JP4217813B2 - Locking device for flow path opening / closing handle of fluid controller - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an apparatus for locking a flow path opening / closing handle of a fluid controller such as an opening / closing valve used in a semiconductor manufacturing apparatus or the like in a fully open or fully closed position.
[0002]
[Prior art]
In the fluid controller, the channel opening / closing handle is operated as necessary to be fully opened or fully closed, but a channel opening / closing handle locking device that is fixed at this position has not been known.
[0003]
[Problems to be solved by the invention]
For this reason, the conventional fluid controller has a problem that the position of the opening / closing handle changes during operation of the semiconductor manufacturing apparatus, leading to an accident such that the fluid does not flow correctly and adversely affects the product.
[0004]
An object of the present invention is to provide a lock device for a channel opening / closing handle that can eliminate an erroneous operation related to channel opening / closing of a fluid controller.
[0005]
[Means for Solving the Problems and Effects of the Invention]
A fluid controller opening / closing handle locking device according to the present invention is a device that locks a channel opening / closing handle that is rotated relative to a fluid controller main body in a fully open or fully closed position. a fixed stop support, and a stopper for preventing the rotation engages the and flow channel opening and closing handle provided not to be rotatable in the stopper support, the stopper support fluid controller A substantially U-shaped first member having a pair of side walls sandwiching two opposing flat surfaces of the main body from both sides, and the first member dropped from the fluid controller main body between the front end portions of both side walls. consists of a second member straight that prevent, by the first member and the second member, the body fitting through-hole for inserting fitting the fluid controller body is formed, the stopper is first Provided integrally with one member And those are.
[0006]
The fluid controller body means a portion of the fluid controller that is fixed to the rotating flow path opening / closing handle. For example, the fluid controller has a valve box (body) in which the flow path is provided. And a valve lid (bonnet) fixed on the cover, the fluid controller body is a combination of the two.
[0007]
According to the fluid controller opening / closing handle locking device of the present invention, the stopper that engages with the passage opening / closing handle and prevents its rotation is rotated with respect to the stopper support fixed to the fluid controller body. Since it is impossible to move, the position of the opening / closing handle will not be changed by carelessness, and accidents such as the fluid not flowing correctly and adversely affecting the product can be prevented.
[0008]
The stopper support is passed between the first member having a substantially U-shape having a pair of side walls sandwiching two opposing flat surfaces of the fluid controller main body from both sides, and the first ends of the side walls. The member may be a linear second member that prevents the member from falling off the fluid controller body, and the stopper may be provided integrally with the stopper support. In this way, the first member is rotated relative to the fluid controller body by inserting the first member into the fluid controller body with the two side walls of the first member aligned with the flat surface of the fluid controller body. It becomes impossible to move. In this state, the first member is prevented from falling off the fluid controller body by blocking the second member between the front end portions of both side walls.
[0009]
The second member is, for example, a pin with a head that is inserted into a second member insertion hole provided on each side wall of the U-shaped first member. Then, a through hole is provided in the shaft portion of the second member so that one side wall is sandwiched between the head of the second member and the through hole, and the second member is inserted from the second member insertion hole side of one side wall. The second member is inserted into the second member insertion hole on the other side wall, and the lock is attached using the through hole of the second member. The lock of the second member is secured by the lock and the head of the second member, and the flow path opening / closing handle cannot be rotated unless the lock is removed. Thereby, it is possible to eliminate any erroneous operation associated with opening and closing the flow path of the fluid controller. In addition, in addition to using a lock, either one of the second member insertion holes on both side walls is a screw hole, a screw portion is provided at the tip of the second member, and this second member is a second member insertion hole on one side wall. May be inserted into the screw hole of the other side wall to prevent the second member from being removed.
[0010]
The stopper is preferably attached to the stopper support so that it can move up and down between a locked position that engages with the flow path opening / closing handle and an unlocked position that does not engage. In this way, it is possible to switch between the locked position and the unlocked position only by moving the stopper up and down, and the switching work is facilitated.
[0011]
In order to achieve such a configuration, for example, the stopper support is formed by joining the first and second members, and when the two members are joined to each member, the through hole for inserting the body And a recess to be a stopper insertion through hole, and the stopper has a vertical portion in which the stopper is slidably fitted into the stopper insertion through hole and a lock mounting hole is provided. It should just be.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings. In the following description, the left and right sides of FIGS. 1 and 4 are referred to as the left and right sides, and the bottom of FIGS. 3 and 5 is the front and the top is the back.
[0013]
1 to 3 show a fluid controller (1) and a channel opening / closing handle locking device (11) according to the present invention.
[0014]
The illustrated fluid controller (1) is a known diaphragm valve, and is fitted to a body (2) provided with an inlet pipe joint (3) and an outlet pipe joint (4), and the upper part of the body (2). A substantially cylindrical bonnet (5), a bonnet nut (6) for fixing the bonnet (5) to the body (2), a panel nut (7) fitted on the bonnet (5), and a clockwise or The flow path opening / closing handle (8) rotated counterclockwise, the valve stem (9) moving up and down with the rotation of the flow path opening / closing handle (8), and the vertical movement of the valve rod (9) And a diaphragm (not shown) that blocks or opens the communication between the inlet passage and the outlet passage in the body (2).
[0015]
The inlet fitting (3) protrudes leftward from the body (2), and the outlet fitting (4) protrudes rightward from the body (2). The flow path opening / closing handle (8) is substantially elliptical when viewed from above, and when fully opened, its longitudinal direction is directed to the left and right, and the inlet fitting (3) and outlet fitting (4) (The position indicated by the chain line in FIG. 2). When the flow path opening / closing handle (8) is rotated 90 ° counterclockwise from this position, the fully closed position (the position indicated by the solid line in FIGS. 1 and 2 and the position indicated by the chain line in FIG. 3) is obtained.
[0016]
The handle lock device (11) fixes the flow path opening / closing handle (8) in the fully closed position at that position, and has a through hole (19) for body fitting and is fixed to the fluid controller body (5). Of the support (12), the stopper (16) provided integrally with the support (12) and engaged with the flow path opening / closing handle (8) to prevent its rotation, and the stopper (16) And a lock (14) that limits a person who can release the engagement to a key holder.
[0017]
The support body (12) consists of a right wall (bottom wall) (15c) and front and rear side walls (15a) and (15b). The front and rear side walls (15a) and (15b) are used to connect the bonnet (5) of the fluid controller (1) to both the front and rear sides. To prevent the first member (15) from dropping from the bonnet (5) across the substantially U-shaped first member (15) sandwiched from the front and the front end portions of the front and rear side walls (15a) (15b) And a rod-shaped second member (13).
[0018]
Although the bonnet (5) is substantially cylindrical, the front and rear portions of the outer peripheral surface of the exposed portion just below the flow path opening / closing handle (8) are cut off, so that the bonnet (5) has a shape as shown in FIG. The front and rear flat surfaces (5a) and (5b) are formed opposite to the front and rear side walls (15a) and (15b) of the first member (15) and parallel to each other. The distance between the front side wall (15a) and the rear side wall (15a) is substantially equal to the distance between the front flat surface (5a) and the rear flat surface (5b) of the bonnet (5) which are parallel to each other. ing.
[0019]
The first member (15) is inserted from the right side into the exposed portion of the bonnet (5) where the front and rear flat surfaces (5a) and (5b) are formed parallel to each other. The contact surface of the right wall (15c) of the first member (15) with the bonnet (5) has an arcuate horizontal section along the bonnet (5). Thus, as shown in FIG. 3, the first member (15) and the second member (13) form a body fitting through-hole (19) having a substantially square horizontal cross section with only the right surface being arcuate. Yes.
[0020]
The stopper (16) is provided on the upper surface of the right wall (15c) of the first member (15) so as to protrude above the front and rear side walls (15a) and (15b) of the first member (15). Then, the contact surface (16a) of the stopper (16) to the flow path opening / closing handle (8) is made to coincide with the shape of the right side surface of the flow path opening / closing handle (8) indicated by a chain line in FIG. The road opening / closing handle (8) is prevented from rotating. The lower end portion of the first member (15) is formed so as not to interfere with the exposed portion of the bonnet (5) where the parallel front and rear flat surfaces are not formed.
[0021]
The front and rear side walls (15a) and (15b) of the first member (15) are respectively provided with second member insertion holes (17) penetrating in the front-rear direction and having a common central axis. The second member (13) is a pin with a head (13a), and this second member (13) is inserted into the second member insertion hole (17) of the front side wall (15a) from the front side, It is inserted through the second member insertion hole (17) of the side wall (15b). A portion of the second member (13) located slightly rearward of the front side wall (15a) has a small diameter, and a vertical through hole (18) is provided therein. A lock (14) that prevents the second member (13) from being detached is attached using the through hole (18). The lock (14) may be a commercially available padlock, for example, and the foot (14a) may be inserted through the through hole (18) and inserted into the hole of the lock (14). As a result, the front side wall (15a) is sandwiched between the lock (14) and the head (13a) of the second member (13), thereby preventing the second member (13) from being removed. Therefore, unless the lock (14) is removed using a key, the flow path opening / closing handle (8) cannot be rotated.
[0022]
To assemble the controller (1), place the bonnet (5) on the body (2) so that the flat surfaces (5a) and (5b) of the bonnet (5) face the same direction as the front and back surfaces of the body (2). Fit the two and fix both (2) and (5) with the bonnet nut (6), then move the valve stem (9) up and down to determine the fully closed position of the valve stem (9). Both are fixed so that the flow path opening / closing handle (8) is also in the fully closed position when is in the fully closed position. As a result, the channel opening / closing handle (8) can be locked when it is in the fully closed position as described above. To lock the flow path opening / closing handle (8) when it is in the fully open position, when assembling the controller (1), the flat surfaces (5a) (5b) of the bonnet (5) are connected to the left and right surfaces of the body (2). The bonnet (5) is fitted over the body (2) so that it faces in the same direction as the above, and then the same as described above.
[0023]
In the above-described embodiment, the contact surface (16a) of the stopper (16) to the flow path opening / closing handle (8) is matched with the right side surface shape of the flow path opening / closing handle (8) in the fully closed position. However, the shape of the stopper (16) is not limited to this, and various modifications are possible as long as the stopper (16) engages with the flow path opening / closing handle (8) to prevent its rotation. The shape of the flow path opening / closing handle (8) is substantially elliptical when viewed from above, but even if the shape of the flow path opening / closing handle is other than this, as long as the flow path opening / closing handle is not completely cylindrical, A lock device for the flow path opening / closing handle can be obtained in the same manner as described above. When the flow path opening / closing handle has a complete cylindrical shape, the flow path opening / closing handle is provided with an engaging portion that engages with the first member. It is also possible to obtain a locking device.
[0024]
4 to 8 show a second embodiment of the handle lock device. The fluid controller is the same as that of the first embodiment, and the same reference numerals are given and description thereof is omitted.
[0025]
The handle lock device (21) fixes the flow path opening / closing handle (8) in the fully closed position at that position, and has a square body fitting through-hole (23) and a fluid controller body (5). A support body (22) fixed to the support body (22), and a stopper (22) which is provided on the support body (22) so as not to rotate and to be vertically movable, and engages with the flow path opening / closing handle (8) to prevent the rotation ( 26) and a lock (27) that limits the person who can release the engagement of the stopper (26) to the key holder.
[0026]
The stopper support (22) is formed by abutting and joining a front half (first member) (24) and a rear half second member (25) of the same shape to each other. . The stopper support (22) has a rectangular plate shape as a whole, the right half (22a) of the bonnet (5) having the same height as the flat front and rear surfaces (5a) and (5b) parallel to each other, and a height higher than this. And a left half (22b) receiving a stopper (26). The through hole (23) for inserting the main body is provided in the right part of the stopper support (22) so that a part thereof is on the left half part (22b). The left half (22b) of the stopper support (22) is provided with a rectangular stopper insertion through-hole (28) having a narrower front-rear width and a longer left and right width than the body insertion through-hole (23).
[0027]
The stopper (26) consists of a contact part (29) extending in the front-rear direction where the contact surface (29a) to the flow path opening / closing handle (8) is formed on the right side, and a front-rear central part of the contact part (29). It consists of a horizontal base portion (30) extending to the left and a vertical portion (31) extending downward from the horizontal base portion (30) and slidably fitted into the stopper insertion through hole (23).
[0028]
The front / rear length of the contact portion (29) is equal to the front / rear width of the stopper support (22), and the shape of the contact surface (29a) matches the shape of the left side surface of the flow path opening / closing handle (8). It has been made. The horizontal cross-sectional area of the horizontal base portion (30) is larger than the stopper fitting through hole (28), and the horizontal base portion (30) is received by the edge of the stopper fitting through hole (28). The vertical portion (31) is provided with a lock mounting hole (32) that passes through the vertical portion (31) in the front-rear direction.
[0029]
The lock (27) is the same as that of the first embodiment.
[0030]
As shown in FIG. 6, in the state where the lock (27) is not applied, the upper surfaces of the contact portion (29) and the horizontal base portion (30) are the same as the upper surface of the right half (22a) of the stopper support (22). The stopper (26) is flush with the flow path opening / closing handle (8). Then, lift the stopper (26) from this state, and pass the foot (27a) of the lock (27) through the lock mounting hole (32) exposed above the left half (22b) of the stopper support (22). As shown in FIG. 4, the stopper (26) protrudes above the upper surface of the right half (22a) of the stopper support (22) by the thickness of the foot (27a) of the lock (27) to open and close the channel. The state is engaged with the handle (8). In this state, the channel opening / closing handle (8) cannot be rotated unless the lock (27) is removed using a key.
[0031]
Thus, the stopper (26) can be moved up and down between the upper position (lock position) engaged with the flow path opening / closing handle (8) and the lower position (unlock position) not engaged ( 22), it is possible to switch between the locked position and the unlocked position only by moving the stopper (26) up and down. Therefore, in the first embodiment, the second member (13) must be removed from the first member (15) until it can be unlocked. Then, it becomes unlocked just by removing the lock (27), and the lock / unlock switching work becomes easy.
[0032]
The lower end of the vertical portion (31) of the stopper (26) is engaged with the edge portion of the stopper fitting through hole (28) when the stopper (26) is lifted up to the chain line position shown in FIG. Thus, a forward projecting edge (31a) is provided to prevent the stopper (26) from being pulled upward.
[0033]
As shown in detail in FIGS. 7 and 8, the butted portions of the first and second members (24) and (25) are connected to the through-holes for inserting the body (23) when the members (24) and (25) are joined. ) Having horizontal rectangular sections (33) and (34) and horizontal concave sections (35) and (36) serving as stopper fitting through holes (28). Further, pin insertion holes (37) and (38) extending in the front-rear direction are provided on the abutting surfaces between the recesses (33) and (34) and the recesses (35) and (36), respectively. A bolt insertion hole (39) is provided at the right end of the member (24), and a screw hole (40) is provided at the right end of the second member (25). Then, the connection pin (41) is tightly inserted into the pin insertion holes (37) and (38) provided in the members (24) and (25), and the screw hole (40) of the second member (25) Both the members (24) and (25) are joined by screwing the flat machine screw (42) passed through the bolt insertion hole (39) of the first member (24).
[0034]
Note that the front and rear flat surfaces of the bonnet (5) that are parallel to each other are not formed at the lower ends of the recesses (33) and (34) of the members (24) and (25) that become the through holes (23) for inserting the main body. It is formed larger than the portion above it so as not to interfere with the exposed portion. Although not shown, a pin for concealing the head of the flat machine screw (42) connecting the first and second members (24) and (25) is forcibly inserted into the bolt insertion hole (39).
[0035]
On the lower surface of the first member (24), it is preferable that a vertical cover plate (43) is integrally provided as shown by a chain line in FIG. As shown in FIGS. 9 and 10, the vertical cover plate (43) is parallel to the vertical portion (31) of the stopper (26) with the stopper (26) being in the lower position, and the lock mounting hole (32). Can be hidden. As a result, the lock (27) cannot be locked unless the stopper (26) is lifted to the upper position, and the lock (27) is locked with the stopper (26) in the lower position. Can be prevented.
[Brief description of the drawings]
FIG. 1 is a front view showing an external appearance of a fluid controller and a first embodiment of a channel opening / closing handle locking device according to the present invention;
FIG. 2 is an enlarged vertical sectional view of a main part.
FIG. 3 is a partially cutaway plan view of the main part.
FIG. 4 is a partially cutaway front view showing a second embodiment of the channel opening / closing handle locking device according to the present invention;
FIG. 5 is a plan view of the same.
FIG. 6 is a front view of the flow path opening / closing handle according to the second embodiment when the locking device is not locked.
FIG. 7 is an exploded perspective view of a main part of a locking device for a flow path opening / closing handle according to a second embodiment.
FIG. 8 is an exploded perspective view after the assembly.
FIG. 9 is a front view showing a modified example of the channel opening / closing handle locking device of the second embodiment.
10 is a cross-sectional view taken along line XX of FIG.
[Explanation of symbols]
(1) Fluid controller
(5) Bonnet (fluid controller body)
(5a) Front flat surface
(5b) Rear flat surface
(8) Flow path opening / closing handle
(11) Handle lock device
(12) Stopper support
(13) Second member
(14) Second member retaining lock
(15) First member
(15a) Front side wall
(15b) Rear side wall
(16) Stopper
(18) Lock mounting through hole
(19) Through hole for insertion into the body
(21) Handle lock device
(22) Stopper support
(23) Through hole for insertion into the body
(24) First member
(25) Second member
(26) Stopper
(28) Stopper insertion through hole
(31) Vertical section
(32) Lock mounting hole
(33) Through-hole formation recess for body insertion
(34) Through hole formation recess for body insertion
(35) Through hole formation recess for stopper insertion
(36) Through hole formation recess for stopper insertion

Claims (2)

A device for locking the flow path opening / closing handle (8) rotated relative to the fluid controller main body (5) in a fully open or fully closed position, and a stopper support (fixed to the fluid controller main body (5)) 12) comprises a stopper (16) to prevent the rotation engages the stopper support (and flow channel opening and closing handle provided not to be rotatable in 12) (8), the stopper support (12 ) is a substantially U-shaped first having a pair of side walls (15a) (15b) sandwiching two flat surfaces (5a) (5b) facing each other of the fluid controller body (5) from both sides . A second linear member that is passed between the member (15) and the distal ends of the side walls (15a) (15b) and prevents the first member (15 ) from falling off the fluid controller body (5) . becomes because the member (13), the first member (13) and the second member (15) Therefore, the body fitting through-hole for inserting fitting the fluid controller body (5) (19) is formed, Stopper (16) is attached to first member (15) . A device for locking a flow path opening / closing handle of a fluid controller provided in a body . The locking device for the flow path opening / closing handle of the fluid controller according to claim 1 , wherein the second member (13) is provided with a through hole (18) to which the second member retaining prevention lock (14) is attached.

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