JP2002033331A5 - - Google Patents

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Publication number
JP2002033331A5
JP2002033331A5 JP2001142322A JP2001142322A JP2002033331A5 JP 2002033331 A5 JP2002033331 A5 JP 2002033331A5 JP 2001142322 A JP2001142322 A JP 2001142322A JP 2001142322 A JP2001142322 A JP 2001142322A JP 2002033331 A5 JP2002033331 A5 JP 2002033331A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2001142322A
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Japanese (ja)
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JP2002033331A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2001142322A priority Critical patent/JP2002033331A/en
Priority claimed from JP2001142322A external-priority patent/JP2002033331A/en
Publication of JP2002033331A publication Critical patent/JP2002033331A/en
Publication of JP2002033331A5 publication Critical patent/JP2002033331A5/ja
Withdrawn legal-status Critical Current

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JP2001142322A 2000-05-12 2001-05-11 Semiconductor device and method for manufacturing the same Withdrawn JP2002033331A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001142322A JP2002033331A (en) 2000-05-12 2001-05-11 Semiconductor device and method for manufacturing the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000140592 2000-05-12
JP2000-140592 2000-05-12
JP2001142322A JP2002033331A (en) 2000-05-12 2001-05-11 Semiconductor device and method for manufacturing the same

Publications (2)

Publication Number Publication Date
JP2002033331A JP2002033331A (en) 2002-01-31
JP2002033331A5 true JP2002033331A5 (en) 2008-05-22

Family

ID=26591806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001142322A Withdrawn JP2002033331A (en) 2000-05-12 2001-05-11 Semiconductor device and method for manufacturing the same

Country Status (1)

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JP (1) JP2002033331A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6559506B1 (en) * 2002-04-03 2003-05-06 General Electric Company Imaging array and methods for fabricating same
JP4610173B2 (en) * 2003-10-10 2011-01-12 株式会社半導体エネルギー研究所 Method for manufacturing thin film transistor
KR100659061B1 (en) * 2004-09-20 2006-12-19 삼성에스디아이 주식회사 Organic thin film transistor and Flat panel display with the same
JP4333574B2 (en) 2004-12-17 2009-09-16 三菱電機株式会社 Liquid crystal display device and manufacturing method thereof
WO2011027676A1 (en) 2009-09-04 2011-03-10 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
JP2012151453A (en) 2010-12-28 2012-08-09 Semiconductor Energy Lab Co Ltd Semiconductor device and driving method of the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6429821A (en) * 1987-07-24 1989-01-31 Nec Corp Thin film field effect type transistor element array and its production
FR2679057B1 (en) * 1991-07-11 1995-10-20 Morin Francois LIQUID CRYSTAL, ACTIVE MATRIX AND HIGH DEFINITION SCREEN STRUCTURE.
JPH07235678A (en) * 1994-02-22 1995-09-05 Hitachi Ltd Thin film semiconductor device and manufacture thereof
JP3574270B2 (en) * 1996-04-17 2004-10-06 三菱電機株式会社 Al taper dry etching method
JP2798066B2 (en) * 1996-08-05 1998-09-17 日本電気株式会社 Thin film transistor, manufacturing method thereof and display device

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