JP2001356012A - Z-axis assembly of measuring instrument - Google Patents

Abstract

PROBLEM TO BE SOLVED: To acquire a Z-axis assembly of a three-dimensional measuring instrument having a little constituents, simple assembling steps and good appearance. SOLUTION: The Z-axis assembly of the three-dimensional measuring instrument for measuring a three-dimensional size on a surface of a material to be measured placed on a measuring instrument base 1 having a z-axis spindle 6 of a Z-axis direction mounted with a detector for measuring the surface of the material at a lower end by sending the spindle supported to the assembly 5 for precisely moving the material in directions X, Y in a substantially horizontal plane comprises a vertical prismatic rigid Z-axis bracket 8 partitioned therein to a spindle containing chamber 10 and a weight containing chamber 20 in a plane perpendicular to a length direction in such a manner that the spindle 6 fixed to one end of a suspension wire 24 is disposed in a state in which the spindle 6 is movable in its length direction by a guide means in the spindle containing chamber 10 and a pair of opposed rib-like weight guides 26A and 26B for guiding a counterweight 27 for balancing weights of the spindle 6 suspended to the other end of the wire 24 are projected from an inner surface of the Z-axis bracket 8 opposed to the containing chamber 20.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface texture measuring device for measuring the surface texture such as the size and roughness, waviness, contour, roundness and three-dimensional shape of an object to be measured, and more particularly to a surface texture measuring machine provided with a Z-axis spindle. The present invention relates to a Z-axis assembly.

[0002]

2. Description of the Related Art As is well known, in a portal type three-dimensional measuring machine as shown in FIG. 1, for example, a probe is sent in a Z-axis direction (generally in a vertical direction). A Z-axis assembly is mounted. That is, the symbol “A” in FIG. 5 is an X-axis guide extending in the X-axis direction in a horizontal plane, and the Z-axis assembly is placed on the X-axis guide A and A slider block B which is fed in the length direction is provided. A Z-axis bracket E provided with a guide pad D for guiding a vertical Z-axis spindle C in the Z-axis direction is fixed to one side of the slider block B. You.

A balancer bracket F is fixed on the upper surface of the slider block B, and a pulley bracket H is supported on a vertical balance bracket G fixed to the balancer bracket F.
An intermediate portion of the suspension wire I, one end of which is fixed to the upper end portion, is hooked on a relay pulley J supported by the pulley bracket H. The other end of the suspension wire I is coupled to a balance weight L guided by a vertically oriented guide bar K parallel to the balun sacket G, and a Z-axis spindle for fixing a detector such as a touch probe M at the lower end. The weight of C is balanced by the weight of the balance weight L. Then, the components of the above-described assembly are completed by assembling the slider block B to the Z-axis assembly and then covering with the front cover N and the rear cover O.

[0004]

As described above, the conventional Z-axis assembly includes a slider block B, a Z-axis bracket E, a balancer bracket F, a balance bracket G, a pulley bracket H, a guide bar K, a relay pulley J, and a balance. Since it is composed of a large number of parts such as the weight L, the production cost of those parts is relatively high, and the manufacturing process of the three-dimensional measuring machine is troublesome. In other words, when assembling the Z-axis assembly, the balancer bracket F, which is assembled with the balance bracket G, the pulley bracket H, the guide bar K, the relay pulley J, and the balance weight L, is assembled into the slider block B, and the Z-axis is attached to the slider block B. Attach the bracket E and the Z-axis spindle C, attach the Z-axis assembly to the X-axis guide A, and finally cover the entire assembly with the front cover N and the rear cover O.

SUMMARY OF THE INVENTION An object of the present invention is to provide a Z-axis assembly of a measuring machine which has a small number of components, has a simple assembly process, and has a good appearance in view of the above-mentioned problems of the Z-axis assembly of the conventional measuring machine. To get a three-dimensional.

[0006]

In order to achieve this object, the present invention relates to a Z-axis having a Z-axis spindle which is attached to one end of a detector for measuring the surface of an object to be measured and is movable in the Z-axis direction. The shaft assembly further includes a vertical rectangular cylindrical rigid Z-axis bracket having an interior partitioned into a spindle housing chamber and a weight housing chamber in a plane perpendicular to the longitudinal direction, and a suspension wire is provided in the spindle housing chamber. The Z-axis spindle fixed to one end of the Z is positioned so as to be movable in its length direction by a guide means, and the Z-axis spindle faces the weight accommodating chamber.
The present invention proposes a Z-axis assembly of a measuring machine having a weight guide projecting from the other end of the suspension wire to a balance weight for balancing the weight of the Z-axis spindle on an inner surface of the shaft bracket.

In the following description of a preferred embodiment of the present invention, 1) a structure in which a pulley bracket supporting a relay pulley for guiding an intermediate portion of the suspension wire is fixed to an upper end surface of a partition wall of the Z-axis bracket; 2) On the inner wall of the Z-axis bracket surrounding the spindle accommodating chamber, an air pad constituting the guide means is supported,
The air supply part of the air pad attached to the outer wall of the Z-axis bracket is covered with a blind plate, so that the outer surface of the Z-axis bracket is an external panel. 3) The measuring device has a substantially horizontal surface. The Z-axis assembly is precisely moved in the X and Y-axis directions orthogonal to each other, and the Z-axis spindle is sent in the Z-axis direction to measure the three-dimensional size of the object placed on the measuring machine veil. 4) The structure of the Z-axis bracket, which is formed of an extruded aluminum material, will be described by taking a three-dimensional measuring machine as an example.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below in detail with reference to FIGS. FIG. 1 shows a portal type three-dimensional measuring machine according to the present invention. it can.

On the stone surface plate 2, a portal-type moving body 3 movable along the stone surface surface 2 in the Y-axis direction in a horizontal plane.
Is provided, and an X-axis guide 4 extending in the X-axis direction perpendicular to the Y-axis direction is provided on the same-type moving body 3 that is precisely moved in the Y-axis direction by a driving unit (not shown). .
Further, a Z-axis assembly 5 of the present invention shown in detail in FIGS. 2 to 4 is supported in a straddled state with respect to the X-axis guide 4,
The detector of the touch probe 7 fixed to the lower end of the Z-axis spindle 6 supported by the Z-axis assembly 5 is brought into contact with the surface of the object to be measured. The Z-axis assembly 5 is precisely moved in the length direction (X-axis direction) of the X-axis guide 4 by well-known feeding means (not shown).

As shown in FIGS. 2 and 3, a Z-axis assembly 5 according to the present invention includes a vertically extending rectangular cylindrical Z-axis bracket 8 made of, for example, an aluminum extruded material. The inside of the shaft bracket 8 is partitioned by a partition wall 8a into a spindle accommodating chamber 10 and a weight accommodating chamber 20 which are adjacent to each other in the front-rear direction (Y-axis direction) of the measuring instrument base 1. The lower rear portion of the Z-axis bracket 8 is notched in an “L” shape, and a slide block 12 surrounding the rigid X-axis guide 4 is fixed to the L-shaped notch 11. The slide block 12 is fed in the X-axis direction by feeding means (not shown).

A Z-axis spindle 6 having a rectangular cross section with a lower end protruding outside is accommodated in the spindle accommodating chamber 10. The Z-axis spindle 6 is provided in the spindle accommodating chamber 10. It is guided in a vertical direction (Z-axis direction) by well-known guide means. In the case of the illustrated embodiment, this guide means comprises four air pads 14A, 14B, 14C, 14D supported inside the four walls surrounding the Z-axis spindle 6.
As can be understood from FIG. 3, the air supply portions 14 of the air pads 14A, 14B, 14C, and 14D are provided.
a penetrates the partition wall 8a, the front wall 8b, the left and right walls 8c, 8d of the Z-axis bracket 8, and is fastened to the corresponding walls by the fixing nuts 15, respectively. And Z-axis bracket 8
The three fixing nuts 15 located outside the front wall 8b,
Mounting grooves 16A, 16B formed in the left and right walls 8c, 8d,
16C, the mounting grooves 16A, 16B, 16C
Are shielded from the outside by blind plates 17A, 17B, 17C that block the space.

As shown in FIG. 3, a Z-axis rack gear 18 and a diffraction grating scale 19 that can mesh with a drive gear (not shown) are fixed to the Z-axis spindle 6 in the longitudinal direction middle portion. A hologram detection element 22 supported by a mounting bracket 21 faces the diffraction grating scale 19, and the hologram detection element 22 measures the feed amount of the Z-axis spindle 6 in the Z-axis direction. Further, a nipple 23 located inside the Z-axis spindle 6 is fixed to a lower end of the Z-axis spindle 6. A suspension wire 24 having one end fixed to the nipple 23 has a through hole formed at the upper end of the Z-axis spindle 6. From 25, it is led out into the spindle accommodating chamber 10.

On the other hand, as shown in FIG. 3, a pair of rib-shaped weight guides 26 integrally formed on the inner surface of the Z-axis bracket 8 are provided in the weight accommodating chamber 20 of the Z-axis bracket 8.
A and 26B are projected in a state of facing each other, and these weight guides 26A and 26B
7 are slidably fitted in the corresponding side grooves 28 to prevent the balance weight 27 from swinging when the Z-axis spindle 6 moves. The other end of the above-described suspension wire 24 is connected to the hook 27 of the balance weight 27 via the guide means.
a, and the weight of the Z-axis spindle 6 is balanced by the weight of the balance weight 27.

FIG. 4 shows a pulley bracket 33 used to guide the suspension wire 24. The pulley bracket 33 has two mounting holes 29 which can be screwed to the partition 8a of the Z-axis bracket 8 in the mounting portion 33a. Part 33a
Two relay pulleys 3 are provided on the support portion 33b bent at a right angle from
1A and 31B are rotatably supported on the central axis 32, respectively. Reference numeral 34 in FIG. 2 denotes an end cap for closing the upper end of the rectangular tubular Z-axis bracket 8, and the end cap 34 prevents foreign matter from entering the inside of the Z-axis bracket 8.

Since the Z-axis assembly of the three-dimensional measuring machine according to the illustrated embodiment has the above-described structure, the Z-axis spindle 6 and the Z-axis spindle 6 are mounted in a hollow Z-axis bracket 8 for fixing the slide block 12 to the lower back. Since it is completed only by incorporating the balance weight 27, there is an advantage that the number of parts is small and the manufacturing process is simplified. Then, the relay pulleys 31A and 31B can be easily mounted simply by fixing the pulley bracket 33 to which the relay pulleys 31A and 31B for guiding the suspension wire 24 are attached to the partition wall 8a of the Z-axis bracket 8, and the relay pulleys 31A and 31B can be hollowed. The molded Z-axis bracket 8 itself is not only a member having a large sectional modulus that is stable against bending load, but also the air supply portion 14a of the air pads 14A, 14B, 14C, and 14D to be assembled to the wall of the Z-axis bracket 8.
Is only partially covered with the blind plates 17A, 17B, 17C, the Z-axis bracket 8 can be used as an external member.

The present invention is not limited to the above embodiment. That is, the detector attached to one end of the Z-axis spindle is not limited to the touch probe, but may be a non-contact type distance sensor, a roughness detection sensor, an inner diameter measurement sensor, an image sensor, or the like. Also, the relay pulleys 31A, 31
B may have a structure attached to the end cap 34. By doing so, the pulley bracket 33 can be omitted.

Further, the guide means is not limited to the gas bearing of the embodiment, but may be an oil body bearing or a magnetic bearing whose rigidity is improved by using oil instead of gas to further improve the guiding performance. Is also good. In addition, the weight guides 26A and 26B
It is not limited to a pair (two places) of ribs, but may be directed to three or more places.
A dovetail-shaped guided portion may be provided on the side.

Further, a member (for example, turquite) having high wear resistance and lubricity may be provided in the guided portion (both side grooves 28) of the balance weight 27, or the weight guides 26A, 2
The sliding performance of the balance weight 27 can be improved by a method such as providing an oiling mechanism on the guide surface of the balance weight 6B. In addition, the present invention is not limited to a Z-axis assembly of a three-dimensional measuring machine, but is also applicable to a measuring machine for measuring dimensions and surface properties such as a one-dimensional measuring device, a roughness measuring device, a shape measuring device, and a roundness measuring device. It can be used as a Z-axis assembly.

[0019]

As is apparent from the above description, according to the present invention, the Z-axis bracket and the balance weight can be easily assembled by simply assembling the Z-axis bracket and the balance weight inside the rigid rectangular Z-axis bracket. Since the shaft assembly can be completed, the number of parts can be reduced and the assembly process can be simplified.
Further, according to the second and third aspects of the present invention, the relay pulley can be attached very easily, and the conventional front and rear covers can be eliminated to rationalize.

[Brief description of the drawings]

FIG. 1 is an overall perspective view of a portal type three-dimensional measuring machine to which the present invention is applied, which is partially cut away.

FIG. 2 is a cross-sectional view of the Z-axis assembly of the present invention used for the three-dimensional measuring machine.

FIG. 3 is an enlarged sectional view taken along line 3-3 in FIG. 2;

FIG. 4 is a side view of the pulley bracket partially cut away.

FIG. 5 is a sectional view of a conventional Z-axis assembly used for a three-dimensional measuring machine.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Measuring machine base 3 Portal type moving body 4 X-axis guide 5 Z-axis assembly 6 Z-axis spindle 7 Touch probe (detector) 8 Z-axis bracket 8a Partition wall 10 Spindle accommodating chambers 14A to 14D Air pad 24 Suspension wire 27 Balance weight 31A , 31B Relay pulley

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Masakazu Matsumoto 2200 Shimoguri-cho, Utsunomiya-shi, Tochigi F-term (reference) 2F069 AA04 AA52 AA56 AA57 AA66 DD26 GG01 GG07 GG62 HH01 HH09 JJ08 LL02 LL06 MM03 RR01 2F078 CA06 CA08

Claims (5)

[Claims] 1. A Z-axis assembly having a Z-axis spindle which is attached at one end to a detector for measuring the surface of an object to be measured and is movable in the Z-axis direction. A vertical rectangular cylindrical rigid Z-axis bracket having an interior partitioned into a spindle housing chamber and a weight housing chamber, and the Z-axis spindle fixed to one end of a suspension wire is provided in the spindle housing chamber by guide means. Z which is positioned so as to be movable in the length direction and faces the weight accommodation chamber
A Z-axis assembly for a measuring machine, wherein a weight guide for projecting a balance weight for suspending the weight of the Z-axis spindle, which is suspended from the other end of the suspension wire, protrudes from an inner surface of the shaft bracket. 2. The Z-axis of the measuring machine according to claim 1, wherein a pulley bracket supporting a relay pulley for guiding an intermediate portion of the suspension wire is fixed to an upper end surface of the partition wall of the Z-axis bracket. Assembly. 3. An air pad constituting the guide means is supported on an inner wall of the Z-axis bracket surrounding the spindle accommodating chamber, and an air supply portion of the air pad attached to an outer wall of the Z-axis bracket is covered with a blind plate. The Z-axis assembly according to claim 1 or 2, wherein the outer surface of the Z-axis bracket is an external panel. 4. The measuring device precisely moves the Z-axis assembly in X and Y-axis directions orthogonal to each other in a substantially horizontal plane, and
3. A three-dimensional measuring machine which sends a shaft spindle in the Z-axis direction and measures a surface property including three-dimensional dimensions of an object to be measured placed on a measuring machine veil. Item 3. A Z-axis assembly of the measuring machine according to Item 3. 5. The Z-axis bracket according to claim 1, wherein the Z-axis bracket is formed of an extruded aluminum material.
A Z-axis assembly for a measuring machine according to claim 4.