JP2002033331A5 - - Google Patents
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- Publication number
- JP2002033331A5 JP2002033331A5 JP2001142322A JP2001142322A JP2002033331A5 JP 2002033331 A5 JP2002033331 A5 JP 2002033331A5 JP 2001142322 A JP2001142322 A JP 2001142322A JP 2001142322 A JP2001142322 A JP 2001142322A JP 2002033331 A5 JP2002033331 A5 JP 2002033331A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001142322A JP2002033331A (en) | 2000-05-12 | 2001-05-11 | Semiconductor device and method for manufacturing the same |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000140592 | 2000-05-12 | ||
JP2000-140592 | 2000-05-12 | ||
JP2001142322A JP2002033331A (en) | 2000-05-12 | 2001-05-11 | Semiconductor device and method for manufacturing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2002033331A JP2002033331A (en) | 2002-01-31 |
JP2002033331A5 true JP2002033331A5 (en) | 2008-05-22 |
Family
ID=26591806
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001142322A Withdrawn JP2002033331A (en) | 2000-05-12 | 2001-05-11 | Semiconductor device and method for manufacturing the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2002033331A (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6559506B1 (en) * | 2002-04-03 | 2003-05-06 | General Electric Company | Imaging array and methods for fabricating same |
JP4610173B2 (en) * | 2003-10-10 | 2011-01-12 | 株式会社半導体エネルギー研究所 | Method for manufacturing thin film transistor |
KR100659061B1 (en) * | 2004-09-20 | 2006-12-19 | 삼성에스디아이 주식회사 | Organic thin film transistor and Flat panel display with the same |
JP4333574B2 (en) | 2004-12-17 | 2009-09-16 | 三菱電機株式会社 | Liquid crystal display device and manufacturing method thereof |
WO2011027676A1 (en) | 2009-09-04 | 2011-03-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
JP2012151453A (en) | 2010-12-28 | 2012-08-09 | Semiconductor Energy Lab Co Ltd | Semiconductor device and driving method of the same |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6429821A (en) * | 1987-07-24 | 1989-01-31 | Nec Corp | Thin film field effect type transistor element array and its production |
FR2679057B1 (en) * | 1991-07-11 | 1995-10-20 | Morin Francois | LIQUID CRYSTAL, ACTIVE MATRIX AND HIGH DEFINITION SCREEN STRUCTURE. |
JPH07235678A (en) * | 1994-02-22 | 1995-09-05 | Hitachi Ltd | Thin film semiconductor device and manufacture thereof |
JP3574270B2 (en) * | 1996-04-17 | 2004-10-06 | 三菱電機株式会社 | Al taper dry etching method |
JP2798066B2 (en) * | 1996-08-05 | 1998-09-17 | 日本電気株式会社 | Thin film transistor, manufacturing method thereof and display device |
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2001
- 2001-05-11 JP JP2001142322A patent/JP2002033331A/en not_active Withdrawn