JP2001518852A5 - - Google Patents
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- Publication number
- JP2001518852A5 JP2001518852A5 JP1998542929A JP54292998A JP2001518852A5 JP 2001518852 A5 JP2001518852 A5 JP 2001518852A5 JP 1998542929 A JP1998542929 A JP 1998542929A JP 54292998 A JP54292998 A JP 54292998A JP 2001518852 A5 JP2001518852 A5 JP 2001518852A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US4340497P | 1997-04-04 | 1997-04-04 | |
| US60/043,404 | 1997-04-04 | ||
| US4944097P | 1997-06-12 | 1997-06-12 | |
| US60/049,440 | 1997-06-12 | ||
| PCT/US1998/006622 WO1998045087A1 (en) | 1997-04-04 | 1998-04-03 | Improved polishing pads and methods relating thereto |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001518852A JP2001518852A (ja) | 2001-10-16 |
| JP2001518852A5 true JP2001518852A5 (enExample) | 2005-11-24 |
Family
ID=26720384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP54292998A Ceased JP2001518852A (ja) | 1997-04-04 | 1998-04-03 | 改良研磨パッド及びこれに関連する方法 |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP1015176B1 (enExample) |
| JP (1) | JP2001518852A (enExample) |
| KR (1) | KR100485847B1 (enExample) |
| DE (1) | DE69812127T2 (enExample) |
| WO (1) | WO1998045087A1 (enExample) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6390890B1 (en) | 1999-02-06 | 2002-05-21 | Charles J Molnar | Finishing semiconductor wafers with a fixed abrasive finishing element |
| KR100585480B1 (ko) * | 1999-01-21 | 2006-06-02 | 롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스 인코포레이티드 | 개선된 연마 패드 및 기판의 연마 방법 |
| US6641463B1 (en) | 1999-02-06 | 2003-11-04 | Beaver Creek Concepts Inc | Finishing components and elements |
| US20010041511A1 (en) * | 2000-01-19 | 2001-11-15 | Lack Craig D. | Printing of polishing pads |
| DE60114183T2 (de) * | 2000-05-27 | 2006-07-13 | Rohm and Haas Electronic Materials CMP Holdings, Inc., Newark | Polierkissen zum chemisch-mechanischen planarisieren |
| US6477926B1 (en) | 2000-09-15 | 2002-11-12 | Ppg Industries Ohio, Inc. | Polishing pad |
| US6641471B1 (en) | 2000-09-19 | 2003-11-04 | Rodel Holdings, Inc | Polishing pad having an advantageous micro-texture and methods relating thereto |
| US6568997B2 (en) | 2001-04-05 | 2003-05-27 | Rodel Holdings, Inc. | CMP polishing composition for semiconductor devices containing organic polymer particles |
| JP2003062748A (ja) * | 2001-08-24 | 2003-03-05 | Inoac Corp | 研磨用パッド |
| US7059936B2 (en) | 2004-03-23 | 2006-06-13 | Cabot Microelectronics Corporation | Low surface energy CMP pad |
| EP1637281B1 (en) | 2004-09-17 | 2008-05-28 | JSR Corporation | Chemical mechanical polishing pad and chemical mechanical polishing process |
| US20060089095A1 (en) | 2004-10-27 | 2006-04-27 | Swisher Robert G | Polyurethane urea polishing pad |
| TWI385050B (zh) * | 2005-02-18 | 2013-02-11 | Nexplanar Corp | 用於ｃｍｐ之特製拋光墊及其製造方法及其用途 |
| KR100909605B1 (ko) | 2005-03-08 | 2009-07-27 | 도요 고무 고교 가부시키가이샤 | 연마 패드 및 그 제조 방법 |
| KR101134058B1 (ko) | 2005-05-17 | 2012-04-16 | 도요 고무 고교 가부시키가이샤 | 연마 패드 |
| JP4884725B2 (ja) | 2005-08-30 | 2012-02-29 | 東洋ゴム工業株式会社 | 研磨パッド |
| JP4898172B2 (ja) * | 2005-09-08 | 2012-03-14 | 日本ミクロコーティング株式会社 | 研磨パッド及びその製造方法並びに研磨方法 |
| JP5031236B2 (ja) | 2006-01-10 | 2012-09-19 | 東洋ゴム工業株式会社 | 研磨パッド |
| US7169030B1 (en) * | 2006-05-25 | 2007-01-30 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing pad |
| US7445847B2 (en) * | 2006-05-25 | 2008-11-04 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing pad |
| US7963827B2 (en) | 2006-07-14 | 2011-06-21 | Saint-Gobain Abrastives, Inc. | Backingless abrasive article |
| CN101489721B (zh) | 2006-08-28 | 2014-06-18 | 东洋橡胶工业株式会社 | 抛光垫 |
| JP5008927B2 (ja) | 2006-08-31 | 2012-08-22 | 東洋ゴム工業株式会社 | 研磨パッド |
| US7569268B2 (en) * | 2007-01-29 | 2009-08-04 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing pad |
| JP5078000B2 (ja) | 2007-03-28 | 2012-11-21 | 東洋ゴム工業株式会社 | 研磨パッド |
| JP2009148891A (ja) * | 2009-04-02 | 2009-07-09 | Nitta Haas Inc | 研磨パッド |
| JP5634903B2 (ja) * | 2010-02-25 | 2014-12-03 | 東洋ゴム工業株式会社 | 研磨パッド |
| JP2017064886A (ja) * | 2015-10-02 | 2017-04-06 | 富士紡ホールディングス株式会社 | 研磨パッド |
| US10786885B2 (en) | 2017-01-20 | 2020-09-29 | Applied Materials, Inc. | Thin plastic polishing article for CMP applications |
| KR102203714B1 (ko) * | 2018-07-17 | 2021-01-18 | 한국철도기술연구원 | 사출강도 개선을 위한 인서트 일체형 롤러 |
| US11717936B2 (en) | 2018-09-14 | 2023-08-08 | Applied Materials, Inc. | Methods for a web-based CMP system |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4927432A (en) * | 1986-03-25 | 1990-05-22 | Rodel, Inc. | Pad material for grinding, lapping and polishing |
| US5177908A (en) * | 1990-01-22 | 1993-01-12 | Micron Technology, Inc. | Polishing pad |
| JPH04310365A (ja) * | 1991-04-08 | 1992-11-02 | Toshiba Corp | 研磨皿 |
| US5273558A (en) * | 1991-08-30 | 1993-12-28 | Minnesota Mining And Manufacturing Company | Abrasive composition and articles incorporating same |
| MY114512A (en) * | 1992-08-19 | 2002-11-30 | Rodel Inc | Polymeric substrate with polymeric microelements |
| US5441598A (en) * | 1993-12-16 | 1995-08-15 | Motorola, Inc. | Polishing pad for chemical-mechanical polishing of a semiconductor substrate |
| US5486131A (en) * | 1994-01-04 | 1996-01-23 | Speedfam Corporation | Device for conditioning polishing pads |
| US5489233A (en) * | 1994-04-08 | 1996-02-06 | Rodel, Inc. | Polishing pads and methods for their use |
| US5534106A (en) * | 1994-07-26 | 1996-07-09 | Kabushiki Kaisha Toshiba | Apparatus for processing semiconductor wafers |
| JP2001513450A (ja) * | 1997-08-06 | 2001-09-04 | ローデル ホールディングス インコーポレイテッド | 改良研磨パッド及びこれに関連する方法 |
-
1998
- 1998-04-03 EP EP98914471A patent/EP1015176B1/en not_active Expired - Lifetime
- 1998-04-03 KR KR10-1999-7009038A patent/KR100485847B1/ko not_active Expired - Lifetime
- 1998-04-03 JP JP54292998A patent/JP2001518852A/ja not_active Ceased
- 1998-04-03 DE DE69812127T patent/DE69812127T2/de not_active Expired - Fee Related
- 1998-04-03 WO PCT/US1998/006622 patent/WO1998045087A1/en not_active Ceased