JP2002009036A5 - - Google Patents
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- JP2002009036A5 JP2002009036A5 JP2000186474A JP2000186474A JP2002009036A5 JP 2002009036 A5 JP2002009036 A5 JP 2002009036A5 JP 2000186474 A JP2000186474 A JP 2000186474A JP 2000186474 A JP2000186474 A JP 2000186474A JP 2002009036 A5 JP2002009036 A5 JP 2002009036A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000186474A JP4369022B2 (ja) | 2000-06-21 | 2000-06-21 | スピン処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000186474A JP4369022B2 (ja) | 2000-06-21 | 2000-06-21 | スピン処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002009036A JP2002009036A (ja) | 2002-01-11 |
| JP2002009036A5 true JP2002009036A5 (hr) | 2007-08-16 |
| JP4369022B2 JP4369022B2 (ja) | 2009-11-18 |
Family
ID=18686630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000186474A Expired - Fee Related JP4369022B2 (ja) | 2000-06-21 | 2000-06-21 | スピン処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4369022B2 (hr) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4685022B2 (ja) * | 2003-10-21 | 2011-05-18 | セミトゥール・インコーポレイテッド | ワークピースを処理するためのシステム |
| JP2008246436A (ja) * | 2007-03-30 | 2008-10-16 | Kureo:Kk | 洗浄容器の遠心脱水装置 |
| JP4995669B2 (ja) * | 2007-08-30 | 2012-08-08 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
| JP5676143B2 (ja) * | 2010-05-20 | 2015-02-25 | 株式会社ディスコ | 洗浄装置 |
| JP5956946B2 (ja) * | 2013-03-13 | 2016-07-27 | 東京エレクトロン株式会社 | 液処理装置および液処理方法 |
| AU2019202067B1 (en) * | 2019-03-18 | 2020-07-09 | Yantai Tanyi Crafts&Gifts Co., Ltd. | A crystal jewelry cleaning apparatus |
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2000
- 2000-06-21 JP JP2000186474A patent/JP4369022B2/ja not_active Expired - Fee Related