JP2002005332A - Fluid controller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fluid controller that can completely eliminate an operational error in passage opening and closing. SOLUTION: A stopper 26 capable of engagement with a passage opening and closing handle 8 has a full-opening phase turning blocking portion 31 for blocking turning movement of the handle in a full opening position, and a full- closing phase turning blocking portion 32 for blocking turning movement of the handle in a full closing position.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid controller such as an on-off valve used in a semiconductor manufacturing apparatus and the like.
The present invention relates to a fluid controller having a device for locking a passage opening / closing handle in a predetermined position.

[0002]

2. Description of the Related Art There is a fluid controller used in a semiconductor manufacturing apparatus in which a passage opening / closing handle is manually turned to open or close a passage completely. Then, the position of the open / close handle changed during the operation of the device, and there was a problem that the fluid could not flow correctly and the product could be adversely affected, resulting in an accident.
There has been proposed a lock device for a flow path opening / closing handle in which the handle is fixed at one of the fully opened position and the fully closed position (see JP-A-11-6581).

[0003]

The above-mentioned conventional lock device for a channel opening / closing handle only completely fixes the handle in one of a fully opened state and a fully closed state. Therefore, the conventional problem of erroneous operation prevention is completely solved. Could not.

[0004] It is an object of the present invention to provide a fluid controller which can completely eliminate erroneous operations related to opening and closing of a flow path.

Another object of the present invention is to provide a fluid controller which has a function of locking the above-mentioned flow passage opening / closing handle and does not increase the space seen from a plane.

[0006]

SUMMARY OF THE INVENTION A fluid controller according to the present invention comprises a fluid controller main body, and a flow path opening / closing handle which is rotated by 90 degrees with respect to switching between full opening and full closing. A stopper support fixed to the fluid controller body, and a stopper which is provided on the stopper support so as to be non-rotatable and vertically movable, and engages with the flow path opening / closing handle to prevent the rotation when moving upward. In the fluid controller comprising: a stopper, a fully-opened rotation preventing portion that prevents rotation of the handle in the fully-open position, and a fully-closed rotation prevention portion that prevents rotation of the handle in the fully-closed position. Is provided.

[0007] The fluid controller main body means a portion of the fluid controller which is fixed to a rotating passage opening / closing handle. For example, the fluid controller is a valve box provided with a passage. In the case of having a (body) and a valve cover (bonnet) fixed over the body, a combination of the two is referred to as a fluid controller body.

According to the fluid controller of the present invention, the stopper that engages with the flow path opening / closing handle and prevents its rotation cannot rotate with respect to the stopper support fixed to the fluid controller body. Therefore, regardless of whether the handle is in the fully opened or fully closed position, the position is not inadvertently changed, and an accident such as a fluid not flowing correctly and adversely affecting the product is prevented.

The handle has a substantially elliptical shape when viewed from a plane, and the stopper support is formed in a substantially rectangular plate shape by coupling the first and second members, and both members are coupled to each member. At the same time, a recess serving as a through hole for fitting the main body and a recess serving as a through hole for inserting the stopper are formed,
The stopper comprises a vertical portion slidably fitted into the stopper fitting through hole and provided with a lock mounting hole, and a horizontal portion located at the upper end thereof. A concave surface is formed as a full-opening rotation preventing portion that abuts on one side surface when in one of the closed positions, and is provided at a central portion of the concave surface at one end when the handle is at the other position. There is a case where a recess is provided as a fully-closed rotation preventing portion for accommodating therein. By doing so, the portion of the lock device that protrudes from the fluid controller main body when viewed from a plane can be reduced, and the fluid controller with the lock mechanism can be installed without interfering with devices adjacent to the fluid controller. can do.

[0010]

Embodiments of the present invention will be described below with reference to the drawings. In the following description, the left and right in FIG. 1 are referred to as left and right, the lower in FIG.

A fluid controller (1) according to the present invention comprises a known diaphragm valve and a lock device (21) for a flow passage opening / closing handle added thereto, and includes an inlet pipe joint (3) and an outlet pipe joint ( A body (2) provided with 4), a substantially cylindrical hood (5) fitted over the body (2), and a hood (5)
Bonnet nut (6) for fixing the hood to the body (2), panel nut (7) fitted over the bonnet (5), and a flow path opening / closing handle that can be turned clockwise or counterclockwise
(8), a lock device (21) for the flow passage opening / closing handle, a valve stem that moves up and down with rotation of the flow passage opening / closing handle (8), and an inlet in the body (2) as the valve stem moves up and down. Diaphragm (not shown) that blocks or opens communication between the passage and the outlet passage
And

The inlet fitting (3) projects leftward from the body (2), and the outlet fitting (4) projects rightward from the body (2). The flow passage opening / closing handle (8) has a substantially elliptical shape when viewed from a plane, and when fully closed, as shown in FIGS.
(3) perpendicular to the direction connecting the outlet fitting (4),
When fully opened, as shown in FIGS. 3 and 4, the longitudinal direction thereof is oriented in the left-right direction, and is made to coincide with the direction connecting the inlet pipe joint part (3) and the outlet pipe joint part (4).

The handle lock device (21) fixes the flow path opening / closing handle (8) at the fully closed position and the fully open position at that position, and includes a stopper support (5) fixed to the fluid controller body (5). A stopper (26) that is provided on the stopper support (22) so as to be non-rotatable and vertically movable, and engages with the flow path opening / closing handle (8) to prevent the rotation; Two
And a lock (27) for limiting a person who can release the engagement of (6) to a key holder.

Although the bonnet (5) is substantially cylindrical, FIG.
As shown in FIG. 4, the front and rear portions of the outer peripheral surface of the exposed portion immediately below the flow path opening / closing handle (8) are cut, so that the bonnet (5) has flat front and rear surfaces parallel to each other. (5a) and (5b) are formed.

The stopper support (22) has a rectangular plate shape as a whole, and the front and rear flat surfaces (5
a) A right half (22a) having the same height as (5b) and a left half (22b) having a lower height and receiving the stopper (26). On the right side of the stopper support (22), a through hole (23) for fitting the main body is provided so that a part thereof extends over the left half (22b), and the left side of the stopper support (22) is provided. The half portion (22b) is provided with a rectangular stopper insertion through hole (28) that is narrower in the front-rear direction and longer in the left and right direction than the main body insertion through hole (23).

As shown in detail in FIGS. 6 and 7, the stopper support (22) is a front half (first member) of the same shape.
(24) and the rear half second member (25) are formed by butting against each other and joined together. When the first and second members (24) and (25) abut each other, when the two members (24) and (25) are connected to each other, a recess (33) having a horizontal cross-sectional rectangular shape that becomes a through hole (23) for main body insertion. ) (34) and through hole for stopper insertion (28)
The recesses (35) and (36) having a rectangular horizontal section are formed. Further, a pin insertion hole (37) (38) extending forward and rearward is provided on the abutting surface between the recesses (33) (34) and the recesses (35) (36). At the right end of the member (24),
A bolt insertion hole (39) is provided at the right end of the second member (25) with a screw hole (40). And each member (24)
The connecting pin (41) is inserted tightly into the pin insertion holes (37) and (38) provided in the (25), and the screw hole (40) of the second member (25) is inserted.
Then, the flat members (42) passed through the bolt insertion holes (39) of the first member (24) are screwed together, so that the two members (24) and (25) are connected.

Each member to be a through hole (23) for inserting the main body.
The lower ends of the recesses (33) and (34) of (24) and (25) do not interfere with the exposed portions of the bonnet (5) where the front and rear parallel flat surfaces are not formed. It is formed large. Although not shown, a pin for hiding the head of a flat screw (42) connecting the first and second members (24) and (25) is
Forcibly fitted into the bolt insertion hole (39).

The stopper (26) has a through hole (2
The vertical part (29) is vertically movably fitted in 3), and includes a horizontal part (30) provided at the upper end thereof and protruding above the stopper support.

As shown in FIG. 2, a concave surface (31) as a full-opening rotation preventing portion which abuts on the left side surface of the horizontal portion (30) when the handle (8) is in the fully closed position, as shown in FIG. At the center of the concave surface (31), there is provided a recess (32) as a fully closed rotation preventing portion for accommodating one end of the handle (8) when the handle (8) is at the fully open position. From the state of FIG. 2,
Once the stopper (26) has been moved downward, handle (8)
When the stopper is moved upward again by 90 degrees, as shown in FIG. 4, one end of the handle (8) is recessed (3).
The handle (8) is locked in both the fully open and fully closed positions.

The front and rear length of the horizontal portion (30) is determined by the stopper support
The shape of the concave surface (31) is made to correspond to the shape of the left side surface of the flow path opening / closing handle (8). The horizontal section (30) has a larger horizontal cross-sectional area than the stopper fitting through-hole (28), and the horizontal part (30) is received by the edge of the stopper fitting through-hole (28). The vertical part (29) has a lock mounting hole (43)
Is provided. Also, at the lower end of the vertical portion (29), FIG.
When the stopper (26) is lifted to the position indicated by the dashed line in
The front protruding edge (4) which prevents the stopper (26) from slipping upward by engaging with the edge of the stopper fitting through hole (28).
4) is provided.

As shown in detail in FIGS. 8 and 9, the vertical portion (29) and the horizontal portion (30) are separate members, and the horizontal portion (3
0) The upper end of the vertical portion (29) is fitted into a groove provided on the lower surface.

The lock (27) may be, for example, a commercially available padlock. As shown by the solid line in FIG. 5, when the lock (27) is not engaged, the upper surface of the horizontal portion (30) is located on the right half of the stopper support (22).
The stopper (26) is flush with the upper surface of (22a) so as not to engage with the channel opening / closing handle (8). Then, when the stopper (26) is lifted from this state, as shown by a chain line in FIG.
(44) stops when it engages with the edge of the stopper insertion through-hole (28), and in this state, the left half of the stopper support (22)
(22b) Insert the foot of the lock (27) into the lock mounting hole (32) exposed above
(27a), the stopper (26) projects upward from the upper surface of the right half (22a) of the stopper support (22) by the thickness of the foot (27a) of the lock (27). The locked state shown in FIG. 4 is obtained, and unless the lock (27) is removed with a key, it becomes impossible to rotate the flow path opening / closing handle (8). Lock (27)
Then, the stopper 26 is lowered by its own weight to the position indicated by the solid line in FIG. 5 to be in the unlocked state.

[Brief description of the drawings]

FIG. 1 is a front view showing a fluid controller when a handle is in a fully closed position.

FIG. 2 is a plan view of the same.

FIG. 3 is a front view showing the fluid controller when the handle is at a fully opened position.

FIG. 4 is a plan view of the same.

FIG. 5 is a front view showing the fluid controller when the locking device of the handle is not locked.

FIG. 6 is an exploded perspective view of a main part of a lock device of the channel opening / closing handle.

FIG. 7 is an exploded perspective view after the assembly.

FIG. 8 is a front view showing the fluid controller when the handle is in the fully open position and the locking device for the handle is not locked.

9 is a sectional view taken along line IX-IX in FIG.

[Explanation of symbols]

 (1) Fluid controller (8) Channel opening / closing handle (21) Handle lock device (22) Stopper support (23) Body insertion hole (24) First member (25) Second member (26) Stopper ( 28) Through hole for stopper insertion (31) Vertical part (32) Lock hole (33) Recessed hole forming through hole for main body fitting (34) Recessed hole forming through hole for main body fitting (35) Recessed hole forming through hole for stopper insertion Location (36) Recess for forming a through hole for stopper insertion

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Naoto Tabashi 2-3-2, Noribori, Nishi-ku, Osaka-shi Inside Fujikin Co., Ltd. (72) Inventor Noriyoshi Tsubota 2-2-2, Noribori, Nishi-ku, Osaka Fujikin Co., Ltd. F term (reference) 3H064 AA08 BA01 CA01 CA10 CA12 DA02

Claims (2)

[Claims] 1. A fluid controller body (5) and a fluid controller body (5).
A channel opening / closing handle (8) that switches between fully open and fully closed by being rotated 0 degrees, a stopper support (22) fixed to the fluid controller body (5), and a stopper support (22). A fluid control device comprising a stopper (26) that is immovable and movable up and down and engages with the flow path opening / closing handle (8) during upward movement to prevent its rotation. ) Is provided with a fully-opened rotation preventing portion (31) for preventing rotation of the handle in the fully-open position, and a fully-closed rotation preventing portion (32) for preventing rotation of the handle in the fully-closed position. A fluid controller. 2. A handle (8) having a substantially elliptical shape in a plan view, wherein a stopper support (22) includes first and second members.
(24) (25) is formed into a substantially rectangular plate shape by being joined, and each member (24) (25) has a through hole for fitting the main body when both members (24) (25) are joined. The recesses (33) and (34) serving as (23) and the recesses (35) and (36) serving as stopper through holes (28) are formed, and the stopper (26) is provided with the stopper fitting through hole ( A vertical portion (29) slidably fitted in the lock portion (28) and provided with a lock mounting hole (33), and a horizontal portion (30) located at the upper end thereof. 30), a concave surface (31) is formed as a full-opening rotation preventing portion that abuts on one side surface when the handle (8) is in one of the fully opened and fully closed positions, and the concave surface (31) 2. The fluid controller according to claim 1, wherein a concave portion (32) is provided in a central portion of the handle (8) as a fully closed rotation preventing portion for receiving one end of the handle (8) when the handle (8) is at the other position.