does not communicate with the nozzle opening 3 and the ink storage chamber 4, as shown in FIG. On the other hand, the damper chamber 7 is also an independent space other than the flow path that does not communicate with the ink flow path. In the drawing, reference numeral 24 denotes a first external communication hole for communicating the pressure generating chambers 2A at both ends of the row, which are independent spaces, with the outside, and reference numeral 25 denotes a second external communication hole for communicating the damper chamber 7, which is also an independent space, with the outside. It is a communication hole.

Here, in the recording head, the nozzle plate 17, the flow path forming section 30 (the ink storage chamber forming plate 16,
Damper plate 13, damper chamber forming plate 21, supply port forming plate 1
8, the communication hole forming plate 14, the pressure generating chamber forming plate 10), and the vibration plate 11 are all formed of ceramics.

In the recording head, when the plates are stacked on the left and right sides of the nozzle plate 17, the damper chamber forming plate 21, the damper plate 13, the ink storage chamber forming plate 16, and the supply port forming plate 18, respectively. A pair of first positioning holes 22 for positioning the plate are formed in the hole. In the recording head, the ink storage chamber forming plate 1 is provided.
6, a pair of second positioning holes 23 for positioning the plates when the respective plates are stacked near the center of the supply port forming plate 18, the pressure generating chamber forming plate 10, and the vibration plate 11, respectively.
Are drilled.

The first plate formed on the nozzle plate 17
The positioning hole 22 is formed at a portion where the recording head is bonded to the case. By doing so, when the recording head is adhered to the case, the first positioning hole 22 is closed with the adhesive, and ink can be prevented from entering the case through the first positioning hole 22.

The method of manufacturing a recording head according to the present invention is performed, for example, as follows.

A green sheet of ceramics is prepared in advance, and the green sheet is punched out, and the nozzle plate 17, the ink storage chamber forming plate 16, and the damper plate 1 are punched out.
3. A green sheet corresponding to the damper chamber forming plate 21, the supply port forming plate 18, the pressure generating chamber forming plate 10, and the vibration plate 11 is formed (see FIGS. 3 and 4). At this time, the ink storage chamber 4, the damper chamber 7, the ink supply port 9, the pressure generation chamber 2,
Spaces respectively corresponding to the nozzle communication passages 8 are formed by punching or the like.

Each of the above plates (hereinafter referred to as "green sheets", but simply "nozzle plates 17")
The “ink storage chamber forming plate 16”, “damper plate 13”, “damper chamber forming plate 21”, “supply opening forming plate 18”, “pressure generating chamber forming plate 10”, and “vibrating plate 11”) are sequentially stacked as follows. I do.

First, as shown in FIGS. 7 and 8, the pressure generating chamber forming plate 10 is laminated on the supply port forming plate 18.
At this time, the ink supply port 9 and the nozzle communication path 8 are laminated by inserting the second positioning holes 23 formed in the two plates while inserting them into positioning pins (not shown).
And the pressure generating chamber 2 are positioned. In this state, pressure is applied to the stacked body of the supply port forming plate 18 and the pressure generating chamber forming plate 10 from above and below, and both plates are pressed and adhered. At this time, the portion of the pressure generating chamber forming plate 10 between the pressure generating chambers 2 also sufficiently adheres to the supply port forming plate 18.

Next, as shown in FIGS. 9 and 10,
The ink storage chamber forming plate 16 is stacked below the supply port forming plate 18. At this time, the ink storage chamber 4 and the pressure generating chamber 2 are positioned by laminating the second positioning holes 23 formed in the respective plates while inserting the second positioning holes 23 into positioning pins (not shown). In this state, pressure is applied from above and below the laminate, and each plate is pressed and adhered.
At this time, since the supply port forming plate 18 and the pressure generating chamber forming plate 10 are already in close contact with each other, poor adhesion between the supply port forming plate 18 and the pressure generating chamber forming plate 10 in the space corresponding to the ink storage chamber 4. Does not occur.

That is, in the pressure bonding between the supply port forming plate 18 and the ink storage chamber forming plate 16, a portion other than the portion corresponding to the pressure generating chamber 2 (the area indicated by oblique line C in FIG. 9).
Can directly press the plates, so that they can be sufficiently adhered to each other. The portion of the supply port forming plate 18 corresponding to the pressure generating chamber 2 (the area indicated by oblique lines D in FIG. 9) cannot directly press the plates, but the width of the pressure generating chamber 2 is small, so the rigidity of the plate is small. Accordingly, poor adhesion between the supply port forming plate 18 and the ink storage chamber forming plate 16 does not occur.

Next, as shown in FIG. 11, the vibration plate 11 is laminated on the pressure generating chamber forming plate 10, and pressure is applied from above and below the laminated body to press and adhere the plates. At this time, the second positioning holes 23 formed in the respective plates are formed.
Are stacked while being passed through positioning pins (not shown), so that the pressure generating chambers 2A at both ends of the row become independent spaces.
And the first external communication hole 24 are positioned.

On the other hand, as shown in FIG. 12, the damper chamber forming plate 21 is laminated on the nozzle plate 17, and pressure is applied from above and below the laminated body to press and adhere the respective plates.
At this time, the nozzle openings 3 and the nozzle communication passages 8 are positioned by stacking the first positioning holes 22 formed in the respective plates while inserting the first positioning holes 22 into positioning pins (not shown).

Next, as shown in FIG. 13, a damper plate 13 is laminated on the above-mentioned damper chamber forming plate 21, and pressure is applied from above and below the laminated body to press and adhere the respective plates.
At this time, the damper chamber 7 and the second outside air communication hole 25 are positioned by stacking the first positioning holes 22 formed in the respective plates while inserting the first positioning holes 22 into the positioning pins (not shown).

Thereafter, as shown in FIG. 14, an ink storage chamber forming plate 16 in which a supply port forming plate 18, a pressure generating chamber forming plate 10, and a vibrating plate 11 are laminated on the damper plate 13.
Are laminated, and pressure is applied from above and below the laminate to press and adhere each plate. At this time, the first positioning holes 22 formed in the respective plates are inserted into positioning pins (not shown).
The nozzle communication path 8 of the damper plate 13 and the nozzle communication path 8 of the ink storage chamber forming plate 16 are positioned by stacking while being inserted through the nozzle.

The nozzle plate 17, the ink storage chamber forming plate 16, the damper plate 13, and the damper chamber forming plate 2
1, a recording head integrally formed of ceramics without interposing an adhesive is obtained by firing a laminated body in which the supply port forming plate 18, the pressure generating chamber forming plate 10, and the vibration plate 11 are laminated in this order. be able to.

In the recording head thus obtained, the laminated body of each plate is integrally formed without the interposition of an adhesive layer, so that the laminating operation becomes unnecessary and the thermal contraction rate and the linear expansion coefficient are reduced. There is no risk of distortion or separation due to the difference.
In addition, since all the flow paths that come into contact with the ink are formed of ceramics, the ink resistance of the flow paths is improved. Therefore, there is no restriction on the type of ink used, for example,
Ink that has an etching effect on stainless steel,
It is possible to use even an ink having a property of eluting an adhesive.

In the above manufacturing method, first, the supply port forming plate 18 and the pressure generating chamber forming plate 10 are laminated and pressed, so that the supply port forming plate 18 and the pressure generating chamber forming plate 10 are sufficiently adhered to each other. I do. After that, the ink storage chamber forming plate 16
Are laminated and pressure-bonded to obtain a recording head in which the plates are sufficiently bonded to each other. This is due to insufficient bonding between the plates, such as leakage of ink from the ink flow path and contamination of the surroundings. Almost no trouble occurs. In the above-described manufacturing method, the first and second positioning holes 22 and 23 are formed in each plate, and the first and second positioning holes 22 and 23 are stacked while being inserted into the positioning pins. The positioning work can be performed at the same time, the work efficiency is extremely high, and the positioning of the flow path of each plate can be reliably performed.

FIG. 15 shows a manufacturing method according to the second embodiment of the present invention. In this method, first, the ink storage chamber forming plate 16, the supply port forming plate 18, and the pressure generating chamber forming plate 10 are stacked. On the other hand, the projection 32 corresponding to the pressure generating chamber 2 is formed on the lower surface.
Is prepared, and a pressure-bonding plate 31 in which a convex portion 32 corresponding to the ink storage chamber 4 is formed on the upper surface.
Then, the laminate is sandwiched between the two pressure bonding plates 31, and pressure is applied from above and below while the convex portions 32 are fitted into the pressure generating chambers 2 and the ink storage chambers 4, and the respective plates are pressed and adhered. The pressure bonding plate 31 is desirably formed of an elastic body that deforms along the laminated body in a state where the protrusion 32 is fitted to the pressure generating chamber 2 or the ink storage chamber 4. Otherwise, the process is performed in the same manner as in the first embodiment.

In this manufacturing method, the pressure generating chamber 2 and the ink storage chamber 4 are pressure-bonded with a pressure-bonding plate 31 capable of forming a convex portion 32 corresponding to the space to be formed. Also, sufficient pressure is applied to the pressure generating chamber forming plate 10 and the supply port forming plate 18 so that the sheets can be brought into close contact with each other.

The ceramic material constituting the recording head is not particularly limited, and various materials can be used. For example, various carbides such as silicon carbide, titanium carbide, chromium carbide, niobium carbide, vanadium carbide, zirconium carbide, molybdenum carbide, boron carbide, zirconium oxide (zirconia), aluminum oxide, magnesium oxide, silicon oxide, titanium oxide, beryllium oxide Oxides such as aluminum nitride, silicon nitride, various nitrides such as beryllium nitride and boron nitride, various borides such as zirconium boride, chromium boride and titanium boride, and complex compounds such as sialon. I can give it. These are used alone or in combination. Among these, zirconia is excellent in mechanical strength and toughness and also excellent in corrosion resistance, and is suitable as a material constituting a liquid ejecting apparatus.

In each of the above embodiments, an example is shown in which the present invention is applied to a liquid ejecting apparatus using a flexural mode piezoelectric vibrator. However, the present invention is not limited to this.
The present invention can be applied to a liquid ejecting apparatus using a piezoelectric vibrator in a longitudinal vibration mode, and can also be applied to a recording head using a heating element for heating ink in a flow path as a pressure generating element. .

Further, in each of the above embodiments, an example is shown in which the liquid ejecting apparatus of the present invention is applied to an ink jet recording head. However, the present invention is not limited to this.
The liquid to be discharged can be used as a fuel such as gasoline and used as a fuel injection device for an internal combustion engine. Further, the present invention can be applied to the formation of an organic light emitting layer of a display body in which an organic light emitting layer is formed on a transparent electrode formed in a matrix on a transparent substrate. As described above, in the liquid ejecting apparatus of the present invention, various liquids can be applied as the liquid to be ejected, and can be applied to various industrial fields.

[0052]

As described above, according to the first method of manufacturing the liquid ejecting apparatus of the present invention, first, the green sheet of the supply port forming plate and the green sheet of the pressure generating chamber forming plate are laminated and pressed. Therefore, the green sheet of the supply port forming plate and the green sheet of the pressure generating chamber forming plate are sufficiently adhered to each other. After that, the green sheets of the ink storage chamber forming plate are laminated and pressed, so that the green sheets of the supply port forming plate and the green sheets of the ink storage chamber forming plate are sufficiently adhered to each other. Then, by firing and integrating the obtained laminate, a recording head in which the plates are sufficiently bonded to each other is obtained, and the bonding between the plates is impaired, such as ink leaking from the ink flow path and contaminating the surroundings. The occurrence of troubles due to the sufficiency is almost eliminated.

Further, according to the second method of manufacturing a liquid ejecting apparatus of the present invention, the liquid ejecting apparatus is press-bonded by a press-fitting plate capable of forming a convex portion corresponding to a space to be a pressure generating chamber and / or an ink storage chamber. Even in the portion where the ink storage chamber and the like are formed, pressure hardly escapes into the space, and sufficient pressure is applied to the green sheet of the pressure generating chamber forming plate and the green sheet of the supply port forming plate, and the green sheets are sufficiently separated from each other. Can be in close contact. Then, by firing and integrating the obtained laminate, a recording head in which the plates are sufficiently bonded to each other is obtained, and the bonding between the plates is impaired, such as ink leaking from the ink flow path and contaminating the surroundings. The occurrence of troubles due to the sufficiency is almost eliminated.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing a basic structure of a liquid ejecting apparatus to which the present invention is applied.

FIG. 2 is a sectional view of the liquid ejecting apparatus.

FIG. 3 is a plan view showing a plate constituting the liquid ejecting apparatus, wherein (a) is a nozzle plate, (b) is a damper chamber forming plate, and (c) is a damper plate.

FIGS. 4A and 4B are plan views showing plates constituting the liquid ejecting apparatus, wherein FIG. 4A shows an ink storage chamber forming plate, FIG. 4B shows a supply port forming plate, FIG. 4C shows a pressure generating chamber forming plate, and FIG. ) Is a diaphragm.

FIG. 5 is an explanatory diagram showing a positional relationship between a lower electrode and a pressure generating chamber of the liquid ejecting apparatus.

FIG. 6 is an explanatory diagram showing a positional relationship among a pressure generating chamber, a damper chamber, a nozzle opening, a nozzle communication path, and an ink supply port of the liquid ejecting apparatus.

FIG. 7 is a plan view illustrating steps of a method for manufacturing a liquid ejecting apparatus according to an embodiment of the present invention.

FIG. 8 is a cross-sectional view illustrating a step of the manufacturing method.

FIG. 9 is a plan view for explaining steps of the manufacturing method.

FIG. 10 is a cross-sectional view illustrating a step of the manufacturing method.

FIG. 11 is a plan view illustrating a step of the manufacturing method.

FIG. 12 is a plan view illustrating steps of the manufacturing method.

FIG. 13 is a plan view for explaining steps of the manufacturing method.

FIG. 14 is a plan view illustrating a step of the manufacturing method.

FIG. 15 is a cross-sectional view for explaining steps of a manufacturing method according to the second embodiment of the present invention.

FIG. 16 is a cross-sectional view showing a conventional liquid ejecting apparatus.

[Explanation of symbols]

 Reference Signs List 2 pressure generation chamber 4 ink storage chamber 9 ink supply port 10 pressure generation chamber forming plate 16 ink storage chamber forming plate 18 supply port forming plate

Claims (8)

[Claims] 1. A nozzle plate having a nozzle opening, a ceramic pressure generating chamber forming plate having a pressure generating chamber communicating with the nozzle opening, and a liquid to be supplied to the pressure generating chamber. A ceramic liquid storage chamber forming plate in which a liquid storage chamber is formed, a ceramic supply port forming plate in which a supply port for supplying a liquid from the liquid storage chamber to the pressure generating chamber is formed, and A method for manufacturing a liquid ejecting apparatus, comprising: a sealing plate for sealing an opening; and a pressure generating element for generating pressure in the pressure generating chamber, wherein a green sheet of a supply port forming plate and a liquid storage chamber forming plate are provided. Preparing the green sheet of the pressure generating chamber forming plate and the green sheet of the pressure generating chamber forming plate, and laminating and pressing the green sheet of the supply port forming plate and the green sheet of the pressure generating chamber forming plate, and then storing the liquid The green sheet formed plate and pressed by laminating, method of manufacturing a liquid-jet apparatus characterized by including the step of integrating by firing the resulting laminate. 2. A nozzle plate having a nozzle opening formed therein, a ceramic pressure generating chamber forming plate having a pressure generating chamber communicating with the nozzle opening, and a liquid to be supplied to the pressure generating chamber. A ceramic liquid storage chamber forming plate in which a liquid storage chamber is formed, a ceramic supply port forming plate in which a supply port for supplying a liquid from the liquid storage chamber to the pressure generating chamber is formed, and What is claimed is: 1. A method for manufacturing a liquid ejecting apparatus, comprising: a sealing plate that seals an opening; and a pressure generating element that generates pressure in the pressure generating chamber, wherein a green sheet of a supply port forming plate and a liquid storage chamber forming plate Preparing a green sheet of the pressure generating chamber forming plate, a green sheet of the pressure generating chamber forming plate, a green sheet of the supply port forming plate, and a green sheet of the liquid storage chamber forming plate. Laminating, pressure-bonding with a pressure-bonding plate capable of forming a convex portion corresponding to a space that becomes a pressure generating chamber and / or a liquid storage chamber, and firing the obtained laminated body to integrate them. A method for manufacturing a liquid ejecting apparatus, comprising: 3. The method for manufacturing a liquid ejecting apparatus according to claim 2, wherein said pressure bonding plate is formed of an elastic member. 4. The method for manufacturing a liquid ejecting apparatus according to claim 1, wherein the nozzle plate is formed by laminating and firing green sheets of a ceramic material and integrating them. 5. The sealing plate according to claim 1, wherein a green sheet of a ceramic material is laminated, fired and integrated.
5. The method for manufacturing a liquid ejecting apparatus according to any one of claims 4 to 4. 6. The liquid ejecting apparatus according to claim 1, wherein a plurality of positioning holes are formed in each of the green sheets, and the green sheets are stacked while inserting the positioning holes into the positioning pins. Production method. 7. A common positioning hole for simultaneously positioning each green sheet is formed in the green sheet of the supply port forming plate, the green sheet of the liquid storage chamber forming plate, and the green sheet of the pressure generating chamber forming plate. 7. The method for manufacturing a liquid ejecting apparatus according to claim 6, wherein: 8. The method according to claim 6, wherein the positioning hole formed in the nozzle plate is formed in a bonding portion with a case to which the recording head is bonded.