JP2001352173A - Multi-layer printed wiring board - Google Patents

Multi-layer printed wiring board

Info

Publication number
JP2001352173A
JP2001352173A JP2001109851A JP2001109851A JP2001352173A JP 2001352173 A JP2001352173 A JP 2001352173A JP 2001109851 A JP2001109851 A JP 2001109851A JP 2001109851 A JP2001109851 A JP 2001109851A JP 2001352173 A JP2001352173 A JP 2001352173A
Authority
JP
Japan
Prior art keywords
hole
wiring board
printed wiring
layer
filling material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001109851A
Other languages
Japanese (ja)
Other versions
JP3469214B2 (en
Inventor
Hideki Murase
秀樹 村瀬
Motoo Asai
元雄 浅井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP2001109851A priority Critical patent/JP3469214B2/en
Publication of JP2001352173A publication Critical patent/JP2001352173A/en
Application granted granted Critical
Publication of JP3469214B2 publication Critical patent/JP3469214B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a multi-layer wiring board whose surface smoothness is made excellent by packing paste-shaped packing materials in a through-hole without mixing any air bubble. SOLUTION: A hole for a through-hole is formed in a base, and a conductor is formed on the inner wall of the through-hole so that a board having the through-hole can be constituted, packing materials are packed in the through- hole, and inter-layer insulating material layers are formed on the both faces of the board. Moreover, a conductive circuit is formed on the surface of each inter-layer insulating material layer.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はプリント配線板とそ
の製造方法に関し、特にはスルーホールの接続信頼性と
基板表面の平滑性に優れた多層プリント配線板に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a printed wiring board and a method for manufacturing the same, and more particularly to a multilayer printed wiring board having excellent through-hole connection reliability and substrate surface smoothness.

【0002】[0002]

【従来の技術】近年、電子機器の小型化、モジュール化
が進む中で、ハイブリッドモジュールに使用されるプリ
ント配線板も、より高密度化が要求されている。このよ
うな要求に対して、スルーホールを有する両面(多層)
プリント配線板が製造されている。スルーホールを有す
るプリント配線板を製造する場合には、感光性ドライフ
ィルムを用いて、パターンをエッチングして回路を形成
するテンティング法が使用されている。しかしながら、
この方法は、ドライフィルムがスルーホール部分で破損
しやすく、エッチングの際、スルーホール内壁を溶解さ
せてしまうという欠点があった。また、感光性ドライフ
ィルムの代わりに液状の感光性樹脂液を塗布する方法が
あるが、スルーホールの存在のため、基板表面に均一に
塗布することが困難であるという問題があった。また、
スルーホールを有する基板をビルドアップ多層配線板の
内層に使用すると、層間絶縁材層を設けた際、スルーホ
ール部分が窪んでしまい、層間絶縁材層の層厚みがばら
つくため、インピーダンスの制御が困難であり、パッド
部分に凹部が生じた場合、ICの実装信頼性が低下する
という問題が見られた。
2. Description of the Related Art In recent years, as electronic devices have been reduced in size and modularized, printed wiring boards used in hybrid modules have been required to have higher densities. To meet such requirements, both sides (multilayer) with through holes
Printed wiring boards are being manufactured. When manufacturing a printed wiring board having a through hole, a tenting method of forming a circuit by etching a pattern using a photosensitive dry film is used. However,
This method has a disadvantage that the dry film is easily damaged at the through-hole portion and the inner wall of the through-hole is dissolved during etching. In addition, there is a method of applying a liquid photosensitive resin liquid instead of a photosensitive dry film, but there is a problem that it is difficult to apply the liquid uniformly on the substrate surface due to the presence of through holes. Also,
When a board with through holes is used for the inner layer of a build-up multilayer wiring board, the impedance control is difficult because the through holes are depressed when the interlayer insulating layer is provided, and the thickness of the interlayer insulating layer varies. In the case where a recess is formed in the pad portion, there has been a problem that the mounting reliability of the IC is reduced.

【0003】以上のような問題のため、従来は、スルー
ホール用の貫通孔内壁に導体を形成し、スルーホールと
した後、このスルーホールにペースト状の充填材料を充
填し、プリント配線基板の表面を平滑にする方法がとら
れていた。
[0003] Due to the problems described above, conventionally, a conductor is formed on the inner wall of a through-hole for a through-hole, the through-hole is formed, and then the through-hole is filled with a paste-like filling material to form a printed wiring board. A method of smoothing the surface has been adopted.

【0004】しかしながら、ペースト状の充填材料を充
填する場合、ペースト中に空気が巻き込まれた状態で充
填されやすく、しかも前記充填された材料の表層は、比
較的容易に硬化するため、気泡が抜けがたくなり、基板
表面の残余の充填材料を研磨等で除去すると、基板表面
に窪みが残ってしまう。また、充填材料中に空気が閉じ
込められると、熱圧着などにより、電子部品を搭載する
際、熱膨張などで破壊がおこり、耐熱性が低下してしま
う、さらに吸湿しやすく絶縁性が悪いなどの問題が見ら
れた。
However, when filling a paste-like filling material, the paste is easily filled with air entrained therein, and the surface layer of the filled material hardens relatively easily, so that air bubbles escape. When the remaining filling material on the substrate surface is removed by polishing or the like, a dent remains on the substrate surface. In addition, if air is trapped in the filling material, thermal expansion and the like will cause destruction due to thermal expansion when mounting electronic components due to thermocompression bonding, etc., resulting in reduced heat resistance, moreover, moisture absorption and poor insulation. There was a problem.

【0005】このため、充填材料を充填するにあたり、
充填材料中の気泡を除去する方法が種々開発されてお
り、例えば、特開昭62−173794号には、セラミ
ック基板のスルーホールに充填材料を充填した後、溶剤
に充填材料を接触させ、表面の粘度と表面張力を低下さ
せることにより、気泡を除去する方法が開示されてい
る。
[0005] Therefore, when filling the filling material,
Various methods have been developed for removing air bubbles in the filler material. For example, Japanese Patent Application Laid-Open No. Sho 62-173794 discloses a method in which a filler material is filled in a through hole of a ceramic substrate, and then the filler material is brought into contact with a solvent to form a surface. There is disclosed a method for removing bubbles by lowering the viscosity and surface tension of the foam.

【0006】[0006]

【発明が解決しようとする課題】しかし、この方法は、
充填材料表面の粘度と表面張力を低下させるので、充填
材料が流れ出さないようにその粘度と表面張力を管理し
なければならず、量産の際、品質管理しにくいという問
題が見られた。
However, this method is
Since the viscosity and surface tension of the surface of the filling material are reduced, the viscosity and surface tension of the material must be controlled so that the filling material does not flow out, and there has been a problem that quality control is difficult in mass production.

【0007】以上のように、気泡を混入させることな
く、スルーホールにペースト状の充填材料を充填し、表
面平滑性の優れたプリント配線板の開発が望まれてい
た。本発明者らは、鋭意研究した結果、通気性基体を利
用することにより、上述の問題を解決できることを見出
した。
As described above, it has been desired to develop a printed wiring board having excellent surface smoothness by filling a through-hole with a paste-like filling material without mixing air bubbles. The present inventors have conducted intensive studies and found that the above-mentioned problems can be solved by using a gas-permeable substrate.

【0008】[0008]

【課題を解決するための手段及び作用】本発明は、基体
にスルーホール用の貫通孔を設け、この貫通孔内壁に導
体を形成してスルーホールを有する基板とし、前記スル
ーホールに充填材料を充填するとともに、前記基板の両
面上には層間絶縁材層を設け、さらに、各層間絶縁材層
表面に導体回路を形成したことを特徴とする多層プリン
ト配線板である。
According to the present invention, a through hole for a through hole is provided in a base, a conductor is formed on an inner wall of the through hole to form a substrate having a through hole, and a filling material is filled in the through hole. The multilayer printed wiring board is characterized by being filled, provided with an interlayer insulating material layer on both surfaces of the substrate, and further formed with a conductor circuit on the surface of each interlayer insulating material layer.

【0009】本発明は、スルーホールを有するプリント
配線板の一方の面に、通気性基体を密着させ、ペースト
状の充填材料を圧入して充填することが望ましい。この
理由は、ペースト状の充填材料中に気泡が入っていたと
しても、圧入の際、通気性基体を透過してしまい、また
充填材料自体は、基体を透過することはないため、スル
ーホール中に充填材料が密に充填される。このため、基
板の表面平滑性が優れ、また、スルーホールの内壁が確
実に保護されるため、エッチングの際に溶解することが
ないため、スルーホールの接続信頼性が向上する。
In the present invention, it is desirable that a gas-permeable substrate is brought into close contact with one surface of a printed wiring board having a through hole, and that a paste-like filling material is press-fitted and filled. The reason for this is that even if bubbles are contained in the paste-like filling material, they will permeate through the permeable substrate during press-fitting, and the filling material itself does not penetrate through the substrate. The packing material is densely packed. For this reason, the surface smoothness of the substrate is excellent, and the inner wall of the through hole is reliably protected, so that it does not dissolve at the time of etching, thereby improving the connection reliability of the through hole.

【0010】本願発明で、使用される通気性基体とは、
空気は透過するが、充填材料は透過しないような膜や板
状のものを指し、例えば、繊維質フィルム、多孔質基体
などがよい。
In the present invention, the air-permeable substrate used is:
It refers to a membrane or a plate-like material that allows air to permeate but does not allow the filling material to permeate, such as a fibrous film or a porous substrate.

【0011】繊維質フィルムとしては、濾紙、和紙、な
どの紙類が、多孔質基体としては、セラミック板などが
よい。この理由は、これらは、通気性に優れ、スルーホ
ール内のエアー抜けを容易にし、充填樹脂の抜けおちを
防止する効果があるからである。
As the fibrous film, papers such as filter paper and Japanese paper are preferable, and as the porous substrate, a ceramic plate and the like are preferable. The reason for this is that they are excellent in air permeability, have an effect of facilitating the escape of air in the through hole, and preventing the filling resin from coming off.

【0012】本発明で使用されるぺースト状充填材料と
しては、熱硬化性耐熱樹脂、感光性耐熱樹脂、熱可塑性
耐熱樹脂などの絶縁性樹脂が望ましく、例えば、エポキ
シ系樹脂においては、エピコート828、1001(い
づれも油化シェルの商品名)、EOCN−104S(日
本化薬の商品名)などがよい。また、前記ぺースト状充
填材料は、フィラーを含有してもよい。フィラーとして
は、エポキシ樹脂微粉末、アミノ樹脂粉末、無機質微粉
末などがよい。この理由は、充填樹脂の硬化収縮の緩和
などの効果があるからである。
As the paste-like filling material used in the present invention, an insulating resin such as a thermosetting heat-resistant resin, a photosensitive heat-resistant resin, or a thermoplastic heat-resistant resin is desirable. For example, in the case of an epoxy resin, Epicoat 828 is used. , 1001 (both trade names of Yuka Shell), EOCN-104S (trade name of Nippon Kayaku) and the like. Further, the paste-like filling material may contain a filler. As the filler, epoxy resin fine powder, amino resin powder, inorganic fine powder and the like are preferable. The reason for this is that there is an effect such as relaxation of curing shrinkage of the filling resin.

【0013】前記ペースト状充填材料の粘度は、塗布法
にもよるが、1〜10Pa・sが望ましい。この理由
は、1Pa・s未満では、スルーホール内に充填された
樹脂が基体にしみ込みその結果、スルーホール内の樹脂
が不足し、くぼみや樹脂抜けが発生し、10Pa・sを
超えると充填材料中の気泡が抜けにくく、レベリング性
が悪いからである。前記ペースト状充填材料の粘度調整
は、メチルエチルケトン、メチルセロソルソルブ、ブチ
ルセロソルブ、ブチルセロソルブアセテート、ブチルカ
ルビトール、ブチルセルロース、テトラリン、ジメチル
ホルムアミド、ノルマルメチルピロリドンなどの溶剤を
使用することが望ましい。
The viscosity of the paste-like filling material is preferably 1 to 10 Pa · s, depending on the coating method. The reason for this is that if the pressure is less than 1 Pa · s, the resin filled in the through-hole penetrates into the substrate, resulting in a shortage of resin in the through-hole, causing dents or resin loss. This is because bubbles in the material are difficult to escape and the leveling property is poor. The viscosity of the paste-like filling material is preferably adjusted using a solvent such as methyl ethyl ketone, methyl cellosolve, butyl cellosolve, butyl cellosolve acetate, butyl carbitol, butyl cellulose, tetralin, dimethylformamide, and normal methylpyrrolidone.

【0014】本発明において、ペースト状充填材料を圧
入充填する手段は、ロールコータ、スージなどが望まし
い。前記圧入の際の圧力は、1〜4kg/cm2が望ま
しい。この理由は、1kg/cm2未満では樹脂が完全
に充填しきらない可能性があり、また4kg/cm2
超えると表面に窪みが発生しやすくなる。
In the present invention, the means for press-fitting the paste-like filling material is preferably a roll coater, a stripe, or the like. The pressure at the time of the press-fitting is desirably 1 to 4 kg / cm 2 . The reason is that if it is less than 1 kg / cm 2 , the resin may not be completely filled, and if it exceeds 4 kg / cm 2 , dents are likely to be generated on the surface.

【0015】前記ペースト状充填材料を圧入充填した
後、ペースト状充填材料を乾燥硬化させ、また、乾燥硬
化させた後、必要に応じて研磨やサンドブラストなどの
方法にて、不要な充填材料を除去して表面を平坦にする
ことが望ましい。
After press-fitting the paste-like filling material, the paste-like filling material is dried and hardened, and after being dried and hardened, unnecessary filling material is removed by polishing or sandblasting as necessary. It is desirable to make the surface flat.

【0016】本発明において、スルーホールの形成方法
としては、常法の無電解めっき、あるいは電解めっきを
行うことができる。めっきとしては、銅、ニッケル、金
などが好適に用いられる。
In the present invention, as a method of forming a through hole, a conventional method of electroless plating or electrolytic plating can be used. As plating, copper, nickel, gold or the like is preferably used.

【0017】本発明において、導体回路の形成方法とし
ては、金属層をエッチングするサブトラクテティブ法、
導体回路を無電解めっき等で形成するアディティブ法な
ど、種々の方法を利用できる。アディティブ法を使用し
た場合、次のような工程によりプリント配線板を製造で
きる。 (a)絶縁板あるいは金属板などの基板上に、後述のよ
うな無電解めっき用の接着剤層を形成、粗化し、これを
基体とし、スルーホール用の貫通孔を設けた後、パラジ
ウムなどの触媒核を付与し、ついで必要に応じてめっき
レジストを形成し、さらに貫通孔内壁および基板表面に
導体回路を形成し、導体回路、スルーホールを有する基
板を製造する工程。 (b)スルーホールを有する基板の一方の面に、通気性
基体を密着あるいは接触させる工程。 (c)通気性基体を密着あるいは接触させた面の反対側
の面からペースト状の充填材料を圧入する工程。 (d)充填材料を硬化させる工程。さらに必要に応じて
残余の充填材料を研磨などにより除去する工程などを採
用してもよい。
In the present invention, the conductive circuit is formed by a subtractive method of etching a metal layer,
Various methods such as an additive method of forming a conductor circuit by electroless plating or the like can be used. When the additive method is used, a printed wiring board can be manufactured by the following steps. (A) An adhesive layer for electroless plating as described below is formed and roughened on a substrate such as an insulating plate or a metal plate, and this is used as a base, and a through hole for a through hole is provided. A process of manufacturing a substrate having a conductor circuit and a through hole by forming a plating resist as necessary, further forming a conductor circuit on the inner wall of the through hole and the surface of the substrate. (B) a step of bringing a gas permeable substrate into close contact or contact with one surface of a substrate having a through hole; (C) a step of press-fitting the paste-like filling material from the surface opposite to the surface on which the air-permeable substrate is in close contact or contact. (D) curing the filling material; Further, if necessary, a step of removing the remaining filling material by polishing or the like may be adopted.

【0018】サブトラクテクイブ法を使用した場合、次
のような工程によりプリント配線板を製造できる。 (a)両面に金属層が設けられた基板を基体とし、これ
に、スルーホール用の貫通孔を設け、触媒核を付与して
無電解めっきを行い、貫通孔内に導体を設け、スルーホ
ールを有する基板を製造する工程。 (b)スルーホールを有する基板の一方の面に、通気性
基体を密着あるいは接触させる工程。 (c)通気性基体を密着あるいは接触させた面の反対側
の面からペースト状の充填材料を圧入する工程。 (d)充填材料を硬化させる工程。 (e)エッチングレジストを形成、エッチングして導体
回路を形成する工程。必要に応じて残余の充填材料を研
磨などにより除去する工程などを採用してもよい。
When the subtractive method is used, a printed wiring board can be manufactured by the following steps. (A) A substrate provided with a metal layer on both surfaces is used as a base, a through hole for a through hole is provided, a catalyst nucleus is applied, electroless plating is performed, and a conductor is provided in the through hole. Manufacturing a substrate having: (B) a step of bringing a gas permeable substrate into close contact or contact with one surface of a substrate having a through hole; (C) a step of press-fitting the paste-like filling material from the surface opposite to the surface on which the air-permeable substrate is in close contact or contact. (D) curing the filling material; (E) forming an etching resist and etching to form a conductor circuit; If necessary, a step of removing the remaining filler material by polishing or the like may be employed.

【0019】このようにして得られた多層プリント配線
板が、基体にスルーホール用の貫通孔を設け、この貫通
孔内壁に導体を形成してスルーホールを有する基板と
し、前記スルーホールに充填材料を充填するとともに、
前記基板上には層間絶縁材層を設け、さらに、この層間
絶縁材層表面に導体回路を形成した多層プリント配線
板、である。本発明の多層プリント配線板は、両面(無
論多層も含む)配線板である。
The multilayer printed wiring board thus obtained is provided with a through hole for a through hole in a substrate, a conductor is formed on the inner wall of the through hole to form a substrate having a through hole, and a filling material is filled in the through hole. While filling
A multilayer printed wiring board comprising an interlayer insulating material layer provided on the substrate, and a conductive circuit formed on the surface of the interlayer insulating material layer. The multilayer printed wiring board of the present invention is a double-sided (including, of course, multilayer) wiring board.

【0020】本発明では、スルーホール充填樹脂の抜け
おちを防止し、また充填材料中にも空気が混入されてお
らず、このようなプリント基板を内層基板として、ビル
ドアップ多層プリント配線板を製造するため、表面の平
滑性に優れた多層プリント配線板を製造でき、電子回路
部品の実装信頼性やインピーダンス制御が容易となる。
ビルドアップ多層プリント配線板の製造方法としては、
前記アディティブ、サブトラクテゥイブ法により製造し
た内層用プリント配線板の表面に感光性の接着剤層を形
成、露光、現像して開口部を設け、この接着剤層の表面
を粗化した後、無電解めっきを行い、接着剤層表面およ
び開口部に導体回路を形成して、上層の導体回路と内層
の導体回路を電気的に接続する。
According to the present invention, a build-up multilayer printed wiring board is manufactured by using such a printed circuit board as an inner layer board to prevent the resin from filling the through hole and to prevent air from being mixed in the filling material. Therefore, a multilayer printed wiring board having excellent surface smoothness can be manufactured, and mounting reliability and impedance control of electronic circuit components can be easily performed.
As a method of manufacturing a build-up multilayer printed wiring board,
After forming a photosensitive adhesive layer on the surface of the printed wiring board for the inner layer manufactured by the additive and subtractive method, exposing and developing an opening to roughen the surface of the adhesive layer, Electroplating is performed to form a conductive circuit on the surface of the adhesive layer and on the opening, and the upper conductive circuit and the inner conductive circuit are electrically connected.

【0021】本発明において導体回路をアディティブ法
にて製造する場合は、接着剤として、酸もしくは酸化剤
に対して難溶性の樹脂からなるマトリックス中に酸もし
くは酸化剤に対して可溶性の硬化処理された耐熱性樹脂
粉末が分散してなることが望ましく、その耐熱性樹脂粉
末は、1)平均粒径10μm以下、2)前記耐熱性樹脂粉
末は、平均粒径2μm以下の耐熱性樹脂粉末を凝集させ
て平均粒径2〜10μmの大きさとした凝集粒子、3)平
均粒径2〜10μmの耐熱性樹脂粉末と平均粒径2μm以
下の耐熱性樹脂粉末との混合物、4)平均粒径2〜10μ
mの耐熱性樹脂粉末の表面に平均粒径2μm以下の耐熱
性樹脂粉末もしくは平均粒径2μm以下の無機粉末のい
ずれか少なくとも1種を付着させてなる擬似粒子から選
ばれることが望ましい。
When the conductor circuit is manufactured by the additive method in the present invention, a hardening treatment which is soluble in an acid or an oxidizing agent is carried out in a matrix made of a resin which is hardly soluble in an acid or an oxidizing agent as an adhesive. It is desirable that the heat-resistant resin powder is dispersed, and the heat-resistant resin powder is 1) an average particle diameter of 10 μm or less, and 2) the heat-resistant resin powder aggregates a heat-resistant resin powder having an average particle diameter of 2 μm or less. Agglomerated particles having an average particle size of 2 to 10 μm; 3) a mixture of a heat-resistant resin powder having an average particle size of 2 to 10 μm and a heat-resistant resin powder having an average particle size of 2 μm or less; 10μ
It is desirable to select from pseudo particles obtained by adhering at least one of a heat-resistant resin powder having an average particle size of 2 μm or less and an inorganic powder having an average particle size of 2 μm or less to the surface of the heat-resistant resin powder having a particle size of m.

【0022】上記接着剤層は、酸あるいは酸化剤で粗化
することにより、粗化面を設けることができ、導体回路
を無電解めっきにより形成しても、層間絶縁材層と導体
回路との密着を向上させることができるからである。前
記マトリックスの樹脂は、感光性であることが望まし
い。感光性樹脂を使用することにより、露光、現像でバ
イアホールを形成できるからである。前記接着剤は、ビ
ルドアップ多層配線板では、層間絶縁材層となる。ま
た、このような接着剤層で形成されるアンカー形状、ア
ンカー深さについては、粒径の異なるフィラーにて表面
粗度が1μm〜20μmの範囲内になることが望まし
く、その場合には導体の十分な密着強度が得られる。
The above-mentioned adhesive layer can be provided with a roughened surface by roughening it with an acid or an oxidizing agent. This is because adhesion can be improved. The matrix resin is desirably photosensitive. By using a photosensitive resin, a via hole can be formed by exposure and development. The adhesive becomes an interlayer insulating material layer in the build-up multilayer wiring board. In addition, as for the anchor shape and anchor depth formed by such an adhesive layer, it is desirable that the surface roughness is in the range of 1 μm to 20 μm with fillers having different particle diameters. Sufficient adhesion strength is obtained.

【0023】本願の多層プリント配線板では、導体回路
と層間絶縁材層の界面に設けられる無電解めっき膜から
なる粗化層が銅、ニッケル、リンから成る共晶化合物で
あることが望ましい。この理由は、黒化還元処理面は表
面を酸化して酸化銅を表面に形成し、表面を粗化する
が、この粗化層である酸化銅の強度が低く、これが熱衝
撃により破壊されて層間剥離を起こすが、本発明の共晶
めっきにより得られる共晶化合物は、強度が高いため熱
衝撃による層間剥離が生じにくく、ヒートサイクル特性
が向上するからである。また、このような共晶化合物
は、主に針状結晶となるため、アンカーとしての効果が
高く、導体回路と層間絶縁材層を密着させることができ
るため、ヒートサイクル特性が向上する。更に黒化還元
処理後では酸化銅が表面に曝露されるため、酸溶液中で
溶解されやすく、いわゆるハローイング現象を生じやす
いのに対して、このような処理法では金属が酸化されず
に表面に形成されているため、溶解されず、高い密着力
を確保できる。
In the multilayer printed wiring board of the present invention, it is preferable that the roughened layer made of the electroless plating film provided at the interface between the conductor circuit and the interlayer insulating material layer is a eutectic compound made of copper, nickel and phosphorus. The reason for this is that the surface of the blackened and reduced treated surface oxidizes the surface to form copper oxide on the surface and roughens the surface.However, the strength of the copper oxide, which is a roughened layer, is low, and this is destroyed by thermal shock. Delamination occurs, but the eutectic compound obtained by the eutectic plating of the present invention has high strength, so that delamination due to thermal shock hardly occurs and heat cycle characteristics are improved. Further, such a eutectic compound is mainly a needle-like crystal, so that it has a high effect as an anchor, and can adhere a conductive circuit to an interlayer insulating material layer, thereby improving heat cycle characteristics. Furthermore, after the blackening reduction treatment, the copper oxide is exposed to the surface, so that it is easily dissolved in an acid solution, so that a so-called haloing phenomenon is likely to occur. , It is not dissolved, and high adhesion can be secured.

【0024】前記共晶化合物の銅、ニッケル、リンの含
有量は、それぞれ、90〜96%、1〜3%、0.5〜
2wt%程度あることが望ましい。上記範囲では、析出
被膜の結晶が針状構造になるため、アンカー効果に優れ
るからである。前記粗化層の厚さは、5μmであること
が望ましく、より望ましくは0.5μm〜2μmが望ま
しい。この理由は、0.5μm以下では、アンカー効果
が低く、5μm以上では、表面粗度が大きくなりすぎ、
逆に密着強度が低下してしまう。本発明の多層プリント
配線板は、基板上の導体回路と層間絶縁材層上に設けら
れた導体回路がバイアホールやスルーホールで電気的に
接続されていてもよい。 バイアホールで接続する場
合、接続箇所の粗化層は、予め除去されているか、粗化
層を設けないことが必要である。
The contents of copper, nickel and phosphorus in the eutectic compound are 90 to 96%, 1 to 3%, and 0.5 to 96%, respectively.
Desirably, it is about 2 wt%. This is because, in the above range, the crystals of the deposited film have a needle-like structure, so that the anchor effect is excellent. The thickness of the roughened layer is preferably 5 μm, more preferably 0.5 μm to 2 μm. The reason is that the anchor effect is low at 0.5 μm or less, and the surface roughness is too large at 5 μm or more,
Conversely, the adhesion strength decreases. In the multilayer printed wiring board of the present invention, the conductor circuit on the substrate and the conductor circuit provided on the interlayer insulating material layer may be electrically connected via holes or through holes. When connecting via holes, it is necessary that the roughened layer at the connection location has been removed in advance or that no roughened layer is provided.

【0025】[0025]

【実施例及び比較例】以下、本発明を具体化した実施例
1、比較例1とについて図面に基づき詳細に説明する。
Examples and Comparative Examples Hereinafter, Examples 1 and Comparative Examples 1 embodying the present invention will be described in detail with reference to the drawings.

【0026】実施例1 実施例1の多層プリント配線板の製造工程(1)〜
(9)について、図1(a)〜(e)に基づき説明をす
る。 工程(1):両面銅張積層板に、ドリルにて口径0.2
mmの貫通孔3を形成した。全面に、活性触媒付与、活
性化を行った後、常法に従い、無電解めっきを行い、貫
通孔3の内壁に銅を析出させ、スルーホール4を形成し
た。 工程(2):前記スルーホール4の形成された積層板
に、和紙5を乗せた。 工程(3):フェノールノボラック型エポキシ樹脂(油
化シェル製)60重量部、ビスフェノールA型エポキシ
樹脂(油化シェル製)40重量部およびイミダゾール系
硬化剤(四国化成製)5重量部をブチルセルソルブアセ
テートに溶解させて、この組成物の固形分100重量部
に対して、エポキシ樹脂微粉末を、粒径0.5μmのも
のを15重量部、粒径5.5μmのものを30重量部の
割合で混合し、その後3本ロールで混練して、さらにブ
チルセロソルブアセテートを添加し、固形分濃度75%
のペースト状充填材料14を作成した。この溶液の粘度
は、JIS−K7117に準じ、東京計器製デジタル粘
度計を用い、20℃で60秒間測定したところ、回転数
6rpmで5.2Pa・s、60rpmで2.6Pa・
sであり、そのSVI値(チキソトロピック性)は2.
0であった。 工程(4):ロールコータ7により、面圧力3kg/c
2で上記充填材料14をスルーホール4に圧入した。 工程(5):上記充填材料14を乾燥、加熱、硬化さ
せ、余剰の充填材料14を研磨により除去し、平坦化し
た。 工程(6):和紙5を除去した後、ドライフィルムをラ
ミネートし、これを露光現像し、エッチングレジストと
した。 工程(7):塩化第二銅水溶液によりエッチングを行
い、両面プリント基板(内層回路8)とした。スルーホ
ール4は充填材料14で保護されているため、エッチン
グされなかった。また、充填されたスルーホール4内に
は気泡も窪みも見られなかった。 工程(8):基板を酸性脱脂、ソフトエッチング硫酸活
性触媒付与、活性化を行った後、次の無電解めっき浴に
てめっきを施し、Ni−P−Cu共晶の厚さ1μmの凹
凸面9を得た。 無電解めっき浴 硫酸銅:10.1g/l 硫酸ニッケル:1.0g/l 次亜リン酸ナトリウム:20.2g/l 水酸化ナトリウム:適量 pH=9.0 工程(9):クレゾールノボラック型エポキシ樹脂(油
化シェル製,商品名:エピコート180S)50%アク
リル化物60重量部に、ビスフェノールA型エポキシ樹
脂(油化シェル製,商品名:E−1001)40重量
部、ジアリルテレフタレート15重量部、2−メチル−
1−〔4−(メチルチオ)フェニル〕2−モルフォリノ
プロパノン−1(チバ・ガイギー製,商品名:イルガキ
ュア−907)4重量部、粒径が5.5μmのエピキシ
樹脂微粉末(東レ製)10重量部、及び粒径が0.5μ
mのエポキシ樹脂微粉末(東レ製)25重量部を配合し
た。そして、この混合物にブチルセロソルブを適量添加
しながらホモディスパー攪拌機で攪拌し、接着剤のワニ
スを作成した。
Example 1 Manufacturing process (1) to multilayer printed wiring board of Example 1
(9) will be described with reference to FIGS. Step (1): Drill 0.2 diameter on double-sided copper-clad laminate
The through-hole 3 of mm was formed. After applying and activating an active catalyst on the entire surface, electroless plating was performed according to a conventional method, and copper was deposited on the inner wall of the through hole 3 to form a through hole 4. Step (2): Japanese paper 5 was placed on the laminated plate in which the through holes 4 were formed. Step (3): 60 parts by weight of phenol novolak type epoxy resin (manufactured by Yuka Shell), 40 parts by weight of bisphenol A type epoxy resin (manufactured by Yuka Shell) and 5 parts by weight of imidazole-based curing agent (manufactured by Shikoku Chemicals) are butyl cells Dissolved in Solvent Acetate, and 15 parts by weight of an epoxy resin fine powder having a particle size of 0.5 μm and 30 parts by weight of a epoxy resin fine particle having a particle size of 5.5 μm were added to 100 parts by weight of a solid content of the composition. And then kneading with three rolls, further adding butyl cellosolve acetate, solid concentration 75%
Was prepared. The viscosity of this solution was measured using a digital viscometer manufactured by Tokyo Keiki Co., Ltd. at 20 ° C. for 60 seconds according to JIS-K7117, and found to be 5.2 Pa · s at a rotation speed of 6 rpm and 2.6 Pa · s at a rotation speed of 60 rpm.
s, and its SVI value (thixotropic property) is 2.
It was 0. Step (4): Surface pressure 3 kg / c by roll coater 7
The filling material 14 was pressed into the through hole 4 at m 2 . Step (5): The above-mentioned filling material 14 was dried, heated and cured, and excess filling material 14 was removed by polishing and flattened. Step (6): After removing the Japanese paper 5, a dry film was laminated, and this was exposed and developed to obtain an etching resist. Step (7): Etching was performed with an aqueous cupric chloride solution to obtain a double-sided printed circuit board (inner circuit 8). Since the through-hole 4 was protected by the filling material 14, it was not etched. No bubbles or depressions were found in the filled through holes 4. Step (8): The substrate is subjected to acidic degreasing, soft etching sulfuric acid activation catalyst application and activation, and then plated in the following electroless plating bath to form a 1 μm-thick uneven surface of Ni-P-Cu eutectic. 9 was obtained. Electroless plating bath Copper sulfate: 10.1 g / l Nickel sulfate: 1.0 g / l Sodium hypophosphite: 20.2 g / l Sodium hydroxide: appropriate amount pH = 9.0 Step (9): Cresol novolak type epoxy 60 parts by weight of a 50% acrylate resin (manufactured by Yuka Shell, trade name: Epicoat 180S), 40 parts by weight of a bisphenol A type epoxy resin (manufactured by Yuka Shell, trade name: E-1001), 15 parts by weight of diallyl terephthalate, 2-methyl-
4 parts by weight of 1- [4- (methylthio) phenyl] 2-morpholinopropanone-1 (manufactured by Ciba-Geigy, trade name: Irgacure-907), a fine powder of epixy resin having a particle size of 5.5 μm (manufactured by Toray) 10 Parts by weight and particle size 0.5μ
m of epoxy resin fine powder (manufactured by Toray Co., Ltd.). Then, the mixture was stirred with a homodisper stirrer while adding an appropriate amount of butyl cellosolve to prepare a varnish of the adhesive.

【0027】工程(10):ロールコータ7を用いて内
層回路8上に上記の接着剤ワニスを塗布した後、塗布さ
れたワニスを100℃で1時間乾燥硬化させ、厚さ50
μmの感光性接着剤層(層間絶縁層)12を形成した。 工程(11):次に、前記工程(10)の処理を施した
配線板に直径100μmの黒円及び打ち抜き切断部位が
黒く印刷されたフォトマスクフィルムを密着させ、超高
圧水銀灯により500mj/cm2で露光した。これを
クロロセン溶液で超音波現像処理することにより配線板
上に直径100μmのバイアホール13となる開口を形
成した。 工程(12):次いで、前記配線板を超高圧水銀灯によ
り約300mj/cm2で露光し、更に100℃で1時
間及び150℃で3時間加熱処理した。これらの処理に
より、フォトマスクフィルムに相当する寸法精度に優れ
た開口を有する層間絶縁層12を形成した。 工程(13):そして、前記配線板をクロム酸に10分
間浸漬することにより、層間絶縁層12の表面を粗化し
た。更に、中和後に水洗及び湯洗して、配線板からクロ
ム酸を除去した。 工程(14):その後、配線板を市販のPd−Snコロ
イド触媒に浸漬して、開口の内壁面及び粗化された層間
絶縁層12の表面にPd−Snコロイドを吸着させた。
その後、120℃で30分加熱処理した。 工程(15):前記配線板上にドライフィルムフォトレ
ジストをラミネートすると共に、露光現像を行ってめっ
きレジスト10を形成した。 工程(16):その後、還元剤としての37%のホルム
アルデヒド水溶液に前記配線板を浸漬し、Pdを活性化
させた。このときの処理温度は40℃,処理時間は5分
である。次いで、常法に従う無電解メッキ液に配線板を
直ちに浸漬し、その状態で15時間保持した。以上の各
工程に経ることによって、厚さ約35μm,L/S=7
5μm/75μmの導体回路11を備える4層プリント
配線板を形成した。内層にスルーホールを有していても
上層の膜厚が均一になり、インピーダンスのばらつきは
見られなかった。また、内層にスルーホールを有してい
てもパッドが平滑になるため、ICを実装しても不良は
発生しなかった。また、特開昭62−173794号に
見られたような量産の際の品質管理の困難性もない。
Step (10): After applying the above adhesive varnish on the inner layer circuit 8 using the roll coater 7, the applied varnish is dried and cured at 100 ° C. for 1 hour to obtain a thickness of 50%.
A photosensitive adhesive layer (interlayer insulating layer) 12 of μm was formed. Step (11): Next, a black circle having a diameter of 100 μm and a photomask film having a punched and cut portion printed in black are brought into close contact with the wiring board subjected to the processing of the above step (10), and 500 mj / cm 2 using an ultra-high pressure mercury lamp. Exposure. This was subjected to ultrasonic development with a chlorocene solution to form an opening serving as a via hole 13 having a diameter of 100 μm on the wiring board. Step (12): Next, the wiring board was exposed to light at about 300 mj / cm 2 using an ultra-high pressure mercury lamp, and further subjected to heat treatment at 100 ° C. for 1 hour and at 150 ° C. for 3 hours. Through these processes, an interlayer insulating layer 12 having an opening having excellent dimensional accuracy corresponding to a photomask film was formed. Step (13): The surface of the interlayer insulating layer 12 was roughened by immersing the wiring board in chromic acid for 10 minutes. Further, after the neutralization, washing with water and hot water was performed to remove chromic acid from the wiring board. Step (14): Thereafter, the wiring board was immersed in a commercially available Pd-Sn colloid catalyst, and the Pd-Sn colloid was adsorbed on the inner wall surface of the opening and the surface of the roughened interlayer insulating layer 12.
Thereafter, heat treatment was performed at 120 ° C. for 30 minutes. Step (15): A plating resist 10 was formed by laminating a dry film photoresist on the wiring board and performing exposure and development. Step (16): Thereafter, the wiring board was immersed in a 37% aqueous formaldehyde solution as a reducing agent to activate Pd. At this time, the processing temperature is 40 ° C., and the processing time is 5 minutes. Next, the wiring board was immediately immersed in an electroless plating solution according to a conventional method, and kept in that state for 15 hours. Through the above steps, a thickness of about 35 μm, L / S = 7
A four-layer printed wiring board including the conductive circuit 11 of 5 μm / 75 μm was formed. Even though the inner layer had a through hole, the thickness of the upper layer became uniform, and no variation in impedance was observed. Further, even if the inner layer has a through hole, the pad becomes smooth, so that no failure occurred even when the IC was mounted. Also, there is no difficulty in quality control during mass production as seen in JP-A-62-173794.

【0028】実施例2 実施例1と概ね同じであるが、充填材料14を感光性樹
脂であるクレゾールノボラック型エポキシ樹脂(油化シ
ェル製,商品名:エピコート180S)50%アクリル
化物60重量部に、ビスフェノールA型エポキシ樹脂
(油化シェル製,商品名:E−1001)40重量部、
ジアリルテレフタレート15重量部、2−メチル−1−
〔4−(メチルチオ)フェニル〕2−モルフォリノプロ
パノン−1(チバ・ガイギー製,商品名:イルガキュア
−907)4重量部を混合した溶液とし、通気性基体と
して、セラミックス板を使用した。
Example 2 The same as Example 1, except that the filling material 14 was added to 60 parts by weight of a 50% acrylated product of a cresol novolak type epoxy resin (manufactured by Yuka Shell, trade name: Epicoat 180S) as a photosensitive resin. 40 parts by weight of a bisphenol A type epoxy resin (manufactured by Yuka Shell, trade name: E-1001)
15 parts by weight of diallyl terephthalate, 2-methyl-1-
A solution was prepared by mixing 4 parts by weight of [4- (methylthio) phenyl] 2-morpholinopropanone-1 (trade name: Irgacure-907, manufactured by Ciba-Geigy), and a ceramic plate was used as a gas-permeable substrate.

【0029】実施例3 ガラスエポキシ絶縁基板に、実施例1で調製した無電解
めっき用接着剤を塗布し、露光、加熱により硬化、クロ
ム酸溶液で粗化した後、ドライフィルムをラミネート、
露光現像し、めっきレジスト10を設けた。さらに、パ
ラジウム触媒核を付与、無電解めっきを行い、導体回路
11とスルーホール4を形成した。ついで、充填用ペー
ストとして熱可塑性樹脂であるポリエーテルスルホン
(PES)を用い、実施例1と同様に充填を行い、4層
プリント配線板を形成した。
Example 3 The adhesive for electroless plating prepared in Example 1 was applied to a glass epoxy insulating substrate, cured by exposure and heating, roughened with a chromic acid solution, and then laminated with a dry film.
Exposure and development were performed to provide a plating resist 10. Further, a palladium catalyst core was applied and electroless plating was performed to form a conductor circuit 11 and a through hole 4. Next, using polyether sulfone (PES), which is a thermoplastic resin, as the filling paste, filling was carried out in the same manner as in Example 1 to form a four-layer printed wiring board.

【0030】比較例1 比較例1では、基板にポリエチレンフィルムを密着さ
せ、充填材料を圧入し、実施例1と同様に4層ビルドア
ップ配線板を得た。しかしながら、内層のスルーホール
部分に気泡が入り、これが窪みとなり、表面のパッド部
分に凹部が形成されてしまい、ICを実装できなかっ
た。また、内層のスルーホール上の窪みにより、上層の
膜厚制御が困難になり、その膜厚のバラツキがインピー
ダンスのばらつきになり、不良になってしまった。
Comparative Example 1 In Comparative Example 1, a polyethylene film was brought into close contact with a substrate, and a filling material was press-fitted to obtain a four-layer build-up wiring board in the same manner as in Example 1. However, air bubbles enter into the through-hole portion of the inner layer, which becomes a depression, and a recess is formed in the pad portion on the surface, so that the IC cannot be mounted. In addition, the depression on the through hole in the inner layer makes it difficult to control the thickness of the upper layer, and the variation in the thickness causes variations in impedance, resulting in failure.

【0031】比較例2 スルーホール基板に、ポリエチレンフィルムを密着さ
せ、実施例1で得られた充填材料を圧入し、ついで特開
昭62−173794号でメチルエチルケトンをスプレ
ーにより吹きつけ、充填材料中の気泡を除去した。しか
しながら、一部スルーホールの充填材料が流れ出してい
ることが確認された。
Comparative Example 2 A polyethylene film was closely adhered to a through-hole substrate, and the filling material obtained in Example 1 was press-fitted. Then, methyl ethyl ketone was sprayed by spraying according to Japanese Patent Laid-Open No. Sho 62-173794. Bubbles were removed. However, it was confirmed that the filling material of the through holes partially flowed out.

【0032】[0032]

【発明の効果】以上のように、本願発明によれば、スル
ーホールの接続信頼性に優れたビルドアップ多層プリン
ト配線板を容易に製造できるばかりでなく、実装信頼性
を確保し、インピーダンス制御を容易に実現できる。
As described above, according to the present invention, not only can a build-up multilayer printed wiring board having excellent through-hole connection reliability be easily manufactured, but also mounting reliability can be ensured and impedance control can be performed. Can be easily realized.

【図面の簡単な説明】[Brief description of the drawings]

【図1】図1の(a)〜(g)は、実施例1の4層プリ
ント配線板の工程図。
FIGS. 1A to 1G are process diagrams of a four-layer printed wiring board according to a first embodiment.

【符号の説明】[Explanation of symbols]

1 金属層 2 絶縁板 3 貫通孔 4 スルーホール 5 和紙(通気性基体) 6 充填材料受け 7 ロールコータ 8 内層回路 9 凹凸面(Ni−P−Cu共晶めっき) 10 めっきレジスト 11 導体回路 12 層間絶縁層 13 バイアホール 14 充填材料 DESCRIPTION OF SYMBOLS 1 Metal layer 2 Insulating plate 3 Through-hole 4 Through-hole 5 Japanese paper (air-permeable base) 6 Filling material receiver 7 Roll coater 8 Inner layer circuit 9 Uneven surface (Ni-P-Cu eutectic plating) 10 Plating resist 11 Conductor circuit 12 Layer Insulation layer 13 Via hole 14 Filling material

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 5E314 AA25 AA26 AA27 AA41 AA42 CC01 FF01 FF08 GG12 5E317 AA21 AA24 BB02 BB12 CD27 CD32 GG09 5E346 AA06 AA12 AA15 AA32 AA43 AA51 CC04 CC08 CC32 DD03 EE38 FF01 FF07 GG15 GG19 GG28 HH11  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 5E314 AA25 AA26 AA27 AA41 AA42 CC01 FF01 FF08 GG12 5E317 AA21 AA24 BB02 BB12 CD27 CD32 GG09 5E346 AA06 AA12 AA15 AA32 AA43 AA51 CC04 CC08 CC32 DD03 GG19 GG19

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 基体にスルーホール用の貫通孔を設け、
この貫通孔内壁に導体を形成してスルーホールを有する
基板とし、前記スルーホールに充填材料を充填するとと
もに、前記基板の両面上には層間絶縁材層を設け、さら
に、各層間絶縁材層表面に導体回路を形成したことを特
徴とする多層プリント配線板。
1. A base having a through hole for a through hole,
A conductor is formed on the inner wall of the through hole to form a substrate having a through hole, a filling material is filled in the through hole, and an interlayer insulating material layer is provided on both sides of the substrate. A multilayer printed wiring board characterized by forming a conductor circuit on the printed circuit board.
【請求項2】 前記充填材料は、熱硬化性耐熱樹脂、感
光性耐熱樹脂、熱可塑性耐熱樹脂である請求項1に記載
の多層プリント配線板。
2. The multilayer printed wiring board according to claim 1, wherein the filling material is a thermosetting heat-resistant resin, a photosensitive heat-resistant resin, or a thermoplastic heat-resistant resin.
【請求項3】 前記充填材料は、フィラーを含有する請
求項1または2に記載の多層プリント配線板。
3. The multilayer printed wiring board according to claim 1, wherein the filler material contains a filler.
JP2001109851A 2001-04-09 2001-04-09 Build-up multilayer printed wiring board Expired - Lifetime JP3469214B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001109851A JP3469214B2 (en) 2001-04-09 2001-04-09 Build-up multilayer printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001109851A JP3469214B2 (en) 2001-04-09 2001-04-09 Build-up multilayer printed wiring board

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP31735399A Division JP3469146B2 (en) 1999-11-08 1999-11-08 Build-up multilayer printed wiring board

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2003148433A Division JP2003309371A (en) 2003-05-26 2003-05-26 Build-up multilayer printed wiring board

Publications (2)

Publication Number Publication Date
JP2001352173A true JP2001352173A (en) 2001-12-21
JP3469214B2 JP3469214B2 (en) 2003-11-25

Family

ID=18961734

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001109851A Expired - Lifetime JP3469214B2 (en) 2001-04-09 2001-04-09 Build-up multilayer printed wiring board

Country Status (1)

Country Link
JP (1) JP3469214B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8513538B2 (en) 2010-05-31 2013-08-20 Kabushiki Kaisha Toshiba Television apparatus, electronic device, and circuit board structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8513538B2 (en) 2010-05-31 2013-08-20 Kabushiki Kaisha Toshiba Television apparatus, electronic device, and circuit board structure

Also Published As

Publication number Publication date
JP3469214B2 (en) 2003-11-25

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